JP2006143474A - 工作物の移送装置及び処理方法 - Google Patents
工作物の移送装置及び処理方法 Download PDFInfo
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Abstract
【解決手段】ディスク状の工作物を、その製造の間に一次的に真空雰囲気内で移送するためのチャンバ1は、工作物22と、軸を中心に回転可能な多数の工作物収容部20とを通過させる少なくとも2つの開口部4、6を備える。チャンバ1内には、開口部4に整合され、回転可能な工作物収容部20から独立して軸承される移送機構30bが配置される。移送機構30bは、径方向に制御されて引出し又は引き戻し可能であり、開口部領域において工作物に作用する。チャンバ2は、少なくとも1つの工作物収容部52を備える。工作物収容部52は、移送機構46に配置される。移送機構46は全体として軸A44を中心に回転駆動され、かつ直線状に引出し又は引き戻される。
【選択図】図1
Description
1.挿入及び排出エアロックチャンバ(EASK)・・・工作物を両方向にエアロックを介して通過させるエアロックチャンバ。
2.挿入エアロックチャンバ(ESK)・・・工作物がその真空表面処理に向かう方向においてのみエアロックを介して挿入されるエアロックチャンバ。
3.排出エアロックチャンバ(ASK)・・・工作物が真空表面処理から離れる方向にのみエアロックを通過するエアロックチャンバ。
4.処理チャンバ(BEAK)・・・内部で工作物が、除去、コーティング、浄化、加熱、冷却などの表面処理を受けるチャンバ。
5.径方向に操作されるタレットチャンバ(RAKAK)・・・図1、図2、図6及び図7のチャンバ1を用いて説明された形式の移送チャンバ。
6.径方向に操作される回転スターチャンバ(RADK)・・・図1のチャンバ2及び図8〜図14に関連して説明された形式のチャンバ。
7.移送チャンバ(TR)・・・内部で工作物が少なくとも2つの開口部間で移動されるチャンバ。従ってチャンバEASK、ESK、ASK、RAKAK及びRADKがこれに含まれるが、特にチャンバRAKAK及びRADKに関して説明された移送機構を有するチャンバも含む。
4、6 開口部
16 移送装置
20、52 工作物収容部
26、64 保持機構
30b 皿部
46 移送アーム
66、68 シール
Claims (8)
- 真空環境下で搬送される少なくとも1つの工作物のための移送装置において、
軸を中心に回転可能に駆動される移送回転体と、
前記移送回転体に固定的に搭載される少なくとも1つの工作物把持装置であって、該移送回転体から独立した部材と協働する磁性材料からなる磁石装置を備えた工作物把持装置とを具備し、
前記部材と前記磁石装置とが、互いに制御可能に引き付けあって、それらの間に工作物を選択的に支持及び解放するように構成されること、
を特徴とする移送装置。 - 前記移送回転体の前記磁性材料の部分の軌道に沿って少なくとも1つの特定位置に配置される制御可能な磁石装置をさらに具備し、前記部材が制御下で、該移送回転体の該部分から脱離でき、かつ該部分に適用できることを特徴とする請求項1に記載の移送装置。
- 前記制御可能な磁石装置が少なくとも1つの電磁石を具備することを特徴とする請求項2に記載の移送装置。
- 前記制御可能な磁石装置が第2の移送装置に搭載されることを特徴とする請求項2に記載の移送装置。
- 真空処理によって工作物を処理する方法において、
前記工作物のための真空処理チャンバを用意するステップと、
真空での前記工作物のための移送装置であって、磁性材料部分を有する移送装置を用意するステップと、
前記磁性材料部分に隣接して前記工作物を配置するステップと、
前記磁性材料部分の反対側で前記工作物に対して、磁性材料からなる部材を、前記移送装置の該磁性材料部分に隣接させて該工作物に適用することにより、該工作物を該磁性材料部分に向けて固定するステップと、
前記工作物を前記真空処理チャンバに対し、該工作物を固定した前記移送装置によって接近又は離反する方向へ移送するステップと、
を含むことを特徴とする処理方法。 - 前記工作物を表面処理ステーションに移送するステップと、前記部材により前記工作物の前記処理を隠すステップとをさらに含むことを特徴とする請求項5に記載の処理方法。
- 前記移送装置に少なくとも2つの磁性材料部分を付与するステップと、少なくとも2つの前記部材によって少なくとも2つの工作物をそれら磁性材料部分に固定するステップとをさらに含むことを特徴とする請求項6に記載の処理方法。
- 前記工作物から前記部材を脱離するステップと、前記磁性材料部分上の前記工作物を他の工作物に交換するステップと、脱離した該部材を該他の工作物に再配置するステップとをさらに含むことを特徴とする請求項5に記載の処理方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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CH311992 | 1992-10-06 | ||
CH75793 | 1993-03-11 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP25029493A Division JP3761905B2 (ja) | 1992-10-06 | 1993-10-06 | 真空チャンバ、真空チャンバ装置、工作物の移送方法及び移送装置、並びに工作物の処理方法 |
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JP2006143474A true JP2006143474A (ja) | 2006-06-08 |
JP4130675B2 JP4130675B2 (ja) | 2008-08-06 |
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JP25029493A Expired - Fee Related JP3761905B2 (ja) | 1992-10-06 | 1993-10-06 | 真空チャンバ、真空チャンバ装置、工作物の移送方法及び移送装置、並びに工作物の処理方法 |
JP2005325046A Expired - Fee Related JP4130675B2 (ja) | 1992-10-06 | 2005-11-09 | 工作物の移送装置及び処理方法 |
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JP25029493A Expired - Fee Related JP3761905B2 (ja) | 1992-10-06 | 1993-10-06 | 真空チャンバ、真空チャンバ装置、工作物の移送方法及び移送装置、並びに工作物の処理方法 |
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US (4) | US5590994A (ja) |
EP (2) | EP1179611B1 (ja) |
JP (2) | JP3761905B2 (ja) |
Cited By (1)
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CN104743351A (zh) * | 2013-12-30 | 2015-07-01 | 基准精密工业(惠州)有限公司 | 加工室 |
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EP1179611B1 (de) * | 1992-10-06 | 2004-09-15 | Unaxis Balzers Aktiengesellschaft | Kammer für den Transport von Werkstücken |
CH691377A5 (de) * | 1992-10-06 | 2001-07-13 | Unaxis Balzers Ag | Kammeranordnung für den Transport von Werkstücken und deren Verwendung. |
FR2747111B1 (fr) * | 1996-04-03 | 1998-04-30 | Commissariat Energie Atomique | Systeme d'accouplement pour un transfert confine d'un objet plat d'une boite de confinement vers une unite de traitement de l'objet |
US5882171A (en) | 1996-10-01 | 1999-03-16 | Balzers Aktiengesellschaft | Transport and transfer apparatus |
EP0946780B1 (de) | 1996-12-23 | 2002-01-16 | Unaxis Balzers Aktiengesellschaft | Vakuumbehandlungsanlage |
DE19715151A1 (de) * | 1997-04-11 | 1998-10-15 | Leybold Systems Gmbh | Verfahren zum Be- und Entladen einer evakuierbaren Behandlungskammer und Handlingsvorrichtung zur Durchführung des Verfahrens |
EP0870850B1 (de) * | 1997-04-11 | 2002-09-18 | Leybold Systems GmbH | Verfahren und Vorrichtung zum Be- und Entladen einer evakuierbaren Behandlungskammer |
CH692741A5 (de) * | 1997-07-08 | 2002-10-15 | Unaxis Trading Ltd C O Balzers | Verfahren zur Herstellung in Vakuum oberflächenbehandelter Werkstücke und Vakuumbehandlungsanlage zu dessen Durchführung |
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- 1993-09-11 EP EP01119538A patent/EP1179611B1/de not_active Expired - Lifetime
- 1993-09-11 EP EP93114639A patent/EP0591706B1/de not_active Expired - Lifetime
- 1993-10-05 US US08/131,669 patent/US5590994A/en not_active Expired - Lifetime
- 1993-10-06 JP JP25029493A patent/JP3761905B2/ja not_active Expired - Fee Related
-
1996
- 1996-10-10 US US08/728,610 patent/US5865588A/en not_active Expired - Lifetime
-
1999
- 1999-01-25 US US09/236,388 patent/US6096231A/en not_active Expired - Fee Related
-
2000
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2005
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
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CN104743351A (zh) * | 2013-12-30 | 2015-07-01 | 基准精密工业(惠州)有限公司 | 加工室 |
CN104743351B (zh) * | 2013-12-30 | 2016-09-07 | 基准精密工业(惠州)有限公司 | 加工室 |
TWI595531B (zh) * | 2013-12-30 | 2017-08-11 | 基準精密工業(惠州)有限公司 | 加工室 |
Also Published As
Publication number | Publication date |
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US6364955B2 (en) | 2002-04-02 |
US5590994A (en) | 1997-01-07 |
EP0591706A1 (de) | 1994-04-13 |
JPH06264241A (ja) | 1994-09-20 |
EP1179611A2 (de) | 2002-02-13 |
US6096231A (en) | 2000-08-01 |
JP3761905B2 (ja) | 2006-03-29 |
US20010001951A1 (en) | 2001-05-31 |
JP4130675B2 (ja) | 2008-08-06 |
EP1179611A3 (de) | 2002-04-17 |
US5865588A (en) | 1999-02-02 |
EP0591706B1 (de) | 2002-04-24 |
EP1179611B1 (de) | 2004-09-15 |
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