DE60131621D1 - Thermischer Aktuator mit einem aus der Fläche biegenden Balken - Google Patents
Thermischer Aktuator mit einem aus der Fläche biegenden BalkenInfo
- Publication number
- DE60131621D1 DE60131621D1 DE60131621T DE60131621T DE60131621D1 DE 60131621 D1 DE60131621 D1 DE 60131621D1 DE 60131621 T DE60131621 T DE 60131621T DE 60131621 T DE60131621 T DE 60131621T DE 60131621 D1 DE60131621 D1 DE 60131621D1
- Authority
- DE
- Germany
- Prior art keywords
- thermal actuator
- beam bending
- bending out
- actuator
- thermal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
- B81B3/0024—Transducers for transforming thermal into mechanical energy or vice versa, e.g. thermal or bimorph actuators
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/04—Optical MEMS
- B81B2201/042—Micromirrors, not used as optical switches
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/05—Type of movement
- B81B2203/053—Translation according to an axis perpendicular to the substrate
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/05—Type of movement
- B81B2203/055—Translation in a plane parallel to the substrate, i.e. enabling movement along any direction in the plane
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/05—Type of movement
- B81B2203/058—Rotation out of a plane parallel to the substrate
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Micromachines (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Pressure Sensors (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US703201 | 1991-05-20 | ||
US09/703,201 US6422011B1 (en) | 2000-10-31 | 2000-10-31 | Thermal out-of-plane buckle-beam actuator |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60131621D1 true DE60131621D1 (de) | 2008-01-10 |
DE60131621T2 DE60131621T2 (de) | 2008-04-10 |
Family
ID=24824436
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60131621T Expired - Lifetime DE60131621T2 (de) | 2000-10-31 | 2001-10-15 | Thermischer Aktuator mit einem aus der Fläche biegenden Balken |
Country Status (6)
Country | Link |
---|---|
US (1) | US6422011B1 (de) |
EP (1) | EP1201602B1 (de) |
JP (1) | JP4115116B2 (de) |
KR (1) | KR100871268B1 (de) |
DE (1) | DE60131621T2 (de) |
TW (1) | TW504489B (de) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7064879B1 (en) * | 2000-04-07 | 2006-06-20 | Microsoft Corporation | Magnetically actuated microelectrochemical systems actuator |
US6708492B2 (en) * | 2000-10-31 | 2004-03-23 | Microsoft Corporation | Resonant thermal out-of-plane buckle-beam actuator |
US6775048B1 (en) | 2000-10-31 | 2004-08-10 | Microsoft Corporation | Microelectrical mechanical structure (MEMS) optical modulator and optical display system |
US6804959B2 (en) * | 2001-12-31 | 2004-10-19 | Microsoft Corporation | Unilateral thermal buckle-beam actuator |
US7283112B2 (en) * | 2002-03-01 | 2007-10-16 | Microsoft Corporation | Reflective microelectrical mechanical structure (MEMS) optical modulator and optical display system |
US7053519B2 (en) * | 2002-03-29 | 2006-05-30 | Microsoft Corporation | Electrostatic bimorph actuator |
US7658709B2 (en) * | 2003-04-09 | 2010-02-09 | Medtronic, Inc. | Shape memory alloy actuators |
US6985651B2 (en) * | 2003-08-05 | 2006-01-10 | Xerox Corporation | Thermal actuator with offset beam segment neutral axes and an optical waveguide switch including the same |
US6983088B2 (en) * | 2003-08-05 | 2006-01-03 | Xerox Corporation | Thermal actuator and an optical waveguide switch including the same |
US6985650B2 (en) * | 2003-08-05 | 2006-01-10 | Xerox Corporation | Thermal actuator and an optical waveguide switch including the same |
US7159397B1 (en) * | 2005-06-07 | 2007-01-09 | Sandia Corporation | Tensile-stressed microelectromechanical apparatus and tiltable micromirrors formed therefrom |
US7482664B2 (en) * | 2006-01-09 | 2009-01-27 | Microsoft Corporation | Out-of-plane electrostatic actuator |
WO2007143623A2 (en) | 2006-06-02 | 2007-12-13 | Stalford Harold L | Methods and systems for micro machines |
DE102007027428A1 (de) * | 2007-06-14 | 2008-12-18 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Bauelement mit einem Schwingungselement |
US8122973B2 (en) | 2008-05-21 | 2012-02-28 | Stalford Harold L | Three dimensional (3D) robotic micro electro mechanical systems (MEMS) arm and system |
WO2010016077A1 (en) * | 2008-08-08 | 2010-02-11 | Pirelli & C. Eco Technology S.P.A. | Method and device for controlling the regeneration of a particulate filter |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5994816A (en) * | 1996-12-16 | 1999-11-30 | Mcnc | Thermal arched beam microelectromechanical devices and associated fabrication methods |
US6130464A (en) * | 1997-09-08 | 2000-10-10 | Roxburgh Ltd. | Latching microaccelerometer |
JP2000000331A (ja) * | 1998-06-12 | 2000-01-07 | Descente Ltd | イルミネ−ション輝光を発するスポ−ツ用品 |
US6218762B1 (en) * | 1999-05-03 | 2001-04-17 | Mcnc | Multi-dimensional scalable displacement enabled microelectromechanical actuator structures and arrays |
US6360539B1 (en) * | 2000-04-05 | 2002-03-26 | Jds Uniphase Corporation | Microelectromechanical actuators including driven arched beams for mechanical advantage |
-
2000
- 2000-10-31 US US09/703,201 patent/US6422011B1/en not_active Expired - Lifetime
-
2001
- 2001-10-15 DE DE60131621T patent/DE60131621T2/de not_active Expired - Lifetime
- 2001-10-15 EP EP01124609A patent/EP1201602B1/de not_active Expired - Lifetime
- 2001-10-24 KR KR1020010065618A patent/KR100871268B1/ko active IP Right Grant
- 2001-10-29 JP JP2001331342A patent/JP4115116B2/ja not_active Expired - Fee Related
- 2001-10-30 TW TW090126960A patent/TW504489B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
TW504489B (en) | 2002-10-01 |
JP2002204587A (ja) | 2002-07-19 |
EP1201602A2 (de) | 2002-05-02 |
EP1201602A3 (de) | 2005-02-16 |
DE60131621T2 (de) | 2008-04-10 |
US6422011B1 (en) | 2002-07-23 |
KR20020034876A (ko) | 2002-05-09 |
JP4115116B2 (ja) | 2008-07-09 |
EP1201602B1 (de) | 2007-11-28 |
KR100871268B1 (ko) | 2008-11-28 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |