JP2006231319A - 基板処理方法および基板処理装置 - Google Patents

基板処理方法および基板処理装置 Download PDF

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Publication number
JP2006231319A
JP2006231319A JP2005325739A JP2005325739A JP2006231319A JP 2006231319 A JP2006231319 A JP 2006231319A JP 2005325739 A JP2005325739 A JP 2005325739A JP 2005325739 A JP2005325739 A JP 2005325739A JP 2006231319 A JP2006231319 A JP 2006231319A
Authority
JP
Japan
Prior art keywords
substrate
ice
container
fine particles
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
JP2005325739A
Other languages
English (en)
Japanese (ja)
Inventor
Junhei Kawane
旬平 川根
Yoshikuni Takeichi
芳邦 竹市
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd
Priority to JP2005325739A priority Critical patent/JP2006231319A/ja
Priority to TW094145251A priority patent/TW200640586A/zh
Priority to CN2006100063152A priority patent/CN1810389B/zh
Priority to KR1020060005939A priority patent/KR100670687B1/ko
Publication of JP2006231319A publication Critical patent/JP2006231319A/ja
Abandoned legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N21/00—Selective content distribution, e.g. interactive television or video on demand [VOD]
    • H04N21/40—Client devices specifically adapted for the reception of or interaction with content, e.g. set-top-box [STB]; Operations thereof
    • H04N21/41—Structure of client; Structure of client peripherals
    • H04N21/426—Internal components of the client ; Characteristics thereof
    • H04N21/42661—Internal components of the client ; Characteristics thereof for reading from or writing on a magnetic storage medium, e.g. hard disk drive
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N21/00—Selective content distribution, e.g. interactive television or video on demand [VOD]
    • H04N21/40—Client devices specifically adapted for the reception of or interaction with content, e.g. set-top-box [STB]; Operations thereof
    • H04N21/41—Structure of client; Structure of client peripherals
    • H04N21/4104—Peripherals receiving signals from specially adapted client devices
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N21/00—Selective content distribution, e.g. interactive television or video on demand [VOD]
    • H04N21/40—Client devices specifically adapted for the reception of or interaction with content, e.g. set-top-box [STB]; Operations thereof
    • H04N21/45—Management operations performed by the client for facilitating the reception of or the interaction with the content or administrating data related to the end-user or to the client device itself, e.g. learning user preferences for recommending movies, resolving scheduling conflicts
    • H04N21/462—Content or additional data management e.g. creating a master electronic programme guide from data received from the Internet and a Head-end or controlling the complexity of a video stream by scaling the resolution or bit-rate based on the client capabilities
    • H04N21/4621—Controlling the complexity of the content stream or additional data, e.g. lowering the resolution or bit-rate of the video stream for a mobile client with a small screen

Landscapes

  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Databases & Information Systems (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning In General (AREA)
  • Liquid Crystal (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP2005325739A 2005-01-28 2005-11-10 基板処理方法および基板処理装置 Abandoned JP2006231319A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2005325739A JP2006231319A (ja) 2005-01-28 2005-11-10 基板処理方法および基板処理装置
TW094145251A TW200640586A (en) 2005-01-28 2005-12-20 Method and device of processing substrate
CN2006100063152A CN1810389B (zh) 2005-01-28 2006-01-18 基板处理方法以及基板处理装置
KR1020060005939A KR100670687B1 (ko) 2005-01-28 2006-01-19 기판 처리 방법 및 기판 처리 장치

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2005020802 2005-01-28
JP2005325739A JP2006231319A (ja) 2005-01-28 2005-11-10 基板処理方法および基板処理装置

Publications (1)

Publication Number Publication Date
JP2006231319A true JP2006231319A (ja) 2006-09-07

Family

ID=37039544

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005325739A Abandoned JP2006231319A (ja) 2005-01-28 2005-11-10 基板処理方法および基板処理装置

Country Status (4)

Country Link
JP (1) JP2006231319A (https=)
KR (1) KR100670687B1 (https=)
CN (1) CN1810389B (https=)
TW (1) TW200640586A (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012230253A (ja) * 2011-04-26 2012-11-22 Osaka Univ 基板の洗浄方法

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107695040B (zh) * 2017-10-20 2021-01-15 大族激光科技产业集团股份有限公司 激光清洗系统及方法
CN109226107B (zh) * 2018-11-08 2024-06-21 广东交通职业技术学院 一种杆件激光清洗系统及清洗方法
JP7186095B2 (ja) * 2019-01-08 2022-12-08 東京エレクトロン株式会社 基板処理装置、基板処理方法及び記憶媒体
CN112090821B (zh) * 2020-07-29 2022-08-26 苏州晶洲装备科技有限公司 一种超高压洗净装置
CN116906959A (zh) * 2023-08-22 2023-10-20 嵊州市浙江工业大学创新研究院 具有辅助电力调峰功能的油烟管道清洁系统及清洁方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000031239A (ja) * 1998-07-13 2000-01-28 Dainippon Screen Mfg Co Ltd 基板処理装置
JP2002141269A (ja) * 2000-11-01 2002-05-17 Dainippon Screen Mfg Co Ltd 基板処理装置および基板処理方法
JP2003033733A (ja) * 2001-07-23 2003-02-04 Taiyo Toyo Sanso Co Ltd 基板洗浄システム
JP2003039031A (ja) * 2001-07-27 2003-02-12 Kakizaki Mamufacuturing Co Ltd 板材洗浄方法および板材洗浄装置
JP3380021B2 (ja) * 1993-12-28 2003-02-24 株式会社エフティーエル 洗浄方法
JP2004313827A (ja) * 2003-04-11 2004-11-11 Tokyo Kakoki Kk 表面処理装置

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3380021B2 (ja) * 1993-12-28 2003-02-24 株式会社エフティーエル 洗浄方法
JP2000031239A (ja) * 1998-07-13 2000-01-28 Dainippon Screen Mfg Co Ltd 基板処理装置
JP2002141269A (ja) * 2000-11-01 2002-05-17 Dainippon Screen Mfg Co Ltd 基板処理装置および基板処理方法
JP2003033733A (ja) * 2001-07-23 2003-02-04 Taiyo Toyo Sanso Co Ltd 基板洗浄システム
JP2003039031A (ja) * 2001-07-27 2003-02-12 Kakizaki Mamufacuturing Co Ltd 板材洗浄方法および板材洗浄装置
JP2004313827A (ja) * 2003-04-11 2004-11-11 Tokyo Kakoki Kk 表面処理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012230253A (ja) * 2011-04-26 2012-11-22 Osaka Univ 基板の洗浄方法

Also Published As

Publication number Publication date
TWI295199B (https=) 2008-04-01
TW200640586A (en) 2006-12-01
KR100670687B1 (ko) 2007-01-17
CN1810389A (zh) 2006-08-02
CN1810389B (zh) 2010-07-28
KR20060087417A (ko) 2006-08-02

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