JP2006072510A5 - - Google Patents

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Publication number
JP2006072510A5
JP2006072510A5 JP2004252821A JP2004252821A JP2006072510A5 JP 2006072510 A5 JP2006072510 A5 JP 2006072510A5 JP 2004252821 A JP2004252821 A JP 2004252821A JP 2004252821 A JP2004252821 A JP 2004252821A JP 2006072510 A5 JP2006072510 A5 JP 2006072510A5
Authority
JP
Japan
Prior art keywords
valve
fluid control
gap
control device
unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2004252821A
Other languages
English (en)
Japanese (ja)
Other versions
JP4549136B2 (ja
JP2006072510A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2004252821A priority Critical patent/JP4549136B2/ja
Priority claimed from JP2004252821A external-priority patent/JP4549136B2/ja
Publication of JP2006072510A publication Critical patent/JP2006072510A/ja
Publication of JP2006072510A5 publication Critical patent/JP2006072510A5/ja
Application granted granted Critical
Publication of JP4549136B2 publication Critical patent/JP4549136B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2004252821A 2004-08-31 2004-08-31 流体制御装置 Expired - Fee Related JP4549136B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004252821A JP4549136B2 (ja) 2004-08-31 2004-08-31 流体制御装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004252821A JP4549136B2 (ja) 2004-08-31 2004-08-31 流体制御装置

Publications (3)

Publication Number Publication Date
JP2006072510A JP2006072510A (ja) 2006-03-16
JP2006072510A5 true JP2006072510A5 (https=) 2007-09-20
JP4549136B2 JP4549136B2 (ja) 2010-09-22

Family

ID=36153105

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004252821A Expired - Fee Related JP4549136B2 (ja) 2004-08-31 2004-08-31 流体制御装置

Country Status (1)

Country Link
JP (1) JP4549136B2 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4994082B2 (ja) * 2007-03-30 2012-08-08 旭有機材工業株式会社 配管部材
JP6037845B2 (ja) * 2013-01-17 2016-12-07 旭有機材株式会社 流体制御装置

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0683456A (ja) * 1992-09-03 1994-03-25 M C Electron Kk マスフローコントローラ
JPH07210254A (ja) * 1993-11-30 1995-08-11 Hitachi Metals Ltd ガス質量流量制御装置
JPH09303609A (ja) * 1996-05-21 1997-11-28 Toshiba Corp 流量制御弁及びこれを用いた流量制御システム
JP2002135894A (ja) * 2000-10-26 2002-05-10 Murata Mfg Co Ltd 超音波センサ及びそれを用いた電子装置
JP4557413B2 (ja) * 2000-12-05 2010-10-06 旭有機材工業株式会社 ピンチバルブ
JP2003021252A (ja) * 2001-07-05 2003-01-24 Smc Corp 流量制御弁
JP4763936B2 (ja) * 2001-09-07 2011-08-31 アドバンス電気工業株式会社 バルブにおけるガスパージ方法及び構造
JP4590139B2 (ja) * 2001-09-10 2010-12-01 アドバンス電気工業株式会社 流体コントロール弁
JP3995543B2 (ja) * 2002-07-03 2007-10-24 旭有機材工業株式会社 流体制御弁
JP2004164033A (ja) * 2002-11-08 2004-06-10 Asahi Organic Chem Ind Co Ltd 流量制御装置
JP2004170326A (ja) * 2002-11-22 2004-06-17 Oval Corp 超音波式渦流量計

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