JP2006041401A - 半導体装置及びその製造方法 - Google Patents
半導体装置及びその製造方法 Download PDFInfo
- Publication number
- JP2006041401A JP2006041401A JP2004222520A JP2004222520A JP2006041401A JP 2006041401 A JP2006041401 A JP 2006041401A JP 2004222520 A JP2004222520 A JP 2004222520A JP 2004222520 A JP2004222520 A JP 2004222520A JP 2006041401 A JP2006041401 A JP 2006041401A
- Authority
- JP
- Japan
- Prior art keywords
- external connection
- connection terminal
- electronic component
- semiconductor device
- chip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3107—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
- H01L23/3114—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed the device being a chip scale package, e.g. CSP
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/10—Bump connectors ; Manufacturing methods related thereto
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/12—Mountings, e.g. non-detachable insulating substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/02—Bonding areas ; Manufacturing methods related thereto
- H01L24/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L24/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/10—Bump connectors ; Manufacturing methods related thereto
- H01L24/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L24/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
- H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
- H05K3/34—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
- H05K3/341—Surface mounted components
- H05K3/3431—Leadless components
- H05K3/3436—Leadless components having an array of bottom contacts, e.g. pad grid array or ball grid array components
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/05001—Internal layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/05001—Internal layers
- H01L2224/0502—Disposition
- H01L2224/05022—Disposition the internal layer being at least partially embedded in the surface
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/05001—Internal layers
- H01L2224/0502—Disposition
- H01L2224/05023—Disposition the whole internal layer protruding from the surface
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
- H01L2224/05541—Structure
- H01L2224/05548—Bonding area integrally formed with a redistribution layer on the semiconductor or solid-state body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
- H01L2224/0556—Disposition
- H01L2224/0557—Disposition the external layer being disposed on a via connection of the semiconductor or solid-state body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
- H01L2224/0556—Disposition
- H01L2224/05571—Disposition the external layer being disposed in a recess of the surface
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/06—Structure, shape, material or disposition of the bonding areas prior to the connecting process of a plurality of bonding areas
- H01L2224/061—Disposition
- H01L2224/0612—Layout
- H01L2224/0613—Square or rectangular array
- H01L2224/06134—Square or rectangular array covering only portions of the surface to be connected
- H01L2224/06135—Covering only the peripheral area of the surface to be connected, i.e. peripheral arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
- H01L2224/13001—Core members of the bump connector
- H01L2224/13099—Material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01005—Boron [B]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01006—Carbon [C]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01013—Aluminum [Al]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01015—Phosphorus [P]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01022—Titanium [Ti]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01024—Chromium [Cr]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01029—Copper [Cu]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01033—Arsenic [As]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01047—Silver [Ag]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01074—Tungsten [W]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01075—Rhenium [Re]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01078—Platinum [Pt]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01079—Gold [Au]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/013—Alloys
- H01L2924/014—Solder alloys
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/19—Details of hybrid assemblies other than the semiconductor or other solid state devices to be connected
- H01L2924/1901—Structure
- H01L2924/1904—Component type
- H01L2924/19041—Component type being a capacitor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/19—Details of hybrid assemblies other than the semiconductor or other solid state devices to be connected
- H01L2924/1901—Structure
- H01L2924/1904—Component type
- H01L2924/19042—Component type being an inductor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/19—Details of hybrid assemblies other than the semiconductor or other solid state devices to be connected
- H01L2924/1901—Structure
- H01L2924/1904—Component type
- H01L2924/19043—Component type being a resistor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/19—Details of hybrid assemblies other than the semiconductor or other solid state devices to be connected
- H01L2924/191—Disposition
- H01L2924/19101—Disposition of discrete passive components
- H01L2924/19102—Disposition of discrete passive components in a stacked assembly with the semiconductor or solid state device
- H01L2924/19104—Disposition of discrete passive components in a stacked assembly with the semiconductor or solid state device on the semiconductor or solid-state device, i.e. passive-on-chip
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/0213—Electrical arrangements not otherwise provided for
- H05K1/0216—Reduction of cross-talk, noise or electromagnetic interference
- H05K1/023—Reduction of cross-talk, noise or electromagnetic interference using auxiliary mounted passive components or auxiliary substances
- H05K1/0231—Capacitors or dielectric substances
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/03—Conductive materials
- H05K2201/0332—Structure of the conductor
- H05K2201/0364—Conductor shape
- H05K2201/0379—Stacked conductors
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/09—Shape and layout
- H05K2201/09209—Shape and layout details of conductors
- H05K2201/09654—Shape and layout details of conductors covering at least two types of conductors provided for in H05K2201/09218 - H05K2201/095
- H05K2201/09745—Recess in conductor, e.g. in pad or in metallic substrate
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
- H05K2201/10613—Details of electrical connections of non-printed components, e.g. special leads
- H05K2201/10954—Other details of electrical connections
- H05K2201/10977—Encapsulated connections
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
- H05K2201/10613—Details of electrical connections of non-printed components, e.g. special leads
- H05K2201/10954—Other details of electrical connections
- H05K2201/10992—Using different connection materials, e.g. different solders, for the same connection
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/04—Soldering or other types of metallurgic bonding
- H05K2203/041—Solder preforms in the shape of solder balls
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
- H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
- H05K3/34—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
- H05K3/3457—Solder materials or compositions; Methods of application thereof
- H05K3/3463—Solder compositions in relation to features of the printed circuit board or the mounting process
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
【解決手段】ICチップ4上に形成された、第1の絶縁層7と、チップ電極パッド5に接続され、他端に外部接続端子搭載用電極6aが形成された金属配線6と、外部接続端子搭載用電極6aに搭載された電子部品2と、外部接続端子搭載用電極6aの他の部分に搭載された導電体からなるハンダボール等の外部接続端子1と、外部接続端子搭載用電極6aのうちの電子部品2との接続部を除く部分及び金属配線6を覆う第2の絶縁層8と、電子部品2、及び外部接続端子1の一部が露出するように封止した封止樹脂3とからなる。
【選択図】 図1
Description
少なくとも上記電子部品及び外部接続端子を、該外部接続端子の一部が露出するようにして樹脂にて封止する工程とを含むことを特徴としている。
2 電子部品
3 封止樹脂(樹脂)
4 ICチップ
5 チップ電極パッド(ICチップの電極)
6 金属配線(再配線)
6a 外部接続端子搭載用電極
7 第1の絶縁層
8 第2の絶縁層
9 耐熱樹脂
10 ウエハーレベルCSP(半導体装置)
15 プリント回路基板
15c 接続パッド(プリント回路基板の電極)
16 実装用ハンダ材
20 ウエハーレベルCSP(半導体装置)
30 ウエハーレベルCSP(半導体装置)
33 第2の外部接続端子(導電性の突起物)
40 ウエハーレベルCSP(半導体装置)
44 切欠き(外部接続端子の加工部分)
50 ウエハーレベルCSP(半導体装置)
55 切欠き(外部接続端子の加工部分)
60 ウエハーレベルCSP(半導体装置)
66 第2の外部接続端子(導電性の突起物)
Claims (12)
- ICチップと、
上記ICチップ上に形成された第1の絶縁層と、
上記第1の絶縁層上に設けられると共に、一端が上記ICチップの電極に接続され、かつ他端に外部接続端子搭載用電極が形成された金属配線と、
上記外部接続端子搭載用電極の一部分の上に接続された電子部品と、
上記外部接続端子搭載用電極における他の部分の上に形成された導電体からなる外部接続端子と、
少なくとも、上記外部接続端子搭載用電極のうちの上記電子部品との接続部を除く部分、及び金属配線を覆う第2の絶縁層と、
少なくとも上記電子部品及び外部接続端子を、該外部接続端子の一部が露出するようにして封止した樹脂とからなっていることを特徴とする半導体装置。 - 前記外部接続端子は、球状にて構成されていることを特徴とする請求項1記載の半導体装置。
- 前記外部接続端子の露出部分は、球状の導電体の一部を面で切除してできる円形をなし、かつ上記円形面は前記樹脂と連続する同一面となるように形成されていることを特徴とする請求項1記載の半導体装置。
- 前記外部接続端子は、銅、アルミニウム又はニッケルを主構成要素とする導電体からなっていることを特徴とする請求項1、2又は3半導体装置。
- 前記外部接続端子の露出部分に、導電性の突起物がさらに形成されていることを特徴とする請求項1〜4のいずれか1項に記載の半導体装置。
- 前記外部接続端子は、該外部接続端子の露出部分の一部又は全てが受け口となるように除かれていることを特徴とする請求項1〜4のいずれか1項に記載の半導体装置。
- 前記外部接続端子の受け口部分に、導電性の突起物がさらに形成されていることを特徴とする請求項6記載の半導体装置。
- 前記導電性の突起物は、スズを主成分とする金属合金からなっていることを特徴とする請求項5又は7記載の半導体装置。
- 前記電子部品は、少なくともキャパシタ、インダクタ又は抵抗のいずれかの機能を有していることを特徴とする請求項1〜8のいずれか1項に記載の半導体装置。
- 前記電子部品は、前記外部接続端子搭載用電極との一部分の接続に代えて、前記金属配線の一部分に相互接続されていることを特徴とする請求項1記載の半導体装置。
- 前記電子部品と前記ICチップ上の第1の絶縁層との間に、電子部品固定用の耐熱樹脂が注入されていることを特徴とする請求項1〜10のいずれか1項に記載の半導体装置。
- 上記ICチップ上に第1の絶縁層を形成する工程と、
上記第1の絶縁層上に、一端を上記ICチップの電極に接続し、かつ他端に外部接続端子搭載用電極を有する金属配線を形成する工程と、
少なくとも、上記外部接続端子搭載用電極のうちの電子部品との接続部を除く部分、及び金属配線の上に第2の絶縁層を形成する工程と、
上記第2の絶縁層に電子部品用開口及び外部接続端子用開口を形成して上記外部接続端子搭載用電極をそれぞれ露出させる工程と、
上記露出した外部接続端子搭載用電極に、上記電子部品用開口を通して電子部品を電気接続し、かつ外部接続端子用開口を通して導電体からなる外部接続端子を形成する工程と、
少なくとも上記電子部品及び外部接続端子を、該外部接続端子の一部が露出するようにして樹脂にて封止する工程とを含むことを特徴とする半導体装置の製造方法。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004222520A JP2006041401A (ja) | 2004-07-29 | 2004-07-29 | 半導体装置及びその製造方法 |
US11/188,785 US20060022320A1 (en) | 2004-07-29 | 2005-07-26 | Semiconductor device and manufacturing method thereof |
KR1020050069068A KR20060048884A (ko) | 2004-07-29 | 2005-07-28 | 반도체 장치 및 그 제조 방법 |
TW094125987A TWI272734B (en) | 2004-07-29 | 2005-07-29 | Semiconductor device and manufacturing method thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004222520A JP2006041401A (ja) | 2004-07-29 | 2004-07-29 | 半導体装置及びその製造方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2006041401A true JP2006041401A (ja) | 2006-02-09 |
Family
ID=35731191
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004222520A Pending JP2006041401A (ja) | 2004-07-29 | 2004-07-29 | 半導体装置及びその製造方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US20060022320A1 (ja) |
JP (1) | JP2006041401A (ja) |
KR (1) | KR20060048884A (ja) |
TW (1) | TWI272734B (ja) |
Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006269804A (ja) * | 2005-03-24 | 2006-10-05 | Mitsumi Electric Co Ltd | 半導体装置 |
JP2008118021A (ja) * | 2006-11-07 | 2008-05-22 | Seiko Epson Corp | 半導体モジュールとその製造方法 |
JP2008277569A (ja) * | 2007-04-27 | 2008-11-13 | Oki Electric Ind Co Ltd | 半導体装置及びその製造方法 |
JP2009054686A (ja) * | 2007-08-24 | 2009-03-12 | Shinko Electric Ind Co Ltd | 配線基板及びその製造方法、及び半導体装置 |
JP2011204894A (ja) * | 2010-03-25 | 2011-10-13 | Casio Computer Co Ltd | 半導体装置およびその製造方法 |
US8067814B2 (en) | 2007-06-01 | 2011-11-29 | Panasonic Corporation | Semiconductor device and method of manufacturing the same |
US9385279B2 (en) | 2014-05-30 | 2016-07-05 | Nichia Corporation | Light-emitting device and method for manufacturing the same |
WO2017013938A1 (ja) * | 2015-07-22 | 2017-01-26 | アルプス電気株式会社 | 高周波モジュール |
US9564565B2 (en) | 2014-09-29 | 2017-02-07 | Nichia Corporation | Light emitting device, light emitting module, and method for manufacturing light emitting device |
JP2017050350A (ja) * | 2015-08-31 | 2017-03-09 | 日亜化学工業株式会社 | 発光装置及びその製造方法 |
US9666567B2 (en) | 2014-02-13 | 2017-05-30 | Nichia Corporation | Light emitting device having underlying protective element |
US10002996B2 (en) | 2014-08-25 | 2018-06-19 | Nichia Corporation | Light emitting device and method of manufacturing the same |
JP2018137479A (ja) * | 2018-05-02 | 2018-08-30 | ローム株式会社 | 電圧生成装置 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2011080827A1 (ja) | 2009-12-28 | 2011-07-07 | 富士通株式会社 | 配線構造及びその形成方法 |
EP2834037A4 (en) * | 2012-03-20 | 2016-03-16 | Alpha Metals | LOTFORFORM AND SOLDER ALLOY ASSEMBLY METHOD |
JP6764666B2 (ja) * | 2016-03-18 | 2020-10-07 | 新光電気工業株式会社 | 半導体装置及び半導体装置の製造方法 |
Citations (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0817972A (ja) * | 1994-06-27 | 1996-01-19 | Nec Corp | 部品の接続構造及びその製造方法 |
JPH08139097A (ja) * | 1994-11-10 | 1996-05-31 | World Metal:Kk | フリップチップ用接続ボール及び半導体チップの接合方法 |
WO1998040915A1 (fr) * | 1997-03-10 | 1998-09-17 | Seiko Epson Corporation | Composant electronique et dispositif a semi-conducteurs, procede de fabrication correspondant, carte a circuit imprime ainsi equipee, et equipement electronique comportant cette carte a circuit imprime |
JPH11288977A (ja) * | 1998-03-31 | 1999-10-19 | Nippon Steel Corp | 複数チップ混載型半導体装置 |
JP2000091339A (ja) * | 1998-09-10 | 2000-03-31 | Hitachi Ltd | 半導体装置およびその製造方法 |
JP2000306939A (ja) * | 1999-04-21 | 2000-11-02 | Toshiba Corp | 半導体装置およびその製造方法 |
JP2001007133A (ja) * | 1999-06-25 | 2001-01-12 | Sumitomo Bakelite Co Ltd | はんだボール搭載済み半導体装置およびはんだボールの搭載方法 |
JP2001168265A (ja) * | 1999-12-10 | 2001-06-22 | Nec Corp | 電子デバイス集合体と電子デバイスの接続方法 |
JP2001291791A (ja) * | 2000-04-04 | 2001-10-19 | Texas Instr Japan Ltd | 半導体装置及びその製造方法 |
JP2001292791A (ja) * | 2000-04-13 | 2001-10-23 | Seikagaku Kogyo Co Ltd | N−アセチルラクトサミンの製造方法 |
JP2002246535A (ja) * | 2001-02-16 | 2002-08-30 | Sharp Corp | 半導体集積回路 |
JP2002299496A (ja) * | 2001-03-30 | 2002-10-11 | Fujitsu Ltd | 半導体装置及びその製造方法 |
JP2003051569A (ja) * | 2001-08-03 | 2003-02-21 | Seiko Epson Corp | 半導体装置及びその製造方法 |
JP2003338515A (ja) * | 2002-05-20 | 2003-11-28 | New Japan Radio Co Ltd | 半導体装置の製造方法 |
JP2004071724A (ja) * | 2002-08-05 | 2004-03-04 | Hitachi Metals Ltd | 導電性スペーサ用金属球の製造方法 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55127098A (en) * | 1979-03-09 | 1980-10-01 | Matsushita Electric Ind Co Ltd | Method of mounting electronic part |
US4857482A (en) * | 1987-06-30 | 1989-08-15 | Kabushiki Kaisha Toshiba | Method of forming bump electrode and electronic circuit device |
JP3214470B2 (ja) * | 1998-11-16 | 2001-10-02 | 日本電気株式会社 | マルチチップモジュール及びその製造方法 |
US6525424B2 (en) * | 2000-04-04 | 2003-02-25 | Texas Instruments Incorporated | Semiconductor device and its manufacturing method |
US6847066B2 (en) * | 2000-08-11 | 2005-01-25 | Oki Electric Industry Co., Ltd. | Semiconductor device |
US6762502B1 (en) * | 2000-08-31 | 2004-07-13 | Micron Technology, Inc. | Semiconductor device packages including a plurality of layers substantially encapsulating leads thereof |
US6624501B2 (en) * | 2001-01-26 | 2003-09-23 | Fujitsu Limited | Capacitor and semiconductor device |
US6929971B2 (en) * | 2001-04-04 | 2005-08-16 | Texas Instruments Incorporated | Semiconductor device and its manufacturing method |
US7500329B2 (en) * | 2004-09-02 | 2009-03-10 | Hunter Douglas Inc. | Operating system for a shutter type covering for architectural openings |
-
2004
- 2004-07-29 JP JP2004222520A patent/JP2006041401A/ja active Pending
-
2005
- 2005-07-26 US US11/188,785 patent/US20060022320A1/en not_active Abandoned
- 2005-07-28 KR KR1020050069068A patent/KR20060048884A/ko not_active Application Discontinuation
- 2005-07-29 TW TW094125987A patent/TWI272734B/zh not_active IP Right Cessation
Patent Citations (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0817972A (ja) * | 1994-06-27 | 1996-01-19 | Nec Corp | 部品の接続構造及びその製造方法 |
JPH08139097A (ja) * | 1994-11-10 | 1996-05-31 | World Metal:Kk | フリップチップ用接続ボール及び半導体チップの接合方法 |
WO1998040915A1 (fr) * | 1997-03-10 | 1998-09-17 | Seiko Epson Corporation | Composant electronique et dispositif a semi-conducteurs, procede de fabrication correspondant, carte a circuit imprime ainsi equipee, et equipement electronique comportant cette carte a circuit imprime |
JPH11288977A (ja) * | 1998-03-31 | 1999-10-19 | Nippon Steel Corp | 複数チップ混載型半導体装置 |
JP2000091339A (ja) * | 1998-09-10 | 2000-03-31 | Hitachi Ltd | 半導体装置およびその製造方法 |
JP2000306939A (ja) * | 1999-04-21 | 2000-11-02 | Toshiba Corp | 半導体装置およびその製造方法 |
JP2001007133A (ja) * | 1999-06-25 | 2001-01-12 | Sumitomo Bakelite Co Ltd | はんだボール搭載済み半導体装置およびはんだボールの搭載方法 |
JP2001168265A (ja) * | 1999-12-10 | 2001-06-22 | Nec Corp | 電子デバイス集合体と電子デバイスの接続方法 |
JP2001291791A (ja) * | 2000-04-04 | 2001-10-19 | Texas Instr Japan Ltd | 半導体装置及びその製造方法 |
JP2001292791A (ja) * | 2000-04-13 | 2001-10-23 | Seikagaku Kogyo Co Ltd | N−アセチルラクトサミンの製造方法 |
JP2002246535A (ja) * | 2001-02-16 | 2002-08-30 | Sharp Corp | 半導体集積回路 |
JP2002299496A (ja) * | 2001-03-30 | 2002-10-11 | Fujitsu Ltd | 半導体装置及びその製造方法 |
JP2003051569A (ja) * | 2001-08-03 | 2003-02-21 | Seiko Epson Corp | 半導体装置及びその製造方法 |
JP2003338515A (ja) * | 2002-05-20 | 2003-11-28 | New Japan Radio Co Ltd | 半導体装置の製造方法 |
JP2004071724A (ja) * | 2002-08-05 | 2004-03-04 | Hitachi Metals Ltd | 導電性スペーサ用金属球の製造方法 |
Cited By (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006269804A (ja) * | 2005-03-24 | 2006-10-05 | Mitsumi Electric Co Ltd | 半導体装置 |
JP2008118021A (ja) * | 2006-11-07 | 2008-05-22 | Seiko Epson Corp | 半導体モジュールとその製造方法 |
JP2008277569A (ja) * | 2007-04-27 | 2008-11-13 | Oki Electric Ind Co Ltd | 半導体装置及びその製造方法 |
US8482113B2 (en) | 2007-04-27 | 2013-07-09 | Lapis Semiconductor Co., Ltd. | Semiconductor device |
US8067814B2 (en) | 2007-06-01 | 2011-11-29 | Panasonic Corporation | Semiconductor device and method of manufacturing the same |
JP2009054686A (ja) * | 2007-08-24 | 2009-03-12 | Shinko Electric Ind Co Ltd | 配線基板及びその製造方法、及び半導体装置 |
JP2011204894A (ja) * | 2010-03-25 | 2011-10-13 | Casio Computer Co Ltd | 半導体装置およびその製造方法 |
US9666567B2 (en) | 2014-02-13 | 2017-05-30 | Nichia Corporation | Light emitting device having underlying protective element |
US9385279B2 (en) | 2014-05-30 | 2016-07-05 | Nichia Corporation | Light-emitting device and method for manufacturing the same |
US10002996B2 (en) | 2014-08-25 | 2018-06-19 | Nichia Corporation | Light emitting device and method of manufacturing the same |
US9564565B2 (en) | 2014-09-29 | 2017-02-07 | Nichia Corporation | Light emitting device, light emitting module, and method for manufacturing light emitting device |
WO2017013938A1 (ja) * | 2015-07-22 | 2017-01-26 | アルプス電気株式会社 | 高周波モジュール |
JPWO2017013938A1 (ja) * | 2015-07-22 | 2018-03-15 | アルプス電気株式会社 | 高周波モジュール |
US10068882B2 (en) | 2015-07-22 | 2018-09-04 | Alps Electric Co., Ltd. | High-frequency module |
JP2017050350A (ja) * | 2015-08-31 | 2017-03-09 | 日亜化学工業株式会社 | 発光装置及びその製造方法 |
US10347808B2 (en) | 2015-08-31 | 2019-07-09 | Nichia Corporation | Light emitting device and method of manufacturing the light emitting device |
JP2018137479A (ja) * | 2018-05-02 | 2018-08-30 | ローム株式会社 | 電圧生成装置 |
Also Published As
Publication number | Publication date |
---|---|
KR20060048884A (ko) | 2006-05-18 |
TWI272734B (en) | 2007-02-01 |
TW200610204A (en) | 2006-03-16 |
US20060022320A1 (en) | 2006-02-02 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US7670876B2 (en) | Integrated circuit device with embedded passive component by flip-chip connection and method for manufacturing the same | |
US9165878B2 (en) | Semiconductor packages and methods of packaging semiconductor devices | |
KR20060048884A (ko) | 반도체 장치 및 그 제조 방법 | |
TWI667759B (zh) | 形成用於覆晶半導體晶粒的墊佈局的半導體裝置及方法 | |
TWI591785B (zh) | 半導體裝置及其製造方法 | |
JP4916241B2 (ja) | 半導体装置及びその製造方法 | |
KR100969441B1 (ko) | 반도체칩이 실장된 인쇄회로기판 및 그 제조방법 | |
KR100687000B1 (ko) | 반도체 장치의 제조 방법 및 전기적 접속부의 처리 방법 | |
US6596560B1 (en) | Method of making wafer level packaging and chip structure | |
US6958527B2 (en) | Wiring board having interconnect pattern with land, and semiconductor device, circuit board, and electronic equipment incorporating the same | |
JP2006294692A (ja) | 半導体装置およびその製造方法 | |
JP6547745B2 (ja) | 半導体装置およびその製造方法 | |
KR20180114512A (ko) | 반도체 장치 | |
WO2015198839A1 (ja) | 半導体装置およびその製造方法 | |
JP4494249B2 (ja) | 半導体装置 | |
US7045893B1 (en) | Semiconductor package and method for manufacturing the same | |
US10199345B2 (en) | Method of fabricating substrate structure | |
JP6544354B2 (ja) | 半導体装置の製造方法 | |
US6956293B2 (en) | Semiconductor device | |
JP2006303036A (ja) | 半導体装置 | |
KR100927773B1 (ko) | 반도체 패키지 및 그 제조 방법 | |
JP3838530B2 (ja) | 半導体装置の製造方法 | |
JP2008227161A (ja) | 半導体装置 | |
JP3943037B2 (ja) | 半導体装置の製造方法 | |
JP4887948B2 (ja) | 半導体装置及び半導体モジュール |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20070209 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20070227 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20070427 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20070911 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20071109 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20071211 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20080204 |
|
A911 | Transfer to examiner for re-examination before appeal (zenchi) |
Free format text: JAPANESE INTERMEDIATE CODE: A911 Effective date: 20080214 |
|
A912 | Re-examination (zenchi) completed and case transferred to appeal board |
Free format text: JAPANESE INTERMEDIATE CODE: A912 Effective date: 20080307 |