JP2005322873A5

JP2005322873A5 -

Info

Publication number: JP2005322873A5
Application number: JP2004273645A
Authority: JP
Filing date: 2004-09-21
Publication date: 2006-10-05
Anticipated expiration: 2024-09-21

Claims

In a coating film forming apparatus for forming a film by applying a treatment liquid to the surface of a substrate to be processed,
A first stage and a second stage, which are arranged side by side and each place a substrate to be processed, respectively, a single processing liquid supply nozzle having a slit-like discharge port extending in the width direction of the target substrate, and the processing liquid supply A nozzle moving means for moving the nozzle, a treatment liquid supply means for supplying a treatment liquid to the treatment liquid supply nozzle, and a treatment liquid from the discharge port is discharged to a peripheral surface of a roller formed to be rotatable, Priming processing means for homogenizing the processing liquid adhering to the discharge port by rotating the roller;
An apparatus for forming a coating film, wherein the processing liquid is applied to the surface of the substrate to be processed placed on the first stage and the second stage by the processing liquid supply nozzle.

The coating film forming apparatus according to claim 1, wherein the priming processing unit is installed between the first stage and the second stage.

Prior to the coating process on the substrate to be processed, the nozzle moving means makes the discharge port of the processing liquid supply nozzle close to the peripheral surface of the roller and uniformizes the processing liquid adhering to the discharge port. 3. The coating film forming apparatus according to claim 1, wherein the coating film forming apparatus is characterized in that:

The priming processing means includes roller rotation control means for controlling the rotation of the roller,
When the treatment liquid adhering to the discharge port is homogenized, the roller rotation control unit determines whether the coating process after the homogenization process is performed in the first stage or the second stage. The coating film forming apparatus according to claim 1, wherein a rotation direction of the roller is determined.

5. The coating film forming apparatus according to claim 1, wherein the priming processing unit is provided with a moisturizing unit that suppresses drying of a tip of the processing liquid supply nozzle.

The priming means includes a first priming processing means and a second priming processing means,
2. The coating film formation according to claim 1, wherein the first priming processing unit and the second priming processing unit are disposed on the right side or the left side of the first stage and the second stage, respectively. apparatus.

Prior to the coating process on the substrate to be processed placed on the first stage, the nozzle moving unit brings the discharge port of the processing liquid supply nozzle close to the peripheral surface of the roller, and the first priming processing unit To uniformize the treatment liquid adhering to the discharge port,
In addition, before the coating process on the substrate to be processed placed on the second stage, the nozzle moving means brings the discharge port of the processing liquid supply nozzle close to the peripheral surface of the roller, and the second priming The coating film forming apparatus according to claim 6, wherein the processing unit performs a uniform processing on the processing liquid adhering to the discharge port.

The first and second priming means include roller rotation control means for controlling rotation of the roller, and the rotation direction of the rollers of the first priming processing means and the rollers of the second priming processing means is the same. The coating film forming apparatus according to claim 6, wherein the coating film forming apparatus is a direction.

9. The moisturizing means for suppressing drying of the tip of the processing liquid supply nozzle is provided in the first priming processing means or the second priming processing means. The coating film forming apparatus described in any one.

In a coating film forming apparatus for forming a film by applying a treatment liquid to the surface of a substrate to be processed,
A first stage and a second stage, which are arranged side by side and each have a substrate to be processed, and a slit-like discharge port extending in the width direction of the substrate to be processed, and for supplying a processing liquid to the substrate to be processed. Two processing liquid supply nozzles, nozzle moving means for moving the processing liquid supply nozzle, and the nozzle moving means causes the discharge port of the processing liquid supply nozzle to be close to the circumferential surface of the roller formed to be rotatable, and By discharging the processing liquid from the discharge port to the peripheral surface of the roller and rotating the roller in one direction, the nozzle tip is moved to one side of the front-rear direction of the nozzle tip along the rotation direction of the roller. Priming processing means to make a state in which a lot of processing liquid is attached,
After the processing by the priming processing means, the nozzle moving means moves the processing liquid supply nozzle with the side where the processing liquid in the front-rear direction of the nozzle tip is attached as the traveling direction, and performs the coating process on the substrate to be processed. A coating film forming apparatus.

The coating film forming apparatus according to claim 10, wherein the roller is disposed at least between the first stage and the second stage.

The priming processing means includes roller rotation control means for controlling rotation of the roller,
When processing the nozzle tip, the roller rotation control means determines the rotation direction of the roller depending on whether the coating process for the substrate to be processed is performed on the first stage or the second stage. The coating film forming apparatus according to claim 10 or 11, characterized in that:

The priming means includes two of the rollers,
The two rollers are arranged on the right side or the left side of the first stage and the second stage, respectively.
The moisturizing means for suppressing the drying of the tip of the treatment liquid supply nozzle is provided on either side of the two rollers, according to any one of claims 10 to 12. Coating film forming device.

The priming means has two wipers arranged on the left and right sides of the roller when the discharge port of the processing liquid supply nozzle is brought close to the roller.
Only the wiper on the upstream side in the rotation direction of the roller that rotates in one direction under the control of the roller rotation control means is brought into sliding contact with the roller peripheral surface to remove unnecessary processing liquid on the peripheral surface. The coating film forming apparatus according to claim 12 or 13.