ATE479230T1 - Baw filter mit verschiedenen mittenfrequenzen auf einem einzelnen substrat und entsprechende herstellungsmethode - Google Patents
Baw filter mit verschiedenen mittenfrequenzen auf einem einzelnen substrat und entsprechende herstellungsmethodeInfo
- Publication number
- ATE479230T1 ATE479230T1 AT01310920T AT01310920T ATE479230T1 AT E479230 T1 ATE479230 T1 AT E479230T1 AT 01310920 T AT01310920 T AT 01310920T AT 01310920 T AT01310920 T AT 01310920T AT E479230 T1 ATE479230 T1 AT E479230T1
- Authority
- AT
- Austria
- Prior art keywords
- depositing
- piezolayer
- bottom electrode
- substrate
- resonators
- Prior art date
Links
- 239000000758 substrate Substances 0.000 title abstract 5
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 238000000151 deposition Methods 0.000 abstract 5
- 239000000463 material Substances 0.000 abstract 5
- 238000002955 isolation Methods 0.000 abstract 3
- 238000000034 method Methods 0.000 abstract 3
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
- H03H9/58—Multiple crystal filters
- H03H9/582—Multiple crystal filters implemented with thin-film techniques
- H03H9/586—Means for mounting to a substrate, i.e. means constituting the material interface confining the waves to a volume
- H03H9/589—Acoustic mirrors
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
- H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
- H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
- H03H2003/0414—Resonance frequency
- H03H2003/0421—Modification of the thickness of an element
- H03H2003/0428—Modification of the thickness of an element of an electrode
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
- H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
- H03H2003/0414—Resonance frequency
- H03H2003/0421—Modification of the thickness of an element
- H03H2003/0435—Modification of the thickness of an element of a piezoelectric layer
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
- H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
- H03H2003/0414—Resonance frequency
- H03H2003/0471—Resonance frequency of a plurality of resonators at different frequencies
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/42—Piezoelectric device making
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/755,007 US6518860B2 (en) | 2001-01-05 | 2001-01-05 | BAW filters having different center frequencies on a single substrate and a method for providing same |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE479230T1 true ATE479230T1 (de) | 2010-09-15 |
Family
ID=25037310
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT01310920T ATE479230T1 (de) | 2001-01-05 | 2001-12-28 | Baw filter mit verschiedenen mittenfrequenzen auf einem einzelnen substrat und entsprechende herstellungsmethode |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US6518860B2 (de) |
| EP (1) | EP1221770B1 (de) |
| JP (1) | JP4426748B2 (de) |
| AT (1) | ATE479230T1 (de) |
| DE (1) | DE60142884D1 (de) |
Families Citing this family (82)
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| US6657517B2 (en) * | 2001-12-20 | 2003-12-02 | Agere Systems, Inc. | Multi-frequency thin film resonators |
| JP3952464B2 (ja) * | 2002-02-27 | 2007-08-01 | Ｔｄｋ株式会社 | デュプレクサ |
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| FR2853473B1 (fr) * | 2003-04-01 | 2005-07-01 | St Microelectronics Sa | Composant electronique comprenant un resonateur et procede de fabrication |
| US7227292B2 (en) | 2003-04-10 | 2007-06-05 | Aviza Technologies, Inc. | Methods of depositing piezoelectric films |
| GB0308249D0 (en) * | 2003-04-10 | 2003-05-14 | Trikon Technologies Ltd | Method of depositing piezoelectric films |
| US6927651B2 (en) | 2003-05-12 | 2005-08-09 | Agilent Technologies, Inc. | Acoustic resonator devices having multiple resonant frequencies and methods of making the same |
| US7400217B2 (en) * | 2003-10-30 | 2008-07-15 | Avago Technologies Wireless Ip Pte Ltd | Decoupled stacked bulk acoustic resonator band-pass filter with controllable pass bandwith |
| US6946928B2 (en) * | 2003-10-30 | 2005-09-20 | Agilent Technologies, Inc. | Thin-film acoustically-coupled transformer |
| US7019605B2 (en) * | 2003-10-30 | 2006-03-28 | Larson Iii John D | Stacked bulk acoustic resonator band-pass filter with controllable pass bandwidth |
| DE602004000851T2 (de) | 2003-10-30 | 2007-05-16 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Akustisch gekoppelter Dünnschicht-Transformator mit zwei piezoelektrischen Elementen, welche entgegengesetzte C-Axen Orientierung besitzten |
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| US7242130B2 (en) | 2003-11-07 | 2007-07-10 | Matsushita Electric Industrial Co., Ltd. | Piezoelectric device, antenna duplexer, and method of manufacturing piezoelectric resonators used therefor |
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| US7388454B2 (en) * | 2004-10-01 | 2008-06-17 | Avago Technologies Wireless Ip Pte Ltd | Acoustic resonator performance enhancement using alternating frame structure |
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| US7791434B2 (en) * | 2004-12-22 | 2010-09-07 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Acoustic resonator performance enhancement using selective metal etch and having a trench in the piezoelectric |
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| US20060220763A1 (en) * | 2005-03-31 | 2006-10-05 | Tomohiro Iwasaki | Acoustic mirror type thin film bulk acoustic resonator, and filter, duplexer and communication apparatus comprising the same |
| US7369013B2 (en) * | 2005-04-06 | 2008-05-06 | Avago Technologies Wireless Ip Pte Ltd | Acoustic resonator performance enhancement using filled recessed region |
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| US7423503B2 (en) * | 2005-10-18 | 2008-09-09 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Acoustic galvanic isolator incorporating film acoustically-coupled transformer |
| US7525398B2 (en) * | 2005-10-18 | 2009-04-28 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Acoustically communicating data signals across an electrical isolation barrier |
| US7737807B2 (en) | 2005-10-18 | 2010-06-15 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Acoustic galvanic isolator incorporating series-connected decoupled stacked bulk acoustic resonators |
| US7675390B2 (en) * | 2005-10-18 | 2010-03-09 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Acoustic galvanic isolator incorporating single decoupled stacked bulk acoustic resonator |
| US7463499B2 (en) * | 2005-10-31 | 2008-12-09 | Avago Technologies General Ip (Singapore) Pte Ltd. | AC-DC power converter |
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| DE102005057762A1 (de) * | 2005-12-02 | 2007-06-06 | Epcos Ag | Mit akustischen Volumenwellen arbeitender Resonator |
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| US20070210724A1 (en) * | 2006-03-09 | 2007-09-13 | Mark Unkrich | Power adapter and DC-DC converter having acoustic transformer |
| US7746677B2 (en) * | 2006-03-09 | 2010-06-29 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | AC-DC converter circuit and power supply |
| US7479685B2 (en) * | 2006-03-10 | 2009-01-20 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Electronic device on substrate with cavity and mitigated parasitic leakage path |
| KR100719123B1 (ko) * | 2006-07-27 | 2007-05-18 | 삼성전자주식회사 | 멀피 밴드 필터모듈 및 그 제조방법 |
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| JP4968900B2 (ja) * | 2006-10-17 | 2012-07-04 | 太陽誘電株式会社 | ラダー型フィルタの製造方法 |
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| US7791435B2 (en) * | 2007-09-28 | 2010-09-07 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Single stack coupled resonators having differential output |
| US7732977B2 (en) * | 2008-04-30 | 2010-06-08 | Avago Technologies Wireless Ip (Singapore) | Transceiver circuit for film bulk acoustic resonator (FBAR) transducers |
| US7855618B2 (en) * | 2008-04-30 | 2010-12-21 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Bulk acoustic resonator electrical impedance transformers |
| US8291559B2 (en) * | 2009-02-24 | 2012-10-23 | Epcos Ag | Process for adapting resonance frequency of a BAW resonator |
| ES2327890B2 (es) * | 2009-04-06 | 2010-05-18 | Universidad Politecnica De Madrid | Dispositivo de filtrado de ondas acusticas de volumen. |
| US8248185B2 (en) * | 2009-06-24 | 2012-08-21 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Acoustic resonator structure comprising a bridge |
| US8902023B2 (en) * | 2009-06-24 | 2014-12-02 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Acoustic resonator structure having an electrode with a cantilevered portion |
| US8193877B2 (en) * | 2009-11-30 | 2012-06-05 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Duplexer with negative phase shifting circuit |
| US8796904B2 (en) | 2011-10-31 | 2014-08-05 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Bulk acoustic resonator comprising piezoelectric layer and inverse piezoelectric layer |
| US9243316B2 (en) | 2010-01-22 | 2016-01-26 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Method of fabricating piezoelectric material with selected c-axis orientation |
| US8962443B2 (en) | 2011-01-31 | 2015-02-24 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Semiconductor device having an airbridge and method of fabricating the same |
| US9136818B2 (en) | 2011-02-28 | 2015-09-15 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Stacked acoustic resonator comprising a bridge |
| US9048812B2 (en) | 2011-02-28 | 2015-06-02 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Bulk acoustic wave resonator comprising bridge formed within piezoelectric layer |
| US9425764B2 (en) | 2012-10-25 | 2016-08-23 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Accoustic resonator having composite electrodes with integrated lateral features |
| US9154112B2 (en) | 2011-02-28 | 2015-10-06 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Coupled resonator filter comprising a bridge |
| US9148117B2 (en) | 2011-02-28 | 2015-09-29 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Coupled resonator filter comprising a bridge and frame elements |
| US9203374B2 (en) | 2011-02-28 | 2015-12-01 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Film bulk acoustic resonator comprising a bridge |
| US9083302B2 (en) | 2011-02-28 | 2015-07-14 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Stacked bulk acoustic resonator comprising a bridge and an acoustic reflector along a perimeter of the resonator |
| RU2452079C1 (ru) * | 2011-03-02 | 2012-05-27 | Открытое акционерное общество "Научно-исследовательский институт "Элпа" с опытным производством" (ОАО "НИИ "Элпа") | Способ настройки резонатора на поверхностных акустических волнах |
| US8575820B2 (en) | 2011-03-29 | 2013-11-05 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Stacked bulk acoustic resonator |
| US9444426B2 (en) | 2012-10-25 | 2016-09-13 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Accoustic resonator having integrated lateral feature and temperature compensation feature |
| US8350445B1 (en) | 2011-06-16 | 2013-01-08 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Bulk acoustic resonator comprising non-piezoelectric layer and bridge |
| US8922302B2 (en) | 2011-08-24 | 2014-12-30 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Acoustic resonator formed on a pedestal |
| US9443993B2 (en) | 2013-03-28 | 2016-09-13 | Seiko Epson Corporation | Spectroscopic sensor and method for manufacturing same |
| JP2015097733A (ja) | 2013-11-20 | 2015-05-28 | セイコーエプソン株式会社 | 超音波デバイスおよびその製造方法並びに電子機器および超音波画像装置 |
| DE102014112372B3 (de) | 2014-08-28 | 2016-02-25 | Epcos Ag | Filterchip und Verfahren zur Herstellung eines Filterchips |
| FR3026582A1 (fr) * | 2014-09-29 | 2016-04-01 | Commissariat Energie Atomique | Circuit resonant a frequence et a impedance variables |
| US10135415B2 (en) * | 2015-12-18 | 2018-11-20 | Texas Instruments Incorporated | Method to reduce frequency distribution of bulk acoustic wave resonators during manufacturing |
| US10038422B2 (en) | 2016-08-25 | 2018-07-31 | Qualcomm Incorporated | Single-chip multi-frequency film bulk acoustic-wave resonators |
| DE102016125877B4 (de) | 2016-12-29 | 2018-08-23 | Snaptrack, Inc. | BAW-Resonator- und Resonator-Anordnung |
| CN108761616B (zh) * | 2018-03-23 | 2020-10-16 | 中国科学院上海光学精密机械研究所 | 多波段高反射柔性波片及其制备方法 |
| US10601398B2 (en) * | 2018-04-13 | 2020-03-24 | Qorvo Us, Inc. | BAW structure having multiple BAW transducers over a common reflector, which has reflector layers of varying thicknesses |
| DE102018109974B3 (de) * | 2018-04-25 | 2019-09-12 | RF360 Europe GmbH | Elektroakustisches Filter, Multiplexer und Verfahren zur Herstellung eines elektroakustischen Filters |
| WO2020154008A1 (en) * | 2019-01-25 | 2020-07-30 | Commscope Italy S.R.L. | Multi-pole rf filters |
| CN112217493A (zh) * | 2019-07-10 | 2021-01-12 | 开元通信技术（厦门）有限公司 | 体声波滤波器及其制作方法 |
| WO2021003699A1 (zh) * | 2019-07-10 | 2021-01-14 | 开元通信技术（厦门）有限公司 | 体声波滤波器及其制作方法 |
| US11316497B2 (en) * | 2019-12-09 | 2022-04-26 | Intel Corporation | Multi-filter die |
| CN111262548B (zh) * | 2019-12-31 | 2021-06-22 | 诺思(天津)微系统有限责任公司 | 体声波谐振器组、滤波器、电子设备、机电耦合系数调整方法 |
| US20230058875A1 (en) * | 2021-08-18 | 2023-02-23 | RF360 Europe GmbH | Wideband-enabled electroacoustic device |
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| US3569750A (en) * | 1968-11-29 | 1971-03-09 | Collins Radio Co | Monolithic multifrequency resonator |
| FR2186175A5 (de) * | 1972-05-24 | 1974-01-04 | Thomson Csf | |
| DE3145995A1 (de) | 1981-11-20 | 1983-06-01 | Norddeutsche Affinerie AG, 2000 Hamburg | Verfahren zur herstellung von kupfer-ii-hydroxid |
| US5319324A (en) * | 1991-10-02 | 1994-06-07 | Matsushita Electric Industrial Co., Ltd. | Method of direct bonding of crystals and crystal devices |
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| US6107721A (en) * | 1999-07-27 | 2000-08-22 | Tfr Technologies, Inc. | Piezoelectric resonators on a differentially offset reflector |
| US6306313B1 (en) * | 2000-02-04 | 2001-10-23 | Agere Systems Guardian Corp. | Selective etching of thin films |
-
2001
- 2001-01-05 US US09/755,007 patent/US6518860B2/en not_active Expired - Fee Related
- 2001-12-28 EP EP01310920A patent/EP1221770B1/de not_active Expired - Lifetime
- 2001-12-28 AT AT01310920T patent/ATE479230T1/de not_active IP Right Cessation
- 2001-12-28 DE DE60142884T patent/DE60142884D1/de not_active Expired - Lifetime
-
2002
- 2002-01-04 JP JP2002000134A patent/JP4426748B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP4426748B2 (ja) | 2010-03-03 |
| US20020089395A1 (en) | 2002-07-11 |
| US6518860B2 (en) | 2003-02-11 |
| DE60142884D1 (de) | 2010-10-07 |
| EP1221770B1 (de) | 2010-08-25 |
| JP2002268645A (ja) | 2002-09-20 |
| EP1221770A1 (de) | 2002-07-10 |
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