JP2006072515A5 - - Google Patents

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Publication number
JP2006072515A5
JP2006072515A5 JP2004252870A JP2004252870A JP2006072515A5 JP 2006072515 A5 JP2006072515 A5 JP 2006072515A5 JP 2004252870 A JP2004252870 A JP 2004252870A JP 2004252870 A JP2004252870 A JP 2004252870A JP 2006072515 A5 JP2006072515 A5 JP 2006072515A5
Authority
JP
Japan
Prior art keywords
valve
flow meter
flow
sensor unit
fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2004252870A
Other languages
English (en)
Japanese (ja)
Other versions
JP2006072515A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2004252870A priority Critical patent/JP2006072515A/ja
Priority claimed from JP2004252870A external-priority patent/JP2006072515A/ja
Priority to PCT/JP2005/016168 priority patent/WO2006025550A1/ja
Priority to KR1020077004685A priority patent/KR101124447B1/ko
Priority to US11/661,388 priority patent/US20080029174A1/en
Priority to TW094129656A priority patent/TW200611095A/zh
Publication of JP2006072515A publication Critical patent/JP2006072515A/ja
Publication of JP2006072515A5 publication Critical patent/JP2006072515A5/ja
Pending legal-status Critical Current

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JP2004252870A 2004-08-31 2004-08-31 流体制御装置 Pending JP2006072515A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2004252870A JP2006072515A (ja) 2004-08-31 2004-08-31 流体制御装置
PCT/JP2005/016168 WO2006025550A1 (ja) 2004-08-31 2005-08-29 流体制御装置
KR1020077004685A KR101124447B1 (ko) 2004-08-31 2005-08-29 유체제어장치
US11/661,388 US20080029174A1 (en) 2004-08-31 2005-08-29 Fluid Control Device
TW094129656A TW200611095A (en) 2004-08-31 2005-08-30 A fluid control device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004252870A JP2006072515A (ja) 2004-08-31 2004-08-31 流体制御装置

Publications (2)

Publication Number Publication Date
JP2006072515A JP2006072515A (ja) 2006-03-16
JP2006072515A5 true JP2006072515A5 (https=) 2007-09-20

Family

ID=36153110

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004252870A Pending JP2006072515A (ja) 2004-08-31 2004-08-31 流体制御装置

Country Status (1)

Country Link
JP (1) JP2006072515A (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4896675B2 (ja) * 2006-11-13 2012-03-14 シーケーディ株式会社 流体制御弁
IL279612B2 (en) 2018-07-09 2023-10-01 Fujikin Kk Fluid control device

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