JP2005515951A5 - - Google Patents
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- Publication number
- JP2005515951A5 JP2005515951A5 JP2003545864A JP2003545864A JP2005515951A5 JP 2005515951 A5 JP2005515951 A5 JP 2005515951A5 JP 2003545864 A JP2003545864 A JP 2003545864A JP 2003545864 A JP2003545864 A JP 2003545864A JP 2005515951 A5 JP2005515951 A5 JP 2005515951A5
- Authority
- JP
- Japan
- Prior art keywords
- polycrystalline silicon
- silicon
- crucible
- unmelted
- wedge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims 95
- 238000000034 method Methods 0.000 claims 64
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 33
- 229910052710 silicon Inorganic materials 0.000 claims 33
- 239000010703 silicon Substances 0.000 claims 33
- 238000000151 deposition Methods 0.000 claims 16
- 230000008021 deposition Effects 0.000 claims 14
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims 9
- 230000000903 blocking effect Effects 0.000 claims 4
- 238000010438 heat treatment Methods 0.000 claims 2
- 229920005591 polysilicon Polymers 0.000 claims 2
- 230000008018 melting Effects 0.000 claims 1
- 238000002844 melting Methods 0.000 claims 1
- 239000012768 molten material Substances 0.000 claims 1
- 239000007921 spray Substances 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/002,862 US20030101924A1 (en) | 2001-11-15 | 2001-11-15 | Intermittent feeding technique for increasing the melting rate of polycrystalline silicon |
| PCT/US2002/036169 WO2003044249A1 (en) | 2001-11-15 | 2002-11-12 | Intermittent feeding technique for increasing the melting rate of polycrystalline silicon |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2005515951A JP2005515951A (ja) | 2005-06-02 |
| JP2005515951A5 true JP2005515951A5 (enExample) | 2005-12-22 |
| JP4233453B2 JP4233453B2 (ja) | 2009-03-04 |
Family
ID=21702897
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003545864A Expired - Fee Related JP4233453B2 (ja) | 2001-11-15 | 2002-11-12 | 多結晶シリコンの溶融速度を向上させるための間欠的供給技術 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US20030101924A1 (enExample) |
| EP (2) | EP1820885A3 (enExample) |
| JP (1) | JP4233453B2 (enExample) |
| KR (2) | KR100860440B1 (enExample) |
| CN (2) | CN101054717B (enExample) |
| DE (1) | DE60220939T2 (enExample) |
| TW (1) | TWI250230B (enExample) |
| WO (1) | WO2003044249A1 (enExample) |
Families Citing this family (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8021483B2 (en) | 2002-02-20 | 2011-09-20 | Hemlock Semiconductor Corporation | Flowable chips and methods for the preparation and use of same, and apparatus for use in the methods |
| US7141114B2 (en) * | 2004-06-30 | 2006-11-28 | Rec Silicon Inc | Process for producing a crystalline silicon ingot |
| KR101470814B1 (ko) | 2006-01-20 | 2014-12-09 | 에이엠지 아이디얼캐스트 솔라 코포레이션 | 광전 변환 소자용 단결정 캐스트 실리콘 및 단결정 캐스트 실리콘 바디들을 제조하는 방법 및 장치 |
| JP5061728B2 (ja) * | 2007-05-30 | 2012-10-31 | 信越半導体株式会社 | シリコン単結晶の育成方法 |
| JP2010534189A (ja) * | 2007-07-20 | 2010-11-04 | ビーピー・コーポレーション・ノース・アメリカ・インコーポレーテッド | シード結晶からキャストシリコンを製造するための方法及び装置 |
| US8440157B2 (en) * | 2007-07-20 | 2013-05-14 | Amg Idealcast Solar Corporation | Methods and apparatuses for manufacturing cast silicon from seed crystals |
| US8591649B2 (en) | 2007-07-25 | 2013-11-26 | Advanced Metallurgical Group Idealcast Solar Corp. | Methods for manufacturing geometric multi-crystalline cast materials |
| WO2009015167A1 (en) | 2007-07-25 | 2009-01-29 | Bp Corporation North America Inc. | Methods for manufacturing monocrystalline or near-monocrystalline cast materials |
| US20090120353A1 (en) * | 2007-11-13 | 2009-05-14 | Memc Electronic Materials, Inc. | Reduction of air pockets in silicon crystals by avoiding the introduction of nearly-insoluble gases into the melt |
| EP2072645B2 (en) † | 2007-12-19 | 2014-12-24 | Schott AG | Method for producing a monocrystalline or polycrystalline semiconductor material |
| DE102007061704A1 (de) * | 2007-12-19 | 2009-09-10 | Schott Ag | Verfahren zur Herstellung eines ein- oder polykristallinen Materials |
| TW201012978A (en) * | 2008-08-27 | 2010-04-01 | Bp Corp North America Inc | Apparatus and method of use for a casting system with independent melting and solidification |
| JP5777336B2 (ja) * | 2010-12-28 | 2015-09-09 | ジルトロニック アクチエンゲゼルシャフトSiltronic AG | 多結晶シリコン原料のリチャージ方法 |
| CN103397389B (zh) * | 2013-07-30 | 2016-08-10 | 英利能源(中国)有限公司 | 单晶棒的生产方法 |
| CN103643286B (zh) * | 2013-12-13 | 2016-08-17 | 英利集团有限公司 | 单晶炉的加料方法 |
| CN106222750A (zh) * | 2016-09-30 | 2016-12-14 | 中国电子科技集团公司第二十六研究所 | 一种硅酸镓镧系列晶体生长方法 |
| CN108018602A (zh) * | 2016-11-03 | 2018-05-11 | 上海新昇半导体科技有限公司 | 自动进料系统及进料方法 |
| US12428750B2 (en) | 2022-02-25 | 2025-09-30 | Globalwafers Co., Ltd. | Ingot puller apparatus having silicon feed tubes with kick plates |
Family Cites Families (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5059410A (en) * | 1985-08-01 | 1991-10-22 | Ethyl Corporation | Production of silicon |
| US5205998A (en) * | 1985-08-01 | 1993-04-27 | Ethyl Corporation | Angle of repose valve |
| JPH0633218B2 (ja) * | 1987-12-08 | 1994-05-02 | 日本鋼管株式会社 | シリコン単結晶の製造装置 |
| EP0340941A1 (en) * | 1988-04-28 | 1989-11-08 | Nkk Corporation | Method and apparatus for manufacturing silicon single crystals |
| US5037503A (en) * | 1988-05-31 | 1991-08-06 | Osaka Titanium Co., Ltd. | Method for growing silicon single crystal |
| FI901413A7 (fi) * | 1989-03-30 | 1990-10-01 | Nippon Kokan Kk | Laite piiyksittäiskiteiden valmistamiseksi |
| JP2525246B2 (ja) * | 1989-07-05 | 1996-08-14 | 東芝セラミックス株式会社 | 粒状シリコン原料供給装置 |
| US5569325A (en) * | 1991-04-22 | 1996-10-29 | Condea Vista Company | Process for growing crystals |
| JPH0511788A (ja) * | 1991-06-28 | 1993-01-22 | Y & Y:Kk | 車載用疑似エンジン音再生装置 |
| JP2754104B2 (ja) * | 1991-10-15 | 1998-05-20 | 信越半導体株式会社 | 半導体単結晶引上用粒状原料供給装置 |
| DE4323793A1 (de) * | 1993-07-15 | 1995-01-19 | Wacker Chemitronic | Verfahren zur Herstellung von Stäben oder Blöcken aus beim Erstarren sich ausdehnendem Halbleitermaterial durch Kristallisieren einer aus Granulat erzeugten Schmelze sowie Vorrichtung zu seiner Durchführung |
| JP2935337B2 (ja) * | 1994-11-21 | 1999-08-16 | 信越半導体株式会社 | 粒状原料の供給装置およびその供給方法 |
| US5588993A (en) * | 1995-07-25 | 1996-12-31 | Memc Electronic Materials, Inc. | Method for preparing molten silicon melt from polycrystalline silicon charge |
| US5642751A (en) * | 1995-09-14 | 1997-07-01 | Crawley; Michael F. | Valve assembly |
| TW503265B (en) * | 1995-12-28 | 2002-09-21 | Mitsubishi Material Silicon | Single crystal pulling apparatus |
| TW429273B (en) * | 1996-02-08 | 2001-04-11 | Shinetsu Handotai Kk | Method for feeding garnular silicon material, feed pipe used in the method, and method of manufacturing a silicon monocrystal |
| JPH10158088A (ja) * | 1996-11-25 | 1998-06-16 | Ebara Corp | 固体材料の製造方法及びその製造装置 |
| JP3189764B2 (ja) * | 1997-09-29 | 2001-07-16 | 住友金属工業株式会社 | シリコン単結晶原料の溶解方法 |
| US5919303A (en) * | 1997-10-16 | 1999-07-06 | Memc Electronic Materials, Inc. | Process for preparing a silicon melt from a polysilicon charge |
| JPH11255588A (ja) * | 1998-03-12 | 1999-09-21 | Super Silicon Kenkyusho:Kk | 単結晶原料供給装置及び単結晶原料供給方法 |
| US6284040B1 (en) * | 1999-01-13 | 2001-09-04 | Memc Electronic Materials, Inc. | Process of stacking and melting polycrystalline silicon for high quality single crystal production |
| CN1095505C (zh) * | 2000-03-30 | 2002-12-04 | 天津市环欧半导体材料技术有限公司 | 生产硅单晶的直拉区熔法 |
| US6454851B1 (en) * | 2000-11-09 | 2002-09-24 | Memc Electronic Materials, Inc. | Method for preparing molten silicon melt from polycrystalline silicon charge |
-
2001
- 2001-11-15 US US10/002,862 patent/US20030101924A1/en not_active Abandoned
-
2002
- 2002-11-12 KR KR1020077006666A patent/KR100860440B1/ko not_active Expired - Fee Related
- 2002-11-12 CN CN2007100860084A patent/CN101054717B/zh not_active Expired - Fee Related
- 2002-11-12 EP EP07104628A patent/EP1820885A3/en not_active Withdrawn
- 2002-11-12 WO PCT/US2002/036169 patent/WO2003044249A1/en not_active Ceased
- 2002-11-12 JP JP2003545864A patent/JP4233453B2/ja not_active Expired - Fee Related
- 2002-11-12 EP EP02789582A patent/EP1446517B1/en not_active Expired - Lifetime
- 2002-11-12 KR KR1020047007450A patent/KR100811989B1/ko not_active Expired - Fee Related
- 2002-11-12 CN CNB028223144A patent/CN1314842C/zh not_active Expired - Fee Related
- 2002-11-12 DE DE60220939T patent/DE60220939T2/de not_active Expired - Lifetime
- 2002-11-15 TW TW091133508A patent/TWI250230B/zh not_active IP Right Cessation
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