JP2006041502A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2006041502A5 JP2006041502A5 JP2005185380A JP2005185380A JP2006041502A5 JP 2006041502 A5 JP2006041502 A5 JP 2006041502A5 JP 2005185380 A JP2005185380 A JP 2005185380A JP 2005185380 A JP2005185380 A JP 2005185380A JP 2006041502 A5 JP2006041502 A5 JP 2006041502A5
- Authority
- JP
- Japan
- Prior art keywords
- region
- release layer
- forming
- layer
- insulating film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010408 film Substances 0.000 claims 14
- 238000004519 manufacturing process Methods 0.000 claims 9
- 238000000034 method Methods 0.000 claims 9
- 239000010409 thin film Substances 0.000 claims 9
- 239000000758 substrate Substances 0.000 claims 8
- 239000003795 chemical substances by application Substances 0.000 claims 1
- 238000005530 etching Methods 0.000 claims 1
- 229910052736 halogen Inorganic materials 0.000 claims 1
- -1 halogen fluoride Chemical class 0.000 claims 1
- 239000007788 liquid Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005185380A JP4912627B2 (ja) | 2004-06-24 | 2005-06-24 | 薄膜集積回路の作製方法 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004186543 | 2004-06-24 | ||
| JP2004186543 | 2004-06-24 | ||
| JP2005185380A JP4912627B2 (ja) | 2004-06-24 | 2005-06-24 | 薄膜集積回路の作製方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2006041502A JP2006041502A (ja) | 2006-02-09 |
| JP2006041502A5 true JP2006041502A5 (enExample) | 2008-05-15 |
| JP4912627B2 JP4912627B2 (ja) | 2012-04-11 |
Family
ID=35906104
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005185380A Expired - Fee Related JP4912627B2 (ja) | 2004-06-24 | 2005-06-24 | 薄膜集積回路の作製方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4912627B2 (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5204959B2 (ja) | 2006-06-26 | 2013-06-05 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
| JP5264016B2 (ja) * | 2006-06-30 | 2013-08-14 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
| WO2008036837A2 (en) * | 2006-09-20 | 2008-03-27 | The Board Of Trustees Of The University Of Illinois | Release strategies for making transferable semiconductor structures, devices and device components |
| KR20200112851A (ko) * | 2017-12-22 | 2020-10-05 | 보드 오브 리전츠, 더 유니버시티 오브 텍사스 시스템 | 나노스케일 정렬된 삼차원 적층 집적 회로 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4748859B2 (ja) * | 2000-01-17 | 2011-08-17 | 株式会社半導体エネルギー研究所 | 発光装置の作製方法 |
| WO2003010825A1 (fr) * | 2001-07-24 | 2003-02-06 | Seiko Epson Corporation | Procede de transfert, procede de fabrication d'un element en couche mince, procede de fabrication d'un circuit integre, substrat de circuit et son procede de fabrication, dispositif electro-optique et son procede de fabrication et carte a circuit integre et materiel electronique |
-
2005
- 2005-06-24 JP JP2005185380A patent/JP4912627B2/ja not_active Expired - Fee Related
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2009111367A5 (enExample) | ||
| US10593898B2 (en) | Base carrier, flexible display panel and manufacturing method thereof, flexible display device | |
| JP2006093209A5 (enExample) | ||
| TW200623400A (en) | Method for manufacturing semiconductor device | |
| JP2005235858A5 (enExample) | ||
| JP2007311584A5 (enExample) | ||
| JP2009505424A5 (enExample) | ||
| JP2013042180A5 (enExample) | ||
| JP2010129899A5 (enExample) | ||
| JP2006189853A5 (enExample) | ||
| JP2011009452A5 (enExample) | ||
| JP2009081357A5 (enExample) | ||
| CN110040679A (zh) | 一种三轴磁传感器及其制备方法 | |
| TW200723474A (en) | High thermal conducting circuit substrate and manufacturing process thereof | |
| JP2006066906A5 (enExample) | ||
| JP2008524871A5 (enExample) | ||
| JP2006121060A5 (enExample) | ||
| JP2006041502A5 (enExample) | ||
| JP2005252242A5 (enExample) | ||
| JP2011109056A (ja) | セラミック基板の製造方法 | |
| JP2005311333A5 (enExample) | ||
| TW200616212A (en) | Method for manufacturing thin film integrated circuit | |
| JP2006186332A5 (enExample) | ||
| JP2008536296A5 (enExample) | ||
| JP2008118123A5 (enExample) |