JP2005504442A - 圧電構造 - Google Patents

圧電構造 Download PDF

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Publication number
JP2005504442A
JP2005504442A JP2003531541A JP2003531541A JP2005504442A JP 2005504442 A JP2005504442 A JP 2005504442A JP 2003531541 A JP2003531541 A JP 2003531541A JP 2003531541 A JP2003531541 A JP 2003531541A JP 2005504442 A JP2005504442 A JP 2005504442A
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JP
Japan
Prior art keywords
piezoelectric
group
intermediate surface
corrugations
corrugation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2003531541A
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English (en)
Japanese (ja)
Other versions
JP2005504442A5 (enExample
Inventor
トップリス、リチャード
リヴィングストン、デーヴィド
マシソン、アンドリュー
マッケヴィット、ガレス
シェパード、マーク、リチャード
ホーレイ、アンソニー
Original Assignee
１．．．リミテッド
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by １．．．リミテッド filed Critical １．．．リミテッド
Publication of JP2005504442A publication Critical patent/JP2005504442A/ja
Publication of JP2005504442A5 publication Critical patent/JP2005504442A5/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
    • H10N30/2048—Membrane type having non-planar shape
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Micromachines (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
JP2003531541A 2001-09-27 2002-09-26 圧電構造 Pending JP2005504442A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB0123294.1A GB0123294D0 (en) 2001-09-27 2001-09-27 Piezoelectric structures
PCT/GB2002/004370 WO2003028122A2 (en) 2001-09-27 2002-09-26 Piezoelectric structures

Publications (2)

Publication Number Publication Date
JP2005504442A true JP2005504442A (ja) 2005-02-10
JP2005504442A5 JP2005504442A5 (enExample) 2006-12-07

Family

ID=9922831

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003531541A Pending JP2005504442A (ja) 2001-09-27 2002-09-26 圧電構造

Country Status (9)

Country Link
US (1) US7166952B2 (enExample)
EP (1) EP1430546B1 (enExample)
JP (1) JP2005504442A (enExample)
KR (1) KR20040049309A (enExample)
CN (1) CN1596480A (enExample)
AT (1) ATE391346T1 (enExample)
DE (1) DE60225930T2 (enExample)
GB (1) GB0123294D0 (enExample)
WO (1) WO2003028122A2 (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012175016A (ja) * 2011-02-24 2012-09-10 Kayaba Ind Co Ltd 圧電アクチュエータ
JP2013008733A (ja) * 2011-06-22 2013-01-10 Murata Mfg Co Ltd 電歪アクチュエータ
JP3184382U (ja) * 2013-02-18 2013-06-27 健 山岡 荷電型噴霧器
JPWO2015005188A1 (ja) * 2013-07-08 2017-03-02 株式会社村田製作所 アクチュエータ

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AU8991898A (en) * 1997-09-05 1999-03-29 1... Limited Aerogels, piezoelectric devices, and uses therefor
US7518284B2 (en) 2000-11-02 2009-04-14 Danfoss A/S Dielectric composite and a method of manufacturing a dielectric composite
US8181338B2 (en) 2000-11-02 2012-05-22 Danfoss A/S Method of making a multilayer composite
US7548015B2 (en) 2000-11-02 2009-06-16 Danfoss A/S Multilayer composite and a method of making such
DE10054247C2 (de) * 2000-11-02 2002-10-24 Danfoss As Betätigungselement und Verfahren zu seiner Herstellung
ES2299614T3 (es) * 2001-12-21 2008-06-01 Danfoss A/S Estructura de dispositivo dielectrico de accionamiento o deteccion y metodo para fabricar el mismo.
CN100530931C (zh) * 2002-09-20 2009-08-19 丹福斯有限公司 弹性体致动器及制造致动器的方法
ATE440319T1 (de) * 2002-12-12 2009-09-15 Danfoss As Berührungssensorelement und sensorgruppe
ES2309502T3 (es) * 2003-02-24 2008-12-16 Danfoss A/S Vendaje de compresion elastico electroactivo.
WO2006110908A1 (en) * 2005-04-15 2006-10-19 University Of Florida Research Foundation, Inc. Microactuator having multiple degrees of freedom
GB0509837D0 (en) * 2005-05-16 2005-06-22 1 Ltd Curved electro-active actuator
DE102005028970A1 (de) * 2005-06-22 2006-12-28 Siemens Ag Piezoakter mit gesteigertem Hubvermögen
US7692365B2 (en) * 2005-11-23 2010-04-06 Microstrain, Inc. Slotted beam piezoelectric composite
US7880371B2 (en) * 2006-11-03 2011-02-01 Danfoss A/S Dielectric composite and a method of manufacturing a dielectric composite
US7732999B2 (en) 2006-11-03 2010-06-08 Danfoss A/S Direct acting capacitive transducer
US8432057B2 (en) * 2007-05-01 2013-04-30 Pliant Energy Systems Llc Pliant or compliant elements for harnessing the forces of moving fluid to transport fluid or generate electricity
US7696634B2 (en) * 2007-05-01 2010-04-13 Pliant Energy Systems Llc Pliant mechanisms for extracting power from moving fluid
US8610304B2 (en) 2007-05-01 2013-12-17 Pliant Energy Systems Llc Mechanisms for creating undulating motion, such as for propulsion, and for harnessing the energy of moving fluid
US7952261B2 (en) 2007-06-29 2011-05-31 Bayer Materialscience Ag Electroactive polymer transducers for sensory feedback applications
DE102008000816A1 (de) * 2008-03-26 2009-10-01 Robert Bosch Gmbh Vorrichtung und Verfahren zur Anregung und/oder Dämpfung und/oder Erfassung struktureller Schwingungen einer plattenförmigen Einrichtung mittels einer piezoelektrischen Streifeneinrichtung
EP2109217A3 (en) * 2008-04-07 2013-05-15 Stichting IMEC Nederland System and method for resonance frequency tuning of resonant devices
FR2936650B1 (fr) * 2008-09-26 2011-03-11 Commissariat Energie Atomique Transducteur a polymere electroactif
TWI381747B (zh) * 2008-12-17 2013-01-01 Ind Tech Res Inst 微型揚聲器及其製造方法
EP2239793A1 (de) 2009-04-11 2010-10-13 Bayer MaterialScience AG Elektrisch schaltbarer Polymerfilmaufbau und dessen Verwendung
SG193003A1 (en) 2011-03-01 2013-10-30 Bayer Ip Gmbh Automated manufacturing processes for producing deformable polymer devices and films
CN103703404A (zh) 2011-03-22 2014-04-02 拜耳知识产权有限责任公司 电活化聚合物致动器双凸透镜系统
US9294014B2 (en) * 2012-02-10 2016-03-22 Genziko Incorporated Power generator
US8891222B2 (en) 2012-02-14 2014-11-18 Danfoss A/S Capacitive transducer and a method for manufacturing a transducer
US8692442B2 (en) 2012-02-14 2014-04-08 Danfoss Polypower A/S Polymer transducer and a connector for a transducer
WO2013142552A1 (en) * 2012-03-21 2013-09-26 Bayer Materialscience Ag Roll-to-roll manufacturing processes for producing self-healing electroactive polymer devices
KR20150031285A (ko) 2012-06-18 2015-03-23 바이엘 인텔렉쳐 프로퍼티 게엠베하 연신 공정을 위한 연신 프레임
US9590193B2 (en) 2012-10-24 2017-03-07 Parker-Hannifin Corporation Polymer diode
US9816882B2 (en) * 2013-01-29 2017-11-14 Suzhou Institute Of Nano-Tech And Nano-Bionics (Sinano), Chinese Academy Of Sciences Electronic skin, preparation method and use thereof
DE102013205626A1 (de) * 2013-03-28 2014-10-02 Siemens Aktiengesellschaft Biegewandler mit piezoelektrischem Biegeelement, Kühlvorrichtung und Elektronikmodul
KR101528797B1 (ko) * 2014-04-22 2015-06-15 울산대학교 산학협력단 압전 고분자를 사용한 햅틱 피드백 디바이스
US20160156287A1 (en) * 2014-11-28 2016-06-02 Zhengbao Yang Half-tube array vibration energy harvesting method using piezoelectric materials
WO2016120518A1 (en) 2015-01-27 2016-08-04 Beddit Oy A system for determining the quality of sleep
US9882115B2 (en) * 2015-04-02 2018-01-30 The Boeing Company Integrated compliant boundary for piezoelectric bimorph actuator
US11795900B2 (en) 2016-06-30 2023-10-24 Pliant Energy Systems Llc Vehicle with traveling wave thrust module apparatuses, methods and systems
US11209022B2 (en) 2016-06-30 2021-12-28 Pliant Energy Systems Llc Vehicle with traveling wave thrust module apparatuses, methods and systems
US10519926B2 (en) 2016-06-30 2019-12-31 Pliant Energy Systems Llc Traveling wave propeller, pump and generator apparatuses, methods and systems
US10190570B1 (en) 2016-06-30 2019-01-29 Pliant Energy Systems Llc Traveling wave propeller, pump and generator apparatuses, methods and systems
EP4223217A3 (en) 2016-08-12 2023-12-27 Apple Inc. Vital signs monitoring system
WO2018217585A1 (en) 2017-05-22 2018-11-29 Apple Inc. Multi-element piezo sensors for physiological measurements
US10487817B1 (en) * 2018-11-02 2019-11-26 Baoxiang Shan Methods for creating an undulating structure
CN110944274B (zh) * 2019-11-20 2020-12-18 武汉大学 一种基于Piston-mode的带质量负载可调谐MEMS压电声换能器
JP7597303B2 (ja) * 2021-02-24 2024-12-10 ダイキンファインテック株式会社 布帛状センサ、及び布帛状センサデバイス
US12634611B2 (en) 2022-02-18 2026-05-19 Apple Inc. Piezoelectric MEMS valve for an electronic device

Family Cites Families (11)

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US3816774A (en) * 1972-01-28 1974-06-11 Victor Company Of Japan Curved piezoelectric elements
NL7502453A (nl) * 1975-03-03 1976-09-07 Philips Nv Inrichting voor het omzetten van elektrische in akoestische trillingen en omgekeerd, voorzien van een membraan, bevattende tenminste een laag piezo-elektrisch polymeer materiaal.
US4056742A (en) * 1976-04-30 1977-11-01 Tibbetts Industries, Inc. Transducer having piezoelectric film arranged with alternating curvatures
JPS561269A (en) 1979-06-20 1981-01-08 Hitachi Ltd Arc voltage control unit
JPS5612697A (en) * 1979-07-11 1981-02-07 Suwa Seikosha Kk Piezooelectric sound emitting element
JPH0197604A (ja) 1987-10-09 1989-04-17 Mitsubishi Kasei Corp 積層セラミックス製造法
JP2905643B2 (ja) * 1992-05-29 1999-06-14 住友重機械工業株式会社 圧電リニアアクチュエータ
JP2542154B2 (ja) 1992-11-26 1996-10-09 山一電機株式会社 圧電アクチェ―タ―
EP1240676B1 (en) * 1999-12-21 2010-01-20 Cambridge Mechatronics Limited Electro-active devices
US6411015B1 (en) * 2000-05-09 2002-06-25 Measurement Specialties, Inc. Multiple piezoelectric transducer array
WO2002015378A1 (en) * 2000-08-11 2002-02-21 Ecchandes Inc. Overlapping type piezoelectric stator, overlapping type piezoelectric acturator and applications thereof

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012175016A (ja) * 2011-02-24 2012-09-10 Kayaba Ind Co Ltd 圧電アクチュエータ
JP2013008733A (ja) * 2011-06-22 2013-01-10 Murata Mfg Co Ltd 電歪アクチュエータ
JP3184382U (ja) * 2013-02-18 2013-06-27 健 山岡 荷電型噴霧器
JPWO2015005188A1 (ja) * 2013-07-08 2017-03-02 株式会社村田製作所 アクチュエータ

Also Published As

Publication number Publication date
EP1430546A2 (en) 2004-06-23
US20050040736A1 (en) 2005-02-24
DE60225930T2 (de) 2009-04-16
GB0123294D0 (en) 2001-11-21
EP1430546B1 (en) 2008-04-02
CN1596480A (zh) 2005-03-16
KR20040049309A (ko) 2004-06-11
DE60225930D1 (de) 2008-05-15
WO2003028122A3 (en) 2004-02-12
WO2003028122A2 (en) 2003-04-03
US7166952B2 (en) 2007-01-23
ATE391346T1 (de) 2008-04-15

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