JP2006128993A - 圧電薄膜共振子及びこれを用いたフィルタ - Google Patents
圧電薄膜共振子及びこれを用いたフィルタ Download PDFInfo
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- JP2006128993A JP2006128993A JP2004313727A JP2004313727A JP2006128993A JP 2006128993 A JP2006128993 A JP 2006128993A JP 2004313727 A JP2004313727 A JP 2004313727A JP 2004313727 A JP2004313727 A JP 2004313727A JP 2006128993 A JP2006128993 A JP 2006128993A
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- 239000010408 film Substances 0.000 claims abstract description 123
- 230000002093 peripheral effect Effects 0.000 claims abstract description 38
- 239000000758 substrate Substances 0.000 claims abstract description 31
- 229910052751 metal Inorganic materials 0.000 claims description 5
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- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 2
- 239000011800 void material Substances 0.000 claims 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 7
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- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000010897 surface acoustic wave method Methods 0.000 description 2
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 1
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02086—Means for compensation or elimination of undesirable effects
- H03H9/02149—Means for compensation or elimination of undesirable effects of ageing changes of characteristics, e.g. electro-acousto-migration
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02086—Means for compensation or elimination of undesirable effects
- H03H9/02118—Means for compensation or elimination of undesirable effects of lateral leakage between adjacent resonators
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
- H03H9/132—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials characterized by a particular shape
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
- H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
- H03H9/174—Membranes
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
- H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
- H03H2003/0414—Resonance frequency
- H03H2003/0421—Modification of the thickness of an element
- H03H2003/0428—Modification of the thickness of an element of an electrode
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- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
【解決手段】 基板10と、基板10上に形成された下部電極20と、下部電極20及び基板10上に形成された圧電膜30と、圧電膜30を挟んで下部電極20に対向する部分を有するように圧電膜30上に形成された上部電極40とを有し、前記対向する部分における圧電膜30の外周部の少なくとも一部が、上部電極40と下部電極20とが対向して形成された領域60の外周部と略一致する圧電薄膜共振子。
【選択図】 図2
Description
この種の圧電薄膜共振器は一般にFBAR(Film Bulk Acoustic Resonator)として知られており、例えば特許文献1〜3に記載されている。
20 下部電極
30 圧電膜
40 上部電極
50 空隙(又は音響多層膜)
60 共振部
70、80 非共振部
90 付加膜
Claims (16)
- 基板と、該基板上に形成された下部電極と、該下部電極及び前記基板上に形成された圧電膜と、該圧電膜を挟んで前記下部電極に対向する部分を有するように前記圧電膜上に形成された上部電極とを有し、前記対向する部分における前記圧電膜の外周部の少なくとも一部が、前記上部電極と前記下部電極とが対向して形成された領域の外周部と略一致することを特徴とする圧電薄膜共振子。
- 前記圧電膜の外周部の25%以上が、前記領域の外周部と略一致していることを特徴とする請求項1記載の圧電薄膜共振子。
- 前記圧電膜の外周部の50%以上が、前記領域の外周部と略一致していることを特徴とする請求項1記載の圧電薄膜共振子。
- 前記領域は楕円形状を有することを特徴とする請求項1から3のいずれか一項記載の圧電薄膜共振子。
- 前記領域は不規則な多角形であり、該多角形を形成する少なくとも2辺は平行でないことを特徴とする請求項1から3のいずれか一項記載の圧電薄膜共振子。
- 基板と、該基板上に形成された下部電極と、該下部電極及び前記基板上に形成された圧電膜と、該圧電膜を挟んで前記下部電極に対向する部分を有するように前記圧電膜上に形成された上部電極とを有し、前記圧電膜がポアソン比1/3以下の材料で形成され、前記上部電極の引き出し部上に、前記対向する部分に近接して付加膜を設けたことを特徴とする圧電薄膜共振子。
- 前記圧電膜はAlNを主成分としていることを特徴とする請求項6記載の圧電薄膜共振子。
- 前記付加膜は金属膜であることを特徴とする請求項6又は7に記載の圧電薄膜共振子。
- 前記付加膜は、アルミニウムを主成分とする単層膜又は多層膜であることを特徴とする請求項6から8のいずれか一項記載の圧電薄膜共振子。
- 前記付加膜と前記対向する部分の外周部との最短距離が、当該対向する部分の厚さの2倍以下であることを特徴とする請求項6から9のいずれか一項記載の圧電薄膜共振子。
- 前記付加膜と前記対向する部分の外周部との最短距離が3μm以下であることを特徴とする請求項6から9のいずれか一項記載の圧電薄膜共振子。
- 前記対向する部分における前記圧電膜の外周部の少なくとも一部が、前記上部電極と前記下部電極とが対向して形成された領域の外周部と略一致する請求項6から11のいずれか一項記載の圧電薄膜共振子。
- 前記基板は、前記領域の下に位置し、かつ当該領域よりも幅広の空隙を有することを特徴とする請求項1から12のいずれか一項記載の圧電薄膜共振子。
- 前記圧電膜の外周部はパターニングで形成されたエッジを含むことを特徴とする請求項1から5及び12のいずれか一項記載の圧電薄膜共振子。
- 前記領域は、厚み縦振動モードの共振子を形成していることを特徴とする請求項1から14のいずれか一項記載の圧電薄膜共振子。
- 請求項1から15のいずれか一項に記載の前記圧電薄膜共振子を少なくとも1つ含むフィルタ。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
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JP2004313727A JP4535841B2 (ja) | 2004-10-28 | 2004-10-28 | 圧電薄膜共振子及びこれを用いたフィルタ |
KR1020050095651A KR100753705B1 (ko) | 2004-10-28 | 2005-10-11 | 압전 박막 공진자 및 이를 이용한 필터 |
EP10170336A EP2259425A1 (en) | 2004-10-28 | 2005-10-26 | Piezoelectric thin-film resonator and filter using the same |
EP05256649A EP1653612A3 (en) | 2004-10-28 | 2005-10-26 | Piezoelectric thin-film resonator and filter using the same |
US11/259,347 US7884527B2 (en) | 2004-10-28 | 2005-10-27 | Piezoelectric thin-film resonator and filter using the same |
CNB2005101170072A CN100505531C (zh) | 2004-10-28 | 2005-10-28 | 压电薄膜谐振器及使用该压电薄膜谐振器的滤波器 |
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JP2004313727A JP4535841B2 (ja) | 2004-10-28 | 2004-10-28 | 圧電薄膜共振子及びこれを用いたフィルタ |
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JP2006128993A true JP2006128993A (ja) | 2006-05-18 |
JP4535841B2 JP4535841B2 (ja) | 2010-09-01 |
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US (1) | US7884527B2 (ja) |
EP (2) | EP2259425A1 (ja) |
JP (1) | JP4535841B2 (ja) |
KR (1) | KR100753705B1 (ja) |
CN (1) | CN100505531C (ja) |
Cited By (13)
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JP2007324823A (ja) * | 2006-05-31 | 2007-12-13 | Fujitsu Media Device Kk | フィルタ |
JP2008042878A (ja) * | 2006-07-07 | 2008-02-21 | Ngk Insulators Ltd | 圧電薄膜デバイス |
EP1914888A1 (en) | 2006-10-17 | 2008-04-23 | Fujitsu Media Devices Limited | Ladder type filter |
JP2008182543A (ja) * | 2007-01-25 | 2008-08-07 | Ube Ind Ltd | 薄膜圧電共振器とそれを用いた薄膜圧電フィルタ |
JP2009200714A (ja) * | 2008-02-20 | 2009-09-03 | Fujitsu Ltd | 圧電薄膜共振器、フィルタ、デュープレクサ、通信モジュール、および通信装置 |
US7602101B2 (en) | 2006-10-25 | 2009-10-13 | Fujitsu Media Devices | Piezoelectric thin-film resonator and filter using the same |
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US8125123B2 (en) | 2007-07-13 | 2012-02-28 | Taiyo Yuden Co., Ltd. | Piezoelectric thin film resonant element and circuit component using the same |
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US8653908B2 (en) | 2008-03-04 | 2014-02-18 | Taiyo Yuden Co., Ltd. | Film bulk acoustic resonator, filter, communication module and communication apparatus |
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US7242270B2 (en) * | 2003-10-30 | 2007-07-10 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Decoupled stacked bulk acoustic resonator-based band-pass filter |
EP1533896B1 (en) * | 2003-11-20 | 2011-11-02 | Panasonic Corporation | Piezoelectric element, composite piezoelectric element, and filter, duplexer and communication equipment using the same |
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2004
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2005
- 2005-10-11 KR KR1020050095651A patent/KR100753705B1/ko active IP Right Grant
- 2005-10-26 EP EP10170336A patent/EP2259425A1/en not_active Ceased
- 2005-10-26 EP EP05256649A patent/EP1653612A3/en not_active Ceased
- 2005-10-27 US US11/259,347 patent/US7884527B2/en active Active
- 2005-10-28 CN CNB2005101170072A patent/CN100505531C/zh active Active
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Cited By (18)
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JP2007324823A (ja) * | 2006-05-31 | 2007-12-13 | Fujitsu Media Device Kk | フィルタ |
JP4719623B2 (ja) * | 2006-05-31 | 2011-07-06 | 太陽誘電株式会社 | フィルタ |
JP2008042878A (ja) * | 2006-07-07 | 2008-02-21 | Ngk Insulators Ltd | 圧電薄膜デバイス |
EP1914888A1 (en) | 2006-10-17 | 2008-04-23 | Fujitsu Media Devices Limited | Ladder type filter |
US8756777B2 (en) | 2006-10-17 | 2014-06-24 | Taiyo Yuden Co., Ltd. | Method of manufacturing a ladder filter |
US7602101B2 (en) | 2006-10-25 | 2009-10-13 | Fujitsu Media Devices | Piezoelectric thin-film resonator and filter using the same |
JP2008182543A (ja) * | 2007-01-25 | 2008-08-07 | Ube Ind Ltd | 薄膜圧電共振器とそれを用いた薄膜圧電フィルタ |
US8125123B2 (en) | 2007-07-13 | 2012-02-28 | Taiyo Yuden Co., Ltd. | Piezoelectric thin film resonant element and circuit component using the same |
JP2009200714A (ja) * | 2008-02-20 | 2009-09-03 | Fujitsu Ltd | 圧電薄膜共振器、フィルタ、デュープレクサ、通信モジュール、および通信装置 |
US8653908B2 (en) | 2008-03-04 | 2014-02-18 | Taiyo Yuden Co., Ltd. | Film bulk acoustic resonator, filter, communication module and communication apparatus |
US8240015B2 (en) | 2009-03-19 | 2012-08-14 | Taiyo Yuden Co., Ltd. | Method of manufacturing thin film resonator |
JP2010226171A (ja) * | 2009-03-19 | 2010-10-07 | Taiyo Yuden Co Ltd | 圧電薄膜共振子、フィルタ、通信モジュール、通信装置 |
US9240769B2 (en) | 2009-03-19 | 2016-01-19 | Taiyo Yuden Co., Ltd. | Piezoelectric thin film resonator, filter, communication module and communication device |
US8450906B2 (en) | 2009-10-22 | 2013-05-28 | Taiyo Yuden Co., Ltd. | Piezoelectric thin-film resonator |
JP2013176142A (ja) * | 2013-04-30 | 2013-09-05 | Taiyo Yuden Co Ltd | 圧電薄膜共振器、フィルタ、デュープレクサ、通信モジュール、および通信装置 |
US20170170809A1 (en) * | 2015-12-14 | 2017-06-15 | Taiyo Yuden Co., Ltd. | Piezoelectric thin film resonator, filter, and duplexer |
US10205432B2 (en) * | 2015-12-14 | 2019-02-12 | Taiyo Yuden Co., Ltd. | Piezoelectric thin film resonator, filter, and duplexer |
US10862448B2 (en) | 2016-08-31 | 2020-12-08 | Taiyo Yuden Co., Ltd. | Piezoelectric thin film resonator, filter, and multiplexer |
Also Published As
Publication number | Publication date |
---|---|
CN100505531C (zh) | 2009-06-24 |
KR100753705B1 (ko) | 2007-08-30 |
US20060091764A1 (en) | 2006-05-04 |
JP4535841B2 (ja) | 2010-09-01 |
EP1653612A3 (en) | 2007-06-27 |
CN1767380A (zh) | 2006-05-03 |
KR20060052188A (ko) | 2006-05-19 |
US7884527B2 (en) | 2011-02-08 |
EP2259425A1 (en) | 2010-12-08 |
EP1653612A2 (en) | 2006-05-03 |
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