JP2005513277A - 目的物のコーティング - Google Patents
目的物のコーティング Download PDFInfo
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- JP2005513277A JP2005513277A JP2003556681A JP2003556681A JP2005513277A JP 2005513277 A JP2005513277 A JP 2005513277A JP 2003556681 A JP2003556681 A JP 2003556681A JP 2003556681 A JP2003556681 A JP 2003556681A JP 2005513277 A JP2005513277 A JP 2005513277A
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- JP
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- Prior art keywords
- oxide ceramic
- fluoropolymer
- ceramic layer
- layer
- aluminum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 239000011248 coating agent Substances 0.000 title claims abstract description 9
- 238000000576 coating method Methods 0.000 title claims abstract description 9
- 229920002313 fluoropolymer Polymers 0.000 claims abstract description 36
- 239000004811 fluoropolymer Substances 0.000 claims abstract description 36
- 238000000034 method Methods 0.000 claims abstract description 34
- 239000011224 oxide ceramic Substances 0.000 claims abstract description 26
- 229910052574 oxide ceramic Inorganic materials 0.000 claims abstract description 26
- 238000005470 impregnation Methods 0.000 claims abstract description 25
- 229910052751 metal Inorganic materials 0.000 claims abstract description 19
- 239000002184 metal Substances 0.000 claims abstract description 19
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 13
- 239000000956 alloy Substances 0.000 claims abstract description 13
- 230000004888 barrier function Effects 0.000 claims abstract description 10
- 238000001035 drying Methods 0.000 claims abstract description 6
- 238000009736 wetting Methods 0.000 claims abstract description 4
- 229910052782 aluminium Inorganic materials 0.000 claims description 13
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 13
- 229910000838 Al alloy Inorganic materials 0.000 claims description 7
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 claims description 6
- 239000011777 magnesium Substances 0.000 claims description 6
- 229910052749 magnesium Inorganic materials 0.000 claims description 6
- 239000010936 titanium Substances 0.000 claims description 6
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 5
- 229920000058 polyacrylate Polymers 0.000 claims description 5
- 229920000642 polymer Polymers 0.000 claims description 5
- 229910052719 titanium Inorganic materials 0.000 claims description 5
- 150000002739 metals Chemical class 0.000 claims description 4
- 238000002048 anodisation reaction Methods 0.000 claims description 3
- -1 fluorinated aliphatic silyl ethers Chemical class 0.000 claims description 3
- 239000000126 substance Substances 0.000 claims description 3
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims description 2
- KPUWHANPEXNPJT-UHFFFAOYSA-N disiloxane Chemical class [SiH3]O[SiH3] KPUWHANPEXNPJT-UHFFFAOYSA-N 0.000 claims description 2
- 150000002118 epoxides Chemical class 0.000 claims description 2
- 229910052758 niobium Inorganic materials 0.000 claims description 2
- 239000010955 niobium Substances 0.000 claims description 2
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 claims description 2
- 150000003673 urethanes Chemical class 0.000 claims description 2
- 229910052726 zirconium Inorganic materials 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 46
- 239000002904 solvent Substances 0.000 description 7
- 230000000052 comparative effect Effects 0.000 description 6
- 239000002245 particle Substances 0.000 description 6
- 239000007788 liquid Substances 0.000 description 5
- 239000011148 porous material Substances 0.000 description 5
- 238000003860 storage Methods 0.000 description 4
- 229910000789 Aluminium-silicon alloy Inorganic materials 0.000 description 3
- 239000003792 electrolyte Substances 0.000 description 3
- 229910016570 AlCu Inorganic materials 0.000 description 2
- KZBUYRJDOAKODT-UHFFFAOYSA-N Chlorine Chemical compound ClCl KZBUYRJDOAKODT-UHFFFAOYSA-N 0.000 description 2
- 229910010038 TiAl Inorganic materials 0.000 description 2
- 150000001252 acrylic acid derivatives Chemical class 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000003921 oil Substances 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 239000002243 precursor Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- BQCIDUSAKPWEOX-UHFFFAOYSA-N 1,1-Difluoroethene Chemical compound FC(F)=C BQCIDUSAKPWEOX-UHFFFAOYSA-N 0.000 description 1
- DKPFZGUDAPQIHT-UHFFFAOYSA-N Butyl acetate Natural products CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 1
- 229910018104 Ni-P Inorganic materials 0.000 description 1
- 229910018536 Ni—P Inorganic materials 0.000 description 1
- 229910001069 Ti alloy Inorganic materials 0.000 description 1
- 150000001242 acetic acid derivatives Chemical class 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 125000001931 aliphatic group Chemical group 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 239000007900 aqueous suspension Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000005524 ceramic coating Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- UUAGAQFQZIEFAH-UHFFFAOYSA-N chlorotrifluoroethylene Chemical group FC(F)=C(F)Cl UUAGAQFQZIEFAH-UHFFFAOYSA-N 0.000 description 1
- 229920001577 copolymer Polymers 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 239000010431 corundum Substances 0.000 description 1
- 238000007872 degassing Methods 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 229940079593 drug Drugs 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- XUCNUKMRBVNAPB-UHFFFAOYSA-N fluoroethene Chemical compound FC=C XUCNUKMRBVNAPB-UHFFFAOYSA-N 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- HCDGVLDPFQMKDK-UHFFFAOYSA-N hexafluoropropylene Chemical compound FC(F)=C(F)C(F)(F)F HCDGVLDPFQMKDK-UHFFFAOYSA-N 0.000 description 1
- FUZZWVXGSFPDMH-UHFFFAOYSA-N hexanoic acid Chemical compound CCCCCC(O)=O FUZZWVXGSFPDMH-UHFFFAOYSA-N 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 150000002576 ketones Chemical class 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- OTYBMLCTZGSZBG-UHFFFAOYSA-L potassium sulfate Chemical compound [K+].[K+].[O-]S([O-])(=O)=O OTYBMLCTZGSZBG-UHFFFAOYSA-L 0.000 description 1
- 229910052939 potassium sulfate Inorganic materials 0.000 description 1
- 235000011151 potassium sulphates Nutrition 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical group FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 description 1
- 229920001169 thermoplastic Polymers 0.000 description 1
- 239000004416 thermosoftening plastic Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000013022 venting Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/32—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
- C23C28/322—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer only coatings of metal elements only
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
- C04B41/81—Coating or impregnation
- C04B41/82—Coating or impregnation with organic materials
- C04B41/83—Macromolecular compounds
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/16—Flocking otherwise than by spraying
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D7/00—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials
- B05D7/24—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials for applying particular liquids or other fluent materials
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
- C25D11/02—Anodisation
- C25D11/04—Anodisation of aluminium or alloys based thereon
- C25D11/18—After-treatment, e.g. pore-sealing
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/02—Selection of particular materials
- F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2300/00—Materials; Properties thereof
- F05D2300/20—Oxide or non-oxide ceramics
- F05D2300/21—Oxide ceramics
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2300/00—Materials; Properties thereof
- F05D2300/40—Organic materials
- F05D2300/43—Synthetic polymers, e.g. plastics; Rubber
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2300/00—Materials; Properties thereof
- F05D2300/50—Intrinsic material properties or characteristics
- F05D2300/512—Hydrophobic, i.e. being or having non-wettable properties
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2300/00—Materials; Properties thereof
- F05D2300/60—Properties or characteristics given to material by treatment or manufacturing
- F05D2300/611—Coating
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Electrochemistry (AREA)
- Inorganic Chemistry (AREA)
- Structural Engineering (AREA)
- Wood Science & Technology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Laminated Bodies (AREA)
Abstract
Description
− 含浸容器内を真空に引いて目的物の孔から空気を除去し、
− 依然として真空下にある加工物が沈むまでフルオロポリマー溶液を貯蔵タンクから含浸容器に移し、
− 含浸容器を通気し、続いて圧縮空気で加圧し、
− 圧力を高めることによってフルオロポリマー溶液を貯蔵容器に再度移し、続いて脱気して常圧にし、
− 目的物を取り出し、すすぎ、
− さらなるプロセスステップを行う。
− 含浸容器内を真空に引いて部品の孔から空気を除去し、
− 通気して常圧にし、続いて圧縮空気でタンクを加圧し、
− 脱気して常圧にし、
− 加工物を取り出し、すすぎ、
− さらなるプロセスステップを行う。
シーリング材は、大気圧で部品に含浸する。フルオロポリマー溶液は、部品の孔中に生じた真空に流れ込み、それと置き換わる。
− 真空に引いて部品の孔から空気を除去し、
− 通気して常圧にし、
− フルオロポリマー溶液が含浸するように、短い間部品を含浸容器内に滞留させ、
− 加工物を取り出し、すすぎ、
− さらなるプロセスステップを行う。
アルミニウム合金AlMgSi1のサンプルシートを正常標準電解質中で陽極酸化し、平均層厚さが25μmであることが明らかになった。このサンプルシートを乾燥し、アドミタンスが140μSであることを決定した(比較例1)。
実施例1/比較例1によるアルミニウム合金のサンプルシートを厚さ20μmのプラズマ酸化層でコーティングした。このサンプルも乾燥させ、平均アドミタンスが35μSであることを決定した(比較例2)。
Claims (9)
- バルブ金属またはそれらの合金でできていて、前記金属からなる薄いバリヤ層を含み、その上に酸化物セラミックス層が設けられ、その表面がフルオロポリマーで被覆されている目的物のコーティングのための方法であって、フルオロポリマーが酸化物セラミックス層の毛細管系に真空含浸によって溶液の形で導入され、続いて溶液の濡らさない部分(non−wetting portions)を除去し乾燥させることを特徴とする方法。
- アルミニウム、マグネシウム、チタン、ニオブおよび/またはジルコニウムならびにそれらの合金をバルブ金属として使用することを特徴とする、請求項1に記載の方法。
- 高密度焼結酸化物セラミックス層からなる酸化物セラミックス層をバリヤ層上に使用し、前記高密度焼結酸化物セラミックス層の上に、プラズマ化学陽極酸化によって付着させたワイドメッシュ相互連結毛細管系を有する酸化物セラミックス層を使用することを特徴とする、請求項1または2に記載の方法。
- 厚さが40〜150μm、特に50〜120μmの酸化物セラミックス層を使用することを特徴とする、請求項1から3のいずれかに記載の方法。
- フッ素化エポキシドポリマー、シリルエーテル、特にフッ化脂肪族シリルエーテル、ポリアクリレートおよび/またはウレタンから選択されるフルオロポリマーを使用することを特徴とする、請求項1から4のいずれかに記載の方法。
- フルオロポリマーが、層厚さ1〜20μm、特に1〜5μmで適用されることを特徴とする、請求項1から5のいずれかに記載の方法。
- フルオロポリマーの導入および乾燥ステップが数回繰り返されることを特徴とする、請求項1から6のいずれかに記載の方法。
- バルブ金属からなり、請求項1から7のいずれかに記載の方法によって得られる目的物。
- ターボ分子ポンプ用のアルミニウムまたはアルミニウム合金からなるロータであることを特徴とする、請求項8に記載の目的物。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10163864A DE10163864A1 (de) | 2001-12-22 | 2001-12-22 | Beschichtung von Gegenständen |
PCT/EP2002/014375 WO2003056187A1 (de) | 2001-12-22 | 2002-12-17 | Verfahren zur beschichtung von gegenständen |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005513277A true JP2005513277A (ja) | 2005-05-12 |
JP4455885B2 JP4455885B2 (ja) | 2010-04-21 |
Family
ID=7710799
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003556681A Expired - Fee Related JP4455885B2 (ja) | 2001-12-22 | 2002-12-17 | 目的物のコーティング |
Country Status (9)
Country | Link |
---|---|
US (1) | US7323221B2 (ja) |
EP (1) | EP1485622B1 (ja) |
JP (1) | JP4455885B2 (ja) |
KR (1) | KR100894519B1 (ja) |
CN (1) | CN1608174A (ja) |
AU (1) | AU2002360993A1 (ja) |
DE (2) | DE10163864A1 (ja) |
TW (1) | TW200301318A (ja) |
WO (1) | WO2003056187A1 (ja) |
Cited By (2)
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WO2012111739A1 (ja) * | 2011-02-18 | 2012-08-23 | アイシン軽金属株式会社 | 金属部材の表面処理方法及びそれにより得られた金属部材 |
JP2014520211A (ja) * | 2011-06-24 | 2014-08-21 | エーリコン ライボルト ヴァキューム ゲゼルシャフト ミット ベシュレンクテル ハフツング | 変成層非担持の真空ポンプ部材 |
Families Citing this family (28)
Publication number | Priority date | Publication date | Assignee | Title |
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DE202004010821U1 (de) * | 2003-07-23 | 2004-12-23 | The Boc Group Plc, Windlesham | Vakuumpumpenbauteil |
GB0317126D0 (en) * | 2003-07-23 | 2003-08-27 | Boc Group Plc | Coating |
JP2006088070A (ja) * | 2004-09-24 | 2006-04-06 | Toshiba Corp | インクジェット塗布方法及び表示デバイスの製造方法 |
DE102005040648A1 (de) * | 2005-08-27 | 2007-03-01 | Leybold Vacuum Gmbh | Beschichtete Gegenstände |
FR2898289B1 (fr) * | 2006-03-10 | 2009-01-30 | Alcatel Sa | Structure d'interface entre deux pieces mecaniques en mouvement, procede pour sa realisation, et application aux pompes a vide |
DE502007003011D1 (de) * | 2006-04-29 | 2010-04-15 | Oerlikon Leybold Vacuum Gmbh | Verfahren zur herstellung von rotoren oder statoren einer turbomolekularpumpe |
JP5385146B2 (ja) | 2006-10-20 | 2014-01-08 | スリーエム イノベイティブ プロパティズ カンパニー | 易洗浄基材のための方法及びそれによる物品 |
EP1925782A1 (en) * | 2006-11-23 | 2008-05-28 | Siemens Aktiengesellschaft | Non wetable surface coating of steam turbine parts which work in wet steam |
WO2009148829A2 (en) * | 2008-06-02 | 2009-12-10 | Board Of Regents, The University Of Texas System | Method for treating hydrocarbon-bearing formations with fluorinated epoxides |
DE102009028646A1 (de) * | 2009-08-19 | 2011-02-24 | Robert Bosch Gmbh | Förderaggregat |
JP2014531326A (ja) | 2011-08-03 | 2014-11-27 | マサチューセッツ インスティテュート オブ テクノロジー | 衝突液体を操作するための物品、およびそれを製造する方法 |
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- 2002-12-17 CN CNA028259475A patent/CN1608174A/zh active Pending
- 2002-12-17 US US10/499,558 patent/US7323221B2/en not_active Expired - Lifetime
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- 2002-12-17 WO PCT/EP2002/014375 patent/WO2003056187A1/de active IP Right Grant
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Also Published As
Publication number | Publication date |
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EP1485622A1 (de) | 2004-12-15 |
KR100894519B1 (ko) | 2009-04-22 |
EP1485622B1 (de) | 2005-07-27 |
JP4455885B2 (ja) | 2010-04-21 |
KR20040081742A (ko) | 2004-09-22 |
US7323221B2 (en) | 2008-01-29 |
US20050098441A1 (en) | 2005-05-12 |
WO2003056187A1 (de) | 2003-07-10 |
DE10163864A1 (de) | 2003-07-10 |
AU2002360993A1 (en) | 2003-07-15 |
CN1608174A (zh) | 2005-04-20 |
DE50203798D1 (de) | 2005-09-01 |
TW200301318A (en) | 2003-07-01 |
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