JP2005522890A - Reduction of transition in nonpolar gallium nitride thin films. - Google Patents
Reduction of transition in nonpolar gallium nitride thin films. Download PDFInfo
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Abstract
本発明は、半導体材料、方法、およびデバイスに関し、そしてより具体的には、非極性窒化ガリウム(GaN)薄層における転移低減に関する。本発明は、a−GaNにおけるスレッディング転移密度を、平面ヘテロエピタキシャル「シード」層の横方向過剰成長によって低減する。横方向過剰成長技術は、2つのMOCVD成長(最初のヘテロエピタキシャル成長および横方向過剰成長を構成する再成長)の間の処理工程を必要とする。第1に、薄いパターン化された誘電性マスクが、シード層に適用される。The present invention relates to semiconductor materials, methods, and devices, and more specifically to transition reduction in thin nonpolar gallium nitride (GaN) layers. The present invention reduces the threading transition density in a-GaN by lateral overgrowth of planar heteroepitaxial “seed” layers. The lateral overgrowth technique requires a processing step between two MOCVD growths (the first heteroepitaxial growth and the regrowth that constitutes the lateral overgrowth). First, a thin patterned dielectric mask is applied to the seed layer.
Description
(関連出願の引用)
本願は、米国特許法第119条第(e)項のもとで、以下の同時係属中の、同一人に譲渡された米国仮特許出願番号60/372,909(発明の名称「NON−POLAR GALLIUM NITRIDE BASED THIN FILMS AND HETEROSTRUCTURE MATERIALS」、2002年4月15日出願、Michael D.Craven,Stacia Keller,Steven P.DenBaars,Tal Margalith,James S.Speck,Shuji Nakamura,およびUmesh K.Mishara、代理人文書番号30794.95−US−P1)の利益を主張する。この出願は、本明細書中に参考として援用される。
(Citation of related application)
This application is filed under 35 USC 119 (e) and is assigned to the same co-pending US Provisional Patent Application No. 60 / 372,909 (name of invention "NON-POLAR"). GALLIUM NITRIDE BASSED THIN FILMS AND HETEROSTRUCTURE MATERIALS ”, filing on April 15, 2002, Michael D. Craven, Stacia Keller, Steven P. DenBaars, Tal MarS. Claims the benefit of document number 30794.95-US-P1). This application is incorporated herein by reference.
本願は、以下の同時係属中の、同一人に譲渡された米国特許出願に関する:
出願番号−−/−−−,−−−、発明の名称「NON−POLAR(AL,B,IN,GA)N QUANTUM WELL AND HETEROSTRUCTURE MATERIALS AND DEVICES」、本願と同日に出願、Michael D.Craven、Stacia Keller、Steven P. DenBaars、Tal Margalith、James S.Speck、Shuji NakamuraおよびUmesh K.Mishra、代理人文書番号30794.101−US−U1);ならびに
出願番号−−/−−−,−−−、発明の名称「NON−POLAR A−PLANE GALLIUM NITRIDE THIN FILMS GROWN BY METALORGANIC CHEMICAL VAPOR DEPOSITION」、本願と同日に出願、Michael D.CravenおよびJames S.Speck、代理人文書番号30794.100−US−U1);
これらの出願の両方が、本明細書中に参考として援用される。
This application relates to the following co-pending, commonly assigned US patent applications:
Application number ---------------------- NON-POLAR (AL, B, IN, GA) N QUANTUM WELL AND HEASTER STRUCTURE MATERIALS AND DEVICES, filed the same day as this application, Michael D. Craven, Stacia Keller, Steven P. DenBaars, Tal Margarith, James S. Speck, Shuji Nakamura and Umesh K. Misra, Attorney Document No. 30794.101-US-U1); and Application No.-/ ---, ----, title of invention "NON-POLAR A-PLANE GALLIUM NITRATION THIN FILM GROWN BY METALORGANIC CHAPICAL VAPOR" Filed on the same day as this application, Michael D. Craven and James S. Speck, agent document number 30794.100-US-U1);
Both of these applications are hereby incorporated by reference.
(1.発明の分野)
本発明は、半導体材料、方法、およびデバイスに関し、そしてより具体的には、非極性窒化ガリウム(GaN)薄層における転移低減に関する
(2.関連技術の説明)
(注:本願は、多数の異なる特許、出願および/または刊行物を、1つ以上の参照番号によって、本明細書全体に示されるように参照する。これらの異なる刊行物の、これらの参照番号に従った順序にしたリストは、以下の「参考文献」の表題の節に見出され得る。これらの刊行物の各々は、本明細書中に参考として援用される)。
(1. Field of the Invention)
The present invention relates to semiconductor materials, methods, and devices, and more specifically to transition reduction in thin nonpolar gallium nitride (GaN) layers (2. Description of Related Art).
(Note: This application refers to a number of different patents, applications and / or publications as indicated throughout this specification by one or more reference numbers. These reference numbers for these different publications. An ordered list according to can be found in the section entitled “References” below, each of which is incorporated herein by reference).
現在の窒化物ベースのデバイスは、極性[0001]c方向に沿って成長したヘテロ構造を用い、成長方向に対して平行な強い静電場の形成を生じる。参考文献1〜7を参照のこと。「一体型(built−in)」静電場は、c−平面(0001)窒化物構造内の表面および界面における分極不連続性に関連する一定のシート電荷により生じる。 Current nitride-based devices use heterostructures grown along the polar [0001] c direction, resulting in the formation of a strong electrostatic field parallel to the growth direction. See references 1-7. A “built-in” electrostatic field is caused by a constant sheet charge associated with polarization discontinuities at surfaces and interfaces in c-plane (0001) nitride structures.
これらの分極誘導性電場は、現在の最新技術の光電子窒化物デバイスおよび電子窒化物デバイスの性能に影響を与える。例えば、分極場は、量子井戸(QW)構造における電子およびホールの波動関数を空間的に分離し、それによって、QWベースのデバイス(例えば、レーザーダイオードおよび発光ダイオード(LED))におけるキャリアの再結合効率を減少させる。さらに、分極場は、窒化物ヘテロ構造を用いるトランジスタ構造において大きな可動シート電荷密度を誘導する。全分極における不連続性は、対応する界面または表面において一定のシート電荷の形成を生じる。 These polarization-inducing electric fields affect the performance of current state-of-the-art optoelectronic nitride devices and electron nitride devices. For example, polarization fields spatially separate electron and hole wave functions in quantum well (QW) structures, thereby recombining carriers in QW-based devices (eg, laser diodes and light emitting diodes (LEDs)). Reduce efficiency. Furthermore, the polarization field induces a large movable sheet charge density in transistor structures using nitride heterostructures. A discontinuity in total polarization results in the formation of a constant sheet charge at the corresponding interface or surface.
非極性ウルツ窒化物半導体フィルムのエピタキシャル成長は、窒化物の量子構造における分極誘導性電場の効果を排除する有望な手段を提供する。上記の関連の出願において、非極性 Epitaxial growth of nonpolar wurtz nitride semiconductor films offers a promising means to eliminate the effects of polarization-induced electric fields in nitride quantum structures. In the above related application, non-polar
非極性窒化物層の利点を十分に理解するために、エピタキシャル膜の質の改良が必要であり、特に、転移密度の低減が必要である。詳細には、これらの膜の結晶の質を改良することは、分極誘導性電場を伴わずに作動する高性能窒化物デバイスの実現に必須である。 In order to fully understand the advantages of non-polar nitride layers, it is necessary to improve the quality of the epitaxial film, and in particular to reduce the transition density. In particular, improving the crystal quality of these films is essential for the realization of high performance nitride devices that operate without polarization-induced electric fields.
種々の技術が示されているが、転移の低減は、横方向に過剰成長した極性GaN膜において広範に研究されている。参考文献8〜11を参照のこと。種々の横方向過剰成長技術により得られる低転移密度基板は、窒化物ベースのオプトエレクトロニクスの顕著な性能、もっとも注目すべきは、長寿命の持続波InGaNレーザーダイオードを直接的に担っている。参考文献12を参照のこと。 Various techniques have been shown, but the reduction of transition has been extensively studied in laterally overgrown polar GaN films. See references 8-11. Low dislocation density substrates obtained by various lateral overgrowth techniques directly bear the outstanding performance of nitride-based optoelectronics, most notably long-lived continuous wave InGaN laser diodes. See reference 12.
横方向過剰成長技術は、従来技術において周知である。例えば横方向過剰成長技術は、極性c平面(0001)GaN膜の転移低減について徹底的に研究されている。特定の過剰成長技術としては、横方向エピタキシャル過剰成長(LEO)(これはまた、エピタキシャル横方向過剰成長(ELOまたはELOG)としても公知である)、およびPENDEO(登録商標)エピタキシーが上げられる。これらのプロセスの間の差に関わらず、転移の低減は、一般的な機構、主に、マスクブロッキングおよび転移湾曲によって達成される。参考文献11および19を参照のこと。 Lateral overgrowth techniques are well known in the prior art. For example, lateral overgrowth techniques have been thoroughly studied for reducing transitions in polar c-plane (0001) GaN films. Specific overgrowth techniques include lateral epitaxial overgrowth (LEO) (also known as epitaxial lateral overgrowth (ELO or ELOG)), and PENDEO® epitaxy. Regardless of the difference between these processes, the reduction of transfer is achieved by common mechanisms, mainly mask blocking and transfer curvature. See references 11 and 19.
しかし、本発明は、GaN膜のためのこれらの方法の新規な適用である。詳細には、本発明は、a−GaNシード層を使用するLEO法を記載し、これはスレッディング転移低減を達成する。低転移密度a−GaNは、高性能分極誘導性場を含まない(Al,B,In,Ga)Nベースのデバイスのための緩衝層として使用され得る。 However, the present invention is a novel application of these methods for GaN films. Specifically, the present invention describes a LEO method that uses an a-GaN seed layer, which achieves threading transition reduction. Low transition density a-GaN can be used as a buffer layer for (Al, B, In, Ga) N based devices that do not contain high performance polarization inductive fields.
(発明の要旨)
非極性
(Summary of the Invention)
Nonpolar
ここで、図面が参照される。図面において、類似の参照番号は、全体にわたって、対応する部品を表す。 Reference is now made to the drawings. In the drawings, like reference numerals generally indicate corresponding parts.
(発明の詳細な説明)
以下の好ましい実施形態の説明において、添付の図面に対して参照がなされる。この図面は、本明細書の一部を形成し、そしてこの図面において、例として、本発明が実施され得る特定の実施形態が説明され得る。本発明の範囲から逸脱することなく、他の実施形態が利用され得、そして構造的変化がなされ得ることが、理解されるべきである。
(Detailed description of the invention)
In the following description of the preferred embodiments, reference is made to the accompanying drawings. The drawings form part of the present specification and by way of example specific embodiments in which the invention may be practiced may be described. It should be understood that other embodiments may be utilized and structural changes may be made without departing from the scope of the present invention.
(概説)
本発明は、a−GaNにおけるスレッディング転移密度を、平面ヘテロエピタキシャル「シード」層の横方向過剰成長によって低減する。横方向過剰成長技術は、2つのMOCVD成長(最初のヘテロエピタキシャル成長および横方向過剰成長を構成する再成長)の間の処理工程を必要とする。第1に、薄いパターン化された誘電性マスクが、シード層に適用される。再成長の際、GaNは、最初に、この誘電性マスク中の開口部を通って垂直に成長し、その後、この垂直成長方向に対して垂直の方向で、このマスクを横方向に過剰成長させる。適切なマスクおよび再成長条件を用いて、転移密度が、このマスク中の開口部を通って垂直に成長した領域と比較して、横方向過剰成長領域において低減される。転移は、(1)成長中の膜に向かう垂直方向の転移の伝達をブロックするマスク、および(2)垂直から横方向への成長の移行による転移の湾曲によって、過剰成長領域において低減される。
(Outline)
The present invention reduces the threading transition density in a-GaN by lateral overgrowth of planar heteroepitaxial “seed” layers. The lateral overgrowth technique requires a processing step between two MOCVD growths (first heteroepitaxial growth and regrowth that constitutes lateral overgrowth). First, a thin patterned dielectric mask is applied to the seed layer. During regrowth, GaN first grows perpendicularly through the openings in the dielectric mask and then overgrows the mask laterally in a direction perpendicular to the vertical growth direction. . With an appropriate mask and regrowth conditions, the transition density is reduced in the lateral overgrowth region compared to the region grown vertically through the openings in the mask. The transition is reduced in the overgrowth region by (1) a mask that blocks the transmission of the vertical transition towards the growing film, and (2) the curvature of the transition due to the growth transition from vertical to lateral.
(プロセス工程)
図1は、本発明の好ましい実施形態に従う、平面ヘテロエピタキシャル「シード」層の横方向過剰成長によるa−GaNにおけるスレッディング転移密度を低減するための工程を示すフローチャートである。
(Process process)
FIG. 1 is a flow chart illustrating steps for reducing threading transition density in a-GaN due to lateral overgrowth of planar heteroepitaxial “seed” layers, in accordance with a preferred embodiment of the present invention.
ブロック100は、同時係属中の、同一人に譲渡された米国仮特許出願番号60/372,909(発明の名称「NON−POLAR GALLIUM NITRIDE BASED THIN FILMS AND HETEROSTRUCTURE MATERIALS」、2002年4月15日出願、Michael D.Craven,Stacia Keller,Steven P.DenBaars,Tal Margalith,James S.Speck,Shuji Nakamura,およびUmesh K.Mishara、代理人文書番号30794.95−US−U1)、ならびに同時係属中の、同一人に譲渡された米国特許出願番号−−/−−−,−−−、発明の名称「NON−POLAR A−PLANE GALLIUM NITRIDE THIN FILMS GROWN BY METALORGANIC CHEMICAL VAPOR DEPOSITION」、本願と同日に出願、Michael D.CravenおよびJames S.Speck、代理人文書番号30794.100−US−U1)(これらの出願の両方は、本明細書中で参考として援用される)に記載されるように、MOCVDによって、
ブロック102は、非極性
ブロック104は、堆積されたマスクをパターン化する工程を表し、ここで、このパターンは、従来の光リソグラフィー技術および緩衝化されたフッ化水素酸を用いる湿式エッチングを使用してSiO2に移される。好ましくは、堆積されたマスクは、種々の結晶学的方向で配向された長く、狭いストライプ開口部によりパターン化される。
マスクをパターン化した後、ブロック106は、溶媒を使用してサンプルを洗浄する工程を表す。 After patterning the mask, block 106 represents the step of cleaning the sample using a solvent.
ブロック108は、選択的エピタキシャル再成長を実施して、パターン化されたマスクに基づく横方向過剰成長を達成する工程を表し、ここで、窒化ガリウムは、初期はマスクにおける開口部を通って垂直に成長し、その後、垂直な成長方向に対して垂直な方向でマスクを横方向に過剰成長させる。転位密度は、マスクにおける開口部を通って垂直に成長する領域と比較して、垂直に過剰成長した領域において減少される。さらに成長フィルムへの垂直方向での転位の広がりをブロックするマスクによって、および、垂直から横方向への成長の移行による転位の屈曲によって、転位は過剰成長領域において減少される。
好ましくは、ブロック108は、サファイア基板上でのヘテロエピタキシャル成長に使用される条件と同じ反応器条件(すなわち、約1100℃成長温度。約1300V/III速度、および約0.1気圧(atm)成長圧力)を使用するが、改変された条件が使用され得る。 Preferably, block 108 is the same reactor conditions as those used for heteroepitaxial growth on the sapphire substrate (ie, about 1100 ° C. growth temperature, about 1300 V / III rate, and about 0.1 atmosphere (atm) growth pressure. ), But modified conditions may be used.
ブロック110は、得られる横方向過剰成長を表し、ここで、この横方向過剰成長は、基礎となるマスクパターンによって決定されるように、ストライプを形成した横方向に過剰成長したGaNを含む。過剰成長ストライプ形態学は、マスクストライプの結晶学的配向に依存する。例えば、
この方法を使用して製造され得る可能なデバイスとしては、レーザーダイオード(LD)、発光ダイオード(LED)、共鳴空洞LED(RC−LED)、垂直空洞表面発光レーザー(VCSEL)、高電子移動度トランジスタ(HEMT)、ヘテロ接合双極トランジスタ(HBT)、ヘテロ接合場効果トランジスタ(HFET)、ならびにUV光検出器および近UV光検出器が挙げられる。 Possible devices that can be fabricated using this method include laser diodes (LDs), light emitting diodes (LEDs), resonant cavity LEDs (RC-LEDs), vertical cavity surface emitting lasers (VCSELs), high electron mobility transistors (HEMT), heterojunction bipolar transistor (HBT), heterojunction field effect transistor (HFET), and UV and near UV photodetectors.
(実験結果)
横方向エピタキシャル過剰成長が、非極性
(Experimental result)
Lateral epitaxial overgrowth is nonpolar
[0001]および [0001] and
ストライプの形態学をJEOL 6300TM場放射走査電子顕微鏡(FE−SEM)を使用し、5kVで操作して観察した。横方向過剰成長の微小構造を、JEOL 2000FXTM透過電子顕微鏡(FE−SEM)を使用し200kVで操作して、断面において研究した。カソードルミネセンス(CL)画像を、室温でJEOL 6300TM FE−SEMに装着されたGatan MonoCLTMを使用して得、そして横方向過剰成長ストライプからのルミネセンスの空間マップを提供した。 Stripe morphology was observed using a JEOL 6300 TM field emission scanning electron microscope (FE-SEM) operating at 5 kV. Lateral overgrowth microstructures were studied in cross-section using a JEOL 2000FX ™ transmission electron microscope (FE-SEM) operating at 200 kV. Cathodoluminescence (CL) images were obtained using a Gatan MonoCL ™ attached to a JEOL 6300 ™ FE-SEM at room temperature and provided a spatial map of luminescence from lateral overgrowth stripes.
横方向に過剰成長したc平面GaNについて示されるように、マスクストライプ開口部の結晶学的配向は、これゆえに、横方向過剰成長の特徴を形成する面を記載する。参考文献14を参照のこと。横方向に過剰成長したa−GaNの配向依存性を調査するために、SiO2マスクを「ワゴンホイール」設計を形成する矩形マスク開口部(ウィンドウ)の任意のアレイによりパターン化した。ワゴンホイールパターンを作製するウィンドウは、5μm幅および5°間隔で配向し、その結果、結晶学的マスク配向の範囲は、単一のMOCVD成長を実行することで分析し得た。この実験設計は、線形マスク開口部から横方向に過剰成長したc−平面GaNの初期調査に使用した設計と類似する。参考文献14および15を参照のこと。 As shown for laterally overgrown c-plane GaN, the crystallographic orientation of the mask stripe opening thus describes the plane that forms the lateral overgrowth feature. See reference 14. To investigate the overgrown a-GaN orientation dependence in the horizontal direction, and patterned by any of the array of the rectangular mask opening to form the a SiO 2 mask "wagon wheel" design (window). The windows that make up the wagon wheel pattern were oriented with 5 μm width and 5 ° spacing so that the range of crystallographic mask orientation could be analyzed by performing a single MOCVD growth. This experimental design is similar to the design used for the initial investigation of c-plane GaN overgrown laterally from the linear mask opening. See references 14 and 15.
図2は、a−GaN LEOワゴンホイールパターンの半分を示す平面図操作電子顕微鏡(SEM)画像モンタージュである。この角度は、0°がGaN c−軸[0001]に対応するワゴンホイールパターンへの参照を容易にするように含まれる。(c−GaN表面に対して)a−GaN表面の減少した対称性は、図2に示されるストライプ配向依存性において明らかである。この図は、単一のワゴンホイールパターンの180°図である。主に、この平面図SEM画像は、横方向過剰成長が、全ての可能なストライプ配向に対して生じたことを示す。より近くで検査する際に、3つのストライプ配向は、切子面にされたサイドウォールを伴うことなく均一の形態学を有し:[0001]に対して平行、GaN c−軸から45°離れている、およびGaN c−軸に対して垂直方向( FIG. 2 is a top view manipulated electron microscope (SEM) image montage showing half of the a-GaN LEO wagon wheel pattern. This angle is included to facilitate reference to a wagon wheel pattern where 0 ° corresponds to the GaN c-axis [0001]. The reduced symmetry of the a-GaN surface (relative to the c-GaN surface) is evident in the stripe orientation dependence shown in FIG. This figure is a 180 ° view of a single wagon wheel pattern. Mainly, this top view SEM image shows that lateral overgrowth has occurred for all possible stripe orientations. When examined closer, the three stripe orientations have a uniform morphology without the faceted sidewalls: parallel to [0001], 45 ° away from the GaN c-axis And perpendicular to the GaN c-axis (
a−GaN LEO形態学に対するストライプ配向の効果を明確に観察するために、さらなる斜視図が必要である。図3(a)、(b)および(c)は、それぞれ[0001]、 In order to clearly observe the effect of stripe orientation on a-GaN LEO morphology, further perspective views are needed. 3 (a), (b) and (c) are [0001],
使用される成長条件について、[0001]および For the growth conditions used, [0001] and
図4(a)、(b)および(c)は、 4 (a), (b) and (c)
螺旋転移(threading dislocation:TD)の減少は、図4(a)に断面TEM画像に示されるように、 The decrease in threading dislocation (TD), as shown in the cross-sectional TEM image in FIG.
TD減少に加えて、図4(a)は、 In addition to the decrease in TD, FIG.
極性GaNに対する横方向過剰成長の非対称性のさらなる証拠は、[0001]、 Further evidence of lateral overgrowth asymmetry for polar GaN is [0001],
要約すると、非極性 In summary, nonpolar
(参考文献)
以下の参考文献が、本明細書中に参考として援用される:
(References)
The following references are hereby incorporated by reference:
これは、発明の好ましい実施形態の説明を結論付ける。以下は、本発明を達成するための、いくつかの代替の実施形態を記載する。
This concludes the description of the preferred embodiment of the invention. The following describes some alternative embodiments for accomplishing the present invention.
横方向過剰成長技術の重大な局面は、誘電性のマスク特異性およびMOCVD再成長条件である。種々の誘電性材料、堆積技術およびパターン化方法を使用して、横方向過剰成長に有効なマスクを組みたて得る。さらに、マスクパターンの方向、設計および寸法を改変することは、後の横方向過剰成長の特性を最終的に決定する。転移減少を達成し、そしてマスクを完全に過剰成長するために横方向過剰成長の十分な制御は、必要であり、その結果、平面フィルムは再形成される。横方向過剰成長の特定の詳細(横方向〜垂直の成長速度比およびサイドウォール面の安定性を含む)は、MOCVD再成長条件によって制御される。MOCVD成長条件は、反応器に依存性であり、そして特定の反応器設計の間で変動し得る。成長温度、成長圧力、V/III比、前駆体フロー、および原料のような条件における基礎的なバリエーションが、本発明の可能な改変である。 Critical aspects of lateral overgrowth technology are dielectric mask specificity and MOCVD regrowth conditions. A variety of dielectric materials, deposition techniques and patterning methods can be used to assemble a mask that is effective for lateral overgrowth. Furthermore, altering the direction, design and dimensions of the mask pattern ultimately determines the characteristics of subsequent lateral overgrowth. Sufficient control of lateral overgrowth is necessary to achieve transfer reduction and complete overgrowth of the mask, so that the planar film is reformed. Specific details of lateral overgrowth (including lateral to vertical growth rate ratio and sidewall surface stability) are controlled by MOCVD regrowth conditions. MOCVD growth conditions are reactor dependent and can vary between specific reactor designs. Fundamental variations in conditions such as growth temperature, growth pressure, V / III ratio, precursor flow, and feed are possible modifications of the invention.
さらに、転移減少はまた、代替の過剰成長方法を使用して達成され得る。例えば、片持ちばりエピタキシー、二重横方向エピタキシャル過剰成長(double lateral epitaxial overgrowth:二重LEO)およびSiNナノマスキング技術は、横方向エピタキシャル過剰成長に対する代替として使用され得る。 Furthermore, metastasis reduction can also be achieved using alternative overgrowth methods. For example, cantilever epitaxy, double lateral epitaxial overgrowth (Double LEO) and SiN nanomasking techniques can be used as an alternative to lateral epitaxial overgrowth.
さらに、非極性のa平面GaN薄膜が、本明細書中に記載されるが、同じ技術が、非極性のm平面GaN薄膜に対して適用可能である。さらに、非極性のInN薄膜、AlN薄膜、およびAlInGaN薄膜が、GaN薄膜の代わりに使用され得る。 Furthermore, although non-polar a-plane GaN thin films are described herein, the same technique is applicable to non-polar m-plane GaN thin films. Furthermore, non-polar InN thin films, AlN thin films, and AlInGaN thin films can be used instead of GaN thin films.
最後に、サファイア基板以外の基板が、非極性GaN成長のために使用され得る。これらの基板としては、炭化ケイ素、窒化ガリウム、ケイ素、酸化亜鉛、窒化ホウ素、アルミン酸リチウム、ニオブ酸リチウム、ゲルマニウム、窒化アルミニウム、および没食子酸リチウムが挙げられる。 Finally, substrates other than sapphire substrates can be used for nonpolar GaN growth. These substrates include silicon carbide, gallium nitride, silicon, zinc oxide, boron nitride, lithium aluminate, lithium niobate, germanium, aluminum nitride, and lithium gallate.
要約すると、本発明は、螺旋転移減少を生じる非極性 In summary, the present invention is non-polar, resulting in reduced helical transitions.
本発明の1つ以上の実施形態の上記説明は、例示および説明の目的で提供された。排他的であることも、本発明を開示された正確な形態に限定することも、意図されない。多くの改変およびバリエーションが、上記教示を考慮して、可能である。本発明の範囲は、この詳細な説明によって限定されるのではなく、本明細書に添付された特許請求の範囲によって限定されることが、意図される。 The foregoing description of one or more embodiments of the invention has been provided for purposes of illustration and description. It is not intended to be exhaustive or to limit the invention to the precise form disclosed. Many modifications and variations are possible in view of the above teachings. It is intended that the scope of the invention be limited not by this detailed description, but rather by the claims appended hereto.
Claims (12)
(a)非極性a平面窒化ガリウム薄膜上に誘電性再成長マスク堆積する工程;
(b)堆積された該マスクをパターン化する工程;および
(c)選択的な再成長を行い、該パターン化マスクに基づく過剰成長を達成する工程、
を包含する、方法。 A method for reducing the helical transition density in a nonpolar a-plane gallium nitride thin film, comprising the following steps: (a) depositing a dielectric regrowth mask on the nonpolar a-plane gallium nitride thin film;
(B) patterning the deposited mask; and (c) performing selective regrowth to achieve overgrowth based on the patterned mask;
Including the method.
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