JPH10227368A5 - - Google Patents

Info

Publication number
JPH10227368A5
JPH10227368A5 JP1997029996A JP2999697A JPH10227368A5 JP H10227368 A5 JPH10227368 A5 JP H10227368A5 JP 1997029996 A JP1997029996 A JP 1997029996A JP 2999697 A JP2999697 A JP 2999697A JP H10227368 A5 JPH10227368 A5 JP H10227368A5
Authority
JP
Japan
Prior art keywords
fluid
type
shutoff
inlet
fluid controller
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1997029996A
Other languages
English (en)
Japanese (ja)
Other versions
JPH10227368A (ja
JP3997338B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP02999697A external-priority patent/JP3997338B2/ja
Priority to JP02999697A priority Critical patent/JP3997338B2/ja
Priority to EP98102554A priority patent/EP0859155B1/en
Priority to CA002229476A priority patent/CA2229476C/en
Priority to KR10-1998-0004289A priority patent/KR100517424B1/ko
Priority to US09/023,416 priority patent/US20010003287A1/en
Priority to TW087102012A priority patent/TW372328B/zh
Priority to DE69822689T priority patent/DE69822689T2/de
Priority to SG1998000329A priority patent/SG77161A1/en
Priority to IL12330598A priority patent/IL123305A/xx
Publication of JPH10227368A publication Critical patent/JPH10227368A/ja
Priority to US10/277,147 priority patent/US6615871B2/en
Publication of JPH10227368A5 publication Critical patent/JPH10227368A5/ja
Publication of JP3997338B2 publication Critical patent/JP3997338B2/ja
Application granted granted Critical
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP02999697A 1997-02-14 1997-02-14 流体制御装置 Expired - Lifetime JP3997338B2 (ja)

Priority Applications (10)

Application Number Priority Date Filing Date Title
JP02999697A JP3997338B2 (ja) 1997-02-14 1997-02-14 流体制御装置
DE69822689T DE69822689T2 (de) 1997-02-14 1998-02-13 Flüssigkeitssteuerungseinrichtung
CA002229476A CA2229476C (en) 1997-02-14 1998-02-13 Fluid control apparatus
KR10-1998-0004289A KR100517424B1 (ko) 1997-02-14 1998-02-13 유체제어장치
US09/023,416 US20010003287A1 (en) 1997-02-14 1998-02-13 Fluid control apparatus
TW087102012A TW372328B (en) 1997-02-14 1998-02-13 Fluid control device
EP98102554A EP0859155B1 (en) 1997-02-14 1998-02-13 Fluid control apparatus
SG1998000329A SG77161A1 (en) 1997-02-14 1998-02-14 Fluid control apparatus
IL12330598A IL123305A (en) 1997-02-14 1998-02-15 Fluid control apparatus
US10/277,147 US6615871B2 (en) 1997-02-14 2002-10-22 Fluid control apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP02999697A JP3997338B2 (ja) 1997-02-14 1997-02-14 流体制御装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2006274737A Division JP4395641B2 (ja) 2006-10-06 2006-10-06 流体制御装置

Publications (3)

Publication Number Publication Date
JPH10227368A JPH10227368A (ja) 1998-08-25
JPH10227368A5 true JPH10227368A5 (cg-RX-API-DMAC10.html) 2005-01-06
JP3997338B2 JP3997338B2 (ja) 2007-10-24

Family

ID=12291552

Family Applications (1)

Application Number Title Priority Date Filing Date
JP02999697A Expired - Lifetime JP3997338B2 (ja) 1997-02-14 1997-02-14 流体制御装置

Country Status (9)

Country Link
US (2) US20010003287A1 (cg-RX-API-DMAC10.html)
EP (1) EP0859155B1 (cg-RX-API-DMAC10.html)
JP (1) JP3997338B2 (cg-RX-API-DMAC10.html)
KR (1) KR100517424B1 (cg-RX-API-DMAC10.html)
CA (1) CA2229476C (cg-RX-API-DMAC10.html)
DE (1) DE69822689T2 (cg-RX-API-DMAC10.html)
IL (1) IL123305A (cg-RX-API-DMAC10.html)
SG (1) SG77161A1 (cg-RX-API-DMAC10.html)
TW (1) TW372328B (cg-RX-API-DMAC10.html)

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GB2411696B (en) 2002-11-26 2007-05-30 Swagelok Co Modular surface mount fluid system
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US7320339B2 (en) 2005-06-02 2008-01-22 Ultra Clean Holdings, Inc. Gas-panel assembly
US7299825B2 (en) 2005-06-02 2007-11-27 Ultra Clean Holdings, Inc. Gas-panel assembly
JP2007046697A (ja) * 2005-08-10 2007-02-22 Fujikin Inc 継手付き流体制御器
JP4780555B2 (ja) * 2005-09-12 2011-09-28 株式会社フジキン 流体制御装置
US7575616B2 (en) * 2006-02-10 2009-08-18 Entegris, Inc. Low-profile surface mount filter
JP5096696B2 (ja) * 2006-03-02 2012-12-12 サーパス工業株式会社 流体機器ユニット構造
US20070224708A1 (en) * 2006-03-21 2007-09-27 Sowmya Krishnan Mass pulse sensor and process-gas system and method
US8104516B2 (en) * 2006-06-02 2012-01-31 Ckd Corporation Gas supply unit and gas supply system
JP2007327542A (ja) * 2006-06-07 2007-12-20 Surpass Kogyo Kk 流体機器ユニット構造
US20080009977A1 (en) * 2006-07-10 2008-01-10 Ultra Clean Holdings Apparatus and Method for Monitoring a Chemical-Supply System
US20100112814A1 (en) * 2006-09-06 2010-05-06 Sowmya Krishnan Pre-certified process chamber and method
US7607641B1 (en) * 2006-10-05 2009-10-27 Microfluidic Systems, Inc. Microfluidic valve mechanism
JP2008291941A (ja) * 2007-05-25 2008-12-04 Surpass Kogyo Kk 流体機器ユニット構造
KR20100024925A (ko) 2007-05-31 2010-03-08 도쿄엘렉트론가부시키가이샤 유체 제어 장치
JP5125228B2 (ja) 2007-05-31 2013-01-23 株式会社フジキン 流体制御装置およびその組立方法
JP5127304B2 (ja) 2007-05-31 2013-01-23 株式会社フジキン 流体制御装置
US20080302426A1 (en) * 2007-06-06 2008-12-11 Greg Patrick Mulligan System and method of securing removable components for distribution of fluids
US20090078324A1 (en) * 2007-09-21 2009-03-26 Ultra Clean Technology, Inc. Gas-panel system
US8322380B2 (en) * 2007-10-12 2012-12-04 Lam Research Corporation Universal fluid flow adaptor
US20090114295A1 (en) * 2007-11-06 2009-05-07 Ultra Clean Holdings, Inc. Gas-panel assembly
ES1068601Y (es) * 2008-08-08 2009-02-01 Istobal Sa Panel central para control y distribucion de fluidos en instalaciones de lavado de vehiculos
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US8307854B1 (en) 2009-05-14 2012-11-13 Vistadeltek, Inc. Fluid delivery substrates for building removable standard fluid delivery sticks
US8496029B2 (en) 2009-06-10 2013-07-30 Vistadeltek, Llc Extreme flow rate and/or high temperature fluid delivery substrates
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JP5785813B2 (ja) * 2011-08-10 2015-09-30 株式会社フジキン 流体制御装置
KR101599344B1 (ko) * 2011-09-30 2016-03-03 가부시키가이샤 후지킨 가스 공급 장치
US9188990B2 (en) * 2011-10-05 2015-11-17 Horiba Stec, Co., Ltd. Fluid mechanism, support member constituting fluid mechanism and fluid control system
JP6012247B2 (ja) * 2012-04-27 2016-10-25 株式会社フジキン 流体制御装置
JP5478666B2 (ja) * 2012-05-21 2014-04-23 株式会社アルバック 流体制御装置およびこれを用いたガス処理装置
US9454158B2 (en) 2013-03-15 2016-09-27 Bhushan Somani Real time diagnostics for flow controller systems and methods
US9639094B2 (en) * 2014-11-12 2017-05-02 Michael D. Palmer Electronic pneumatic pressure controller
DE102015100762A1 (de) * 2015-01-20 2016-07-21 Infineon Technologies Ag Behälterschalteinrichtung und Verfahren zum Überwachen einer Fluidrate
US11091837B2 (en) 2016-10-24 2021-08-17 Fujikin Incorporated Fluid control system and product manufacturing method using fluid control system
US10983537B2 (en) 2017-02-27 2021-04-20 Flow Devices And Systems Inc. Systems and methods for flow sensor back pressure adjustment for mass flow controller
US10400332B2 (en) * 2017-03-14 2019-09-03 Eastman Kodak Company Deposition system with interlocking deposition heads
JP7036349B2 (ja) * 2017-03-29 2022-03-15 株式会社フジキン 変換継手、その変換継手を有する集積型流体供給装置および流体用パーツの取付け方法
JP7045089B2 (ja) 2017-08-31 2022-03-31 株式会社フジキン 継手ブロックおよびその製造方法
JP7333053B2 (ja) * 2019-06-28 2023-08-24 株式会社フジキン ガス供給装置および半導体製造装置
JP7389461B2 (ja) * 2019-10-31 2023-11-30 株式会社フジキン バルブ装置および流体制御装置

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