TW200640586A - Method and device of processing substrate - Google Patents
Method and device of processing substrateInfo
- Publication number
- TW200640586A TW200640586A TW094145251A TW94145251A TW200640586A TW 200640586 A TW200640586 A TW 200640586A TW 094145251 A TW094145251 A TW 094145251A TW 94145251 A TW94145251 A TW 94145251A TW 200640586 A TW200640586 A TW 200640586A
- Authority
- TW
- Taiwan
- Prior art keywords
- substrate
- process liquid
- tank
- liquid containing
- washing tank
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N21/00—Selective content distribution, e.g. interactive television or video on demand [VOD]
- H04N21/40—Client devices specifically adapted for the reception of or interaction with content, e.g. set-top-box [STB]; Operations thereof
- H04N21/41—Structure of client; Structure of client peripherals
- H04N21/426—Internal components of the client ; Characteristics thereof
- H04N21/42661—Internal components of the client ; Characteristics thereof for reading from or writing on a magnetic storage medium, e.g. hard disk drive
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N21/00—Selective content distribution, e.g. interactive television or video on demand [VOD]
- H04N21/40—Client devices specifically adapted for the reception of or interaction with content, e.g. set-top-box [STB]; Operations thereof
- H04N21/41—Structure of client; Structure of client peripherals
- H04N21/4104—Peripherals receiving signals from specially adapted client devices
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N21/00—Selective content distribution, e.g. interactive television or video on demand [VOD]
- H04N21/40—Client devices specifically adapted for the reception of or interaction with content, e.g. set-top-box [STB]; Operations thereof
- H04N21/45—Management operations performed by the client for facilitating the reception of or the interaction with the content or administrating data related to the end-user or to the client device itself, e.g. learning user preferences for recommending movies, resolving scheduling conflicts
- H04N21/462—Content or additional data management, e.g. creating a master electronic program guide from data received from the Internet and a Head-end, controlling the complexity of a video stream by scaling the resolution or bit-rate based on the client capabilities
- H04N21/4621—Controlling the complexity of the content stream or additional data, e.g. lowering the resolution or bit-rate of the video stream for a mobile client with a small screen
Landscapes
- Engineering & Computer Science (AREA)
- Multimedia (AREA)
- Signal Processing (AREA)
- Databases & Information Systems (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Liquid Crystal (AREA)
- Cleaning In General (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005020802 | 2005-01-28 | ||
JP2005325739A JP2006231319A (ja) | 2005-01-28 | 2005-11-10 | 基板処理方法および基板処理装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200640586A true TW200640586A (en) | 2006-12-01 |
TWI295199B TWI295199B (zh) | 2008-04-01 |
Family
ID=37039544
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW094145251A TW200640586A (en) | 2005-01-28 | 2005-12-20 | Method and device of processing substrate |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP2006231319A (zh) |
KR (1) | KR100670687B1 (zh) |
CN (1) | CN1810389B (zh) |
TW (1) | TW200640586A (zh) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5736615B2 (ja) * | 2011-04-26 | 2015-06-17 | 国立大学法人大阪大学 | 基板の洗浄方法 |
CN107695040B (zh) * | 2017-10-20 | 2021-01-15 | 大族激光科技产业集团股份有限公司 | 激光清洗系统及方法 |
CN109226107B (zh) * | 2018-11-08 | 2024-06-21 | 广东交通职业技术学院 | 一种杆件激光清洗系统及清洗方法 |
JP7186095B2 (ja) * | 2019-01-08 | 2022-12-08 | 東京エレクトロン株式会社 | 基板処理装置、基板処理方法及び記憶媒体 |
CN112090821B (zh) * | 2020-07-29 | 2022-08-26 | 苏州晶洲装备科技有限公司 | 一种超高压洗净装置 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3380021B2 (ja) * | 1993-12-28 | 2003-02-24 | 株式会社エフティーエル | 洗浄方法 |
JP2000031239A (ja) * | 1998-07-13 | 2000-01-28 | Dainippon Screen Mfg Co Ltd | 基板処理装置 |
JP2002141269A (ja) * | 2000-11-01 | 2002-05-17 | Dainippon Screen Mfg Co Ltd | 基板処理装置および基板処理方法 |
JP2003033733A (ja) * | 2001-07-23 | 2003-02-04 | Taiyo Toyo Sanso Co Ltd | 基板洗浄システム |
JP2003039031A (ja) * | 2001-07-27 | 2003-02-12 | Kakizaki Mamufacuturing Co Ltd | 板材洗浄方法および板材洗浄装置 |
JP2004313827A (ja) * | 2003-04-11 | 2004-11-11 | Tokyo Kakoki Kk | 表面処理装置 |
-
2005
- 2005-11-10 JP JP2005325739A patent/JP2006231319A/ja not_active Abandoned
- 2005-12-20 TW TW094145251A patent/TW200640586A/zh not_active IP Right Cessation
-
2006
- 2006-01-18 CN CN2006100063152A patent/CN1810389B/zh not_active Expired - Fee Related
- 2006-01-19 KR KR1020060005939A patent/KR100670687B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
CN1810389A (zh) | 2006-08-02 |
KR20060087417A (ko) | 2006-08-02 |
TWI295199B (zh) | 2008-04-01 |
CN1810389B (zh) | 2010-07-28 |
JP2006231319A (ja) | 2006-09-07 |
KR100670687B1 (ko) | 2007-01-17 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |