JP2005504442A - 圧電構造 - Google Patents

圧電構造 Download PDF

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Publication number
JP2005504442A
JP2005504442A JP2003531541A JP2003531541A JP2005504442A JP 2005504442 A JP2005504442 A JP 2005504442A JP 2003531541 A JP2003531541 A JP 2003531541A JP 2003531541 A JP2003531541 A JP 2003531541A JP 2005504442 A JP2005504442 A JP 2005504442A
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JP
Japan
Prior art keywords
piezoelectric
group
intermediate surface
corrugations
corrugation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2003531541A
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English (en)
Japanese (ja)
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JP2005504442A5 (enExample
Inventor
トップリス、リチャード
リヴィングストン、デーヴィド
マシソン、アンドリュー
マッケヴィット、ガレス
シェパード、マーク、リチャード
ホーレイ、アンソニー
Original Assignee
１．．．リミテッド
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by １．．．リミテッド filed Critical １．．．リミテッド
Publication of JP2005504442A publication Critical patent/JP2005504442A/ja
Publication of JP2005504442A5 publication Critical patent/JP2005504442A5/ja
Pending legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
    • H10N30/2048—Membrane type having non-planar shape
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Micromachines (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
JP2003531541A 2001-09-27 2002-09-26 圧電構造 Pending JP2005504442A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB0123294.1A GB0123294D0 (en) 2001-09-27 2001-09-27 Piezoelectric structures
PCT/GB2002/004370 WO2003028122A2 (en) 2001-09-27 2002-09-26 Piezoelectric structures

Publications (2)

Publication Number Publication Date
JP2005504442A true JP2005504442A (ja) 2005-02-10
JP2005504442A5 JP2005504442A5 (enExample) 2006-12-07

Family

ID=9922831

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003531541A Pending JP2005504442A (ja) 2001-09-27 2002-09-26 圧電構造

Country Status (9)

Country Link
US (1) US7166952B2 (enExample)
EP (1) EP1430546B1 (enExample)
JP (1) JP2005504442A (enExample)
KR (1) KR20040049309A (enExample)
CN (1) CN1596480A (enExample)
AT (1) ATE391346T1 (enExample)
DE (1) DE60225930T2 (enExample)
GB (1) GB0123294D0 (enExample)
WO (1) WO2003028122A2 (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012175016A (ja) * 2011-02-24 2012-09-10 Kayaba Ind Co Ltd 圧電アクチュエータ
JP2013008733A (ja) * 2011-06-22 2013-01-10 Murata Mfg Co Ltd 電歪アクチュエータ
JP3184382U (ja) * 2013-02-18 2013-06-27 健 山岡 荷電型噴霧器
JPWO2015005188A1 (ja) * 2013-07-08 2017-03-02 株式会社村田製作所 アクチュエータ

Families Citing this family (46)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999013681A2 (en) * 1997-09-05 1999-03-18 1... Ipr Limited Aerogels, piezoelectric devices, and uses therefor
US7548015B2 (en) 2000-11-02 2009-06-16 Danfoss A/S Multilayer composite and a method of making such
US8181338B2 (en) 2000-11-02 2012-05-22 Danfoss A/S Method of making a multilayer composite
US7518284B2 (en) 2000-11-02 2009-04-14 Danfoss A/S Dielectric composite and a method of manufacturing a dielectric composite
DE10054247C2 (de) * 2000-11-02 2002-10-24 Danfoss As Betätigungselement und Verfahren zu seiner Herstellung
AU2002351736A1 (en) * 2001-12-21 2003-07-15 Danfoss A/S Dielectric actuator or sensor structure and method of making it
AU2003263159A1 (en) * 2002-09-20 2004-04-08 Danfoss A/S An elastomer actuator and a method of making an actuator
DE60328913D1 (de) * 2002-12-12 2009-10-01 Danfoss As Berührungssensorelement und sensorgruppe
DE602004014592D1 (enExample) * 2003-02-24 2008-08-07 Danfoss As
WO2006110908A1 (en) * 2005-04-15 2006-10-19 University Of Florida Research Foundation, Inc. Microactuator having multiple degrees of freedom
GB0509837D0 (en) * 2005-05-16 2005-06-22 1 Ltd Curved electro-active actuator
DE102005028970A1 (de) * 2005-06-22 2006-12-28 Siemens Ag Piezoakter mit gesteigertem Hubvermögen
US7692365B2 (en) * 2005-11-23 2010-04-06 Microstrain, Inc. Slotted beam piezoelectric composite
US7880371B2 (en) * 2006-11-03 2011-02-01 Danfoss A/S Dielectric composite and a method of manufacturing a dielectric composite
US7732999B2 (en) 2006-11-03 2010-06-08 Danfoss A/S Direct acting capacitive transducer
US7696634B2 (en) * 2007-05-01 2010-04-13 Pliant Energy Systems Llc Pliant mechanisms for extracting power from moving fluid
US8432057B2 (en) * 2007-05-01 2013-04-30 Pliant Energy Systems Llc Pliant or compliant elements for harnessing the forces of moving fluid to transport fluid or generate electricity
WO2009006318A1 (en) 2007-06-29 2009-01-08 Artificial Muscle, Inc. Electroactive polymer transducers for sensory feedback applications
DE102008000816A1 (de) * 2008-03-26 2009-10-01 Robert Bosch Gmbh Vorrichtung und Verfahren zur Anregung und/oder Dämpfung und/oder Erfassung struktureller Schwingungen einer plattenförmigen Einrichtung mittels einer piezoelektrischen Streifeneinrichtung
EP2109217A3 (en) * 2008-04-07 2013-05-15 Stichting IMEC Nederland System and method for resonance frequency tuning of resonant devices
FR2936650B1 (fr) * 2008-09-26 2011-03-11 Commissariat Energie Atomique Transducteur a polymere electroactif
TWI381747B (zh) * 2008-12-17 2013-01-01 Ind Tech Res Inst 微型揚聲器及其製造方法
EP2239793A1 (de) 2009-04-11 2010-10-13 Bayer MaterialScience AG Elektrisch schaltbarer Polymerfilmaufbau und dessen Verwendung
CN103384957B (zh) 2011-01-10 2017-09-08 本亚明·彼得罗·菲拉尔多 用于例如为推进产生波状运动和用于利用运动流体的能量的机构
JP2014513510A (ja) 2011-03-01 2014-05-29 バイエル・インテレクチュアル・プロパティ・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツング 変形可能なポリマー装置及び変形可能なポリマーフィルムを作るための自動化された製造プロセス
US9195058B2 (en) 2011-03-22 2015-11-24 Parker-Hannifin Corporation Electroactive polymer actuator lenticular system
US9294014B2 (en) * 2012-02-10 2016-03-22 Genziko Incorporated Power generator
US8891222B2 (en) 2012-02-14 2014-11-18 Danfoss A/S Capacitive transducer and a method for manufacturing a transducer
US8692442B2 (en) 2012-02-14 2014-04-08 Danfoss Polypower A/S Polymer transducer and a connector for a transducer
WO2013142552A1 (en) * 2012-03-21 2013-09-26 Bayer Materialscience Ag Roll-to-roll manufacturing processes for producing self-healing electroactive polymer devices
US9761790B2 (en) 2012-06-18 2017-09-12 Parker-Hannifin Corporation Stretch frame for stretching process
US9590193B2 (en) 2012-10-24 2017-03-07 Parker-Hannifin Corporation Polymer diode
JP6180547B2 (ja) * 2013-01-29 2017-08-16 中国科学院蘇州納米技術与納米倣生研究所Ｓｕｚｈｏｕ Ｉｎｓｔｉｔｕｔｅ Ｏｆ Ｎａｎｏ−Ｔｅｃｈ Ａｎｄ Ｎａｎｏ−Ｂｉｏｎｉｃｓ（Ｓｉｎａｎｏ），Ｃｈｉｎｅｓｅ Ａｃａｄｅｍｙ Ｏｆ Ｓｃｉｅｎｃｅ 電子皮膚及びその製造方法と使用
DE102013205626A1 (de) * 2013-03-28 2014-10-02 Siemens Aktiengesellschaft Biegewandler mit piezoelektrischem Biegeelement, Kühlvorrichtung und Elektronikmodul
KR101528797B1 (ko) * 2014-04-22 2015-06-15 울산대학교 산학협력단 압전 고분자를 사용한 햅틱 피드백 디바이스
US20160156287A1 (en) * 2014-11-28 2016-06-02 Zhengbao Yang Half-tube array vibration energy harvesting method using piezoelectric materials
JP6766052B2 (ja) 2015-01-27 2020-10-07 アップル インコーポレイテッドＡｐｐｌｅ Ｉｎｃ． 睡眠の質を決定するためのシステム及び方法
US9882115B2 (en) * 2015-04-02 2018-01-30 The Boeing Company Integrated compliant boundary for piezoelectric bimorph actuator
US10190570B1 (en) 2016-06-30 2019-01-29 Pliant Energy Systems Llc Traveling wave propeller, pump and generator apparatuses, methods and systems
US10519926B2 (en) 2016-06-30 2019-12-31 Pliant Energy Systems Llc Traveling wave propeller, pump and generator apparatuses, methods and systems
US11795900B2 (en) 2016-06-30 2023-10-24 Pliant Energy Systems Llc Vehicle with traveling wave thrust module apparatuses, methods and systems
US11209022B2 (en) 2016-06-30 2021-12-28 Pliant Energy Systems Llc Vehicle with traveling wave thrust module apparatuses, methods and systems
CN109561840B (zh) 2016-08-12 2021-11-19 苹果公司 生命体征监测系统
WO2018217585A1 (en) 2017-05-22 2018-11-29 Apple Inc. Multi-element piezo sensors for physiological measurements
US10487817B1 (en) * 2018-11-02 2019-11-26 Baoxiang Shan Methods for creating an undulating structure
CN110944274B (zh) * 2019-11-20 2020-12-18 武汉大学 一种基于Piston-mode的带质量负载可调谐MEMS压电声换能器

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3816774A (en) * 1972-01-28 1974-06-11 Victor Company Of Japan Curved piezoelectric elements
NL7502453A (nl) * 1975-03-03 1976-09-07 Philips Nv Inrichting voor het omzetten van elektrische in akoestische trillingen en omgekeerd, voorzien van een membraan, bevattende tenminste een laag piezo-elektrisch polymeer materiaal.
US4056742A (en) * 1976-04-30 1977-11-01 Tibbetts Industries, Inc. Transducer having piezoelectric film arranged with alternating curvatures
JPS561269A (en) 1979-06-20 1981-01-08 Hitachi Ltd Arc voltage control unit
JPS5612697A (en) * 1979-07-11 1981-02-07 Suwa Seikosha Kk Piezooelectric sound emitting element
JPH0197604A (ja) 1987-10-09 1989-04-17 Mitsubishi Kasei Corp 積層セラミックス製造法
JP2905643B2 (ja) * 1992-05-29 1999-06-14 住友重機械工業株式会社 圧電リニアアクチュエータ
JP2542154B2 (ja) 1992-11-26 1996-10-09 山一電機株式会社 圧電アクチェ―タ―
GB2376834B (en) 1999-12-21 2003-06-25 1 Ltd Loudspeaker using an electro-active device
US6411015B1 (en) * 2000-05-09 2002-06-25 Measurement Specialties, Inc. Multiple piezoelectric transducer array
WO2002015378A1 (en) * 2000-08-11 2002-02-21 Ecchandes Inc. Overlapping type piezoelectric stator, overlapping type piezoelectric acturator and applications thereof

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012175016A (ja) * 2011-02-24 2012-09-10 Kayaba Ind Co Ltd 圧電アクチュエータ
JP2013008733A (ja) * 2011-06-22 2013-01-10 Murata Mfg Co Ltd 電歪アクチュエータ
JP3184382U (ja) * 2013-02-18 2013-06-27 健 山岡 荷電型噴霧器
JPWO2015005188A1 (ja) * 2013-07-08 2017-03-02 株式会社村田製作所 アクチュエータ

Also Published As

Publication number Publication date
DE60225930T2 (de) 2009-04-16
ATE391346T1 (de) 2008-04-15
CN1596480A (zh) 2005-03-16
WO2003028122A3 (en) 2004-02-12
DE60225930D1 (de) 2008-05-15
US7166952B2 (en) 2007-01-23
KR20040049309A (ko) 2004-06-11
EP1430546A2 (en) 2004-06-23
WO2003028122A2 (en) 2003-04-03
EP1430546B1 (en) 2008-04-02
US20050040736A1 (en) 2005-02-24
GB0123294D0 (en) 2001-11-21

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