JP2005518474A - 焼結された多結晶質ジルコニアを含有する研磨粒子 - Google Patents
焼結された多結晶質ジルコニアを含有する研磨粒子 Download PDFInfo
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- JP2005518474A JP2005518474A JP2003571370A JP2003571370A JP2005518474A JP 2005518474 A JP2005518474 A JP 2005518474A JP 2003571370 A JP2003571370 A JP 2003571370A JP 2003571370 A JP2003571370 A JP 2003571370A JP 2005518474 A JP2005518474 A JP 2005518474A
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- abrasive
- oxide
- abrasive particles
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- weight percent
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- 239000002245 particle Substances 0.000 title claims abstract description 618
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 title claims description 248
- 238000000034 method Methods 0.000 claims abstract description 52
- 239000000463 material Substances 0.000 claims description 144
- 238000010438 heat treatment Methods 0.000 claims description 77
- 229910044991 metal oxide Inorganic materials 0.000 claims description 53
- 150000004706 metal oxides Chemical class 0.000 claims description 53
- 238000005498 polishing Methods 0.000 claims description 32
- 239000011230 binding agent Substances 0.000 claims description 26
- ODINCKMPIJJUCX-UHFFFAOYSA-N calcium oxide Inorganic materials [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 claims description 24
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 claims description 21
- 239000000292 calcium oxide Substances 0.000 claims description 16
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 16
- 239000000395 magnesium oxide Substances 0.000 claims description 15
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 claims description 14
- 238000009826 distribution Methods 0.000 claims description 14
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 claims description 13
- 230000000087 stabilizing effect Effects 0.000 claims description 11
- RKTYLMNFRDHKIL-UHFFFAOYSA-N copper;5,10,15,20-tetraphenylporphyrin-22,24-diide Chemical compound [Cu+2].C1=CC(C(=C2C=CC([N-]2)=C(C=2C=CC=CC=2)C=2C=CC(N=2)=C(C=2C=CC=CC=2)C2=CC=C3[N-]2)C=2C=CC=CC=2)=NC1=C3C1=CC=CC=C1 RKTYLMNFRDHKIL-UHFFFAOYSA-N 0.000 claims description 10
- MRELNEQAGSRDBK-UHFFFAOYSA-N lanthanum(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[La+3].[La+3] MRELNEQAGSRDBK-UHFFFAOYSA-N 0.000 claims description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 9
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 claims description 9
- BRPQOXSCLDDYGP-UHFFFAOYSA-N calcium oxide Chemical compound [O-2].[Ca+2] BRPQOXSCLDDYGP-UHFFFAOYSA-N 0.000 claims description 8
- 229910000420 cerium oxide Inorganic materials 0.000 claims description 8
- 239000013078 crystal Substances 0.000 claims description 8
- 238000004519 manufacturing process Methods 0.000 claims description 8
- PLDDOISOJJCEMH-UHFFFAOYSA-N neodymium(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Nd+3].[Nd+3] PLDDOISOJJCEMH-UHFFFAOYSA-N 0.000 claims description 8
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 claims description 8
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 7
- 239000002243 precursor Substances 0.000 claims description 7
- 230000008569 process Effects 0.000 claims description 7
- 238000002844 melting Methods 0.000 claims description 5
- 230000008018 melting Effects 0.000 claims description 5
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims description 5
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 4
- VQCBHWLJZDBHOS-UHFFFAOYSA-N erbium(iii) oxide Chemical compound O=[Er]O[Er]=O VQCBHWLJZDBHOS-UHFFFAOYSA-N 0.000 claims description 4
- 229910001940 europium oxide Inorganic materials 0.000 claims description 4
- AEBZCFFCDTZXHP-UHFFFAOYSA-N europium(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Eu+3].[Eu+3] AEBZCFFCDTZXHP-UHFFFAOYSA-N 0.000 claims description 4
- 229910001938 gadolinium oxide Inorganic materials 0.000 claims description 4
- 229940075613 gadolinium oxide Drugs 0.000 claims description 4
- CMIHHWBVHJVIGI-UHFFFAOYSA-N gadolinium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[Gd+3].[Gd+3] CMIHHWBVHJVIGI-UHFFFAOYSA-N 0.000 claims description 4
- MMKQUGHLEMYQSG-UHFFFAOYSA-N oxygen(2-);praseodymium(3+) Chemical compound [O-2].[O-2].[O-2].[Pr+3].[Pr+3] MMKQUGHLEMYQSG-UHFFFAOYSA-N 0.000 claims description 4
- 229910003447 praseodymium oxide Inorganic materials 0.000 claims description 4
- ZIKATJAYWZUJPY-UHFFFAOYSA-N thulium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[Tm+3].[Tm+3] ZIKATJAYWZUJPY-UHFFFAOYSA-N 0.000 claims description 4
- 229910000449 hafnium oxide Inorganic materials 0.000 claims description 3
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 claims description 3
- 229910000480 nickel oxide Inorganic materials 0.000 claims description 3
- GNRSAWUEBMWBQH-UHFFFAOYSA-N oxonickel Chemical compound [Ni]=O GNRSAWUEBMWBQH-UHFFFAOYSA-N 0.000 claims description 3
- 229910001404 rare earth metal oxide Inorganic materials 0.000 claims description 3
- HYXGAEYDKFCVMU-UHFFFAOYSA-N scandium oxide Chemical compound O=[Sc]O[Sc]=O HYXGAEYDKFCVMU-UHFFFAOYSA-N 0.000 claims description 3
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 3
- QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical compound [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 claims description 2
- 239000005751 Copper oxide Substances 0.000 claims description 2
- XFQUNBSJKRQLNL-UHFFFAOYSA-N [O--].[O--].[O--].[O--].[Y+3].[Ta+5] Chemical compound [O--].[O--].[O--].[O--].[Y+3].[Ta+5] XFQUNBSJKRQLNL-UHFFFAOYSA-N 0.000 claims description 2
- UPEMFLOMQVFMCZ-UHFFFAOYSA-N [O--].[O--].[O--].[Pm+3].[Pm+3] Chemical compound [O--].[O--].[O--].[Pm+3].[Pm+3] UPEMFLOMQVFMCZ-UHFFFAOYSA-N 0.000 claims description 2
- 229910000431 copper oxide Inorganic materials 0.000 claims description 2
- 229910003440 dysprosium oxide Inorganic materials 0.000 claims description 2
- NLQFUUYNQFMIJW-UHFFFAOYSA-N dysprosium(iii) oxide Chemical compound O=[Dy]O[Dy]=O NLQFUUYNQFMIJW-UHFFFAOYSA-N 0.000 claims description 2
- YBMRDBCBODYGJE-UHFFFAOYSA-N germanium oxide Inorganic materials O=[Ge]=O YBMRDBCBODYGJE-UHFFFAOYSA-N 0.000 claims description 2
- JYTUFVYWTIKZGR-UHFFFAOYSA-N holmium oxide Inorganic materials [O][Ho]O[Ho][O] JYTUFVYWTIKZGR-UHFFFAOYSA-N 0.000 claims description 2
- OWCYYNSBGXMRQN-UHFFFAOYSA-N holmium(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Ho+3].[Ho+3] OWCYYNSBGXMRQN-UHFFFAOYSA-N 0.000 claims description 2
- 229910052746 lanthanum Inorganic materials 0.000 claims description 2
- 229910003443 lutetium oxide Inorganic materials 0.000 claims description 2
- OMRLRLKIWPPBAY-UHFFFAOYSA-N niobium(5+) oxygen(2-) yttrium(3+) Chemical compound [O--].[O--].[O--].[O--].[Y+3].[Nb+5] OMRLRLKIWPPBAY-UHFFFAOYSA-N 0.000 claims description 2
- 230000003647 oxidation Effects 0.000 claims description 2
- 238000007254 oxidation reaction Methods 0.000 claims description 2
- MPARYNQUYZOBJM-UHFFFAOYSA-N oxo(oxolutetiooxy)lutetium Chemical compound O=[Lu]O[Lu]=O MPARYNQUYZOBJM-UHFFFAOYSA-N 0.000 claims description 2
- PVADDRMAFCOOPC-UHFFFAOYSA-N oxogermanium Chemical compound [Ge]=O PVADDRMAFCOOPC-UHFFFAOYSA-N 0.000 claims description 2
- UZLYXNNZYFBAQO-UHFFFAOYSA-N oxygen(2-);ytterbium(3+) Chemical compound [O-2].[O-2].[O-2].[Yb+3].[Yb+3] UZLYXNNZYFBAQO-UHFFFAOYSA-N 0.000 claims description 2
- KKCBUQHMOMHUOY-UHFFFAOYSA-N sodium oxide Chemical compound [O-2].[Na+].[Na+] KKCBUQHMOMHUOY-UHFFFAOYSA-N 0.000 claims description 2
- 229910001948 sodium oxide Inorganic materials 0.000 claims description 2
- 229910003451 terbium oxide Inorganic materials 0.000 claims description 2
- SCRZPWWVSXWCMC-UHFFFAOYSA-N terbium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[Tb+3].[Tb+3] SCRZPWWVSXWCMC-UHFFFAOYSA-N 0.000 claims description 2
- 229910003454 ytterbium oxide Inorganic materials 0.000 claims description 2
- 229940075624 ytterbium oxide Drugs 0.000 claims description 2
- 229910052727 yttrium Inorganic materials 0.000 claims description 2
- 239000011787 zinc oxide Substances 0.000 claims description 2
- 229910001954 samarium oxide Inorganic materials 0.000 claims 3
- 229940075630 samarium oxide Drugs 0.000 claims 3
- FKTOIHSPIPYAPE-UHFFFAOYSA-N samarium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[Sm+3].[Sm+3] FKTOIHSPIPYAPE-UHFFFAOYSA-N 0.000 claims 3
- 229940075616 europium oxide Drugs 0.000 claims 2
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 claims 1
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 claims 1
- 239000003082 abrasive agent Substances 0.000 abstract description 49
- 238000000227 grinding Methods 0.000 description 176
- 239000000843 powder Substances 0.000 description 137
- 230000000052 comparative effect Effects 0.000 description 114
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 104
- 238000012360 testing method Methods 0.000 description 94
- 239000000203 mixture Substances 0.000 description 93
- 229910052786 argon Inorganic materials 0.000 description 52
- 239000000047 product Substances 0.000 description 49
- 229910001233 yttria-stabilized zirconia Inorganic materials 0.000 description 42
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 40
- 238000001816 cooling Methods 0.000 description 38
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 36
- -1 gamma-alumina monohydrate Chemical class 0.000 description 32
- 239000006185 dispersion Substances 0.000 description 30
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- 239000002184 metal Substances 0.000 description 30
- 238000005245 sintering Methods 0.000 description 26
- 239000002002 slurry Substances 0.000 description 26
- YXVFQADLFFNVDS-UHFFFAOYSA-N diammonium citrate Chemical compound [NH4+].[NH4+].[O-]C(=O)CC(O)(C(=O)O)CC([O-])=O YXVFQADLFFNVDS-UHFFFAOYSA-N 0.000 description 23
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- 229910002085 magnesia-stabilized zirconia Inorganic materials 0.000 description 18
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 16
- 239000004698 Polyethylene Substances 0.000 description 15
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- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 10
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- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 description 8
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- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/48—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates
- C04B35/486—Fine ceramics
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- C—CHEMISTRY; METALLURGY
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- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/48—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates
- C04B35/486—Fine ceramics
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- C04B35/4885—Composites with aluminium oxide
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- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
- C04B35/62605—Treating the starting powders individually or as mixtures
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- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
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- C04B35/6262—Milling of calcined, sintered clinker or ceramics
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- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
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Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/081,404 US6749653B2 (en) | 2002-02-21 | 2002-02-21 | Abrasive particles containing sintered, polycrystalline zirconia |
| PCT/US2002/039725 WO2003072678A1 (en) | 2002-02-21 | 2002-12-12 | Abrasive particles containing sintered, polycrystalline zirconia |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2005518474A true JP2005518474A (ja) | 2005-06-23 |
| JP2005518474A5 JP2005518474A5 (https=) | 2006-02-02 |
Family
ID=27765258
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003571370A Pending JP2005518474A (ja) | 2002-02-21 | 2002-12-12 | 焼結された多結晶質ジルコニアを含有する研磨粒子 |
Country Status (10)
| Country | Link |
|---|---|
| US (1) | US6749653B2 (https=) |
| EP (1) | EP1478711B1 (https=) |
| JP (1) | JP2005518474A (https=) |
| KR (1) | KR20040089653A (https=) |
| CN (1) | CN1328012C (https=) |
| AT (1) | ATE359338T1 (https=) |
| AU (1) | AU2002361646A1 (https=) |
| BR (1) | BR0215587A (https=) |
| DE (1) | DE60219532T2 (https=) |
| WO (1) | WO2003072678A1 (https=) |
Cited By (4)
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| JP2007223892A (ja) * | 2006-02-17 | 2007-09-06 | Saint-Gobain Centre De Recherches & D'etudes Europeen | アルミア−酸化チタン−ジルコニア溶融粒子 |
| JP2012201884A (ja) * | 2012-01-25 | 2012-10-22 | Mie Industry & Enterprise Support Center | ガラス用研磨材 |
| JP2014205586A (ja) * | 2013-04-11 | 2014-10-30 | 株式会社ニッカトー | ジルコニア質焼結体、ジルコニア質焼結体からなる粉砕・分散用メディア |
| JP2019527288A (ja) * | 2016-06-22 | 2019-09-26 | イメルテック ソシエテ パル アクシオン サンプリフィエ | ボーキサイト中に存在する酸化物を主成分とした焼結研磨粒子 |
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| CN117655937B (zh) * | 2024-02-02 | 2024-04-26 | 四川江天科技有限公司 | 一种用于水晶玻璃抛光的稀土抛光盘及其制备方法 |
| CN118184271B (zh) * | 2024-04-26 | 2024-09-17 | 山东鲁泰装配式装修材料有限公司 | 一种用于多晶硅厂房的防静电装饰板及其制备方法 |
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-
2002
- 2002-02-21 US US10/081,404 patent/US6749653B2/en not_active Expired - Lifetime
- 2002-12-12 JP JP2003571370A patent/JP2005518474A/ja active Pending
- 2002-12-12 CN CNB028281306A patent/CN1328012C/zh not_active Expired - Fee Related
- 2002-12-12 WO PCT/US2002/039725 patent/WO2003072678A1/en not_active Ceased
- 2002-12-12 BR BRPI0215587-7A patent/BR0215587A/pt not_active IP Right Cessation
- 2002-12-12 DE DE60219532T patent/DE60219532T2/de not_active Expired - Fee Related
- 2002-12-12 EP EP02797285A patent/EP1478711B1/en not_active Expired - Lifetime
- 2002-12-12 KR KR10-2004-7013013A patent/KR20040089653A/ko not_active Ceased
- 2002-12-12 AT AT02797285T patent/ATE359338T1/de not_active IP Right Cessation
- 2002-12-12 AU AU2002361646A patent/AU2002361646A1/en not_active Abandoned
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007223892A (ja) * | 2006-02-17 | 2007-09-06 | Saint-Gobain Centre De Recherches & D'etudes Europeen | アルミア−酸化チタン−ジルコニア溶融粒子 |
| JP2012201884A (ja) * | 2012-01-25 | 2012-10-22 | Mie Industry & Enterprise Support Center | ガラス用研磨材 |
| JP2014205586A (ja) * | 2013-04-11 | 2014-10-30 | 株式会社ニッカトー | ジルコニア質焼結体、ジルコニア質焼結体からなる粉砕・分散用メディア |
| JP2019527288A (ja) * | 2016-06-22 | 2019-09-26 | イメルテック ソシエテ パル アクシオン サンプリフィエ | ボーキサイト中に存在する酸化物を主成分とした焼結研磨粒子 |
Also Published As
| Publication number | Publication date |
|---|---|
| AU2002361646A1 (en) | 2003-09-09 |
| CN1620490A (zh) | 2005-05-25 |
| WO2003072678A1 (en) | 2003-09-04 |
| US20030172594A1 (en) | 2003-09-18 |
| CN1328012C (zh) | 2007-07-25 |
| BR0215587A (pt) | 2006-06-06 |
| EP1478711A1 (en) | 2004-11-24 |
| US6749653B2 (en) | 2004-06-15 |
| EP1478711B1 (en) | 2007-04-11 |
| KR20040089653A (ko) | 2004-10-21 |
| DE60219532D1 (de) | 2007-05-24 |
| ATE359338T1 (de) | 2007-05-15 |
| DE60219532T2 (de) | 2007-12-27 |
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