JP2005322873A5 - - Google Patents

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Publication number
JP2005322873A5
JP2005322873A5 JP2004273645A JP2004273645A JP2005322873A5 JP 2005322873 A5 JP2005322873 A5 JP 2005322873A5 JP 2004273645 A JP2004273645 A JP 2004273645A JP 2004273645 A JP2004273645 A JP 2004273645A JP 2005322873 A5 JP2005322873 A5 JP 2005322873A5
Authority
JP
Japan
Prior art keywords
roller
stage
priming
processing
coating film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2004273645A
Other languages
English (en)
Japanese (ja)
Other versions
JP2005322873A (ja
JP4386430B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2004273645A priority Critical patent/JP4386430B2/ja
Priority claimed from JP2004273645A external-priority patent/JP4386430B2/ja
Priority to TW094110774A priority patent/TWI260686B/zh
Priority to KR1020050028560A priority patent/KR101069494B1/ko
Publication of JP2005322873A publication Critical patent/JP2005322873A/ja
Publication of JP2005322873A5 publication Critical patent/JP2005322873A5/ja
Application granted granted Critical
Publication of JP4386430B2 publication Critical patent/JP4386430B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP2004273645A 2004-04-07 2004-09-21 塗布膜形成装置 Expired - Lifetime JP4386430B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2004273645A JP4386430B2 (ja) 2004-04-07 2004-09-21 塗布膜形成装置
TW094110774A TWI260686B (en) 2004-04-07 2005-04-04 Coating film forming apparatus
KR1020050028560A KR101069494B1 (ko) 2004-04-07 2005-04-06 도포막형성장치

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2004113023 2004-04-07
JP2004273645A JP4386430B2 (ja) 2004-04-07 2004-09-21 塗布膜形成装置

Publications (3)

Publication Number Publication Date
JP2005322873A JP2005322873A (ja) 2005-11-17
JP2005322873A5 true JP2005322873A5 (enExample) 2006-10-05
JP4386430B2 JP4386430B2 (ja) 2009-12-16

Family

ID=35469892

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004273645A Expired - Lifetime JP4386430B2 (ja) 2004-04-07 2004-09-21 塗布膜形成装置

Country Status (3)

Country Link
JP (1) JP4386430B2 (enExample)
KR (1) KR101069494B1 (enExample)
TW (1) TWI260686B (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100803147B1 (ko) * 2007-04-04 2008-02-14 세메스 주식회사 도포장치 및 이를 이용한 처리액의 도포 방법
KR100840528B1 (ko) 2007-04-13 2008-06-23 주식회사 케이씨텍 슬릿 코터용 예비토출장치
KR200456618Y1 (ko) * 2007-05-07 2011-11-09 주식회사 케이씨텍 슬릿 코터용 예비토출장치
KR100969347B1 (ko) 2009-09-07 2010-07-09 한국기계연구원 멀티 코터 및 이를 이용한 코팅 방법과 롤 프린팅 방법
KR102061315B1 (ko) * 2011-07-27 2019-12-31 스미도모쥬기가이고교 가부시키가이샤 기판제조장치 및 기판제조방법
JP5912403B2 (ja) * 2011-10-21 2016-04-27 東京エレクトロン株式会社 塗布処理装置
KR101744512B1 (ko) * 2016-02-04 2017-06-20 황중국 양면 코팅장치
CN117184835A (zh) * 2022-05-31 2023-12-08 上海德沪涂膜设备有限公司 涂布设备

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11169769A (ja) * 1997-12-08 1999-06-29 Toray Ind Inc 塗布装置及び塗布方法並びにカラーフィルタの製造装置及び製造方法
JP2001070858A (ja) * 1999-07-07 2001-03-21 Canon Inc 塗料の塗工装置および塗工方法

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