JP2005509348A5 - - Google Patents

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Publication number
JP2005509348A5
JP2005509348A5 JP2003543190A JP2003543190A JP2005509348A5 JP 2005509348 A5 JP2005509348 A5 JP 2005509348A5 JP 2003543190 A JP2003543190 A JP 2003543190A JP 2003543190 A JP2003543190 A JP 2003543190A JP 2005509348 A5 JP2005509348 A5 JP 2005509348A5
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JP
Japan
Prior art keywords
filter
substrate
elastic
acoustic
filter device
Prior art date
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Application number
JP2003543190A
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English (en)
Japanese (ja)
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JP3987036B2 (ja
JP2005509348A (ja
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Priority claimed from PCT/EP2001/012826 external-priority patent/WO2003041273A1/en
Publication of JP2005509348A publication Critical patent/JP2005509348A/ja
Publication of JP2005509348A5 publication Critical patent/JP2005509348A5/ja
Application granted granted Critical
Publication of JP3987036B2 publication Critical patent/JP3987036B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2003543190A 2001-11-06 2001-11-06 フィルタ装置およびその製造方法 Expired - Fee Related JP3987036B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP2001/012826 WO2003041273A1 (en) 2001-11-06 2001-11-06 Filter device and method of fabricating a filter device

Publications (3)

Publication Number Publication Date
JP2005509348A JP2005509348A (ja) 2005-04-07
JP2005509348A5 true JP2005509348A5 (enExample) 2007-04-05
JP3987036B2 JP3987036B2 (ja) 2007-10-03

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ID=8164665

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003543190A Expired - Fee Related JP3987036B2 (ja) 2001-11-06 2001-11-06 フィルタ装置およびその製造方法

Country Status (5)

Country Link
US (1) US6943647B2 (enExample)
EP (1) EP1454412B1 (enExample)
JP (1) JP3987036B2 (enExample)
DE (1) DE60140319D1 (enExample)
WO (1) WO2003041273A1 (enExample)

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EP1540819A1 (en) * 2002-09-12 2005-06-15 Philips Intellectual Property & Standards GmbH Bulk acoustic waver resonator with means for suppression of pass-band ripple in bulk acoustic wave filters
JP4024741B2 (ja) 2003-10-20 2007-12-19 富士通メディアデバイス株式会社 圧電薄膜共振子及びフィルタ
US7332985B2 (en) * 2003-10-30 2008-02-19 Avago Technologies Wireless Ip (Singapore) Pte Ltd. Cavity-less film bulk acoustic resonator (FBAR) devices
JP2005260484A (ja) * 2004-03-10 2005-09-22 Tdk Corp 圧電共振器およびそれを備えた電子部品
JP2005277454A (ja) * 2004-03-22 2005-10-06 Tdk Corp 圧電共振器およびそれを備えた電子部品
US8981876B2 (en) 2004-11-15 2015-03-17 Avago Technologies General Ip (Singapore) Pte. Ltd. Piezoelectric resonator structures and electrical filters having frame elements
US7791434B2 (en) * 2004-12-22 2010-09-07 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustic resonator performance enhancement using selective metal etch and having a trench in the piezoelectric
US7598827B2 (en) 2006-06-19 2009-10-06 Maxim Integrated Products Harmonic termination of power amplifiers using BAW filter output matching circuits
US7586389B2 (en) * 2006-06-19 2009-09-08 Maxim Integrated Products, Inc. Impedance transformation and filter using bulk acoustic wave technology
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US20090053401A1 (en) * 2007-08-24 2009-02-26 Maxim Integrated Products, Inc. Piezoelectric deposition for BAW resonators
US8512800B2 (en) * 2007-12-04 2013-08-20 Triquint Semiconductor, Inc. Optimal acoustic impedance materials for polished substrate coating to suppress passband ripple in BAW resonators and filters
DE102008003820B4 (de) * 2008-01-10 2013-01-17 Epcos Ag Frontendschaltung
US7768364B2 (en) * 2008-06-09 2010-08-03 Maxim Integrated Products, Inc. Bulk acoustic resonators with multi-layer electrodes
US8030823B2 (en) * 2009-01-26 2011-10-04 Resonance Semiconductor Corporation Protected resonator
US9735338B2 (en) 2009-01-26 2017-08-15 Cymatics Laboratories Corp. Protected resonator
US8248185B2 (en) 2009-06-24 2012-08-21 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustic resonator structure comprising a bridge
US8902023B2 (en) 2009-06-24 2014-12-02 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustic resonator structure having an electrode with a cantilevered portion
JP5617523B2 (ja) * 2009-12-08 2014-11-05 株式会社村田製作所 積層型圧電薄膜フィルタの製造方法
US9243316B2 (en) 2010-01-22 2016-01-26 Avago Technologies General Ip (Singapore) Pte. Ltd. Method of fabricating piezoelectric material with selected c-axis orientation
US8796904B2 (en) 2011-10-31 2014-08-05 Avago Technologies General Ip (Singapore) Pte. Ltd. Bulk acoustic resonator comprising piezoelectric layer and inverse piezoelectric layer
DE102010033867A1 (de) 2010-08-10 2012-02-16 Epcos Ag Filteranordnung, Duplexer sowie Verfahren zur Herstellung einer Filteranordnung
US8962443B2 (en) 2011-01-31 2015-02-24 Avago Technologies General Ip (Singapore) Pte. Ltd. Semiconductor device having an airbridge and method of fabricating the same
US9136818B2 (en) 2011-02-28 2015-09-15 Avago Technologies General Ip (Singapore) Pte. Ltd. Stacked acoustic resonator comprising a bridge
US9203374B2 (en) 2011-02-28 2015-12-01 Avago Technologies General Ip (Singapore) Pte. Ltd. Film bulk acoustic resonator comprising a bridge
US9154112B2 (en) 2011-02-28 2015-10-06 Avago Technologies General Ip (Singapore) Pte. Ltd. Coupled resonator filter comprising a bridge
US9048812B2 (en) 2011-02-28 2015-06-02 Avago Technologies General Ip (Singapore) Pte. Ltd. Bulk acoustic wave resonator comprising bridge formed within piezoelectric layer
US9425764B2 (en) 2012-10-25 2016-08-23 Avago Technologies General Ip (Singapore) Pte. Ltd. Accoustic resonator having composite electrodes with integrated lateral features
US9148117B2 (en) 2011-02-28 2015-09-29 Avago Technologies General Ip (Singapore) Pte. Ltd. Coupled resonator filter comprising a bridge and frame elements
US9083302B2 (en) 2011-02-28 2015-07-14 Avago Technologies General Ip (Singapore) Pte. Ltd. Stacked bulk acoustic resonator comprising a bridge and an acoustic reflector along a perimeter of the resonator
US9484882B2 (en) * 2013-02-14 2016-11-01 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustic resonator having temperature compensation
US8575820B2 (en) 2011-03-29 2013-11-05 Avago Technologies General Ip (Singapore) Pte. Ltd. Stacked bulk acoustic resonator
US9444426B2 (en) 2012-10-25 2016-09-13 Avago Technologies General Ip (Singapore) Pte. Ltd. Accoustic resonator having integrated lateral feature and temperature compensation feature
US8350445B1 (en) 2011-06-16 2013-01-08 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Bulk acoustic resonator comprising non-piezoelectric layer and bridge
US9473106B2 (en) * 2011-06-21 2016-10-18 Georgia Tech Research Corporation Thin-film bulk acoustic wave delay line
US8922302B2 (en) 2011-08-24 2014-12-30 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustic resonator formed on a pedestal
US9254997B2 (en) * 2013-08-29 2016-02-09 Taiwan Semiconductor Manufacturing Co., Ltd. CMOS-MEMS integrated flow for making a pressure sensitive transducer
US10090820B2 (en) 2015-07-31 2018-10-02 Qorvo Us, Inc. Stealth-dicing compatible devices and methods to prevent acoustic backside reflections on acoustic wave devices
JP2017046225A (ja) * 2015-08-27 2017-03-02 株式会社ディスコ Ｂａｗデバイス及びｂａｗデバイスの製造方法
JP6699927B2 (ja) * 2016-03-03 2020-05-27 株式会社ディスコ Ｂａｗデバイス及びｂａｗデバイスの製造方法
JP2020113954A (ja) 2019-01-16 2020-07-27 株式会社村田製作所 弾性波装置

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JPH03165116A (ja) * 1989-11-22 1991-07-17 Clarion Co Ltd 弾性表面波装置
US5864261A (en) * 1994-05-23 1999-01-26 Iowa State University Research Foundation Multiple layer acoustical structures for thin-film resonator based circuits and systems
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US6720844B1 (en) * 2001-11-16 2004-04-13 Tfr Technologies, Inc. Coupled resonator bulk acoustic wave filter
EP1540819A1 (en) * 2002-09-12 2005-06-15 Philips Intellectual Property & Standards GmbH Bulk acoustic waver resonator with means for suppression of pass-band ripple in bulk acoustic wave filters

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