ATE391346T1 - Piezoelektrische strukturen - Google Patents

Piezoelektrische strukturen

Info

Publication number
ATE391346T1
ATE391346T1 AT02760433T AT02760433T ATE391346T1 AT E391346 T1 ATE391346 T1 AT E391346T1 AT 02760433 T AT02760433 T AT 02760433T AT 02760433 T AT02760433 T AT 02760433T AT E391346 T1 ATE391346 T1 AT E391346T1
Authority
AT
Austria
Prior art keywords
plane
bimorph
dimension change
piezoelectric
piezoelectric layer
Prior art date
Application number
AT02760433T
Other languages
German (de)
English (en)
Inventor
Richard Topliss
David Livingstone
Andrew Matheson
Gareth Mckevitt
Mark Shepherd
Anthony Hooley
Original Assignee
1 Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 1 Ltd filed Critical 1 Ltd
Application granted granted Critical
Publication of ATE391346T1 publication Critical patent/ATE391346T1/de

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
    • H10N30/2048—Membrane type having non-planar shape

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Micromachines (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
AT02760433T 2001-09-27 2002-09-26 Piezoelektrische strukturen ATE391346T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB0123294.1A GB0123294D0 (en) 2001-09-27 2001-09-27 Piezoelectric structures

Publications (1)

Publication Number Publication Date
ATE391346T1 true ATE391346T1 (de) 2008-04-15

Family

ID=9922831

Family Applications (1)

Application Number Title Priority Date Filing Date
AT02760433T ATE391346T1 (de) 2001-09-27 2002-09-26 Piezoelektrische strukturen

Country Status (9)

Country Link
US (1) US7166952B2 (enExample)
EP (1) EP1430546B1 (enExample)
JP (1) JP2005504442A (enExample)
KR (1) KR20040049309A (enExample)
CN (1) CN1596480A (enExample)
AT (1) ATE391346T1 (enExample)
DE (1) DE60225930T2 (enExample)
GB (1) GB0123294D0 (enExample)
WO (1) WO2003028122A2 (enExample)

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US7518284B2 (en) 2000-11-02 2009-04-14 Danfoss A/S Dielectric composite and a method of manufacturing a dielectric composite
US8181338B2 (en) 2000-11-02 2012-05-22 Danfoss A/S Method of making a multilayer composite
EP1466149B1 (en) * 2001-12-21 2008-01-23 Danfoss A/S Dielectric actuator or sensor structure and method of making it
EP1540807B1 (en) 2002-09-20 2013-01-09 Danfoss A/S Elastomer actuator and method of making the actuator
US7481120B2 (en) * 2002-12-12 2009-01-27 Danfoss A/S Tactile sensor element and sensor array
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GB0509837D0 (en) * 2005-05-16 2005-06-22 1 Ltd Curved electro-active actuator
DE102005028970A1 (de) * 2005-06-22 2006-12-28 Siemens Ag Piezoakter mit gesteigertem Hubvermögen
US7692365B2 (en) * 2005-11-23 2010-04-06 Microstrain, Inc. Slotted beam piezoelectric composite
US7880371B2 (en) * 2006-11-03 2011-02-01 Danfoss A/S Dielectric composite and a method of manufacturing a dielectric composite
US7732999B2 (en) 2006-11-03 2010-06-08 Danfoss A/S Direct acting capacitive transducer
US7696634B2 (en) * 2007-05-01 2010-04-13 Pliant Energy Systems Llc Pliant mechanisms for extracting power from moving fluid
US8432057B2 (en) * 2007-05-01 2013-04-30 Pliant Energy Systems Llc Pliant or compliant elements for harnessing the forces of moving fluid to transport fluid or generate electricity
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EP2109217A3 (en) * 2008-04-07 2013-05-15 Stichting IMEC Nederland System and method for resonance frequency tuning of resonant devices
FR2936650B1 (fr) * 2008-09-26 2011-03-11 Commissariat Energie Atomique Transducteur a polymere electroactif
TWI381747B (zh) * 2008-12-17 2013-01-01 Ind Tech Res Inst 微型揚聲器及其製造方法
EP2239793A1 (de) 2009-04-11 2010-10-13 Bayer MaterialScience AG Elektrisch schaltbarer Polymerfilmaufbau und dessen Verwendung
EP2662558A3 (en) 2011-01-10 2015-01-14 Benjamin Filardo Mechanisms for creating undulating motion, such as for propulsion and for harnessing the energy of moving fluid
JP5687921B2 (ja) * 2011-02-24 2015-03-25 カヤバ工業株式会社 圧電アクチュエータ
EP2681748B1 (en) 2011-03-01 2016-06-08 Parker-Hannifin Corp Automated manufacturing processes for producing deformable polymer devices and films
EP2689284A4 (en) 2011-03-22 2014-08-20 Bayer Ip Gmbh ELECTROACTIVE POLYMER ACTUATOR LENS SYSTEM
JP5751044B2 (ja) * 2011-06-22 2015-07-22 株式会社村田製作所 電歪アクチュエータ
US9294014B2 (en) * 2012-02-10 2016-03-22 Genziko Incorporated Power generator
US8891222B2 (en) 2012-02-14 2014-11-18 Danfoss A/S Capacitive transducer and a method for manufacturing a transducer
US8692442B2 (en) 2012-02-14 2014-04-08 Danfoss Polypower A/S Polymer transducer and a connector for a transducer
US9876160B2 (en) 2012-03-21 2018-01-23 Parker-Hannifin Corporation Roll-to-roll manufacturing processes for producing self-healing electroactive polymer devices
US9761790B2 (en) 2012-06-18 2017-09-12 Parker-Hannifin Corporation Stretch frame for stretching process
WO2014066576A1 (en) 2012-10-24 2014-05-01 Bayer Intellectual Property Gmbh Polymer diode
AU2014211862B2 (en) * 2013-01-29 2017-05-18 Suzhou Institute Of Nano-Tech And Nano-Bionics (Sinano), Chinese Academy Of Sciences Electronic skin, preparation method and use thereof
JP3184382U (ja) * 2013-02-18 2013-06-27 健 山岡 荷電型噴霧器
DE102013205626A1 (de) * 2013-03-28 2014-10-02 Siemens Aktiengesellschaft Biegewandler mit piezoelektrischem Biegeelement, Kühlvorrichtung und Elektronikmodul
WO2015005188A1 (ja) * 2013-07-08 2015-01-15 株式会社村田製作所 アクチュエータ
KR101528797B1 (ko) * 2014-04-22 2015-06-15 울산대학교 산학협력단 압전 고분자를 사용한 햅틱 피드백 디바이스
US20160156287A1 (en) * 2014-11-28 2016-06-02 Zhengbao Yang Half-tube array vibration energy harvesting method using piezoelectric materials
WO2016120518A1 (en) 2015-01-27 2016-08-04 Beddit Oy A system for determining the quality of sleep
US9882115B2 (en) * 2015-04-02 2018-01-30 The Boeing Company Integrated compliant boundary for piezoelectric bimorph actuator
US10190570B1 (en) 2016-06-30 2019-01-29 Pliant Energy Systems Llc Traveling wave propeller, pump and generator apparatuses, methods and systems
US10519926B2 (en) 2016-06-30 2019-12-31 Pliant Energy Systems Llc Traveling wave propeller, pump and generator apparatuses, methods and systems
US11795900B2 (en) 2016-06-30 2023-10-24 Pliant Energy Systems Llc Vehicle with traveling wave thrust module apparatuses, methods and systems
US11209022B2 (en) 2016-06-30 2021-12-28 Pliant Energy Systems Llc Vehicle with traveling wave thrust module apparatuses, methods and systems
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WO2018217585A1 (en) 2017-05-22 2018-11-29 Apple Inc. Multi-element piezo sensors for physiological measurements
US10487817B1 (en) * 2018-11-02 2019-11-26 Baoxiang Shan Methods for creating an undulating structure
CN110944274B (zh) * 2019-11-20 2020-12-18 武汉大学 一种基于Piston-mode的带质量负载可调谐MEMS压电声换能器

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US3816774A (en) * 1972-01-28 1974-06-11 Victor Company Of Japan Curved piezoelectric elements
NL7502453A (nl) * 1975-03-03 1976-09-07 Philips Nv Inrichting voor het omzetten van elektrische in akoestische trillingen en omgekeerd, voorzien van een membraan, bevattende tenminste een laag piezo-elektrisch polymeer materiaal.
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US6411015B1 (en) * 2000-05-09 2002-06-25 Measurement Specialties, Inc. Multiple piezoelectric transducer array
AU2001278697A1 (en) * 2000-08-11 2002-02-25 Ecchandes Inc. Overlapping type piezoelectric stator, overlapping type piezoelectric acturator and applications thereof

Also Published As

Publication number Publication date
EP1430546B1 (en) 2008-04-02
WO2003028122A2 (en) 2003-04-03
DE60225930T2 (de) 2009-04-16
WO2003028122A3 (en) 2004-02-12
JP2005504442A (ja) 2005-02-10
US7166952B2 (en) 2007-01-23
GB0123294D0 (en) 2001-11-21
CN1596480A (zh) 2005-03-16
EP1430546A2 (en) 2004-06-23
KR20040049309A (ko) 2004-06-11
DE60225930D1 (de) 2008-05-15
US20050040736A1 (en) 2005-02-24

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