IT1392556B1 - Struttura di resistore di materiale a cambiamento di fase e relativo metodo di calibratura - Google Patents

Struttura di resistore di materiale a cambiamento di fase e relativo metodo di calibratura

Info

Publication number
IT1392556B1
IT1392556B1 ITTO2008A000951A ITTO20080951A IT1392556B1 IT 1392556 B1 IT1392556 B1 IT 1392556B1 IT TO2008A000951 A ITTO2008A000951 A IT TO2008A000951A IT TO20080951 A ITTO20080951 A IT TO20080951A IT 1392556 B1 IT1392556 B1 IT 1392556B1
Authority
IT
Italy
Prior art keywords
phase change
calibration method
resistor structure
relative calibration
material resistor
Prior art date
Application number
ITTO2008A000951A
Other languages
English (en)
Inventor
Stefania Maria Serena Privitera
Original Assignee
St Microelectronics Rousset
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by St Microelectronics Rousset filed Critical St Microelectronics Rousset
Priority to ITTO2008A000951A priority Critical patent/IT1392556B1/it
Priority to US12/638,922 priority patent/US8319597B2/en
Priority to EP09179740A priority patent/EP2200049A1/en
Publication of ITTO20080951A1 publication Critical patent/ITTO20080951A1/it
Priority to US13/414,633 priority patent/US8427273B2/en
Application granted granted Critical
Publication of IT1392556B1 publication Critical patent/IT1392556B1/it

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
    • H01C7/06—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material including means to minimise changes in resistance with changes in temperature
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/22—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming
    • H01C17/232—Adjusting the temperature coefficient; Adjusting value of resistance by adjusting temperature coefficient of resistance
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
    • H01L28/20—Resistors
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49082—Resistor making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49082—Resistor making
    • Y10T29/49085—Thermally variable
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49082—Resistor making
    • Y10T29/49099—Coating resistive material on a base
ITTO2008A000951A 2008-12-18 2008-12-18 Struttura di resistore di materiale a cambiamento di fase e relativo metodo di calibratura IT1392556B1 (it)

Priority Applications (4)

Application Number Priority Date Filing Date Title
ITTO2008A000951A IT1392556B1 (it) 2008-12-18 2008-12-18 Struttura di resistore di materiale a cambiamento di fase e relativo metodo di calibratura
US12/638,922 US8319597B2 (en) 2008-12-18 2009-12-15 Resistor structure of phase change material and trimming method thereof
EP09179740A EP2200049A1 (en) 2008-12-18 2009-12-17 Resistor structure of phase change material and trimming method thereof
US13/414,633 US8427273B2 (en) 2008-12-18 2012-03-07 Resistor structure of phase change material and trimming method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ITTO2008A000951A IT1392556B1 (it) 2008-12-18 2008-12-18 Struttura di resistore di materiale a cambiamento di fase e relativo metodo di calibratura

Publications (2)

Publication Number Publication Date
ITTO20080951A1 ITTO20080951A1 (it) 2010-06-19
IT1392556B1 true IT1392556B1 (it) 2012-03-09

Family

ID=40887398

Family Applications (1)

Application Number Title Priority Date Filing Date
ITTO2008A000951A IT1392556B1 (it) 2008-12-18 2008-12-18 Struttura di resistore di materiale a cambiamento di fase e relativo metodo di calibratura

Country Status (3)

Country Link
US (2) US8319597B2 (it)
EP (1) EP2200049A1 (it)
IT (1) IT1392556B1 (it)

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US8790637B2 (en) * 2003-06-27 2014-07-29 DePuy Synthes Products, LLC Repair and regeneration of ocular tissue using postpartum-derived cells
IT1392556B1 (it) 2008-12-18 2012-03-09 St Microelectronics Rousset Struttura di resistore di materiale a cambiamento di fase e relativo metodo di calibratura
US8017433B2 (en) * 2010-02-09 2011-09-13 International Business Machines Corporation Post deposition method for regrowth of crystalline phase change material
IT1402165B1 (it) * 2010-06-30 2013-08-28 St Microelectronics Srl Resistore ad elevata precisione e relativo metodo di calibratura
ITTO20120553A1 (it) * 2012-06-22 2013-12-23 St Microelectronics Srl Dispositivo a resistore calibrabile elettricamente e relativo metodo di calibrazione
US8896408B2 (en) * 2013-03-14 2014-11-25 Analog Devices, Inc. Composite resistors
EP3050076A4 (en) * 2013-09-27 2017-10-18 Intel Corporation Methods of forming tuneable temperature coefficient for embedded resistors
US9331642B2 (en) * 2014-06-27 2016-05-03 Freescale Semiconductor, Inc. Monolithic transistor circuits with tapered feedback resistors, RF amplifier devices, and methods of manufacture thereof
US20160218062A1 (en) * 2015-01-23 2016-07-28 Texas Instruments Incorporated Thin film resistor integration in copper damascene metallization
JP2017022176A (ja) * 2015-07-07 2017-01-26 Koa株式会社 薄膜抵抗器及びその製造方法
US9806020B1 (en) * 2016-04-26 2017-10-31 Kabushiki Kaisha Toshiba Semiconductor device
US10276439B2 (en) * 2017-06-02 2019-04-30 International Business Machines Corporation Rapid oxide etch for manufacturing through dielectric via structures
US10211278B2 (en) * 2017-07-11 2019-02-19 Texas Instruments Incorporated Device and method for a thin film resistor using a via retardation layer
WO2019132879A1 (en) * 2017-12-27 2019-07-04 Intel Corporation Compensation of resistance in thin film resistor
US11333558B2 (en) * 2018-11-06 2022-05-17 Globalfoundries U.S. Inc. Boolean temperature sensing using phase transition material
GB2610886B (en) * 2019-08-21 2023-09-13 Pragmatic Printing Ltd Resistor geometry

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US4746896A (en) * 1986-05-08 1988-05-24 North American Philips Corp. Layered film resistor with high resistance and high stability
US4703557A (en) * 1986-10-07 1987-11-03 Cts Corporation Adjustment of thick film resistor (TCR) by laser annealing
US4907341A (en) 1987-02-27 1990-03-13 John Fluke Mfg. Co., Inc. Compound resistor manufacturing method
US5296716A (en) 1991-01-18 1994-03-22 Energy Conversion Devices, Inc. Electrically erasable, directly overwritable, multibit single cell memory elements and arrays fabricated therefrom
US5596522A (en) 1991-01-18 1997-01-21 Energy Conversion Devices, Inc. Homogeneous compositions of microcrystalline semiconductor material, semiconductor devices and directly overwritable memory elements fabricated therefrom, and arrays fabricated from the memory elements
US5534711A (en) 1991-01-18 1996-07-09 Energy Conversion Devices, Inc. Electrically erasable, directly overwritable, multibit single cell memory elements and arrays fabricated therefrom
US5166758A (en) 1991-01-18 1992-11-24 Energy Conversion Devices, Inc. Electrically erasable phase change memory
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US5233327A (en) * 1991-07-01 1993-08-03 International Business Machines Corporation Active resistor trimming by differential annealing
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US5687112A (en) 1996-04-19 1997-11-11 Energy Conversion Devices, Inc. Multibit single cell memory element having tapered contact
US6211769B1 (en) * 1997-12-22 2001-04-03 Texas Instruments Incorporated System to minimize the temperature coefficient of resistance of passive resistors in an integrated circuit process flow
US6326256B1 (en) 1998-12-18 2001-12-04 Texas Instruments Incorporated Method of producing a laser trimmable thin film resistor in an integrated circuit
US6497824B1 (en) 1999-09-23 2002-12-24 Texas Instruments Incorporated One mask solution for the integration of the thin film resistor
US6647614B1 (en) * 2000-10-20 2003-11-18 International Business Machines Corporation Method for changing an electrical resistance of a resistor
DE10053957C2 (de) * 2000-10-31 2002-10-31 Infineon Technologies Ag Temperaturkompensierter Halbleiterwiderstand und dessen Verwendung
US6621404B1 (en) * 2001-10-23 2003-09-16 Lsi Logic Corporation Low temperature coefficient resistor
US7012499B2 (en) 2003-06-02 2006-03-14 International Business Machines Corporation Method of fabrication of thin film resistor with 0 TCR
US7217981B2 (en) 2005-01-06 2007-05-15 International Business Machines Corporation Tunable temperature coefficient of resistance resistors and method of fabricating same
KR100699833B1 (ko) * 2005-01-22 2007-03-27 삼성전자주식회사 균일한 저항값을 가진 저항소자 및 이를 이용한 반도체 소자
IT1392556B1 (it) 2008-12-18 2012-03-09 St Microelectronics Rousset Struttura di resistore di materiale a cambiamento di fase e relativo metodo di calibratura

Also Published As

Publication number Publication date
US8319597B2 (en) 2012-11-27
US8427273B2 (en) 2013-04-23
US20100156588A1 (en) 2010-06-24
EP2200049A1 (en) 2010-06-23
ITTO20080951A1 (it) 2010-06-19
US20120171838A1 (en) 2012-07-05

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