KR101744512B1 - apparatus for coating the both side - Google Patents

apparatus for coating the both side Download PDF

Info

Publication number
KR101744512B1
KR101744512B1 KR1020160014288A KR20160014288A KR101744512B1 KR 101744512 B1 KR101744512 B1 KR 101744512B1 KR 1020160014288 A KR1020160014288 A KR 1020160014288A KR 20160014288 A KR20160014288 A KR 20160014288A KR 101744512 B1 KR101744512 B1 KR 101744512B1
Authority
KR
South Korea
Prior art keywords
coating
roll
contact
blade
coating roll
Prior art date
Application number
KR1020160014288A
Other languages
Korean (ko)
Inventor
황중국
서응수
강진구
안현철
Original Assignee
황중국
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 황중국 filed Critical 황중국
Priority to KR1020160014288A priority Critical patent/KR101744512B1/en
Application granted granted Critical
Publication of KR101744512B1 publication Critical patent/KR101744512B1/en

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/76—Apparatus for connecting with build-up interconnects
    • H01L2224/7615—Means for depositing
    • H01L2224/76161—Means for screen printing, e.g. roller, squeegee, screen stencil
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/77—Apparatus for connecting with strap connectors
    • H01L2224/7715—Means for applying permanent coating, e.g. in-situ coating
    • H01L2224/77161—Means for screen printing, e.g. roller, squeegee, screen stencil
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/93—Batch processes
    • H01L2224/95—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
    • H01L2224/951—Supplying the plurality of semiconductor or solid-state bodies
    • H01L2224/95115—Supplying the plurality of semiconductor or solid-state bodies using a roll-to-roll transfer technique

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Coating Apparatus (AREA)

Abstract

A double-sided coating apparatus is provided.
The present invention relates to a first coating roll, in which a first coating roll in which a part of a body is immersed in a first coating tank filled with a coating solution and rotated in one direction, a first coating roll in which a circumferential surface and an end of the first coating roll are spaced apart from each other A doctor blade, a pair of first kiss rolls facing the first coating roll, and a coating liquid, which passes through between the first coating roll and the pair of first kiss rolls while contacting the first coating roll, To form a first coating layer; And a first contact roll which is in contact with the opposite surface of the substrate film having the first coating layer formed on one side thereof while passing through the first coating portion, A direction switching unit for switching the traveling direction of the base film to the side of the drying furnace by having a second contact that is in contact with the opposite side of the base film; And a second coating roll in which a part of the body is immersed in a second coating tank filled with a predetermined amount of the coating liquid and rotated in one direction and a second doctor blade And a second coating unit for transferring the coating solution to the opposite surface of the base film in contact with the second coating roll to form a second coating layer; .

Description

[0001] The present invention relates to a double-

The present invention relates to a double-sided coating apparatus capable of coating both sides of a film by successively forming coating layers by transferring the coating solution on the opposite side of one side of a substrate film which proceeds in one direction by gravure roll coating method.

Generally, in the field of semiconductors and LCDs, it is used for adhesion or coating of photo-resist, solder resist, etc., or to form a uniform layer thickness of an interlayer resin insulating layer or a solder resist, A roller coater is used to form the double-sided layer.

Conventionally, a method of rolling coating a coating liquid on both surfaces of a substrate includes a method of forming a resist layer by transferring a coating liquid onto a surface of a substrate, which is a coating object, by punching grooves with a uniform gap in a cylindrical roller made of silicon, urethane, I use it the most.

In order to form a resist layer on both sides of the substrate, the rollers are vertically moved so as to transfer and coat the coating solution, which is a photoresist ink, on the substrate while moving the substrate from below to above.

In such a conventional photoresist coating method, there is a problem that when the coating is vertically applied and then cured, there is a thickness variation between the upper and lower ends.

In addition, the facilities for continuously coating and drying the photo-solder resist (PSR) such as Reel-to-Reel or Roll-to-Roll have hitherto been problematic in terms of dry stage construction in the manufacturing process structure, It is difficult to implement the inkjet recording apparatus practically because it is difficult to contaminate the ink and change the traveling direction.

That is, the conventional technique has a disadvantage in terms of productivity and process cost because it can not continuously perform printing (or coating) and curing (or drying), and has a process structure that is susceptible to contamination.

(Patent Document 1) KR10-1425622 B1

SUMMARY OF THE INVENTION Accordingly, the present invention has been made to solve the above-mentioned problems, and it is an object of the present invention to provide a method and apparatus for continuously performing a process of roll coating a photo solder resist (PSR) on both sides, Sided roll coating apparatus.

It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory and are not restrictive of the invention, unless further departing from the spirit and scope of the invention as defined by the appended claims. It will be possible.

As a specific means for achieving the above object, a preferred embodiment of the present invention includes a first coating roll in which a part of a body is immersed and rotated in one direction in a first coating tank filled with a predetermined amount of a coating solution, And a pair of first kiss rolls opposing the first coating roll, wherein the first doctor blade has a circumferential surface and an end portion spaced apart from each other by a predetermined distance, and passes between the first coating roll and the pair of first kiss rolls A first coating unit for transferring the coating liquid to one surface of the substrate film in contact with the first coating roll to form a first coating layer; And a first contact roll which is in contact with the opposite surface of the substrate film having the first coating layer formed on one side thereof while passing through the first coating portion, A direction switching unit for switching the traveling direction of the base film to the side of the drying furnace by having a second contact that is in contact with the opposite side of the base film; And a second coating roll in which a part of the body is immersed in a second coating tank filled with a predetermined amount of the coating liquid and rotated in one direction and a second doctor blade A second coating unit for transferring the coating solution to the opposite side of the substrate film in contact with the second coating roll to form a second coating layer; Side coating apparatus.

Preferably, the first doctor blade includes a first blade main body to which a first scratch plate facing the first coating roll is mounted so as to be replaceable at a front end thereof, and a second blade main body having a rear end of the blade main body and a rod end connected thereto, And a first blade regulating cylinder for rotationally operating the first scratch plate so as to come into contact with or spaced from the circumferential surface of the first coating roll.

The first blade movement cylinder is fixed to the first blade adjustment cylinder and moves the first cylinder base horizontally movably to the body frame forward and backward toward the first coating roll.

Preferably, the pair of first kiss rolls include a first support block for rotatably supporting both ends of the roll shaft, a first slider for assembling the first support block so as to be movable up and down, And a first adjusting screw assembled and assembled to a horizontal stand extended from the first slider.

Preferably, the first contact rolls may be connected to the rod ends of a pair of right and left contact roll cylinders, both ends of which are fixedly mounted on a body frame on which the second coating portion is provided.

Preferably, the second contact roll includes a second support block for rotatably supporting both ends of the roll shaft, a second slider for assembling the second support block so as to be movable up and down, and a tip end connected to the second support block And a second adjusting screw which is assembled to the horizontal plate provided on the second slider.

Wherein the second contact roll is an adsorption roller having a plurality of suction holes connected to a vacuum suction line on a circumferential surface which is in contact with an opposite surface of the base film to generate a vacuum suction force.

Preferably, the second doctor blade includes a second blade main body in which a second scratch plate facing the second coating roll is mounted so as to be replaceable at a front end thereof, and a rotary shaft coupled with a rear end of the blade main body is rotatably assembled And the blade support.

More preferably, the blade support may include a second blade control cylinder for moving the blade support forward and backward to contact or separate the second scratch plate against the circumferential surface of the second coating roll.

Preferably, the first coating vessel or the second coating vessel may include a scattering prevention plate disposed at a predetermined distance in front of the inlet hole connected to the coating liquid supply line.

Preferably, the first frame includes a roll frame on which the first kiss roll is disposed, and the roll frame is rotatably assembled through a body frame on which the second coating part is disposed and a rotary operation shaft, A rod end of a fixedly installed operation cylinder can be connected to the roll frame.

The present invention as described above has the following effects.

(1) The coating liquid is transferred to one surface of the base film in contact with the first coating roll of the first coating portion to form a first coating layer, and the direction is changed by the first and second contact rolls of the redirection portion. 2 Since the coating liquid is transferred to the opposite side of the substrate film in contact with the coating roll to form the second coating layer, the first coating layer and the second coating layer can be sequentially formed on the side opposite to the one side of the substrate film at the side of the drying furnace, It is possible to automate the process of forming a coating layer such as a photo solder resist (PSR) on both surfaces of the film opposite to the one surface without defect.

(2) By adjusting the contact angle at which one side of the substrate film and one side of the first coating roll contact with each other by controlling the vertical movement of the pair of first kiss rolls facing the first coating roll, The contact area can be varied, so that the first coating layer formed on one surface of the base film can be easily controlled.

(3) By adjusting the contact angle at which the opposite surface of the base film and the second coating roll come into contact with each other by the up-and-down movement of the second contact roll in contact with the opposite surface of the base film so as to turn the base film to the side of the drying furnace Since the contact area between the base film and the second coating roll can be varied, the second coating layer formed on the opposite side of the base film can be controlled.

(4) By disposing a scattering prevention plate facing the inflow hole in which the coating liquid is replenished or supplied into the coating tank filled with the coating liquid, contamination due to scattering of the coating liquid can be prevented when replenishing the coating liquid.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is an installation view of a double-side coating apparatus according to a preferred embodiment of the present invention; FIG.
2 is a side view showing a double-side coating apparatus according to a preferred embodiment of the present invention.
3 is a front view showing a double-side coating apparatus according to a preferred embodiment of the present invention.
4 is a detailed view showing a first kiss roll and a first coating roll employed in a double-sided coating apparatus according to a preferred embodiment of the present invention.
5 is a detailed view showing a second contact roll and a second coating unit employed in the double-side coating apparatus according to the preferred embodiment of the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the following description, a detailed description of known functions and configurations incorporated herein will be omitted when it may obscure the subject matter of the present invention.

The same reference numerals are used for portions having similar functions and functions throughout the drawings.

In addition, in the entire specification, when a part is referred to as being 'connected' to another part, it may be referred to as 'indirectly connected' not only with 'directly connected' . Also, to include an element does not exclude other elements unless specifically stated otherwise, but may also include other elements.

As shown in FIG. 1, a double-side coating apparatus 100 according to a preferred embodiment of the present invention includes a first and a second coating unit 100, which is coated on a surface opposite to one surface of a substrate film, 2, and a second coating unit 130 to sequentially form a first coating layer, a second coating layer, and a second coating layer.

1 to 3, a part of the first coating unit 110 is immersed in a first coating tank 111 filled with a predetermined amount of the coating liquid, and the first coating unit 110 is driven by a driving source of the first motor 113 And a first coating roll 112 rotated in one direction (clockwise in the drawing).

The first coating roll 112 is formed of a gravure roll member having a pattern formed on the outer surface of the body, so that the first coating roll 111 in which a part of the body is immersed in the coating solution filled in the first coating bath 111, And the surface of the substrate film, which is in contact with the first coating roll, is transferred to the surface of the substrate film while the coating film is being contacted.

Both ends of the first coating roll 112 are rotatably assembled to the main body frame 101. One end of the first coating roll 112 is connected to the driving shaft of the first motor 113, And is rotated in one direction by a driving force.

A first doctor blade 114 is disposed on the outer side of the first coating roll to uniformly maintain the thickness of the coating solution. The first doctor blade 114 has a distal end which is in contact with the circumferential surface of the first coating roll The coating liquid applied to the circumferential surface of the first coating roll is scratched so that only the coating liquid having a thickness regulated remains on the circumferential surface of the first coating roll.

The first doctor blade 114 includes a first blade main body 114b having a first rubbing plate 114a facing the first coating roll and being mounted on the tip of the first rubbing plate 114a so as to be replaceable, And a first blade regulating cylinder 114d connected to the rod end for rotating the first scratching plate 114a against the circumferential surface of the first coating roll or rotating the first scratching plate 114a around the rotating shaft 114c .

A first cylinder base 114f fixed to the first blade adjusting cylinder 114d and assembled horizontally to the main body frame 101 is moved back and forth to the first coating roll side, And a first blade movement cylinder 114e for regulating the thickness of the coating liquid buried in the circumferential surface of the first coating roll by adjusting the distance between the first coating roll and the first coating roll.

Thus, the first coating blade (114) is provided on the circumferential surface of the first coating roll (112) in which a part of the body is immersed in the first coating bath so that a coating liquid having a predetermined thickness for transferring is deposited on one surface of the base film It remains.

A pair of first kiss rolls 115a and 115b facing the first coating roll 112 are provided on the first coating roll 112. A base film which is uncoiled in uncoiler and proceeds in one direction, The coating liquid buried in the circumferential surface of the first coating roll while passing between the first coating roll 112 and the pair of first kiss rolls 115a and 115b is transferred to one surface of the substrate film in contact with the first coating roll Thereby forming the first coating layer C1.

The pair of first kiss rolls 115a and 115b are rotatably assembled to the right and left ends of the roll frame 102 assembled via the main body frame 101 and the rotary operation shaft 104, The first coating roll 112 can be moved up and down with respect to the first coating roll 112 so that the contact area between one side of the film and the circumferential face of the first coating roll can be adjusted.

That is, the pair of first kiss rolls 115a and 115b includes a first support block 116a for rotatably supporting both ends of the roll shaft, a first slider for assembling the first support block 116a to be movable up and down And a first adjusting screw 116d assembled to the horizontal support 116c, one end of which is assembled to the first supporting block and extends from the first slider 116b.

Accordingly, by vertically adjusting the positions of the pair of first kiss rolls 115a and 115b relative to the first coating roll 112 fixed in position by the forward or reverse rotation of the first adjustment screw 116b, The contact angle at which the one surface of the base film and the circumferential surface of the first coating roll 112 are in contact with each other can be varied according to the coating conditions by the descent and the elevation of the pair of first kiss rolls contiguous to the opposite surface of the base film, The area can be easily adjusted.

Accordingly, the thickness of the first coating layer (C1) can be controlled by controlling the transfer amount of the coating solution transferred and coated on one surface of the base film.

The direction changing unit 120 includes a first contact roll 121 which is in contact with the opposite side of the base film having the first coating layer C1 formed on one side thereof while passing through the first coating unit 110, The direction of the substrate film horizontally entering the portion 110 side is firstly turned upward after passing the first coating portion 110 horizontally.

The first contact roll 121 has a second contact roll 122 which is in contact with the opposite surface of the substrate film, which is opposite to the first contact roll 121, After the coating process is performed on the second coating part 130, the first and second coating layers C1 and C2 formed on both surfaces of the substrate film opposite to the first surface, respectively, To the drying furnace 200 side.

Both ends of the roll axis of the first contact roll 121 may be connected to the rod ends of a pair of left and right contact roll cylinders 121a fixed to the body frame 101 on which the second coating unit 130 is installed.

The second contact roll 122 includes a second support block 123a for rotatably supporting both ends of the roll shaft, a second slider 123b for assembling the second support block 123a to be movable up and down, And a second adjusting screw 123d whose tip is connected to the second supporting block 123a and assembled to the horizontal plate 123c provided on the second slider.

The position of the second contact roll 122 relative to the second coating roll 132 fixed in position by the second coating part 130 by the forward or reverse rotation of the second adjusting screw 123d, (Θ1, θ2, θ3) at which the opposite surface of the base film and the circumferential surface of the second coating roll 122 are in contact with each other according to the coating conditions, The contact area where the opposite surface of the base film and the circumferential surface of the second coating roll 122 are in contact with each other can be easily controlled according to the coating conditions by the rising and falling of the second contact roll 122 contacting.

Accordingly, the thickness of the second coating layer (C2) can be controlled by controlling the transfer amount of the coating solution transferred onto the opposite surface of the base film.

The second contact roll 122 is composed of an adsorption roller having a plurality of suction holes connected to a vacuum suction line on an outer surface contacting the opposite surface of the base film to generate a vacuum suction force, The substrate film can be redirected to the second coating portion without slip occurrence while adsorbing the base film which is in contact with the opposite surface to the circumferential surface of the second coating portion.

Although this adsorption roller is shown and described as being applied to the second contact roll 122, it is not limited thereto and can be applied to the first contact roll 121 as well.

1 to 5, a part of the body is immersed in a second coating tank 131 filled with a predetermined amount of the coating liquid, and the second coating unit 130 is driven by a driving source of the second motor 133 And a second coating roll 132 rotated in one direction (counterclockwise in the drawing).

The second coating roll 132 is composed of a gravure roll member having a pattern formed on the outer surface of the body, like the first coating roll, so that the second coating roll 132 is immersed in a coating solution contained in a second coating bath filled with a certain amount of the coating solution, The second coating layer C2 is formed by transferring the coating solution onto the surface of the base film which is in contact with the second coating roll while passing through the base film.

Both ends of the second coating roll 132 are rotatably assembled to the body frame 101. One end of the second coating roll 132 is connected to the driving shaft of the second motor 133, And is rotated in one direction by a driving force.

A second doctor blade 134 is disposed on the outer side of the second coating roll 132 so as to maintain a uniform and uniform thickness of the coating solution. So that only the coating liquid whose thickness is regulated is left on the circumferential surface of the second coating roll 132 by scraping the coating liquid applied to the circumferential surface of the second coating roll.

The second doctor blade 134 includes a second blade main body 134b having a second rubbing plate 134a facing the second coating roll so as to be replaceable at the front end thereof and a second blade main body 134b provided at the rear end of the blade main body 134b And may include a blade support 134d in which a coupled rotary shaft 134c is rotatably assembled.

The blade support 134d includes an operation member such as a second blade adjustment cylinder for moving the blade support 134d forward and backward to contact or separate the second scratch plate 134a against the circumferential surface of the second coating roll, Lt; RTI ID = 0.0 > 134e. ≪ / RTI >

Accordingly, the second blade main body 134b is rotated about the rotation axis provided on the blade support 134d, and the second blade adjustment cylinder is moved forward and backward by the second blade adjustment cylinder, By controlling the gap between the coating rolls to regulate the thickness of the coating liquid buried in the circumferential surface of the second coating roll, the circumferential surface of the second coating roll 132, in which a part of the body is immersed in the second coating bath 131, The coating liquid remains on the opposite surface of the substrate film so that the coating liquid has a certain thickness for transfer.

In addition, the second coating tank 131 is provided with a scattering prevention plate 135 disposed at a predetermined distance in front of the inflow hole through which the coating liquid flows, thereby preventing the coating liquid from flowing into the inflow hole It is possible to prevent the scattering of the coating liquid supplied and discharged from the outside by the scattering prevention plate. Therefore, it is possible to prevent the peripheral equipment from being contaminated by the coating liquid scattered to the outside when supplying the coating liquid.

Although the scattering prevention plate 135 is illustrated as being installed in the second coating tank 131, it is not limited thereto and may include a first coating tank 111 having an inlet hole connected to the coating liquid supply line so as to supplement the coating liquid. Can be installed in the same configuration.

The cutout portion cut outwardly from the main body frame 101 includes a roll frame 102 on which a first coating portion 110 is installed and the roll frame 102 is rotatably supported by the main frame and the rotary motion shaft 104 And connecting the rod end of an actuating cylinder 103 fixed to the main body frame 101 to the roll frame, the upper and lower ends of the actuating cylinder are moved upward and downward, The pair of first kiss rolls 115a and 115b of the first coating unit can be rotated from the first coating roll to the first coating roll, It can be distant or close.

On the other hand, the substrate film having the first and second coating layers formed on the first and second coating rolls successively contacted with the first and second coating rolls successively passes through the first coating portion and the second coating portion, The drying process for the first and second coating layers is continuously performed by entering the inner space of the drying furnace through the inlet 201 formed on one side.

A plurality of discharge ports 202 for discharging high temperature hot air and a plurality of guide rolls 203 for guiding the base film are disposed in the inner space of the drying furnace 200, The film is dried internally by drying in a high-temperature atmosphere and then transferred to a post-process.

At this time, upper and lower magnet members for applying a magnetic force to the first and second coating layers C1 and C2 are formed at the entrance of the drying furnace 200 so as to prevent shaking of the substrate film entering the inside of the drying furnace .

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the inventions. It will be apparent to those of ordinary skill in the art.

110: first coating part 111: first coating coating
112: first coating roll 113: first motor
114: first doctor blade 120: direction changing section
121: first contact roll 122: second contact roll
130: second coating part 131: second coating coating
132: second coating roll 133: second motor
134: first doctor blade 200: drying furnace

Claims (11)

A first doctor blade having a first coating roll in which a part of the body is immersed in a first coating tank filled with a predetermined amount of the coating liquid and rotated in one direction and a circumferential surface and an end of the first coating roll are spaced apart from each other by a predetermined distance, And a pair of first kiss rolls facing the first coating roll. The first coating roll and the pair of first kiss rolls are provided with a pair of first kiss rolls on opposite sides of the substrate film contacting with the first coating roll while passing between the first coating roll and the pair of first kiss rolls A first coating part for transferring the coating solution to form a first coating layer;
And a first contact roll which is in contact with the opposite surface of the substrate film having the first coating layer formed on one side thereof while passing through the first coating portion, A direction switching unit that has a second contact roll that is in contact with the opposite surface of the base film to switch the traveling direction of the base film to the side of the drying furnace; And
A second doctor blade having a second coating roll in which a part of the body is immersed in a second coating tank filled with a predetermined amount of the coating liquid and rotated in one direction and the end portion of which is spaced apart from the circumferential surface of the second coating roll by a predetermined distance, A second coating part for transferring the coating solution to the opposite side of the substrate film in contact with the second coating roll to form a second coating layer; Lt; / RTI >
Wherein the second contact roll comprises a second support block for rotatably supporting both ends of the roll shaft, a second slider for assembling the second support block so as to be movable up and down, And a second adjusting screw which is assembled to the horizontal plate provided on the slider. The method according to claim 1,
Wherein the first doctor blade has a first blade main body in which a first scratch plate facing the first coating roll is mounted so that the first scratch plate is replaceable at a front end thereof and a second blade main body having a rear end of the first blade main body connected to a rod end, And a first blade control cylinder for rotating the first scratch plate in contact with or spaced from the circumferential surface of the first coating roll. 3. The method of claim 2,
And a first blade moving cylinder fixedly installed with the first blade adjusting cylinder and moving the first cylinder base horizontally movably to the body frame forward and backward toward the first coating roll, . The method according to claim 1,
The pair of first kiss rolls may include a first support block rotatably supporting both ends of the roll shaft, a first slider assembled in such a manner that the first support block can move up and down, And a first adjusting screw which is assembled to a horizontal stand extending from the slider. The method according to claim 1,
Wherein the first contact roll is connected to the rod ends of a pair of right and left contact roll cylinders fixed to the body frame on both sides of which the second coating part is provided. delete The method according to claim 1,
Wherein the second contact roll is an adsorption roller having a plurality of suction holes connected to a vacuum suction line on a circumferential surface which is in contact with an opposite surface of the base film to generate a vacuum suction force. The method according to claim 1,
Wherein the second doctor blade includes a second blade main body in which a second scratch plate facing the second coating roll is mounted so as to be rotatable at a tip end thereof and a rotary shaft coupled to a rear end of the second blade main body is rotatably assembled ≪ / RTI > wherein the blade support comprises a blade support. 9. The method of claim 8,
Wherein the blade support comprises a second blade adjustment cylinder for moving the blade support forward and backward to contact or separate the second scratch plate against the circumferential surface of the second coating roll. 10. The method according to any one of claims 1 to 5 and 7 to 9,
Wherein the first coating bath or the second coating bath comprises a scattering prevention plate disposed at a predetermined distance in front of an inflow hole connected to a coating liquid supply line. 10. The method according to any one of claims 1 to 5 and 7 to 9,
And a roll frame in which the first kiss roll is disposed, wherein the roll frame is assembled to be rotatable via a main body frame in which the second coating portion is disposed and a rotary operation shaft, and a body is fixedly installed And the rod end of the operating cylinder is connected to the roll frame.
KR1020160014288A 2016-02-04 2016-02-04 apparatus for coating the both side KR101744512B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020160014288A KR101744512B1 (en) 2016-02-04 2016-02-04 apparatus for coating the both side

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020160014288A KR101744512B1 (en) 2016-02-04 2016-02-04 apparatus for coating the both side

Publications (1)

Publication Number Publication Date
KR101744512B1 true KR101744512B1 (en) 2017-06-20

Family

ID=59281026

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020160014288A KR101744512B1 (en) 2016-02-04 2016-02-04 apparatus for coating the both side

Country Status (1)

Country Link
KR (1) KR101744512B1 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110328085A (en) * 2019-08-09 2019-10-15 深圳市浩能科技有限公司 A kind of coating machine for ultrathin membrane coating
CN112774946A (en) * 2020-12-31 2021-05-11 海宁市方圣包装材料有限公司 Coating device for anti-slip coating on surface of chemical filling bag
CN114514106A (en) * 2019-10-15 2022-05-17 林道尔·多尼尔有限责任公司 Method for producing sealable biaxially oriented polyester-based film and film stretching device
CN114769075A (en) * 2022-05-14 2022-07-22 广东新诺兰智能装备有限公司 One-way double-sided transfer coating machine
CN116586244A (en) * 2023-06-09 2023-08-15 吴江市涂泰克纺织后整理有限公司 Fabric surface coating device and coating method

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005322873A (en) * 2004-04-07 2005-11-17 Tokyo Electron Ltd Device for forming coating film

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005322873A (en) * 2004-04-07 2005-11-17 Tokyo Electron Ltd Device for forming coating film

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110328085A (en) * 2019-08-09 2019-10-15 深圳市浩能科技有限公司 A kind of coating machine for ultrathin membrane coating
CN114514106A (en) * 2019-10-15 2022-05-17 林道尔·多尼尔有限责任公司 Method for producing sealable biaxially oriented polyester-based film and film stretching device
CN112774946A (en) * 2020-12-31 2021-05-11 海宁市方圣包装材料有限公司 Coating device for anti-slip coating on surface of chemical filling bag
CN114769075A (en) * 2022-05-14 2022-07-22 广东新诺兰智能装备有限公司 One-way double-sided transfer coating machine
CN116586244A (en) * 2023-06-09 2023-08-15 吴江市涂泰克纺织后整理有限公司 Fabric surface coating device and coating method
CN116586244B (en) * 2023-06-09 2024-01-12 吴江市涂泰克纺织后整理有限公司 Fabric surface coating device and coating method

Similar Documents

Publication Publication Date Title
KR101744512B1 (en) apparatus for coating the both side
KR101069464B1 (en) Roll printing apparatus
KR930008324B1 (en) Roll coating apparatus
TWI498171B (en) Coating treatment method, computer recording medium and coating treatment device
JP5218781B2 (en) Substrate processing equipment
JP5122546B2 (en) Substrate processing equipment
KR100803147B1 (en) Slit coater and method of coating a process solution on a substrate using the same
JP2018034151A (en) Automatic coating bake line
TW554383B (en) Developing unit and developing method
JP4071183B2 (en) Coating method and coating apparatus
JP4762872B2 (en) Dirty removal mechanism of rotating roll
TW200537585A (en) Coating film forming apparatus
KR100924656B1 (en) Spin coater for cylindrical substrate and coating method using thereof
KR101671496B1 (en) Photoresist treating apparatus
JP2005322873A5 (en)
KR101346091B1 (en) Apparatus for coating thin material
JP4614509B2 (en) Coating apparatus and coating method
JPH10288784A (en) Device and method for manufacturing liquid crystal display device
KR101052757B1 (en) Substrate coating method and apparatus for performing the same
KR950002148Y1 (en) Roll coating apparatus for forming film of uniform thickness
JPH11197569A (en) Coating method and coater
KR101052754B1 (en) Substrate Transfer Device
JP6361208B2 (en) Plate cylinder moisturizer
KR102134437B1 (en) Method and Apparatus for treating substrate
JPH11513933A (en) Method and apparatus for producing photographic material

Legal Events

Date Code Title Description
GRNT Written decision to grant