JP2005515951A5 - - Google Patents

Download PDF

Info

Publication number
JP2005515951A5
JP2005515951A5 JP2003545864A JP2003545864A JP2005515951A5 JP 2005515951 A5 JP2005515951 A5 JP 2005515951A5 JP 2003545864 A JP2003545864 A JP 2003545864A JP 2003545864 A JP2003545864 A JP 2003545864A JP 2005515951 A5 JP2005515951 A5 JP 2005515951A5
Authority
JP
Japan
Prior art keywords
polycrystalline silicon
silicon
crucible
unmelted
wedge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2003545864A
Other languages
English (en)
Japanese (ja)
Other versions
JP4233453B2 (ja
JP2005515951A (ja
Filing date
Publication date
Priority claimed from US10/002,862 external-priority patent/US20030101924A1/en
Application filed filed Critical
Publication of JP2005515951A publication Critical patent/JP2005515951A/ja
Publication of JP2005515951A5 publication Critical patent/JP2005515951A5/ja
Application granted granted Critical
Publication of JP4233453B2 publication Critical patent/JP4233453B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2003545864A 2001-11-15 2002-11-12 多結晶シリコンの溶融速度を向上させるための間欠的供給技術 Expired - Fee Related JP4233453B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/002,862 US20030101924A1 (en) 2001-11-15 2001-11-15 Intermittent feeding technique for increasing the melting rate of polycrystalline silicon
PCT/US2002/036169 WO2003044249A1 (en) 2001-11-15 2002-11-12 Intermittent feeding technique for increasing the melting rate of polycrystalline silicon

Publications (3)

Publication Number Publication Date
JP2005515951A JP2005515951A (ja) 2005-06-02
JP2005515951A5 true JP2005515951A5 (enExample) 2005-12-22
JP4233453B2 JP4233453B2 (ja) 2009-03-04

Family

ID=21702897

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003545864A Expired - Fee Related JP4233453B2 (ja) 2001-11-15 2002-11-12 多結晶シリコンの溶融速度を向上させるための間欠的供給技術

Country Status (8)

Country Link
US (1) US20030101924A1 (enExample)
EP (2) EP1820885A3 (enExample)
JP (1) JP4233453B2 (enExample)
KR (2) KR100860440B1 (enExample)
CN (2) CN101054717B (enExample)
DE (1) DE60220939T2 (enExample)
TW (1) TWI250230B (enExample)
WO (1) WO2003044249A1 (enExample)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8021483B2 (en) 2002-02-20 2011-09-20 Hemlock Semiconductor Corporation Flowable chips and methods for the preparation and use of same, and apparatus for use in the methods
US7141114B2 (en) * 2004-06-30 2006-11-28 Rec Silicon Inc Process for producing a crystalline silicon ingot
KR101470814B1 (ko) 2006-01-20 2014-12-09 에이엠지 아이디얼캐스트 솔라 코포레이션 광전 변환 소자용 단결정 캐스트 실리콘 및 단결정 캐스트 실리콘 바디들을 제조하는 방법 및 장치
JP5061728B2 (ja) * 2007-05-30 2012-10-31 信越半導体株式会社 シリコン単結晶の育成方法
JP2010534189A (ja) * 2007-07-20 2010-11-04 ビーピー・コーポレーション・ノース・アメリカ・インコーポレーテッド シード結晶からキャストシリコンを製造するための方法及び装置
US8440157B2 (en) * 2007-07-20 2013-05-14 Amg Idealcast Solar Corporation Methods and apparatuses for manufacturing cast silicon from seed crystals
US8591649B2 (en) 2007-07-25 2013-11-26 Advanced Metallurgical Group Idealcast Solar Corp. Methods for manufacturing geometric multi-crystalline cast materials
WO2009015167A1 (en) 2007-07-25 2009-01-29 Bp Corporation North America Inc. Methods for manufacturing monocrystalline or near-monocrystalline cast materials
US20090120353A1 (en) * 2007-11-13 2009-05-14 Memc Electronic Materials, Inc. Reduction of air pockets in silicon crystals by avoiding the introduction of nearly-insoluble gases into the melt
EP2072645B2 (en) 2007-12-19 2014-12-24 Schott AG Method for producing a monocrystalline or polycrystalline semiconductor material
DE102007061704A1 (de) * 2007-12-19 2009-09-10 Schott Ag Verfahren zur Herstellung eines ein- oder polykristallinen Materials
TW201012978A (en) * 2008-08-27 2010-04-01 Bp Corp North America Inc Apparatus and method of use for a casting system with independent melting and solidification
JP5777336B2 (ja) * 2010-12-28 2015-09-09 ジルトロニック アクチエンゲゼルシャフトSiltronic AG 多結晶シリコン原料のリチャージ方法
CN103397389B (zh) * 2013-07-30 2016-08-10 英利能源(中国)有限公司 单晶棒的生产方法
CN103643286B (zh) * 2013-12-13 2016-08-17 英利集团有限公司 单晶炉的加料方法
CN106222750A (zh) * 2016-09-30 2016-12-14 中国电子科技集团公司第二十六研究所 一种硅酸镓镧系列晶体生长方法
CN108018602A (zh) * 2016-11-03 2018-05-11 上海新昇半导体科技有限公司 自动进料系统及进料方法
US12428750B2 (en) 2022-02-25 2025-09-30 Globalwafers Co., Ltd. Ingot puller apparatus having silicon feed tubes with kick plates

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5059410A (en) * 1985-08-01 1991-10-22 Ethyl Corporation Production of silicon
US5205998A (en) * 1985-08-01 1993-04-27 Ethyl Corporation Angle of repose valve
JPH0633218B2 (ja) * 1987-12-08 1994-05-02 日本鋼管株式会社 シリコン単結晶の製造装置
EP0340941A1 (en) * 1988-04-28 1989-11-08 Nkk Corporation Method and apparatus for manufacturing silicon single crystals
US5037503A (en) * 1988-05-31 1991-08-06 Osaka Titanium Co., Ltd. Method for growing silicon single crystal
FI901413A7 (fi) * 1989-03-30 1990-10-01 Nippon Kokan Kk Laite piiyksittäiskiteiden valmistamiseksi
JP2525246B2 (ja) * 1989-07-05 1996-08-14 東芝セラミックス株式会社 粒状シリコン原料供給装置
US5569325A (en) * 1991-04-22 1996-10-29 Condea Vista Company Process for growing crystals
JPH0511788A (ja) * 1991-06-28 1993-01-22 Y & Y:Kk 車載用疑似エンジン音再生装置
JP2754104B2 (ja) * 1991-10-15 1998-05-20 信越半導体株式会社 半導体単結晶引上用粒状原料供給装置
DE4323793A1 (de) * 1993-07-15 1995-01-19 Wacker Chemitronic Verfahren zur Herstellung von Stäben oder Blöcken aus beim Erstarren sich ausdehnendem Halbleitermaterial durch Kristallisieren einer aus Granulat erzeugten Schmelze sowie Vorrichtung zu seiner Durchführung
JP2935337B2 (ja) * 1994-11-21 1999-08-16 信越半導体株式会社 粒状原料の供給装置およびその供給方法
US5588993A (en) * 1995-07-25 1996-12-31 Memc Electronic Materials, Inc. Method for preparing molten silicon melt from polycrystalline silicon charge
US5642751A (en) * 1995-09-14 1997-07-01 Crawley; Michael F. Valve assembly
TW503265B (en) * 1995-12-28 2002-09-21 Mitsubishi Material Silicon Single crystal pulling apparatus
TW429273B (en) * 1996-02-08 2001-04-11 Shinetsu Handotai Kk Method for feeding garnular silicon material, feed pipe used in the method, and method of manufacturing a silicon monocrystal
JPH10158088A (ja) * 1996-11-25 1998-06-16 Ebara Corp 固体材料の製造方法及びその製造装置
JP3189764B2 (ja) * 1997-09-29 2001-07-16 住友金属工業株式会社 シリコン単結晶原料の溶解方法
US5919303A (en) * 1997-10-16 1999-07-06 Memc Electronic Materials, Inc. Process for preparing a silicon melt from a polysilicon charge
JPH11255588A (ja) * 1998-03-12 1999-09-21 Super Silicon Kenkyusho:Kk 単結晶原料供給装置及び単結晶原料供給方法
US6284040B1 (en) * 1999-01-13 2001-09-04 Memc Electronic Materials, Inc. Process of stacking and melting polycrystalline silicon for high quality single crystal production
CN1095505C (zh) * 2000-03-30 2002-12-04 天津市环欧半导体材料技术有限公司 生产硅单晶的直拉区熔法
US6454851B1 (en) * 2000-11-09 2002-09-24 Memc Electronic Materials, Inc. Method for preparing molten silicon melt from polycrystalline silicon charge

Similar Documents

Publication Publication Date Title
JP4233453B2 (ja) 多結晶シリコンの溶融速度を向上させるための間欠的供給技術
US6840998B2 (en) Silicon single crystal produced by crucible-free float zone pulling
US9435053B2 (en) Apparatus for manufacturing ingot
JPH09328391A5 (enExample)
CN101006205B (zh) 向晶体形成装置装载熔融源材料的熔化器组件和方法
JP3955826B2 (ja) 半導体材料から単結晶を製造する方法および装置、およびこの種の単結晶
CN102639438A (zh) 用于生产硅的反应器和方法
TW429273B (en) Method for feeding garnular silicon material, feed pipe used in the method, and method of manufacturing a silicon monocrystal
JP2013256406A (ja) 原料充填方法及び単結晶の製造方法
US9702055B2 (en) Method for manufacturing single-crystal silicon
JP2525294B2 (ja) 粒状シリコン供給装置
JPH11292682A (ja) シリコン単結晶の製造方法および製造装置
JPS59169654A (ja) 溶融金属の化学成分調整方法
JPS598694A (ja) 結晶成長装置
JPH09255470A (ja) 単結晶用原料の供給方法
JPH03199189A (ja) 半導体単結晶の製造方法
WO2007123169A1 (ja) 粒状シリコンの製造方法及び製造装置
JPH0623918Y2 (ja) 電子ビーム溶解炉用原料供給フィーダー
JPH09208367A (ja) 二重ルツボへの初期のシリコン原料の供給方法
JP2005271078A (ja) 不活性ガス処理構造及びこれを有するシリコン鋳造装置、シリコン鋳造方法及びこれを用いた多結晶シリコンインゴット並びに多結晶シリコン基板
KR20200073727A (ko) 전도성 물질 비드 제조방법 및 그 제조장치
JP2567312B2 (ja) シリコン単結晶の製造装置及び製造方法
JPH0543107Y2 (enExample)
JPH0797292A (ja) 連続チャージ法における原料供給方法
JPH038791A (ja) シリコン単結晶の製造方法及び製造装置