JP2006044982A - 窒化物半導体単結晶基板とその合成方法 - Google Patents
窒化物半導体単結晶基板とその合成方法 Download PDFInfo
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- JP2006044982A JP2006044982A JP2004228032A JP2004228032A JP2006044982A JP 2006044982 A JP2006044982 A JP 2006044982A JP 2004228032 A JP2004228032 A JP 2004228032A JP 2004228032 A JP2004228032 A JP 2004228032A JP 2006044982 A JP2006044982 A JP 2006044982A
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- single crystal
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- nitride semiconductor
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/08—Reaction chambers; Selection of materials therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/20—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/40—AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
- C30B29/403—AIII-nitrides
Abstract
【解決手段】 窒化物半導体単結晶基板は、AlxGa1-xN(0≦x≦1)の組成を有する場合に、(1.2−0.7x)MPa・m1/2以上の破壊靭性値と20cm2以上の面積を有し、また、AlxGa1-xN(0.5≦x≦1)の組成を有する場合に、350〜780nmの全波長範囲において50cm-1以下の吸収係数を有することを特徴としている
【選択図】 図1
Description
Jpn.J.Appl.Phys. Vol.40 (2001) pp.L426-L427 J.Appl.Phys.,Vol.44,1973,pp.292-296
HV=P/(2a3/2)・・・(2)
ここで、KCは破壊靭性値、HVはビッカース硬度、Eはヤング率、ξは構成定数(=0.016)、Pは圧子荷重(0.5〜5N)、2aは窪み長さ、そしてcはクラック長さを表している。
Claims (5)
- AlxGa1-xN(0≦x≦1)の組成を有し、(1.2−0.7x)MPa・m1/2以上の破壊靭性値と20cm2以上の面積を有することを特徴とする窒化物半導体単結晶基板。
- AlxGa1-xN(0.5≦x≦1)の組成を有し、350〜780nmの全波長範囲において50cm-1以下の吸収係数を有することを特徴とする窒化物半導体単結晶基板。
- 1×1017cm-3以下の全不純物密度を有することを特徴とする請求項1または2に記載の窒化物半導体単結晶基板。
- 請求項1から3のいずれかに記載の窒化物半導体単結晶基板を合成するための方法であって、前記基板はHPVE法で合成されることを特徴とする窒化物半導体単結晶基板の合成方法。
- 前記HPVE法に用いられる結晶成長炉内において、原料ガスが800℃以上の温度で接する領域の内壁がpBNで形成されているか、窒化物、炭化物、および酸化物のいずれかの焼結体で形成されているか、またはpBN、窒化物、炭化物、および酸化物のいずれかで表面コーティングされた部材で形成されていることを特徴とする請求項4に記載の窒化物半導体単結晶基板の合成方法。
Priority Applications (8)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004228032A JP2006044982A (ja) | 2004-08-04 | 2004-08-04 | 窒化物半導体単結晶基板とその合成方法 |
TW094120871A TWI352376B (en) | 2004-08-04 | 2005-06-22 | Nitride semiconductor single-crystal substrate and |
KR1020050069909A KR101289128B1 (ko) | 2004-08-04 | 2005-07-29 | 질화물 반도체 단결정 기판과 그 합성 방법 |
CNB2005100882953A CN100466176C (zh) | 2004-08-04 | 2005-08-02 | 氮化物半导体单晶基材及其合成方法 |
CN2009100058711A CN101503824B (zh) | 2004-08-04 | 2005-08-02 | 氮化物半导体单晶基材及其合成方法 |
EP05016895A EP1624095A3 (en) | 2004-08-04 | 2005-08-03 | Nitride semiconductor single-crystal substrate and method of its synthesis |
US11/161,436 US20060027896A1 (en) | 2004-08-04 | 2005-08-03 | Nitride Semiconductor Single-Crystal Substrate and Method of Its Synthesis |
US13/350,095 US20120118226A1 (en) | 2004-08-04 | 2012-01-13 | Method of Synthesizing Nitride Semiconductor Single-Crystal Substrate |
Applications Claiming Priority (1)
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JP2004228032A JP2006044982A (ja) | 2004-08-04 | 2004-08-04 | 窒化物半導体単結晶基板とその合成方法 |
Related Child Applications (2)
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JP2009001808A Division JP2009078972A (ja) | 2009-01-07 | 2009-01-07 | 窒化物半導体単結晶基板とその合成方法 |
JP2009001807A Division JP2009078971A (ja) | 2009-01-07 | 2009-01-07 | 窒化物半導体単結晶基板とその合成方法 |
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JP2006044982A true JP2006044982A (ja) | 2006-02-16 |
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JP2004228032A Pending JP2006044982A (ja) | 2004-08-04 | 2004-08-04 | 窒化物半導体単結晶基板とその合成方法 |
Country Status (6)
Country | Link |
---|---|
US (2) | US20060027896A1 (ja) |
EP (1) | EP1624095A3 (ja) |
JP (1) | JP2006044982A (ja) |
KR (1) | KR101289128B1 (ja) |
CN (2) | CN101503824B (ja) |
TW (1) | TWI352376B (ja) |
Cited By (7)
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WO2010001804A1 (ja) | 2008-07-01 | 2010-01-07 | 住友電気工業株式会社 | AlxGa(1-x)N単結晶の製造方法、AlxGa(1-x)N単結晶および光学部品 |
JP2010034117A (ja) * | 2008-07-25 | 2010-02-12 | Taiyo Nippon Sanso Corp | 気相成長装置 |
EP2305860A2 (en) | 2009-09-30 | 2011-04-06 | Sumitomo Electric Industries, Ltd. | Gallium nitride substrate |
JP2011168490A (ja) * | 2011-04-28 | 2011-09-01 | Sumitomo Electric Ind Ltd | 結晶成長方法および結晶基板 |
WO2011108640A1 (ja) * | 2010-03-04 | 2011-09-09 | Jx日鉱日石金属株式会社 | 結晶成長装置、窒化物系化合物半導体結晶の製造方法及び窒化物系化合物半導体結晶 |
US9779934B2 (en) | 2009-08-11 | 2017-10-03 | Sumitomo Chemical Company, Limited | Nitride semiconductor free-standing substrate, method of manufacturing the same and nitride semiconductor device |
JP2019073439A (ja) * | 2013-09-11 | 2019-05-16 | 国立大学法人東京農工大学 | 窒化物半導体結晶 |
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JP2005203418A (ja) * | 2004-01-13 | 2005-07-28 | Hitachi Cable Ltd | 窒化物系化合物半導体基板及びその製造方法 |
US8349077B2 (en) * | 2005-11-28 | 2013-01-08 | Crystal Is, Inc. | Large aluminum nitride crystals with reduced defects and methods of making them |
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CN102443842A (zh) * | 2011-05-05 | 2012-05-09 | 中国科学院福建物质结构研究所 | 一种AlGaN单晶制备方法 |
US9691942B2 (en) | 2011-12-22 | 2017-06-27 | National University Corporation Tokyo University Of Agriculture And Technology | Single-cystalline aluminum nitride substrate and a manufacturing method thereof |
US20140264388A1 (en) * | 2013-03-15 | 2014-09-18 | Nitride Solutions Inc. | Low carbon group-iii nitride crystals |
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WO2019094742A1 (en) | 2017-11-10 | 2019-05-16 | Crystal Is, Inc. | Large, uv-transparent aluminum nitride single crystals and methods of forming them |
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Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6533874B1 (en) * | 1996-12-03 | 2003-03-18 | Advanced Technology Materials, Inc. | GaN-based devices using thick (Ga, Al, In)N base layers |
JPH111396A (ja) * | 1997-06-09 | 1999-01-06 | Sumitomo Electric Ind Ltd | 窒化物系化合物半導体の製造方法 |
TW417315B (en) * | 1998-06-18 | 2001-01-01 | Sumitomo Electric Industries | GaN single crystal substrate and its manufacture method of the same |
US6372041B1 (en) * | 1999-01-08 | 2002-04-16 | Gan Semiconductor Inc. | Method and apparatus for single crystal gallium nitride (GaN) bulk synthesis |
US6185808B1 (en) * | 1999-01-29 | 2001-02-13 | General Electric Company | Cryostat, cryostat positioning method, and cryostat alignment set |
US6447604B1 (en) * | 2000-03-13 | 2002-09-10 | Advanced Technology Materials, Inc. | Method for achieving improved epitaxy quality (surface texture and defect density) on free-standing (aluminum, indium, gallium) nitride ((al,in,ga)n) substrates for opto-electronic and electronic devices |
US6596079B1 (en) * | 2000-03-13 | 2003-07-22 | Advanced Technology Materials, Inc. | III-V nitride substrate boule and method of making and using the same |
JP2001345268A (ja) * | 2000-05-31 | 2001-12-14 | Matsushita Electric Ind Co Ltd | 半導体製造装置及び半導体の製造方法 |
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US7501023B2 (en) * | 2001-07-06 | 2009-03-10 | Technologies And Devices, International, Inc. | Method and apparatus for fabricating crack-free Group III nitride semiconductor materials |
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-
2004
- 2004-08-04 JP JP2004228032A patent/JP2006044982A/ja active Pending
-
2005
- 2005-06-22 TW TW094120871A patent/TWI352376B/zh not_active IP Right Cessation
- 2005-07-29 KR KR1020050069909A patent/KR101289128B1/ko not_active IP Right Cessation
- 2005-08-02 CN CN2009100058711A patent/CN101503824B/zh not_active Expired - Fee Related
- 2005-08-02 CN CNB2005100882953A patent/CN100466176C/zh not_active Expired - Fee Related
- 2005-08-03 EP EP05016895A patent/EP1624095A3/en not_active Withdrawn
- 2005-08-03 US US11/161,436 patent/US20060027896A1/en not_active Abandoned
-
2012
- 2012-01-13 US US13/350,095 patent/US20120118226A1/en not_active Abandoned
Cited By (10)
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WO2010001804A1 (ja) | 2008-07-01 | 2010-01-07 | 住友電気工業株式会社 | AlxGa(1-x)N単結晶の製造方法、AlxGa(1-x)N単結晶および光学部品 |
JPWO2010001804A1 (ja) * | 2008-07-01 | 2011-12-22 | 住友電気工業株式会社 | AlxGa(1−x)N単結晶の製造方法、AlxGa(1−x)N単結晶および光学部品 |
JP2010034117A (ja) * | 2008-07-25 | 2010-02-12 | Taiyo Nippon Sanso Corp | 気相成長装置 |
US9779934B2 (en) | 2009-08-11 | 2017-10-03 | Sumitomo Chemical Company, Limited | Nitride semiconductor free-standing substrate, method of manufacturing the same and nitride semiconductor device |
EP2305860A2 (en) | 2009-09-30 | 2011-04-06 | Sumitomo Electric Industries, Ltd. | Gallium nitride substrate |
US8183668B2 (en) | 2009-09-30 | 2012-05-22 | Sumitomo Electric Industries, Ltd. | Gallium nitride substrate |
WO2011108640A1 (ja) * | 2010-03-04 | 2011-09-09 | Jx日鉱日石金属株式会社 | 結晶成長装置、窒化物系化合物半導体結晶の製造方法及び窒化物系化合物半導体結晶 |
JPWO2011108640A1 (ja) * | 2010-03-04 | 2013-06-27 | Jx日鉱日石金属株式会社 | 結晶成長装置、窒化物系化合物半導体結晶の製造方法及び窒化物系化合物半導体結晶 |
JP2011168490A (ja) * | 2011-04-28 | 2011-09-01 | Sumitomo Electric Ind Ltd | 結晶成長方法および結晶基板 |
JP2019073439A (ja) * | 2013-09-11 | 2019-05-16 | 国立大学法人東京農工大学 | 窒化物半導体結晶 |
Also Published As
Publication number | Publication date |
---|---|
CN100466176C (zh) | 2009-03-04 |
US20060027896A1 (en) | 2006-02-09 |
KR101289128B1 (ko) | 2013-07-23 |
EP1624095A2 (en) | 2006-02-08 |
TWI352376B (en) | 2011-11-11 |
CN101503824A (zh) | 2009-08-12 |
US20120118226A1 (en) | 2012-05-17 |
CN101503824B (zh) | 2012-05-09 |
CN1734719A (zh) | 2006-02-15 |
KR20060048978A (ko) | 2006-05-18 |
TW200607005A (en) | 2006-02-16 |
EP1624095A3 (en) | 2009-04-01 |
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