JP2005539375A5 - - Google Patents

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Publication number
JP2005539375A5
JP2005539375A5 JP2004531639A JP2004531639A JP2005539375A5 JP 2005539375 A5 JP2005539375 A5 JP 2005539375A5 JP 2004531639 A JP2004531639 A JP 2004531639A JP 2004531639 A JP2004531639 A JP 2004531639A JP 2005539375 A5 JP2005539375 A5 JP 2005539375A5
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JP
Japan
Prior art keywords
manifold
substrate
port
channel
ports
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2004531639A
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English (en)
Japanese (ja)
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JP2005539375A (ja
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Publication date
Application filed filed Critical
Priority claimed from PCT/US2003/026979 external-priority patent/WO2004021412A2/en
Publication of JP2005539375A publication Critical patent/JP2005539375A/ja
Publication of JP2005539375A5 publication Critical patent/JP2005539375A5/ja
Pending legal-status Critical Current

Links

JP2004531639A 2002-08-27 2003-08-26 共通の平面にマニホルド接続を有するモジュール式基板ガスパネル Pending JP2005539375A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US40613202P 2002-08-27 2002-08-27
PCT/US2003/026979 WO2004021412A2 (en) 2002-08-27 2003-08-26 Modular substrate gas panel having manifold connections in a common plane

Publications (2)

Publication Number Publication Date
JP2005539375A JP2005539375A (ja) 2005-12-22
JP2005539375A5 true JP2005539375A5 (cg-RX-API-DMAC10.html) 2006-10-12

Family

ID=31978264

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004531639A Pending JP2005539375A (ja) 2002-08-27 2003-08-26 共通の平面にマニホルド接続を有するモジュール式基板ガスパネル

Country Status (8)

Country Link
US (2) US7334605B2 (cg-RX-API-DMAC10.html)
EP (1) EP1543544A2 (cg-RX-API-DMAC10.html)
JP (1) JP2005539375A (cg-RX-API-DMAC10.html)
KR (1) KR20060017577A (cg-RX-API-DMAC10.html)
CN (1) CN100396980C (cg-RX-API-DMAC10.html)
AU (1) AU2003262953A1 (cg-RX-API-DMAC10.html)
TW (1) TWI244669B (cg-RX-API-DMAC10.html)
WO (1) WO2004021412A2 (cg-RX-API-DMAC10.html)

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US10022689B2 (en) 2015-07-24 2018-07-17 Lam Research Corporation Fluid mixing hub for semiconductor processing tool
US10118263B2 (en) 2015-09-02 2018-11-06 Lam Researech Corporation Monolithic manifold mask and substrate concepts
US10215317B2 (en) 2016-01-15 2019-02-26 Lam Research Corporation Additively manufactured gas distribution manifold
US9879795B2 (en) 2016-01-15 2018-01-30 Lam Research Corporation Additively manufactured gas distribution manifold
US11091837B2 (en) 2016-10-24 2021-08-17 Fujikin Incorporated Fluid control system and product manufacturing method using fluid control system
JP7061808B2 (ja) * 2017-03-15 2022-05-02 株式会社フジキン 継手および流体制御装置
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JP7333944B2 (ja) * 2019-06-27 2023-08-28 株式会社フジキン 流体制御装置
US11537150B2 (en) * 2020-04-09 2022-12-27 Horiba Stec, Co., Ltd. Fluid control apparatus

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