JP2006059889A5 - - Google Patents
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- Publication number
- JP2006059889A5 JP2006059889A5 JP2004237899A JP2004237899A JP2006059889A5 JP 2006059889 A5 JP2006059889 A5 JP 2006059889A5 JP 2004237899 A JP2004237899 A JP 2004237899A JP 2004237899 A JP2004237899 A JP 2004237899A JP 2006059889 A5 JP2006059889 A5 JP 2006059889A5
- Authority
- JP
- Japan
- Prior art keywords
- optical element
- thin film
- film
- incident light
- thickness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 claims 19
- 239000010409 thin film Substances 0.000 claims 11
- 239000010408 film Substances 0.000 claims 8
- 238000000034 method Methods 0.000 claims 3
- 239000000758 substrate Substances 0.000 claims 3
- 238000000151 deposition Methods 0.000 claims 2
- 238000005286 illumination Methods 0.000 claims 2
- 230000002093 peripheral effect Effects 0.000 claims 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- 238000009826 distribution Methods 0.000 claims 1
- 238000010030 laminating Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 229910052750 molybdenum Inorganic materials 0.000 claims 1
- 239000011733 molybdenum Substances 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004237899A JP4498060B2 (ja) | 2004-08-18 | 2004-08-18 | 投影光学系、露光装置及び光学素子の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004237899A JP4498060B2 (ja) | 2004-08-18 | 2004-08-18 | 投影光学系、露光装置及び光学素子の製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2006059889A JP2006059889A (ja) | 2006-03-02 |
| JP2006059889A5 true JP2006059889A5 (enExample) | 2007-09-27 |
| JP4498060B2 JP4498060B2 (ja) | 2010-07-07 |
Family
ID=36107130
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004237899A Expired - Fee Related JP4498060B2 (ja) | 2004-08-18 | 2004-08-18 | 投影光学系、露光装置及び光学素子の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4498060B2 (enExample) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1930771A1 (en) * | 2006-12-04 | 2008-06-11 | Carl Zeiss SMT AG | Projection objectives having mirror elements with reflective coatings |
| JP5269079B2 (ja) | 2007-08-20 | 2013-08-21 | カール・ツァイス・エスエムティー・ゲーエムベーハー | 反射コーティングを備えたミラー要素を有する投影対物系 |
| JP2010199503A (ja) * | 2009-02-27 | 2010-09-09 | Nikon Corp | 光学素子、露光装置及びデバイス製造方法 |
| DE102009047179B8 (de) | 2009-11-26 | 2016-08-18 | Carl Zeiss Smt Gmbh | Projektionsobjektiv |
| WO2013146488A1 (ja) * | 2012-03-28 | 2013-10-03 | Hoya株式会社 | 多層反射膜付き基板の製造方法、反射型マスクブランクの製造方法、及び反射型マスクの製造方法 |
| JP5746259B2 (ja) * | 2013-05-07 | 2015-07-08 | カール・ツァイス・エスエムティー・ゲーエムベーハー | 反射コーティングを備えたミラー要素を有する投影対物系 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2569447B2 (ja) * | 1988-11-28 | 1997-01-08 | 株式会社ニコン | 多層膜反射鏡の製造方法 |
| JP2002162566A (ja) * | 2000-11-27 | 2002-06-07 | Nikon Corp | 光学系の設計方法，光学系および投影露光装置 |
| DE50208750D1 (de) * | 2001-08-01 | 2007-01-04 | Zeiss Carl Smt Ag | Reflektives Projektionsobjektiv für EUV-Photolithographie |
| JP2003077805A (ja) * | 2001-09-03 | 2003-03-14 | Nikon Corp | 光学系の製造方法およびｅｕｖ露光装置 |
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2004
- 2004-08-18 JP JP2004237899A patent/JP4498060B2/ja not_active Expired - Fee Related