JP2006072510A5

JP2006072510A5 -

Info

Publication number: JP2006072510A5
Application number: JP2004252821A
Authority: JP
Filing date: 2004-08-31
Publication date: 2007-09-20
Anticipated expiration: 2024-08-31

Claims

An electric control valve comprising an electric drive unit (11) and a flow rate control unit (5), an ultrasonic transducer (18) for transmitting ultrasonic waves into the fluid, and an ultrasonic wave transmitted from the ultrasonic transducer (18) A flow meter sensor unit (4) having an ultrasonic transducer (19) that receives sound waves and outputs a signal to a flow meter amplifier unit (9), and a flow meter that calculates a flow rate based on a signal from the flow meter sensor unit (4) An amplifier unit (9), and a control unit (10) for adjusting the opening of the electric control valve based on the flow rate value calculated by the flow meter amplifier unit (9) and performing feedback control, and at least the flow meter An electrical module (7) comprising an amplifier unit (9), a control unit (10) and an electric drive unit (11) was installed in one first casing (8),
A fluid control device.

A valve module (1) comprising at least the flow meter sensor part (4) and the flow rate control part (5) is provided with a second casing (1) having a fluid inlet (3) and a fluid outlet (6). 2) arranged in
The fluid control apparatus according to claim 1.

A pressure regulating valve (112) is provided inside or outside the fluid inlet (3) of the second casing (2) of the valve module (1),
The fluid control apparatus according to claim 2.

The pressure regulating valve (112)
A second gap (122) provided open to the bottom at the center of the lower part, an inlet channel (124) communicating with the second gap (122), and an upper face opened at the upper part. A first gap (123) having a diameter larger than the diameter of the gap (122), an outlet channel (125) communicating with the first gap (123), the first gap (123) and the second gap It has a communication hole (126) that communicates with the gap (122) and has a diameter smaller than the diameter of the first gap (123), and the upper surface of the second gap (122) serves as a valve seat (127). A main body (114);
A bonnet having a cylindrical gap (128) communicating with an air supply hole (130) and a discharge hole (131) provided on a side surface or an upper surface and having a step portion (129) on the inner peripheral surface of the lower end (115),
A spring receiver (116) fitted into the step (129) of the bonnet (115) and having a through-hole (132) in the center;
The lower end portion has a first joint portion (137) having a diameter smaller than that of the through hole (132) of the spring receiver (116), and a flange portion (135) is provided on the upper portion, and is inside the gap (128) of the bonnet (115). A piston (117) inserted in a vertically movable manner;
A spring (118) clamped and supported by the lower end surface of the flange (135) of the piston (117) and the upper end surface of the spring receiver (116);
A center where the peripheral portion is sandwiched and fixed between the main body (114) and the spring receiver (116) and covers the first gap (123) of the main body (114) to form the first valve chamber (144) The first diaphragm (140) having a thickened portion and the first joint (137) of the piston (117) at the center of the upper surface through the through hole (132) of the spring receiver (116) are joined and fixed. A first valve mechanism (119) having a second joint (142) and a third joint (143) provided through the communication hole (126) of the main body (114) in the center of the lower surface;
A valve body (145) located inside the second gap (122) of the main body (114) and having a larger diameter than the communication hole (126) of the main body (114), and protruding to the upper end surface of the valve body (145) A fourth joint portion (147) that is joined and fixed to the third joint portion (143) of the first valve mechanism body (119), and a rod (148) that projects from the lower end surface of the valve body (145). And a second valve mechanism (120) having a second diaphragm (150) provided to extend radially from the lower end surface of the rod (148),
An annular protrusion (152) located at the lower center of the main body (114) and sandwiching and fixing the peripheral edge of the second diaphragm (150) of the second valve mechanism (120) with the main body (114) is provided at the upper center. A base plate (121) provided with a notch recess (153) at the upper end of the annular protrusion (152) and a breathing hole (154) communicating with the notch recess (153),
The opening area of the fluid control unit (155) formed by the valve body (145) of the second valve mechanism (120) and the valve seat (127) of the main body (114) as the piston (117) moves up and down. Arranged to change,
The fluid control device according to claim 3.

The flowmeter sensor unit (4) includes an inlet channel (13) communicating with the fluid inlet (3), a first rising channel (14) vertically provided from the inlet channel (13), A straight flow path (15) provided in communication with one rising flow path (14) and substantially parallel to the axis of the inlet flow path (13), and a second rising flow path (vertical flow path (15)) 16) and an outlet channel (17) that communicates with the second rising channel (16) and is substantially parallel to the axis of the inlet channel (13) and communicates with the inlet channel (24) of the flow rate controller (5). ) Are continuously provided, and the ultrasonic transducers (18, 19) face each other at positions intersecting with the axis of the straight flow path (15) on the side walls of the first and second rising flow paths (14, 16). A flowmeter sensor unit (4) arranged as
The flow meter amplifier unit (9) is a flow meter amplifier unit (9) to which an ultrasonic transducer (18, 19) is connected via a cable,
The flowmeter sensor unit (4) and the flowmeter amplifier unit (9) alternately switch the transmission / reception of the ultrasonic transducers (18, 19) to transmit ultrasonic waves between the ultrasonic transducers (18, 19). Constituting an ultrasonic flowmeter that calculates the flow rate of the fluid flowing through the straight flow path (15) by measuring the time difference;
The fluid control device according to any one of claims 2 to 4, wherein the fluid control device is provided.

The flowmeter sensor unit (156) includes an inlet channel (159) communicating with the fluid inlet (3) and a vortex generator (160) that generates Karman vortices suspended in the inlet channel (159). ) And a straight flow path (162) including an outlet flow path (161) are continuously provided, and an ultrasonic transducer is provided on the downstream side wall of the vortex generator (160) of the straight flow path (162). (163, 164) is a flow meter sensor unit (156) arranged opposite to each other at a position orthogonal to the flow path axis direction, and the flow meter amplifier (165) is an ultrasonic transducer (163, 164). Is a flow meter amplifier unit (165) connected via a cable,
The ultrasonic transducer (163) transmits the generated frequency of Karman vortex generated downstream of the vortex generator by the flow meter sensor unit (156) and the flow meter amplifier unit (165) and the ultrasonic transducer. (164) constitutes an ultrasonic vortex flowmeter that calculates the flow rate according to the phase difference from the received signal,
The fluid control device according to any one of claims 2 to 4, wherein the fluid control device is provided.

The electrical module (7) and the valve module (1) are connected,
The fluid control apparatus according to any one of claims 2 to 6, wherein the fluid control apparatus is characterized in that:

The electrical module (7) and the valve module (1) are connected via a space layer (12),
The fluid control device according to claim 7.

The first casing (57) of the electrical module (56) has a discharge port (61) provided for discharging the gas filled in the first casing (57). The fluid control device according to any one of claims 1 to 8.

An exhaust port (49) provided for exhausting the gas filled in the space layer (12);
The fluid control apparatus according to claim 8.

The electric drive unit (11) includes an upper bonnet (37) and a motor unit (38) included in the lower bonnet (36), and the flow rate control unit (5) is connected to the motor unit (38). A diaphragm (21) having a valve body (22) moved up and down by a stem (47) connected to a shaft, and a valve chamber (23) isolated from the electric drive unit (11) by the diaphragm (21), respectively. A valve body (20) having an inlet channel (24) and an outlet channel (25) communicating with each other, and an exhaust hole (43) communicating with a non-wetted side space (41) of the diaphragm (21) Provided in the hood (36),
The fluid control device according to any one of claims 1 to 10, wherein the fluid control device is characterized in that:

The electric control valve is an electric pinch valve;
The fluid control device according to any one of claims 1 to 10, wherein the fluid control device is characterized in that:

13. The fluid control device according to claim 12, wherein a material of a pipe body of the electric pinch valve is made of EPDM, fluoro rubber, silicon rubber, or a composite thereof.

The fluid control device according to claim 12, wherein the tube body of the electric pinch valve is made of a composite of polytetrafluoroethylene and silicon rubber.