JP2005537941A - 樹脂制御添加剤入り研磨物品 - Google Patents
樹脂制御添加剤入り研磨物品 Download PDFInfo
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- JP2005537941A JP2005537941A JP2004534249A JP2004534249A JP2005537941A JP 2005537941 A JP2005537941 A JP 2005537941A JP 2004534249 A JP2004534249 A JP 2004534249A JP 2004534249 A JP2004534249 A JP 2004534249A JP 2005537941 A JP2005537941 A JP 2005537941A
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- abrasive
- binder
- abrasive article
- article
- resin
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- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 claims description 3
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- 229910052796 boron Inorganic materials 0.000 description 1
- INAHAJYZKVIDIZ-UHFFFAOYSA-N boron carbide Chemical compound B12B3B4C32B41 INAHAJYZKVIDIZ-UHFFFAOYSA-N 0.000 description 1
- 229910000019 calcium carbonate Inorganic materials 0.000 description 1
- 239000000378 calcium silicate Substances 0.000 description 1
- GBAOBIBJACZTNA-UHFFFAOYSA-L calcium sulfite Chemical compound [Ca+2].[O-]S([O-])=O GBAOBIBJACZTNA-UHFFFAOYSA-L 0.000 description 1
- 235000010261 calcium sulphite Nutrition 0.000 description 1
- AOWKSNWVBZGMTJ-UHFFFAOYSA-N calcium titanate Chemical compound [Ca+2].[O-][Ti]([O-])=O AOWKSNWVBZGMTJ-UHFFFAOYSA-N 0.000 description 1
- QXJJQWWVWRCVQT-UHFFFAOYSA-K calcium;sodium;phosphate Chemical compound [Na+].[Ca+2].[O-]P([O-])([O-])=O QXJJQWWVWRCVQT-UHFFFAOYSA-K 0.000 description 1
- 125000002915 carbonyl group Chemical group [*:2]C([*:1])=O 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- CETPSERCERDGAM-UHFFFAOYSA-N ceric oxide Chemical compound O=[Ce]=O CETPSERCERDGAM-UHFFFAOYSA-N 0.000 description 1
- 229910000422 cerium(IV) oxide Inorganic materials 0.000 description 1
- 239000004927 clay Substances 0.000 description 1
- 229910052570 clay Inorganic materials 0.000 description 1
- 239000008119 colloidal silica Substances 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 239000007822 coupling agent Substances 0.000 description 1
- 238000004132 cross linking Methods 0.000 description 1
- 239000002173 cutting fluid Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000003599 detergent Substances 0.000 description 1
- GUJOJGAPFQRJSV-UHFFFAOYSA-N dialuminum;dioxosilane;oxygen(2-);hydrate Chemical compound O.[O-2].[O-2].[O-2].[Al+3].[Al+3].O=[Si]=O.O=[Si]=O.O=[Si]=O.O=[Si]=O GUJOJGAPFQRJSV-UHFFFAOYSA-N 0.000 description 1
- 239000012975 dibutyltin dilaurate Substances 0.000 description 1
- QDOXWKRWXJOMAK-UHFFFAOYSA-N dichromium trioxide Chemical compound O=[Cr]O[Cr]=O QDOXWKRWXJOMAK-UHFFFAOYSA-N 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- UYAHIZSMUZPPFV-UHFFFAOYSA-N erbium Chemical compound [Er] UYAHIZSMUZPPFV-UHFFFAOYSA-N 0.000 description 1
- UHESRSKEBRADOO-UHFFFAOYSA-N ethyl carbamate;prop-2-enoic acid Chemical compound OC(=O)C=C.CCOC(N)=O UHESRSKEBRADOO-UHFFFAOYSA-N 0.000 description 1
- FGBJXOREULPLGL-UHFFFAOYSA-N ethyl cyanoacrylate Chemical compound CCOC(=O)C(=C)C#N FGBJXOREULPLGL-UHFFFAOYSA-N 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000010433 feldspar Substances 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 229920005570 flexible polymer Polymers 0.000 description 1
- 230000009969 flowable effect Effects 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 150000002334 glycols Chemical class 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 239000003999 initiator Substances 0.000 description 1
- 150000002605 large molecules Chemical class 0.000 description 1
- VMPHSYLJUKZBJJ-UHFFFAOYSA-N lauric acid triglyceride Natural products CCCCCCCCCCCC(=O)OCC(OC(=O)CCCCCCCCCCC)COC(=O)CCCCCCCCCCC VMPHSYLJUKZBJJ-UHFFFAOYSA-N 0.000 description 1
- 239000006028 limestone Substances 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 229920002521 macromolecule Polymers 0.000 description 1
- 229910001629 magnesium chloride Inorganic materials 0.000 description 1
- 239000004579 marble Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 229910052976 metal sulfide Inorganic materials 0.000 description 1
- 239000010445 mica Substances 0.000 description 1
- 229910052618 mica group Inorganic materials 0.000 description 1
- 238000005065 mining Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- 229910000402 monopotassium phosphate Inorganic materials 0.000 description 1
- 235000019796 monopotassium phosphate Nutrition 0.000 description 1
- 229910052901 montmorillonite Inorganic materials 0.000 description 1
- BPLYVSYSBPLDOA-GYOJGHLZSA-N n-[(2r,3r)-1,3-dihydroxyoctadecan-2-yl]tetracosanamide Chemical compound CCCCCCCCCCCCCCCCCCCCCCCC(=O)N[C@H](CO)[C@H](O)CCCCCCCCCCCCCCC BPLYVSYSBPLDOA-GYOJGHLZSA-N 0.000 description 1
- 238000005121 nitriding Methods 0.000 description 1
- 229920001778 nylon Polymers 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- 238000003921 particle size analysis Methods 0.000 description 1
- 229920001568 phenolic resin Polymers 0.000 description 1
- 239000005011 phenolic resin Substances 0.000 description 1
- PJNZPQUBCPKICU-UHFFFAOYSA-N phosphoric acid;potassium Chemical compound [K].OP(O)(O)=O PJNZPQUBCPKICU-UHFFFAOYSA-N 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 239000004014 plasticizer Substances 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 229920003192 poly(bis maleimide) Polymers 0.000 description 1
- 229920002492 poly(sulfone) Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 229920001601 polyetherimide Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 229920006324 polyoxymethylene Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 239000001103 potassium chloride Substances 0.000 description 1
- 235000011164 potassium chloride Nutrition 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 150000003254 radicals Chemical class 0.000 description 1
- 239000010979 ruby Substances 0.000 description 1
- 229910001750 ruby Inorganic materials 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 150000004760 silicates Chemical class 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- ABTOQLMXBSRXSM-UHFFFAOYSA-N silicon tetrafluoride Chemical compound F[Si](F)(F)F ABTOQLMXBSRXSM-UHFFFAOYSA-N 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 150000003384 small molecules Chemical class 0.000 description 1
- 239000000429 sodium aluminium silicate Substances 0.000 description 1
- 235000012217 sodium aluminium silicate Nutrition 0.000 description 1
- URGAHOPLAPQHLN-UHFFFAOYSA-N sodium aluminosilicate Chemical compound [Na+].[Al+3].[O-][Si]([O-])=O.[O-][Si]([O-])=O URGAHOPLAPQHLN-UHFFFAOYSA-N 0.000 description 1
- 239000011780 sodium chloride Substances 0.000 description 1
- 235000019983 sodium metaphosphate Nutrition 0.000 description 1
- NTHWMYGWWRZVTN-UHFFFAOYSA-N sodium silicate Chemical compound [Na+].[Na+].[O-][Si]([O-])=O NTHWMYGWWRZVTN-UHFFFAOYSA-N 0.000 description 1
- 229910052911 sodium silicate Inorganic materials 0.000 description 1
- 235000019794 sodium silicate Nutrition 0.000 description 1
- 229910052938 sodium sulfate Inorganic materials 0.000 description 1
- 235000011152 sodium sulphate Nutrition 0.000 description 1
- 229910001495 sodium tetrafluoroborate Inorganic materials 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000000527 sonication Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- LSNNMFCWUKXFEE-UHFFFAOYSA-L sulfite Chemical class [O-]S([O-])=O LSNNMFCWUKXFEE-UHFFFAOYSA-L 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 239000000375 suspending agent Substances 0.000 description 1
- 239000000454 talc Substances 0.000 description 1
- 229910052623 talc Inorganic materials 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- 239000004408 titanium dioxide Substances 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
- 150000003624 transition metals Chemical class 0.000 description 1
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 description 1
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 description 1
- 239000010455 vermiculite Substances 0.000 description 1
- 229910052902 vermiculite Inorganic materials 0.000 description 1
- 235000019354 vermiculite Nutrition 0.000 description 1
- 239000000080 wetting agent Substances 0.000 description 1
- 229910001233 yttria-stabilized zirconia Inorganic materials 0.000 description 1
Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/34—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties
- B24D3/342—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties incorporated in the bonding agent
- B24D3/344—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties incorporated in the bonding agent the bonding agent being organic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B11/00—Machines or devices designed for grinding spherical surfaces or parts of spherical surfaces on work; Accessories therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/001—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as supporting member
- B24D3/002—Flexible supporting members, e.g. paper, woven, plastic materials
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/25—Web or sheet containing structurally defined element or component and including a second component containing structurally defined particles
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/25—Web or sheet containing structurally defined element or component and including a second component containing structurally defined particles
- Y10T428/252—Glass or ceramic [i.e., fired or glazed clay, cement, etc.] [porcelain, quartz, etc.]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/25—Web or sheet containing structurally defined element or component and including a second component containing structurally defined particles
- Y10T428/254—Polymeric or resinous material
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/25—Web or sheet containing structurally defined element or component and including a second component containing structurally defined particles
- Y10T428/256—Heavy metal or aluminum or compound thereof
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/25—Web or sheet containing structurally defined element or component and including a second component containing structurally defined particles
- Y10T428/258—Alkali metal or alkaline earth metal or compound thereof
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/25—Web or sheet containing structurally defined element or component and including a second component containing structurally defined particles
- Y10T428/259—Silicic material
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Polishing Bodies And Polishing Tools (AREA)
- Light Guides In General And Applications Therefor (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Abstract
Description
0.0625インチ×0.25インチ×1インチ(0.16cm×0.64cm×2.54cm)の寸法の金属炭化物(ケンナメタル、イリノイ州ライル(Kennametal,Lisle,IL)から#STB−28Aとして商業的に入手可能な)の2ピースを、接着された炭化物ピースが金属プレートに垂直であり、互いに平行であるように、かつ、それらが0.75インチ(1.9cm)相隔たるように、0.25インチ×1インチ×1インチ(0.64cm×2.54cm×2.54cm)アルミニウム・プレートの平面に0.0625インチ×1インチ(0.16cm×2.54cm)エッジに沿ってシアノアクリレート接着剤で接着する。次にこのワークピースの重さを量り、2つの金属炭化物ピースがラップフィルムに対して常に平らであるように2つの金属炭化物ピースをラップフィルムの4.5インチ×5インチ(11.4cm×12.7cm)ピースに押し付けるレバーアームの下方に取り付ける。ラップフィルムを、次に、それが軌道的に移動するようにモーターによって偏心して駆動されるスチールプレート上にクランプで固定する。偏心は、各旋回でxおよびy方向に±0.75インチ(1.9cm)の行程で、プレートを円運動で移動させるように選ばれる。ワークピースを5ポンド(22.2N)の力でラップフィルムに押し付ける。ラップ界面を脱イオン(DI)水および洗剤(フィッシャー・サイエンティフィク、ペンシルバニア州ピッツバーグ(Fisher Scientific,Pittsburgh,PA)から商品名コントラッド(Contrad)70で商業的に入手可能な)の95/5ブレンドの1〜2滴/秒でリンスしながら、ベースプレートおよびラップフィルムを304±6rpmで5000旋回回転させる。5000旋回の終わりに、ワークピースを取り外し、残留潤滑剤および削りくずからきれいにし、再び重さを量る。mg単位での差を、試料について観察されたカットとして報告する。
12のST光ファイバーコネクター(3M社、テキサス州オースチン(3M Co.,Austin,TX)一式を、一連の5マイクロメートル炭化ケイ素ラップフィルム(463X、3M社、ミネソタ州セントポール(St.Paul,MN))付きドメイル(Domaille)光ファイバー研磨機(ドメイル社、ミネソタ州ロチェスター(Domaille Co.,Rochester,MN))で、作動液として脱イオン水のミスト、および6マイクロメートル・ダイヤモンド・ラップフィルム(661X、3M社、ミネソタ州セントポール)を用いて研磨機を70デュロメーター・パッドおよび8ポンド力(35.6N)で140rpmで60秒間運転して、作動液として脱イオン水のミスト、および3マイクロメートル・ダイヤモンド・ラップフィルム(661X、3M社、ミネソタ州セントポール)を用いて研磨機を65デュロメーター・パッドおよび4ポンド力(17.8N)で140rpmで60秒間運転して、作動液として脱イオン水のミストを用いて研磨機を70デュロメーター・パッドおよび4ポンド力(17.8N)で140rpmで60秒間運転して予備仕上げした。10〜20mmの範囲で曲率半径(ROC)を保証するために光ファイバーコネクターをDORC干渉計(Interferometer)(ダイレクト・オプティカル・リサーチ・カンパニー、アリゾナ州フェニックス(Direct Optical Research Company,Phoenix,AZ))で測定した。6マイクロメートル・ダイヤモンドおよび3マイクロメートル・ダイヤモンド工程を、必要ならば、所望のROCが得られるまで続けた。
12のSC光ファイバーコネクター(コーニング社、テキサス州ケラー(Coring Co,Keller,Tex.)一式を、一連の3マイクロメートル炭化ケイ素ラップフィルム(463X、3M社、ミネソタ州セントポール)付きドメイル光ファイバー研磨機(ドメイル社、ミネソタ州ロチェスター)で、潤滑剤として脱イオン水のミストを用い、引き続き1マイクロメートル・ダイヤモンド・ラップフィルム(661X、3M社、ミネソタ州セントポール)を用いて70デュロメーター・パッドおよび4ポンド力(17.8N)で100rpmで20秒間ドメイルを運転して、作動液としてDI水のミストを用いて研磨機を70デュロメーター・パッドおよび6ポンド力(26.7N)で100rpmで30秒間運転して予備仕上げした。
おおよそ40cm3の0.5mm直径ビーズ(イットリア安定化ジルコニア、トーソー、オハイオ州ハドソン(Tosoh,Hudson,OH)からまたはトーレ・セラミックス、ジョージ・ミスバッハ・アンド・コ.、ジョージア州アトランタ(Toray Ceramics,George Missbach & Co.,Atlanta,GA))から商業的に入手可能な)を、ホックマイアー・バスケット・ミル(Hockmeyer Basket Mill)(ホックマイアー・イクウィップメント社、ニュージャージー州ハリソン(Hockmeyer Equipment Corp.,Harrison,NJ)、モデルHM−1/16エア(Model HM−1/16 Air))のバスケット中へ入れた。255gのメチルエチルケトン(MEK)をミル容器中へ量り入れ、引き続き16.5gの分散剤(アヴェシア・ピグメンツ・アンド・アディティブス、ノースカロライナ州シャーロット(Avecia Pigments and Additives,Charlotte,NC)から商品名ゾルスパース(Solsperse)24000で商業的に入手可能な)を量り入れた。混合物を、分散剤が溶解してしまうまで空気撹拌機で低速で撹拌した。ダイヤモンド粉末(1100gのジェネラル・エレクトリック・ミクロン・プロダクツ、フロリダ州ディアフィールド・ビーチ(General Electric Micron Products,Deerfield Beach,FL)、0〜2マイクロメートルSJK*−5C3M)を、エアミキサーで撹拌しながらミルチャンバー中へ量り入れた。混合が完了した時に、ミル容器をミル・バスケットおよびモーターの下方を移動させ、バスケット/モーターをミルの底部の0.25インチ(0.64mm)内まで下げた。混合物を最大可能速度で(チャンバーの側面を越えて跳ね散らすことなく)10分間ミルにかけた。ミル内容物を貯蔵容器に注ぎ、残留ミル内容物をMEKで容器中へ洗い出し、容器の固形分含有率を測定し(一般に約70%)、容器を将来の使用のために蓄えた。
混合ケトルに、161.5gメチルエチルケトン(「MEK」)、147.2g1,3−ジオキソラン、および26.6gシクロヘキサノンを装入した。10.2gのMEK中の60%ポリオール溶液(ミリケン・アンド・コ.、サウスカロライナ州スパータンスバーグ(Milliken and Co.,Spartansburg,SC)からシンファック(SynFac)8024Uとして商業的に入手可能な)をケトルに加え、引き続き5.5gのMEK中の50%界面活性剤溶液(サイテック・インダストリーズ、ニュージャージー州バウンドブルック(Cytec Industries,Boundbrook,NJ)製のエアロゾル(Aerosol)AY50界面活性剤として商業的に入手可能な)および3.1gの染料を加えた。180.5gのダイヤモンド分散系(125.8gの1ミクロンGEダイヤモンド、1.9g分散剤、および52.8gメチルエチルケトン)をケトルに加え、混合物を手動で撹拌した。ポリエステル・ポリウレタン樹脂(157.5gのMEK中35%溶液、ネオペンチルグリコール[21%]、ポリ−ε−カプロラクトン[29%]およびメチレンジイソシアネート(MDI)[50%]から社内で合成した樹脂)、および87.6gのMEK中のフェノキシ樹脂(Phenoxy Resin)の30%溶液(トート・カセイ株式会社、イナバタ・アメリカ社、ニューヨーク州ニューヨークからYP−50Sとして商業的に入手可能な)を加えた。生じたスラリーを10分間撹拌し、ジフェニルメタン−ジイソシアネートをベースとする20.2gの高分子イソシアネート(バイエル社、ペンシルバニア州ピッツバーグから商品名モンデュールMRSで商業的に入手可能な)をケトル中へブレンドした。生じた分散系を1.3ミル(33ミクロン)ナイフ・ギャップで、30フィート/分(9.14メートル/分)で3ミル(76ミクロン)ポリエチレンテレフタレートフィルム(デュポン・テイジン・フィルムス、バージニア州ホープウェル(DuPont Teijin Films,Hopewell,VA)から商業的に入手可能な)上へナイフ・コートした。物品を200フィート(61メートル)長さのボックスオーブン中で225°F(107℃)で乾燥し、ロールに巻き取った。オーブンからの出力ロールを別のボックスオーブン中へ165°F(74℃)で24時間入れ、次に材料を取り出し、試験前に室温に冷却した。
混合ケトルに、865.3gメチルエチルケトンMEK(865.3g)、1,3−ジオキソラン(736.8g)、およびシクロヘキサノン(130.0g)を装入した。51.0gのシンファック8024Uポリオールの溶液を加え、引き続き27.7gのエアロゾルAY50界面活性剤の溶液および15.7gの染料を加えた。847.8gのダイヤモンド分散系(628.9gの1ミクロンGEダイヤモンド、9.4g分散剤、および209.5gMEK)をケトルに加え、混合物を手動で撹拌した。788.0gの上に記載したポリエステル・ポリウレタン樹脂、および437.9gのフェノキシ樹脂を加えた。生じたスラリーを10分間撹拌し、101.0gの上に記載した高分子イソシアネートをケトル中へブレンドした。生じた分散系を指定のアリコートへ分割した。次に表3に示すアリコートを、また表3に示すそれぞれの添加剤のMEK中10重量%溶液または分散系と組み合わせることによって実験ロットを調製した。
ステンレススチール混合ケトルに、1412.5gのMEK中コロイダル・シリカの溶液(ニッサン・ケミカル・アメリカ社、テキサス州ヒューストン(Nissan Chemical America Corp.,Houston,TX)から入手可能な)、129.9gの1,3−ジオキソラン、および130.7gトルエンを装入した。ポリエステル・ポリウレタン樹脂(105.2gのMEK中25%溶液、ネオペンチルグリコール[6%]、ポリ−ε−カプロラクトン[63%]およびメチレンジイソシアネート(MDI)[31%]から社内で合成した樹脂)、および次に「YP−50S」フェノキシ樹脂(154.1g)を順次加えた。ジブチル錫ジラウレート(カージナル・ケミカル社、アトフィナ・ケミカルズ、サウスカロライナ州コロンビア(Cardinal Chemical Co.,Atofina Chemicals,Columbia,SC))の10%溶液をメチルエチルケトン中で調製し、1.0gの混合物をマスターバッチに加えた。マスターバッチを、エアミキサーで撹拌しながら、15分間低出力水浴中で超音波処理し、次にデスモデュール(Desmodur)CB−55Nイソシアネート(75.6g、バイエル社、ペンシルバニア州ピッツバーグ)を加え、引き続き追加の5分の超音波処理および撹拌を行った。次に250gのアリコートをマスターバッチから採取した。1つを対照として1.3ミル(33ミクロン)ナイフ・ギャップで、30フィート/分(9.14メートル/分)でコーティングして、3ミル(76ミクロン)デュポン・テイジン・ポリエチレンテレフタレートフィルム上へ直接ナイフ・コートし、200フィート(61メートル)長さのボックスオーブン中で225°F(107℃)で乾燥し、ロールに巻き取った。オーブンからの出力ロールを別のボックスオーブン中へ165°F(74℃)で24時間入れ、次に材料を取り出し、試験前に室温に冷却した。
Claims (23)
- 主面を有するバッキング、および
該主面の少なくとも一部分に固定された研磨層であって、バインダーと、該バインダー中に分散された研磨粒子と、樹脂制御添加剤を含みそして該バインダー中に分散された無機非研磨粒子を本質的に含まない粒子と、を含み、かつ、実質的に一様な厚さを有する研磨層
を含む研磨物品。 - 樹脂制御添加剤を含む前記粒子が約20マイクロメートル以下の平均粒度を有する、請求項1に記載の研磨物品。
- 前記研磨粒子がある平均粒度を有し、樹脂制御添加剤を含む粒子が該研磨粒子平均粒度の約2倍よりも大きい平均粒度を有する、請求項1に記載の研磨物品。
- 樹脂制御添加剤を含む前記粒子が該樹脂制御添加剤より本質的になる、請求項1に記載の研磨物品。
- 前記研磨粒子がダイヤモンドである、請求項1に記載の研磨物品。
- 前記研磨粒子がシリカである、請求項1に記載の研磨物品。
- 前記樹脂制御添加剤が亜鉛、リチウム、ナトリウム、カルシウムまたはマグネシウムから誘導される、請求項1に記載の研磨物品。
- 前記樹脂制御添加剤がラウリン酸、オレイン酸、ミリスチン酸、ステアリン酸またはリノール酸から誘導される、請求項1に記載の研磨物品。
- 前記樹脂制御添加剤がステアリン酸リチウムである、請求項1に記載の研磨物品。
- 前記樹脂制御添加剤がステアリン酸カルシウムである、請求項1に記載の研磨物品。
- 前記樹脂制御添加剤がステアリン酸ナトリウムである、請求項1に記載の研磨物品。
- 前記バッキングがポリエステルフィルムを含む、請求項1に記載の研磨物品。
- 前記バインダーが有機バインダーを含む、請求項1に記載の研磨物品。
- 主面を有するバッキング、および
該主面の少なくとも一部分に固定された研磨層であって、バインダーと、該バインダー中に分散された研磨粒子と、該バインダー中に分子状に分散された樹脂制御添加剤と、を含み、かつ、実質的に一様な厚さを有する研磨層
を含む研磨物品。 - 主面を有するバッキング、および
該主面の少なくとも一部分に固定された研磨層であって、バインダーと、該バインダー中に分散されたある平均粒度を有する研磨粒子と、該研磨粒子平均粒度の約2倍よりも大きい平均粒度を有する樹脂制御添加剤を含む粒子と、を含み、かつ、実質的に一様な厚さを有する研磨層
を含む研磨物品。 - 前記研磨粒子が約0.4〜約1マイクロメートルの平均粒度を有し、かつ、樹脂制御添加剤を含む前記粒子が約3マイクロメートルよりも大きい平均粒度を有する、請求項15に記載の研磨物品。
- 主面を有するバッキング、および該主面の少なくとも一部分に固定された研磨層を含む研磨物品を提供する工程であって、該研磨層が、バインダーと、該バインダー中に分散された研磨粒子と、該バインダー中に分散された樹脂制御添加剤と、を含み、かつ、実質的に一様な厚さを有する工程と、
該研磨物品をワークピースの研磨面と接触させる工程と、
該ワークピースと該研磨物品とを相対的に移動させる工程と、
を含むワークピースの研磨方法。 - 前記ワークピースが複合物品である、請求項17に記載の方法。
- 前記複合物品が光ファイバーコネクターである、請求項18に記載の方法。
- 前記光ファイバーコネクターが前記研磨物品で約100〜約150rpmで約1分間研磨される、請求項19に記載の方法。
- 表面および該表面上のコーティングを有するバッキングを含む第2研磨物品を提供する工程であって、該コーティングが、バインダーと、該バインダー中に分散された研磨粒子と、を含む工程と、
前記研磨面を第2研磨物品と接触させる工程と、
前記光学部品と該研磨物品とを相対的に移動させる工程と、
を含む第2研磨工程をさらに含む、請求項17に記載の方法。 - 前記第2研磨物品が樹脂制御添加剤を含む、請求項21に記載の方法。
- 前記光ファイバーコネクターが2以下の樹脂移動値を示す、請求項19に記載の方法。
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US10/236,588 US6858292B2 (en) | 2002-09-06 | 2002-09-06 | Abrasive articles with resin control additives |
PCT/US2003/022681 WO2004022285A1 (en) | 2002-09-06 | 2003-07-21 | Abrasive articles with resin control additives |
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JP2000229262A (ja) | 1999-02-09 | 2000-08-22 | Fuji Photo Film Co Ltd | 塗布方法 |
US6179887B1 (en) * | 1999-02-17 | 2001-01-30 | 3M Innovative Properties Company | Method for making an abrasive article and abrasive articles thereof |
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2002
- 2002-09-06 US US10/236,588 patent/US6858292B2/en not_active Expired - Fee Related
-
2003
- 2003-07-21 MX MXPA05002356A patent/MXPA05002356A/es active IP Right Grant
- 2003-07-21 BR BR0314002-4A patent/BR0314002A/pt not_active Application Discontinuation
- 2003-07-21 AU AU2003268008A patent/AU2003268008A1/en not_active Abandoned
- 2003-07-21 WO PCT/US2003/022681 patent/WO2004022285A1/en active Application Filing
- 2003-07-21 KR KR1020057003761A patent/KR101021389B1/ko not_active IP Right Cessation
- 2003-07-21 EP EP03748959A patent/EP1534468B1/en not_active Expired - Lifetime
- 2003-07-21 CN CNA038211270A patent/CN1678431A/zh active Pending
- 2003-07-21 JP JP2004534249A patent/JP2005537941A/ja active Pending
- 2003-07-30 MY MYPI20032870A patent/MY126703A/en unknown
- 2003-07-31 TW TW092120992A patent/TWI291910B/zh not_active IP Right Cessation
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US3619150A (en) * | 1969-09-22 | 1971-11-09 | Borden Co | Abrasive article and nonloading coating therefor |
JPS5669074A (en) * | 1979-10-31 | 1981-06-10 | Sankyo Rikagaku Kk | Water dispersive antiloading treatment method for coated abrasive |
JPS61192479A (ja) * | 1985-02-11 | 1986-08-27 | ミネソタ マイニング アンド マニユフアクチユアリング コンパニー | 砥石車 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2012147312A1 (ja) * | 2011-04-25 | 2012-11-01 | バンドー化学株式会社 | 研磨フィルム |
JP5896992B2 (ja) * | 2011-04-25 | 2016-03-30 | バンドー化学株式会社 | 研磨フィルム |
Also Published As
Publication number | Publication date |
---|---|
TWI291910B (en) | 2008-01-01 |
TW200413132A (en) | 2004-08-01 |
AU2003268008A1 (en) | 2004-03-29 |
CN1678431A (zh) | 2005-10-05 |
EP1534468B1 (en) | 2012-06-06 |
US6858292B2 (en) | 2005-02-22 |
EP1534468A1 (en) | 2005-06-01 |
WO2004022285A1 (en) | 2004-03-18 |
BR0314002A (pt) | 2005-07-19 |
US20040048057A1 (en) | 2004-03-11 |
MY126703A (en) | 2006-10-31 |
KR20050057177A (ko) | 2005-06-16 |
KR101021389B1 (ko) | 2011-03-14 |
MXPA05002356A (es) | 2005-06-06 |
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