ATE391346T1 - Piezoelektrische strukturen - Google Patents
Piezoelektrische strukturenInfo
- Publication number
- ATE391346T1 ATE391346T1 AT02760433T AT02760433T ATE391346T1 AT E391346 T1 ATE391346 T1 AT E391346T1 AT 02760433 T AT02760433 T AT 02760433T AT 02760433 T AT02760433 T AT 02760433T AT E391346 T1 ATE391346 T1 AT E391346T1
- Authority
- AT
- Austria
- Prior art keywords
- plane
- bimorph
- dimension change
- piezoelectric
- piezoelectric layer
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2041—Beam type
- H10N30/2042—Cantilevers, i.e. having one fixed end
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2047—Membrane type
- H10N30/2048—Membrane type having non-planar shape
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
- Micromachines (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB0123294.1A GB0123294D0 (en) | 2001-09-27 | 2001-09-27 | Piezoelectric structures |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE391346T1 true ATE391346T1 (de) | 2008-04-15 |
Family
ID=9922831
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT02760433T ATE391346T1 (de) | 2001-09-27 | 2002-09-26 | Piezoelektrische strukturen |
Country Status (9)
Country | Link |
---|---|
US (1) | US7166952B2 (de) |
EP (1) | EP1430546B1 (de) |
JP (1) | JP2005504442A (de) |
KR (1) | KR20040049309A (de) |
CN (1) | CN1596480A (de) |
AT (1) | ATE391346T1 (de) |
DE (1) | DE60225930T2 (de) |
GB (1) | GB0123294D0 (de) |
WO (1) | WO2003028122A2 (de) |
Families Citing this family (48)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1012891A2 (de) * | 1997-09-05 | 2000-06-28 | 1... Ipr Limited | Aerogele, piezoelektrische anordnungen, und ihre verwendung |
US8181338B2 (en) | 2000-11-02 | 2012-05-22 | Danfoss A/S | Method of making a multilayer composite |
WO2004027970A1 (en) * | 2002-09-20 | 2004-04-01 | Danfoss A/S | An elastomer actuator and a method of making an actuator |
DE10054247C2 (de) * | 2000-11-02 | 2002-10-24 | Danfoss As | Betätigungselement und Verfahren zu seiner Herstellung |
EP1466149B1 (de) * | 2001-12-21 | 2008-01-23 | Danfoss A/S | Dielektrisches betätigungsglied oder sensorstruktur und herstellungsverfahren |
US7481120B2 (en) * | 2002-12-12 | 2009-01-27 | Danfoss A/S | Tactile sensor element and sensor array |
DE602004014592D1 (de) * | 2003-02-24 | 2008-08-07 | Danfoss As | |
US8148874B2 (en) * | 2005-04-15 | 2012-04-03 | University Of Florida Research Foundation, Inc. | Microactuator having multiple degrees of freedom |
GB0509837D0 (en) * | 2005-05-16 | 2005-06-22 | 1 Ltd | Curved electro-active actuator |
DE102005028970A1 (de) * | 2005-06-22 | 2006-12-28 | Siemens Ag | Piezoakter mit gesteigertem Hubvermögen |
US7692365B2 (en) * | 2005-11-23 | 2010-04-06 | Microstrain, Inc. | Slotted beam piezoelectric composite |
US7880371B2 (en) * | 2006-11-03 | 2011-02-01 | Danfoss A/S | Dielectric composite and a method of manufacturing a dielectric composite |
US7732999B2 (en) | 2006-11-03 | 2010-06-08 | Danfoss A/S | Direct acting capacitive transducer |
US8432057B2 (en) * | 2007-05-01 | 2013-04-30 | Pliant Energy Systems Llc | Pliant or compliant elements for harnessing the forces of moving fluid to transport fluid or generate electricity |
US7696634B2 (en) * | 2007-05-01 | 2010-04-13 | Pliant Energy Systems Llc | Pliant mechanisms for extracting power from moving fluid |
US7952261B2 (en) | 2007-06-29 | 2011-05-31 | Bayer Materialscience Ag | Electroactive polymer transducers for sensory feedback applications |
DE102008000816A1 (de) * | 2008-03-26 | 2009-10-01 | Robert Bosch Gmbh | Vorrichtung und Verfahren zur Anregung und/oder Dämpfung und/oder Erfassung struktureller Schwingungen einer plattenförmigen Einrichtung mittels einer piezoelektrischen Streifeneinrichtung |
EP2109217A3 (de) * | 2008-04-07 | 2013-05-15 | Stichting IMEC Nederland | System und Verfahren zur Resonanzfrequenzeinstellung von Resonanzvorrichtungen |
FR2936650B1 (fr) * | 2008-09-26 | 2011-03-11 | Commissariat Energie Atomique | Transducteur a polymere electroactif |
TWI381747B (zh) * | 2008-12-17 | 2013-01-01 | Ind Tech Res Inst | 微型揚聲器及其製造方法 |
EP2239793A1 (de) | 2009-04-11 | 2010-10-13 | Bayer MaterialScience AG | Elektrisch schaltbarer Polymerfilmaufbau und dessen Verwendung |
CN103384957B (zh) | 2011-01-10 | 2017-09-08 | 本亚明·彼得罗·菲拉尔多 | 用于例如为推进产生波状运动和用于利用运动流体的能量的机构 |
JP5687921B2 (ja) * | 2011-02-24 | 2015-03-25 | カヤバ工業株式会社 | 圧電アクチュエータ |
TWI542269B (zh) | 2011-03-01 | 2016-07-11 | 拜耳材料科學股份有限公司 | 用於生產可變形聚合物裝置和薄膜的自動化生產方法 |
TW201250288A (en) | 2011-03-22 | 2012-12-16 | Bayer Materialscience Ag | Electroactive polymer actuator lenticular system |
JP5751044B2 (ja) * | 2011-06-22 | 2015-07-22 | 株式会社村田製作所 | 電歪アクチュエータ |
US9294014B2 (en) * | 2012-02-10 | 2016-03-22 | Genziko Incorporated | Power generator |
US8692442B2 (en) | 2012-02-14 | 2014-04-08 | Danfoss Polypower A/S | Polymer transducer and a connector for a transducer |
US8891222B2 (en) | 2012-02-14 | 2014-11-18 | Danfoss A/S | Capacitive transducer and a method for manufacturing a transducer |
WO2013142552A1 (en) * | 2012-03-21 | 2013-09-26 | Bayer Materialscience Ag | Roll-to-roll manufacturing processes for producing self-healing electroactive polymer devices |
WO2013192143A1 (en) | 2012-06-18 | 2013-12-27 | Bayer Intellectual Property Gmbh | Stretch frame for stretching process |
US9590193B2 (en) | 2012-10-24 | 2017-03-07 | Parker-Hannifin Corporation | Polymer diode |
CA2899676C (en) * | 2013-01-29 | 2020-03-24 | Suzhou Institute Of Nano-Tech And Nano-Bionics (Sinano), Chinese Acade Of Sciences | Electronic skin, preparation method and use thereof |
JP3184382U (ja) * | 2013-02-18 | 2013-06-27 | 健 山岡 | 荷電型噴霧器 |
DE102013205626A1 (de) * | 2013-03-28 | 2014-10-02 | Siemens Aktiengesellschaft | Biegewandler mit piezoelektrischem Biegeelement, Kühlvorrichtung und Elektronikmodul |
CN105453289A (zh) * | 2013-07-08 | 2016-03-30 | 株式会社村田制作所 | 致动器 |
KR101528797B1 (ko) * | 2014-04-22 | 2015-06-15 | 울산대학교 산학협력단 | 압전 고분자를 사용한 햅틱 피드백 디바이스 |
US20160156287A1 (en) * | 2014-11-28 | 2016-06-02 | Zhengbao Yang | Half-tube array vibration energy harvesting method using piezoelectric materials |
AU2015379572B2 (en) | 2015-01-27 | 2018-09-27 | Apple Inc. | A system for determining the quality of sleep |
US9882115B2 (en) * | 2015-04-02 | 2018-01-30 | The Boeing Company | Integrated compliant boundary for piezoelectric bimorph actuator |
US11795900B2 (en) | 2016-06-30 | 2023-10-24 | Pliant Energy Systems Llc | Vehicle with traveling wave thrust module apparatuses, methods and systems |
US10519926B2 (en) | 2016-06-30 | 2019-12-31 | Pliant Energy Systems Llc | Traveling wave propeller, pump and generator apparatuses, methods and systems |
US11209022B2 (en) | 2016-06-30 | 2021-12-28 | Pliant Energy Systems Llc | Vehicle with traveling wave thrust module apparatuses, methods and systems |
US10190570B1 (en) | 2016-06-30 | 2019-01-29 | Pliant Energy Systems Llc | Traveling wave propeller, pump and generator apparatuses, methods and systems |
EP4223217A3 (de) | 2016-08-12 | 2023-12-27 | Apple Inc. | Vitalparameterüberwachungssystem |
CN110612060B (zh) | 2017-05-22 | 2022-09-02 | 苹果公司 | 用于生理测量的多元件压电传感器 |
US10487817B1 (en) * | 2018-11-02 | 2019-11-26 | Baoxiang Shan | Methods for creating an undulating structure |
CN110944274B (zh) * | 2019-11-20 | 2020-12-18 | 武汉大学 | 一种基于Piston-mode的带质量负载可调谐MEMS压电声换能器 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3816774A (en) * | 1972-01-28 | 1974-06-11 | Victor Company Of Japan | Curved piezoelectric elements |
NL7502453A (nl) * | 1975-03-03 | 1976-09-07 | Philips Nv | Inrichting voor het omzetten van elektrische in akoestische trillingen en omgekeerd, voorzien van een membraan, bevattende tenminste een laag piezo-elektrisch polymeer materiaal. |
US4056742A (en) * | 1976-04-30 | 1977-11-01 | Tibbetts Industries, Inc. | Transducer having piezoelectric film arranged with alternating curvatures |
JPS561269A (en) | 1979-06-20 | 1981-01-08 | Hitachi Ltd | Arc voltage control unit |
JPS5612697A (en) * | 1979-07-11 | 1981-02-07 | Suwa Seikosha Kk | Piezooelectric sound emitting element |
JPH0197604A (ja) | 1987-10-09 | 1989-04-17 | Mitsubishi Kasei Corp | 積層セラミックス製造法 |
JP2905643B2 (ja) * | 1992-05-29 | 1999-06-14 | 住友重機械工業株式会社 | 圧電リニアアクチュエータ |
JP2542154B2 (ja) | 1992-11-26 | 1996-10-09 | 山一電機株式会社 | 圧電アクチェ―タ― |
US6833656B2 (en) * | 1999-12-21 | 2004-12-21 | 1 . . . Limited | Electro active devices |
US6411015B1 (en) * | 2000-05-09 | 2002-06-25 | Measurement Specialties, Inc. | Multiple piezoelectric transducer array |
AU2001278697A1 (en) * | 2000-08-11 | 2002-02-25 | Ecchandes Inc. | Overlapping type piezoelectric stator, overlapping type piezoelectric acturator and applications thereof |
-
2001
- 2001-09-27 GB GBGB0123294.1A patent/GB0123294D0/en not_active Ceased
-
2002
- 2002-09-26 EP EP02760433A patent/EP1430546B1/de not_active Expired - Lifetime
- 2002-09-26 KR KR10-2004-7004588A patent/KR20040049309A/ko not_active Application Discontinuation
- 2002-09-26 US US10/491,220 patent/US7166952B2/en not_active Expired - Fee Related
- 2002-09-26 JP JP2003531541A patent/JP2005504442A/ja active Pending
- 2002-09-26 CN CNA028235789A patent/CN1596480A/zh active Pending
- 2002-09-26 AT AT02760433T patent/ATE391346T1/de not_active IP Right Cessation
- 2002-09-26 DE DE60225930T patent/DE60225930T2/de not_active Expired - Fee Related
- 2002-09-26 WO PCT/GB2002/004370 patent/WO2003028122A2/en active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
US20050040736A1 (en) | 2005-02-24 |
DE60225930D1 (de) | 2008-05-15 |
GB0123294D0 (en) | 2001-11-21 |
US7166952B2 (en) | 2007-01-23 |
EP1430546B1 (de) | 2008-04-02 |
WO2003028122A2 (en) | 2003-04-03 |
KR20040049309A (ko) | 2004-06-11 |
CN1596480A (zh) | 2005-03-16 |
EP1430546A2 (de) | 2004-06-23 |
DE60225930T2 (de) | 2009-04-16 |
JP2005504442A (ja) | 2005-02-10 |
WO2003028122A3 (en) | 2004-02-12 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |