JP2006203209A5 - - Google Patents
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- Publication number
- JP2006203209A5 JP2006203209A5 JP2006011278A JP2006011278A JP2006203209A5 JP 2006203209 A5 JP2006203209 A5 JP 2006203209A5 JP 2006011278 A JP2006011278 A JP 2006011278A JP 2006011278 A JP2006011278 A JP 2006011278A JP 2006203209 A5 JP2006203209 A5 JP 2006203209A5
- Authority
- JP
- Japan
- Prior art keywords
- resistance
- width
- length
- uniform
- resistive element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 8
- 239000000758 substrate Substances 0.000 claims 4
- 230000007423 decrease Effects 0.000 claims 2
- 239000012535 impurity Substances 0.000 claims 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims 2
- 229920005591 polysilicon Polymers 0.000 claims 2
- 239000002184 metal Substances 0.000 claims 1
- 229910052751 metal Inorganic materials 0.000 claims 1
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020050006101A KR100699833B1 (ko) | 2005-01-22 | 2005-01-22 | 균일한 저항값을 가진 저항소자 및 이를 이용한 반도체 소자 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2006203209A JP2006203209A (ja) | 2006-08-03 |
| JP2006203209A5 true JP2006203209A5 (https=) | 2009-03-05 |
Family
ID=36696175
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006011278A Pending JP2006203209A (ja) | 2005-01-22 | 2006-01-19 | 均一な抵抗値を有する抵抗素子及びそれを用いた半導体素子 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US7551055B2 (https=) |
| JP (1) | JP2006203209A (https=) |
| KR (1) | KR100699833B1 (https=) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4337904B2 (ja) * | 2007-04-12 | 2009-09-30 | セイコーエプソン株式会社 | 集積回路装置および電子機器 |
| IT1392556B1 (it) | 2008-12-18 | 2012-03-09 | St Microelectronics Rousset | Struttura di resistore di materiale a cambiamento di fase e relativo metodo di calibratura |
| US20180102318A1 (en) * | 2016-10-12 | 2018-04-12 | Globalfoundries Inc. | Compound resistor structure for semiconductor device |
| CN111489873B (zh) * | 2020-04-17 | 2021-11-09 | 西安神电电器有限公司 | 直流输电工程用电阻器及组合、系统与阻值偏差消除方法 |
| US12249603B2 (en) | 2021-10-29 | 2025-03-11 | Samsung Electronics Co., Ltd. | Resistor structures of integrated circuit devices including stacked transistors and methods of forming the same |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60154551A (ja) | 1984-01-23 | 1985-08-14 | Mitsubishi Electric Corp | 半導体装置用抵抗体装置 |
| JPS6373550A (ja) * | 1986-09-16 | 1988-04-04 | Nec Corp | 半導体装置 |
| JPS63273347A (ja) | 1987-05-01 | 1988-11-10 | Oki Electric Ind Co Ltd | 抵抗器 |
| JPH03166757A (ja) | 1989-11-27 | 1991-07-18 | Fujitsu Ltd | 半導体装置 |
| JP2658570B2 (ja) | 1990-02-28 | 1997-09-30 | 株式会社デンソー | 半導体装置及びその製造方法 |
| JP3404064B2 (ja) | 1993-03-09 | 2003-05-06 | 株式会社日立製作所 | 半導体装置及びその製造方法 |
| CA2092370C (en) | 1993-03-24 | 1997-03-18 | John M. Boyd | Forming resistors for integrated circuits |
| BE1007868A3 (nl) * | 1993-12-10 | 1995-11-07 | Koninkl Philips Electronics Nv | Elektrische weerstand. |
| JPH07211867A (ja) * | 1994-01-24 | 1995-08-11 | Fuji Electric Co Ltd | 抵抗素子 |
| US5489547A (en) * | 1994-05-23 | 1996-02-06 | Texas Instruments Incorporated | Method of fabricating semiconductor device having polysilicon resistor with low temperature coefficient |
| JP3401994B2 (ja) * | 1995-05-29 | 2003-04-28 | 松下電工株式会社 | 半導体抵抗素子及びその製造方法 |
| JPH0936310A (ja) * | 1995-07-14 | 1997-02-07 | Sony Corp | 半導体装置 |
| KR100194596B1 (ko) * | 1995-11-08 | 1999-06-15 | 정선종 | 반도체 소자의 저항 제조방법 |
| JP3890702B2 (ja) | 1997-10-17 | 2007-03-07 | ソニー株式会社 | 抵抗の製造方法および抵抗 |
| KR20010054511A (ko) * | 1999-12-07 | 2001-07-02 | 박종섭 | 반도체장치의 저항 및 그 제조방법 |
| US6621404B1 (en) * | 2001-10-23 | 2003-09-16 | Lsi Logic Corporation | Low temperature coefficient resistor |
-
2005
- 2005-01-22 KR KR1020050006101A patent/KR100699833B1/ko not_active Expired - Fee Related
- 2005-12-20 US US11/312,982 patent/US7551055B2/en active Active
-
2006
- 2006-01-19 JP JP2006011278A patent/JP2006203209A/ja active Pending
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