DE60225930T2 - Piezoelektrische strukturen - Google Patents
Piezoelektrische strukturen Download PDFInfo
- Publication number
- DE60225930T2 DE60225930T2 DE60225930T DE60225930T DE60225930T2 DE 60225930 T2 DE60225930 T2 DE 60225930T2 DE 60225930 T DE60225930 T DE 60225930T DE 60225930 T DE60225930 T DE 60225930T DE 60225930 T2 DE60225930 T2 DE 60225930T2
- Authority
- DE
- Germany
- Prior art keywords
- piezoelectric
- waves
- plane
- group
- sections
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000008859 change Effects 0.000 claims abstract description 26
- 239000002356 single layer Substances 0.000 claims abstract description 18
- 239000000463 material Substances 0.000 claims description 32
- 238000000034 method Methods 0.000 claims description 18
- 230000007935 neutral effect Effects 0.000 claims description 11
- 229910010293 ceramic material Inorganic materials 0.000 claims description 2
- 239000010410 layer Substances 0.000 abstract description 34
- 238000005452 bending Methods 0.000 abstract description 12
- 238000000926 separation method Methods 0.000 abstract description 4
- 238000007493 shaping process Methods 0.000 abstract description 4
- 230000005684 electric field Effects 0.000 description 13
- 230000004913 activation Effects 0.000 description 12
- 238000003462 Bender reaction Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 5
- 230000000903 blocking effect Effects 0.000 description 4
- 239000002131 composite material Substances 0.000 description 3
- 238000010276 construction Methods 0.000 description 3
- 230000001419 dependent effect Effects 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 3
- 238000003825 pressing Methods 0.000 description 3
- 238000007639 printing Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000005245 sintering Methods 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 230000003213 activating effect Effects 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 2
- 230000008602 contraction Effects 0.000 description 2
- 229920002981 polyvinylidene fluoride Polymers 0.000 description 2
- 241001136792 Alle Species 0.000 description 1
- 239000004606 Fillers/Extenders Substances 0.000 description 1
- 239000002033 PVDF binder Substances 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- WYTGDNHDOZPMIW-RCBQFDQVSA-N alstonine Natural products C1=CC2=C3C=CC=CC3=NC2=C2N1C[C@H]1[C@H](C)OC=C(C(=O)OC)[C@H]1C2 WYTGDNHDOZPMIW-RCBQFDQVSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 235000008429 bread Nutrition 0.000 description 1
- 235000019504 cigarettes Nutrition 0.000 description 1
- 239000004927 clay Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 239000002178 crystalline material Substances 0.000 description 1
- 230000000994 depressogenic effect Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2047—Membrane type
- H10N30/2048—Membrane type having non-planar shape
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2041—Beam type
- H10N30/2042—Cantilevers, i.e. having one fixed end
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
- Micromachines (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GBGB0123294.1A GB0123294D0 (en) | 2001-09-27 | 2001-09-27 | Piezoelectric structures |
| GB0123294 | 2001-09-27 | ||
| PCT/GB2002/004370 WO2003028122A2 (en) | 2001-09-27 | 2002-09-26 | Piezoelectric structures |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE60225930D1 DE60225930D1 (de) | 2008-05-15 |
| DE60225930T2 true DE60225930T2 (de) | 2009-04-16 |
Family
ID=9922831
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE60225930T Expired - Fee Related DE60225930T2 (de) | 2001-09-27 | 2002-09-26 | Piezoelektrische strukturen |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US7166952B2 (enExample) |
| EP (1) | EP1430546B1 (enExample) |
| JP (1) | JP2005504442A (enExample) |
| KR (1) | KR20040049309A (enExample) |
| CN (1) | CN1596480A (enExample) |
| AT (1) | ATE391346T1 (enExample) |
| DE (1) | DE60225930T2 (enExample) |
| GB (1) | GB0123294D0 (enExample) |
| WO (1) | WO2003028122A2 (enExample) |
Families Citing this family (52)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AU8991898A (en) * | 1997-09-05 | 1999-03-29 | 1... Limited | Aerogels, piezoelectric devices, and uses therefor |
| US7518284B2 (en) | 2000-11-02 | 2009-04-14 | Danfoss A/S | Dielectric composite and a method of manufacturing a dielectric composite |
| US8181338B2 (en) | 2000-11-02 | 2012-05-22 | Danfoss A/S | Method of making a multilayer composite |
| US7548015B2 (en) | 2000-11-02 | 2009-06-16 | Danfoss A/S | Multilayer composite and a method of making such |
| DE10054247C2 (de) * | 2000-11-02 | 2002-10-24 | Danfoss As | Betätigungselement und Verfahren zu seiner Herstellung |
| ES2299614T3 (es) * | 2001-12-21 | 2008-06-01 | Danfoss A/S | Estructura de dispositivo dielectrico de accionamiento o deteccion y metodo para fabricar el mismo. |
| CN100530931C (zh) * | 2002-09-20 | 2009-08-19 | 丹福斯有限公司 | 弹性体致动器及制造致动器的方法 |
| ATE440319T1 (de) * | 2002-12-12 | 2009-09-15 | Danfoss As | Berührungssensorelement und sensorgruppe |
| ES2309502T3 (es) * | 2003-02-24 | 2008-12-16 | Danfoss A/S | Vendaje de compresion elastico electroactivo. |
| WO2006110908A1 (en) * | 2005-04-15 | 2006-10-19 | University Of Florida Research Foundation, Inc. | Microactuator having multiple degrees of freedom |
| GB0509837D0 (en) * | 2005-05-16 | 2005-06-22 | 1 Ltd | Curved electro-active actuator |
| DE102005028970A1 (de) * | 2005-06-22 | 2006-12-28 | Siemens Ag | Piezoakter mit gesteigertem Hubvermögen |
| US7692365B2 (en) * | 2005-11-23 | 2010-04-06 | Microstrain, Inc. | Slotted beam piezoelectric composite |
| US7880371B2 (en) * | 2006-11-03 | 2011-02-01 | Danfoss A/S | Dielectric composite and a method of manufacturing a dielectric composite |
| US7732999B2 (en) | 2006-11-03 | 2010-06-08 | Danfoss A/S | Direct acting capacitive transducer |
| US8432057B2 (en) * | 2007-05-01 | 2013-04-30 | Pliant Energy Systems Llc | Pliant or compliant elements for harnessing the forces of moving fluid to transport fluid or generate electricity |
| US7696634B2 (en) * | 2007-05-01 | 2010-04-13 | Pliant Energy Systems Llc | Pliant mechanisms for extracting power from moving fluid |
| US8610304B2 (en) | 2007-05-01 | 2013-12-17 | Pliant Energy Systems Llc | Mechanisms for creating undulating motion, such as for propulsion, and for harnessing the energy of moving fluid |
| US7952261B2 (en) | 2007-06-29 | 2011-05-31 | Bayer Materialscience Ag | Electroactive polymer transducers for sensory feedback applications |
| DE102008000816A1 (de) * | 2008-03-26 | 2009-10-01 | Robert Bosch Gmbh | Vorrichtung und Verfahren zur Anregung und/oder Dämpfung und/oder Erfassung struktureller Schwingungen einer plattenförmigen Einrichtung mittels einer piezoelektrischen Streifeneinrichtung |
| EP2109217A3 (en) * | 2008-04-07 | 2013-05-15 | Stichting IMEC Nederland | System and method for resonance frequency tuning of resonant devices |
| FR2936650B1 (fr) * | 2008-09-26 | 2011-03-11 | Commissariat Energie Atomique | Transducteur a polymere electroactif |
| TWI381747B (zh) * | 2008-12-17 | 2013-01-01 | Ind Tech Res Inst | 微型揚聲器及其製造方法 |
| EP2239793A1 (de) | 2009-04-11 | 2010-10-13 | Bayer MaterialScience AG | Elektrisch schaltbarer Polymerfilmaufbau und dessen Verwendung |
| JP5687921B2 (ja) * | 2011-02-24 | 2015-03-25 | カヤバ工業株式会社 | 圧電アクチュエータ |
| SG193003A1 (en) | 2011-03-01 | 2013-10-30 | Bayer Ip Gmbh | Automated manufacturing processes for producing deformable polymer devices and films |
| CN103703404A (zh) | 2011-03-22 | 2014-04-02 | 拜耳知识产权有限责任公司 | 电活化聚合物致动器双凸透镜系统 |
| JP5751044B2 (ja) * | 2011-06-22 | 2015-07-22 | 株式会社村田製作所 | 電歪アクチュエータ |
| US9294014B2 (en) * | 2012-02-10 | 2016-03-22 | Genziko Incorporated | Power generator |
| US8891222B2 (en) | 2012-02-14 | 2014-11-18 | Danfoss A/S | Capacitive transducer and a method for manufacturing a transducer |
| US8692442B2 (en) | 2012-02-14 | 2014-04-08 | Danfoss Polypower A/S | Polymer transducer and a connector for a transducer |
| WO2013142552A1 (en) * | 2012-03-21 | 2013-09-26 | Bayer Materialscience Ag | Roll-to-roll manufacturing processes for producing self-healing electroactive polymer devices |
| KR20150031285A (ko) | 2012-06-18 | 2015-03-23 | 바이엘 인텔렉쳐 프로퍼티 게엠베하 | 연신 공정을 위한 연신 프레임 |
| US9590193B2 (en) | 2012-10-24 | 2017-03-07 | Parker-Hannifin Corporation | Polymer diode |
| US9816882B2 (en) * | 2013-01-29 | 2017-11-14 | Suzhou Institute Of Nano-Tech And Nano-Bionics (Sinano), Chinese Academy Of Sciences | Electronic skin, preparation method and use thereof |
| JP3184382U (ja) * | 2013-02-18 | 2013-06-27 | 健 山岡 | 荷電型噴霧器 |
| DE102013205626A1 (de) * | 2013-03-28 | 2014-10-02 | Siemens Aktiengesellschaft | Biegewandler mit piezoelektrischem Biegeelement, Kühlvorrichtung und Elektronikmodul |
| WO2015005188A1 (ja) * | 2013-07-08 | 2015-01-15 | 株式会社村田製作所 | アクチュエータ |
| KR101528797B1 (ko) * | 2014-04-22 | 2015-06-15 | 울산대학교 산학협력단 | 압전 고분자를 사용한 햅틱 피드백 디바이스 |
| US20160156287A1 (en) * | 2014-11-28 | 2016-06-02 | Zhengbao Yang | Half-tube array vibration energy harvesting method using piezoelectric materials |
| WO2016120518A1 (en) | 2015-01-27 | 2016-08-04 | Beddit Oy | A system for determining the quality of sleep |
| US9882115B2 (en) * | 2015-04-02 | 2018-01-30 | The Boeing Company | Integrated compliant boundary for piezoelectric bimorph actuator |
| US11795900B2 (en) | 2016-06-30 | 2023-10-24 | Pliant Energy Systems Llc | Vehicle with traveling wave thrust module apparatuses, methods and systems |
| US11209022B2 (en) | 2016-06-30 | 2021-12-28 | Pliant Energy Systems Llc | Vehicle with traveling wave thrust module apparatuses, methods and systems |
| US10519926B2 (en) | 2016-06-30 | 2019-12-31 | Pliant Energy Systems Llc | Traveling wave propeller, pump and generator apparatuses, methods and systems |
| US10190570B1 (en) | 2016-06-30 | 2019-01-29 | Pliant Energy Systems Llc | Traveling wave propeller, pump and generator apparatuses, methods and systems |
| EP4223217A3 (en) | 2016-08-12 | 2023-12-27 | Apple Inc. | Vital signs monitoring system |
| WO2018217585A1 (en) | 2017-05-22 | 2018-11-29 | Apple Inc. | Multi-element piezo sensors for physiological measurements |
| US10487817B1 (en) * | 2018-11-02 | 2019-11-26 | Baoxiang Shan | Methods for creating an undulating structure |
| CN110944274B (zh) * | 2019-11-20 | 2020-12-18 | 武汉大学 | 一种基于Piston-mode的带质量负载可调谐MEMS压电声换能器 |
| JP7597303B2 (ja) * | 2021-02-24 | 2024-12-10 | ダイキンファインテック株式会社 | 布帛状センサ、及び布帛状センサデバイス |
| US12634611B2 (en) | 2022-02-18 | 2026-05-19 | Apple Inc. | Piezoelectric MEMS valve for an electronic device |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3816774A (en) * | 1972-01-28 | 1974-06-11 | Victor Company Of Japan | Curved piezoelectric elements |
| NL7502453A (nl) * | 1975-03-03 | 1976-09-07 | Philips Nv | Inrichting voor het omzetten van elektrische in akoestische trillingen en omgekeerd, voorzien van een membraan, bevattende tenminste een laag piezo-elektrisch polymeer materiaal. |
| US4056742A (en) * | 1976-04-30 | 1977-11-01 | Tibbetts Industries, Inc. | Transducer having piezoelectric film arranged with alternating curvatures |
| JPS561269A (en) | 1979-06-20 | 1981-01-08 | Hitachi Ltd | Arc voltage control unit |
| JPS5612697A (en) * | 1979-07-11 | 1981-02-07 | Suwa Seikosha Kk | Piezooelectric sound emitting element |
| JPH0197604A (ja) | 1987-10-09 | 1989-04-17 | Mitsubishi Kasei Corp | 積層セラミックス製造法 |
| JP2905643B2 (ja) * | 1992-05-29 | 1999-06-14 | 住友重機械工業株式会社 | 圧電リニアアクチュエータ |
| JP2542154B2 (ja) | 1992-11-26 | 1996-10-09 | 山一電機株式会社 | 圧電アクチェ―タ― |
| EP1240676B1 (en) * | 1999-12-21 | 2010-01-20 | Cambridge Mechatronics Limited | Electro-active devices |
| US6411015B1 (en) * | 2000-05-09 | 2002-06-25 | Measurement Specialties, Inc. | Multiple piezoelectric transducer array |
| WO2002015378A1 (en) * | 2000-08-11 | 2002-02-21 | Ecchandes Inc. | Overlapping type piezoelectric stator, overlapping type piezoelectric acturator and applications thereof |
-
2001
- 2001-09-27 GB GBGB0123294.1A patent/GB0123294D0/en not_active Ceased
-
2002
- 2002-09-26 AT AT02760433T patent/ATE391346T1/de not_active IP Right Cessation
- 2002-09-26 EP EP02760433A patent/EP1430546B1/en not_active Expired - Lifetime
- 2002-09-26 JP JP2003531541A patent/JP2005504442A/ja active Pending
- 2002-09-26 WO PCT/GB2002/004370 patent/WO2003028122A2/en not_active Ceased
- 2002-09-26 US US10/491,220 patent/US7166952B2/en not_active Expired - Fee Related
- 2002-09-26 DE DE60225930T patent/DE60225930T2/de not_active Expired - Fee Related
- 2002-09-26 KR KR10-2004-7004588A patent/KR20040049309A/ko not_active Withdrawn
- 2002-09-26 CN CNA028235789A patent/CN1596480A/zh active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| EP1430546A2 (en) | 2004-06-23 |
| US20050040736A1 (en) | 2005-02-24 |
| GB0123294D0 (en) | 2001-11-21 |
| EP1430546B1 (en) | 2008-04-02 |
| CN1596480A (zh) | 2005-03-16 |
| KR20040049309A (ko) | 2004-06-11 |
| DE60225930D1 (de) | 2008-05-15 |
| WO2003028122A3 (en) | 2004-02-12 |
| WO2003028122A2 (en) | 2003-04-03 |
| JP2005504442A (ja) | 2005-02-10 |
| US7166952B2 (en) | 2007-01-23 |
| ATE391346T1 (de) | 2008-04-15 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8364 | No opposition during term of opposition | ||
| 8339 | Ceased/non-payment of the annual fee |