KR100969347B1 - Multi-coater, coating method and roll printing method using the same - Google Patents

Abstract

PURPOSE: A multi coater, a coating method using thereof, and a roll printing method using thereof are provided to reduce the formation time of a coated layer while controlling the thickness of coating, and to produce a device with a multilayer. CONSTITUTION: A multi coater comprises the following: a base; a vacuum hot plate supporting a substrate to form a curing and hardening space; and a coater head(30) moving on the vacuum hot plate. The coater head includes a doctor plate(41), a squeeze(42) and a coating roll(43), a squeeze holder installed on a second slot hole(52) of the coater head using a second mounting member(62). The second mounting member is supported by a second elastic member(72) and a second micro-meter(82). The coating roll forms a through-hole mounted on a third slot hole(53) of the coater head.

Description

Multi coater, coating method and roll printing method using it {MULTI-COATER, COATING METHOD AND ROLL PRINTING METHOD USING THE SAME}

The present invention relates to a multi coater and a coating method using the same, and more particularly, to a multi coater and a coating method using the same having a plurality of working functions to coat the substrate in various ways.

A plurality of processes and corresponding equipment are required to form a coating film having a predetermined thickness on a substrate.

For example, the coating film forming apparatus may include a device for driving a dispenser for dispensing a coating liquid on a substrate, a doctor blade for forming a coating film having a uniform thickness, and a remaining squeeze (squeeze) Equipment for driving a squeegee and a coating roll (coating roll), the equipment for driving a coating roll (coating roll) to pressurize the coating film and to form a new coating film.

As such, since the equipment for each work function is formed separately, the substrate having one process completed must be moved to the equipment of the next process.

Therefore, it is difficult to continuously form a coating film on the substrate, to set a separate curing conditions, difficult to align between layers, it is more difficult to form a coating film or to control the coating thickness in various ways, and also the overall coating time This lengthens.

One embodiment of the present invention is provided with equipment for each work function, and can be used selectively to each of the work functions, and relates to a multi-coater and coating method for adjusting the coating thickness and shorten the coating time.

One embodiment of the present invention relates to a multi-coater and a coating method having a device for each work function, to form a coating film in a variety of ways, and also to enable the fabrication of devices having multiple layers.

In addition, an embodiment of the present invention relates to a roll printing method for implementing roll printing using a multi-coater.

According to an embodiment of the present invention, a multi-coater may include a base, a vacuum hot plate installed on the base to support a substrate to form a coating, solidification, and curing space space, and mounted on the base and mounted on the vacuum hot plate. And a coater head moving in one direction, the coater head comprising: a doctor blade for forming a dispensed coating solution as a first coating film, a squeeze for forming the first coating film as a second coating film, and the first coating film and the first coating film. Two or more of the coating rolls which form one of two coating films as a 3rd coating film are included.

The coater head may further include a dispenser which dispenses the coating liquid and moves in a second direction crossing the first direction.

The doctor blade is elongated in the second direction and is attached to a blade holder provided on both sides of the first direction, and the blade holder is provided through first mounting members provided at both ends of the second direction. It is mounted in the first slot hole of the coater head, and can be adjusted and supported in height.

The squeeze is elongated in the second direction, is attached to a squeeze holder provided on both sides of the first direction, and the squeeze holder is provided through the second mounting member provided at both ends of the second direction. Mounted in the second slot hole of the head, it can be adjusted and supported height.

The coating roll is formed long in the second direction, and forms a through hole at the center in the second direction, and the through hole is formed in the coater head through third mounting members provided at both ends of the second direction. Mounted in a third slot hole, the coating roll may be height-adjusted and supported through the third mounting member.

The third slot hole may include a thirty first slot hole and a thirty-second slot hole formed at both ends of the second direction of the coater head, and the third mounting member may include the thirty-first slot hole and the thirty-second slot hole. And a thirty-first mounting member and a thirty-second mounting member mounted to each one, wherein one of the thirty-first mounting member and the thirty-second mounting member may be separated from the coater head.

The coating method according to an embodiment of the present invention includes a substrate loading step of loading a substrate to be coated on a vacuum hot plate, a coating solution dispensing step of dispensing a coating solution on the substrate loaded on the vacuum hot plate, and a coater head. An equipment selection step of selecting one or more equipment of one or more doctor blades, one or more squeeze and coating rolls, and a film forming step of forming a coating film with the selected equipment.

In the equipment selection step, when the combination of the doctor blade, the squeeze and the coating roll is variously selected, the film forming step may form a multi-layer.

Roll printing method according to an embodiment of the present invention, the pattern plate loading step of loading the patterned plate making on the vacuum hot plate, the coating liquid dispensed on the patterned plate loaded on the vacuum hot plate pattern of the patterned substrate An inking step of inking, and a film patterning step of patterning the first film by mounting and roll printing a first film on a coating roll.

The film patterning step may remove the coating roll and mount a printing device including a printing roll on which a blanket roll and a second film are mounted, thereby patterning the second film by roll printing.

As such, according to an embodiment of the present invention, the coater head is selectively provided with a doctor blade, squeeze, and a coating roll, thereby controlling the coating thickness and shortening the coating film formation time.

By selecting a combination of equipment, it is possible to form a coating film in various ways, and it becomes possible to manufacture a device having multiple layers.

In addition, by attaching the patterned plate to the coating roll it is possible to roll printing using a multi-coater device.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those skilled in the art may easily implement the present invention. As those skilled in the art would realize, the described embodiments may be modified in various different ways, all without departing from the spirit or scope of the present invention. In order to clearly illustrate the present invention, parts not related to the description are omitted, and the same or similar components are denoted by the same reference numerals throughout the specification.

1 is a perspective view of a multi coater according to an embodiment of the present invention, and FIG. 2 is a side view of the coater head in FIG. 1 and 2, the multi coater 1 includes a base 10, a vacuum hot plate 20, and a coater head 30. The base 10 forms the basis of the multi coater 1 and provides an installation space for the vacuum hot plate 20 and the coater head 30 and an operation space for the coater head 30.

The base 10 penetrates the base 10 at both ends of the second direction (y-axis direction) orthogonal to the x-axis direction to guide the movement of the first direction (x-axis direction) of the coater head 30 in the x-axis direction. It is provided with a guide hole 11 formed in a long straight line. And the base 10 is a drive device for reciprocating the cotter head 30 in the x-axis direction, for example, the lead screw 12 is installed in the x-axis direction, and the lead screw 12 to drive the inside A motor 13 is provided (see FIG. 3).

The coater head 30 is mounted to the lead screw 12 to be reciprocated in the x-axis direction from the base 10. That is, both side plate members 31 of the coater head 30 are inserted and extended through the guide holes 11 on the base 10 and are mounted to the lead screw 12 in the base 10. Accordingly, when the motor 13 is driven, the lead screw 12 rotates, and when the lead screw 12 rotates, the cotter head 30 moves the lead screw 12 and the guide hole 11 through the side plate member 31. Along the x-axis.

Meanwhile, the side plate member 31 may be directly mounted to the lead screw 12, but may be mounted to the lead screw 12 via the bracket 33 as in the present embodiment. And the side plate member 31 is mounted to the bracket 33 as a fastening member 34. By disassembling and coupling the fastening member 34, the side plate member 31 can be simply removed or mounted from the bracket 33. That is, the coater head 30 may be separated from the base 10. It is easy to replace and mount the coater head 30.

The x-axis movement of the coater head 30 causes the doctor blade 41, squeeze 42, coating roll 43 and dispenser 44 to be mounted on the coater head 30 above the vacuum hot plate 20. Move in the x-axis direction to perform the associated work of each equipment, or to escape from above the vacuum hot plate (20).

Vacuum hot plate 20 is installed on the upper surface of the base 10, while supporting the substrate to be coated (S, see Fig. 1 and 6) coating the coating liquid to form a coating film, and at the same time solidifying the coating film and Allows curing operations to cure. Since the coating work and the solidification and curing work are performed without moving the substrate S, the coating film can maintain a uniform thickness, and the workability of the work for forming the coating film can be improved.

Hereinafter, first, the coater head 30 will be described in detail, and the vacuum hot plate 20 will be described in detail. 3 is a cross-sectional view taken along the line III-III of FIG. 1, and FIG. 4 is a cross-sectional view taken along the line IV-IV of FIG. 2, 3, and 4, the respective equipments mounted on the coater head 30 will be described.

The dispenser 44 dispenses the coating liquid onto the substrate S, the doctor blade 41 forms the dispensed coating liquid as the first coating film, and the squeeze 42 forms the first coating film as the second coating film, and the coating roll. Reference numeral 43 forms a first coating film or a second coating film as a third coating film. The substrate S may be formed of various materials requiring coating such as a wafer, glass, and a film. The coating liquid may be conductive, insulating or semiconducting, or may use various materials such as a photosensitive liquid.

The dispenser 44 is mounted to the guide 32 which extends in the y-axis direction from the front of the side plate member 31 in the coater head 30 (see Fig. 1). Therefore, the dispenser 44 can be reciprocated in the y-axis direction according to the driving of the motor 441 (see FIG. 4). That is, the coater head 30 is moved in the x-axis direction by the lead screw 12, the motor 13, and the bracket 33. Since the dispenser 44 is mounted on the guide 32 provided in the coater head 30, the coating liquid may be dispensed with respect to the entire xy plane of the vacuum hot plate 20 above the vacuum hot plate 20.

The dispenser 44 is mounted on the coater head 30 to drop and spread the material to be coated, that is, the coating liquid onto the substrate S. For example, the coating liquid may include a material that can be coated on the substrate S, that is, water, a polymer, an ink containing fine particles, and a paste. The dispenser 44 may implement a quantitative coating according to the thickness of the coating film required by controlling the amount of the coating liquid dispensed.

2, 3, and 4, the doctor blade 41 has a side plate member of the coater head 30 to form a coating liquid dispensed on the substrate S placed on the vacuum hot plate 20 as a first coating film. It is provided between 31 and is installed long in the y-axis direction.

The blade holder 411 is used to install the doctor blade 41 in the coater head 30. The blade holder 411 is formed long in the y-axis direction between both side plate members 31 of the coater head 30 and is provided on both sides of the doctor blade 41 to hold the doctor blade 41.

The blade holder 411 is connected to the first mounting member 61 provided at both ends of the doctor blade 41 in the y-axis direction. Therefore, the blade holder 411 is mounted and supported in the first slot hole 51 which is elongated in the third direction (z-axis direction) in the side plate member 31 through the first mounting member 61 (see FIG. 2). ). As the first mounting member 61 is moved up and down in the first slot hole 51, the doctor blade 41 is moved in the z-axis direction based on the substrate S to adjust height, thereby adjusting the thickness of the first coating film. do.

For example, the first mounting member 61 is inserted into the first slot hole 51 and screwed to the blade holder 411 on one side, and the side plate portion 31 on the other side of the first slot hole 51. ) 2 and 3, the first mounting member 61 is supported by the first elastic member 71 below the first slot hole 51, and the first mounting member 61 is first above the first slot hole 51. Supported by a micrometer 81.

The first micrometer 81 is fixedly mounted to the side plate member 31 and positions the tip of the rod 811 on the first mounting member 61. Therefore, when the rod 811 is raised and lowered by the operation of the first micrometer 81, the first mounting member 61 is raised by the elastic force of the first elastic member 71, or the first micrometer 81 is used. The first elastic member 71 is lowered by the pressing force of the rod 811.

That is, the first mounting member 61 is stopped at a position where the pressing force of the first micrometer 81 and the elastic force of the first elastic member 71 are balanced. As a result, the doctor blade 41 mounted on the first mounting member 61 via the blade holder 411 is spaced apart from the substrate S, that is, in a state in which the height of the coater head 30 is adjusted. The first coating film is formed on the substrate S placed on the vacuum hot plate 20 through the x-axis movement.

The first slot hole 51, the first mounting member 61, and the blade holder 411 separate the blade holder 411 from the side plate member 31 when the doctor blade 41 wears, and the blade holder 411. The doctor blade 41 is disassembled from the doctor blade 41, the doctor blade 41 is replaced, and then the doctor blade 41 is easily replaced by engaging and mounting in the reverse order of disassembly.

The configuration of the doctor blade 41 and the blade holder 411, the first mounting member 61, the first elastic member 71 and the first micrometer 81 for mounting the same, as illustrated in this embodiment, It may be provided in one set in the coater head 30, or may be provided in a plurality of sets along the x-axis direction to enable coating in a variety of ways with more various choices.

Next, the squeeze 42 will be described, and the squeeze 42 may be mounted to the side plate member 31 in a structure similar to that of the doctor blade 41. The squeeze 42 is formed at the rear of the doctor blade 41 in the x-axis direction and the side plate members of the coater head 30 in the x-axis direction so as to form the first coating film formed on the substrate S or the dispensed coating liquid as the second coating film. It is provided between 31 and is installed long in the y-axis direction.

A squeeze holder 421 is used to install the squeeze 42 on the coater head 30. The squeeze holder 421 is formed long in the y-axis direction between both side plate members 31 of the coater head 30, and is provided on both sides of the squeeze 42 to hold the squeeze 42.

The squeeze holder 421 has a second slot hole formed in the side plate member 31 in a third direction (z-axis direction) through the second mounting member 62 provided at both ends of the squeeze 42 in the y-axis direction ( 52) and supported (see FIG. 2). As the second mounting member 62 moves up and down in the second slot hole 52, the squeeze 42 is moved in the z-axis direction with respect to the substrate S and is height-adjusted.

For example, the second mounting member 62 is inserted into the second slot hole 52 and screwed to the squeeze holder 421 to one side, and the side plate member 31 of the second slot hole 52 to the other side. Takes on 2 and 3, the second mounting member 62 is supported by the second elastic member 72 below the second slot hole 52, and the second mounting member 62 is disposed above the second slot hole 52. Supported by a micrometer 82.

The second micrometer 82 is fixedly mounted to the side plate member 31 and positions the tip of the rod 821 on the second mounting member 62. Therefore, when the rod 821 rises and falls by the operation of the second micrometer 82. The second mounting member 62 is raised by the elastic force of the second elastic member 72 or lowered while pressing the second elastic member 72 by the pressing force of the rod 821 of the second micrometer 82.

That is, the second mounting member 62 is stopped at a position where the pressing force of the second micrometer 82 and the elastic force of the second elastic member 72 are balanced. As a result, the squeeze 42, which is mounted to the second mounting member 62 via the squeeze holder 421, is spaced apart from the substrate S, that is, in a state in which the height of the coater head 30 is adjusted. Through the axial movement, the first coating film or the dispensed coating liquid on the substrate S is formed as the second coating film.

The second slot hole 52, the second mounting member 62, and the squeeze holder 421 separate the squeeze holder 421 from the side plate member 31 when the squeeze 42 wears, and removes the squeeze holder 421 from the squeeze holder 421. After disassembling the squeeze 42 and replacing the squeeze 42, the squeeze 42 is easily replaced by engaging and mounting in the reverse order of disassembly.

The configuration of the squeeze 42 and the squeeze holder 421, the second mounting member 62, the second elastic member 72 and the second micrometer 82 for mounting the squeeze 42, as illustrated in this embodiment, coater The head 30 may be provided in one set, or may be provided in a plurality of sets along the x-axis direction to enable various types of coatings with more various choices.

Next, the coating roll 43 will be described, and the coating roll 43 is coated on the rear of the squeeze 42 so as to form the first coating film, the second coating film or the dispensed coating liquid formed on the substrate S as the third coating film. It is provided between both side plate members 31 of the head 30 to be installed in a long y-axis direction.

FIG. 5 is a cross-sectional view taken along the line VV of FIG. 1. Referring to Figure 5, the coating roll 43 is formed long in the y-axis direction, and forms a through hole 431 in the y-axis direction in the center.

The coating roll 43 is formed to be elongated in the z-axis direction in the side plate member 31 of the coater head 30 through the third mounting member 63 provided at both ends of the y-axis direction of the through hole 431. It is mounted and supported in the hole 53 (see Fig. 5). As the third mounting member 63 moves up and down in the third slot hole 53, the coating roll 43 is moved in the z-axis direction with respect to the substrate S and is height-adjusted.

The third mounting member 63 is supported in a suspended state by the third elastic member 73 above the third slot hole 53, and is third micrometer above the third slot hole 53. It is supported by (83). The third slot hole 53 includes a thirty-first slot hole 531 and a thirty-second slot hole 532 formed at both ends of the coater head 30 in the y-axis direction, that is, at both side plate members 31. Accordingly, the third mounting member 63 includes a thirty-first mounting member 631 and a thirty-second mounting member 632 mounted in each of the thirty-first slot hole 531 and the thirty-second slot hole 532.

The 31st mounting member 631 and the 32nd mounting member 632 may be detachably mounted to the 31st slot hole 531 and the 32nd slot hole 532 of the coater head 30, respectively, but the coating roll ( In order to facilitate the mounting and dismounting of 43), only one can be detachably mounted.

For example, the thirty-first mounting member 631 is rotatably mounted to the thirty-first slot hole 531 formed in one side plate member 31 of the coater head 30. The 32nd mounting member 632 is mounted in a rotatable and detachable structure in the 32nd slot hole 532 formed in the other side plate member 31 of the coater head 30.

For this purpose, the forward and backward members 64 and the locking member 65 are used between the thirty-second slot holes 532 and the thirty-second mounting members 632. The forward and backward members 64 accommodate one end of the support part 662 that rotatably supports the thirty-second mounting member 632, and an accommodation part 641 mounted to the side plate member 31 in a structure capable of moving in the y-axis direction. And an adjusting unit 642 which is screwed to one side of the receiving unit 641 to restrict movement of one end of the 32nd mounting member 632 in the y-axis direction.

The locking member 65 is fixed to one side of the receiving portion 641 to lock and release the adjusting portion 642 to the receiving portion 641 (see FIGS. 2 and 5). Therefore, the 31st and 32nd mounting members 631 and 632 hold | maintain (lock state) or release (release state) of the coating roll 43. As shown in FIG.

The first and second elastic members 71 and 72 are formed of compression springs, whereas the third elastic members 73 are formed of tension springs.

On the thirty-second mounting member 632 side, the third elastic member 73 connects the coater head 30 from the accommodating portion 641 and the upper portion thereof, and is connected to the accommodating portion 641. Apply upward force to The third micrometer 83 positions the tip of the rod 831 above the thirty-second mounting portion 632.

At the 31st mounting member 631 side, the 3rd elastic member 73 connects the support part 662 which rotatably supports the 31st mounting member 631, and the coater head 30 from the upper side, and supports it. An upward acting force is applied to the thirty-first mounting member 631 connected to the part 662. The third micrometer 83 positions the tip of the rod 831 above the thirty-first mounting part 631.

The thirty-first and thirty-second mounting members 631 and 632 are raised by the elastic force of the third elastic member 73 or press and lower the elastic force by the downward actuation force of the third micrometer 83. That is, the 31st and 32nd mounting members 631 and 632 stop at a position where the pressing force of the third micrometer 83 and the elastic force of the third elastic member 73 are balanced. As a result, the coating roll 43 mounted on the 31st and 32nd mounting members 631 and 632 is spaced apart from the substrate S, that is, in a height-adjusted state, in the x-axis direction of the coater head 30. Through the movement, the second coating film or coating liquid on the substrate S is formed as a third coating film.

The thirty-first and thirty-second slot holes 531 and 532 and the thirty-first and thirty-second mounting members 631 and 632, the locking member 65, and the forward and backward members 64 are locked from the side plate member 31. Of the coating roll 43 by releasing the, and operating the forward and backward members 64, removing the 32nd mounting member 632, replacing the coating roll 43, and then engaging and mounting in the reverse order of disassembly. To facilitate replacement.

6 is a perspective view of a vacuum hot plate, and FIG. 7 is a cross-sectional view taken along the line VII-VII of FIG. 6. 6 and 7, the vacuum hot plate 20 includes a heat insulating plate 21, a lower plate 22, and an upper plate 23. The heat insulating plate 21 is installed on the base 10 to prevent heat generated in the vacuum hot plate 20 from being transferred to the base 10 to reduce the efficiency of the vacuum hot plate 20.

The lower plate 22 is installed on the heat insulating plate 21 and includes a heater H therein to maintain a constant temperature level by heating the vacuum hot plate 20. The upper plate 23 is installed on the upper surface of the lower plate 22, and forms a vacuum chamber (C) between the upper surface of the lower plate 22, it is possible to install the substrate (S).

The heater H is formed in a straight state with a constant length in the y-axis direction, is disposed at equal intervals on the lower plate 22 along the x-axis direction, to form a uniform temperature distribution on the upper plate 23, The third coating film formed on the substrate S can be solidified and cured simultaneously with the coating.

In addition, the upper plate 23 is provided with a vacuum hole 231 to vacuum-adsorb the substrate S placed on the upper surface of the upper plate 23 by using the vacuum pressure of the vacuum chamber (C). The vacuum hole 231 penetrates the upper plate 23 to apply a vacuum pressure of the vacuum chamber C to the substrate S placed on the upper surface of the upper plate 23. In addition, a plurality of vacuum holes 231 are formed in the upper plate 23 to stably apply the vacuum pressure to the substrate S.

The substrate S placed on the vacuum hot plate 20 is made of a combination of any one or two or more of the doctor blade 41, the squeeze 42 and the coating roll 43 during the coating process. In the meantime, the coating error can be minimized because it is stably fixed.

Hereinafter, a coating method using the multi coater 1 will be described. 8 is a flowchart of a coating method using the multi coater of FIG. 1. Referring to Fig. 8, the coating method includes a substrate loading step (a), a coating liquid dispensing step (b), an equipment selection step (c), and a film forming step (d).

In the substrate loading step (a), the coating target substrate S is loaded onto the vacuum hot plate 20. At this time, the substrate (S) is fixed with a vacuum pressure to minimize the coating error, it is heated by the heater (H) can be dried and cured simultaneously with the coating.

In the coating liquid dispensing step (b), the coating liquid (CM) is dispensed on the substrate S loaded on the vacuum hot plate 20. The coater head 30 is moved in the x-axis direction on the lead screw 12 in accordance with the drive of the motor 13. In addition, the dispenser 44 is moved in the y-axis direction on the guide 32 in accordance with the driving of the motor 441. That is, the dispenser 44 dispenses the coating liquid CM with respect to the xy plane of the substrate S.

Equipment selection step (c) selects at least one of the doctor blade 41, the squeeze 42 and the coating roll 43 provided on the coater head 30 to form a coating film. As illustrated in this example, the equipment selection step (c) selected each of the doctor blade 41, the squeeze 42 and the coating roll 43.

The film forming step (d) moves the coater head 30 in the x-axis direction to form a coating film with selected equipment. As illustrated in this embodiment, the first coating film L1 is formed of the doctor blade 41. The squeeze 42 forms the first coating film L2 as the thinner second coating film L2, and the coating roll 43 finally forms the second coating film L2 as the thinner third coating film L3.

9-11 are state diagrams of use of coater heads illustrating various coating methods. 9 to 11, the coater head 30 may select equipment in various combinations according to the type of coating liquid, that is, the ink containing water, polymers, and fine particles, and the type of paste and the thickness of the required coating film. have.

Figure 9 (a) selects only the doctor blade 41 to form a first coating film, (b) select the doctor blade 41 and the coating roll 43 to form a first coating film and then the third coating film (C) selecting two doctor blades 41 to form a first coating film, and (d) selecting two doctor blades 41 and a coating roll 43 to form a first coating film. The combination which forms a 3rd coating film after this is illustrated.

FIG. 10 illustrates a second coating film by selecting only the squeeze 42 in (a), and forming a second coating film by selecting the squeeze 42 and the coating roll 43 in (b), and then forming a third coating film. In (c), two squeeze 42 is selected to form a second coating film, and in (d) two squeeze 42 and a coating roll 43 are selected to form a second coating film and then a third coating film An example of forming a combination is illustrated.

11 shows the doctor blade 41 and the squeeze 42 in (a) to form a first coating film and then the second coating film, and in (b) the doctor blade 41 and squeeze 42 and coating Selecting the roll 43 to form a first coating film and a second coating film in sequence to form a third coating film, in (c) illustrates a combination of forming only the coating roll 43 by selecting the third coating film.

In addition, since the coater head 30 is provided with three coating methods, that is, the doctor blade 41, the squeeze 42, and the coating roll 43, a coating film having a step may be formed.

12 is a flow chart of a roll printing method using the multi-coater of FIG. Referring to Figure 12, the roll printing method includes a pattern engraving loading step (a), an inking step (b) and a film patterning step (c, d).

The pattern plate loading step (a) loads the patterned platen PS on the vacuum hot plate 20 and dispenses the ink CM. The patterned plate making PS is fixed to the vacuum hot plate 20 by vacuum pressure.

Inking step (b) inks the ink (CM) dispensed on the patterned plate making (PS) to the pattern of the patterned substrate (S). At this time, the coating roll 43 in the coater head 30 is kept up and does not affect the ink CM, and the doctor blade 41 is moved down to the upper surface of the patterned plate making PS. The ink CN. Inks include inks of various viscosities such as conductive, insulating or semiconducting inks, photoresists and the like.

In the film patterning steps C and d, the first film F is mounted on the coating roll 43 and roll printed to pattern the first film F. FIG. At this time, the doctor blade 41 in the coater head 30 maintains the raised state and does not affect the ink CM, and the coating roll 43 moves down to the upper surface of the patterned plate making PS. Then, the ink filled in the pattern of the patterned plate making PS is transferred, and the 1st film F is patterned.

That is, the coating roll 43 which attached the 1st film F becomes a printing roll. Mounting the first film F on the coating roll 43 includes removing the coating roll 43 and mounting a printing roll (not shown).

Therefore, the film patterning steps (c, d) may be performed by removing the coating roll 43 and mounting the printing device including the blanket roll and the printing roll on which the second film is mounted on the coater head 30 to roll printing. (Not shown). That is, the film patterning steps (c, d) may pattern the second film by roll printing.

Although the preferred embodiments of the present invention have been described above, the present invention is not limited thereto, and various modifications and changes can be made within the scope of the claims and the detailed description of the invention and the accompanying drawings. Naturally, it belongs to the scope of the invention.

1 is a perspective view of a multi coater according to an embodiment of the present invention.

2 is a side view of the coater head in FIG.

3 is a cross-sectional view taken along line III-III of FIG.

4 is a cross-sectional view taken along the line IV-IV of FIG. 1.

FIG. 5 is a cross-sectional view taken along the line VV of FIG. 1.

6 is a perspective view of a vacuum hot plate.

FIG. 7 is a cross-sectional view taken along the line VII-VII of FIG. 6.

8 is a flowchart of a coating method using the multi coater of FIG. 1.

9-11 are state diagrams of use of coater heads illustrating various coating methods.

12 is a flow chart of a roll printing method using the multi-coater of FIG.

<Explanation of symbols for the main parts of the drawings>

1: multi coater 10: base

11: guide hole 12: lead screw

13: motor 20: vacuum hot plate

21: heat insulation plate 22: lower plate

23: upper plate 30: coater head

31: side plate member 32: guide

33: bracket 34: fastening member

41: Doctor Blade 42: Squeeze

43: coating roll 44: dispenser

51, 52, 53: first, second, third slot hole 64: forward and backward member

61, 62, 63: 1st, 2nd, 3rd mounting member 65: Locking member

71, 72, 73: first, second, third elastic member 231: vacuum hole

81, 82, 83: first and second micrometer 411: blade holder

421 squeeze holder 431 through hole

441: Motors 531, 532: 31st, 32nd slot holes

631, 632: 31st, 32nd mounting member 641: receiving portion

642: adjuster 811, 821, 831: rod

C: vacuum chamber CM: coating liquid (ink)

F: Film (first film) H: Heater

PS: Patterned Plate Making S: Substrate

Claims (10)

Base; A vacuum hot plate installed on the base to support a substrate to form a space for coating and coagulation and curing; And A coater head mounted to the base and moving in a first direction on the vacuum hot plate, The coater head is, A doctor blade for forming a dispensed coating solution into a first coating film, A squeeze to form the first coating film as a second coating film, and A coating roll for forming one of the first coating film and the second coating film as a third coating film, The squeeze, Is formed long in the second direction, mounted on the squeeze holder provided on both sides of the first direction, The squeeze holder, It is mounted to the second slot hole of the coater head through the second mounting member provided at both ends of the second direction, The second mounting member, Supported by a second elastic member below the second slot hole, supported by a second micrometer above the second slot hole, the height is adjusted, The coating roll, It is formed long in the second direction, and forms a through hole in the second direction in the center, The through hole is, It is mounted to the third slot hole of the coater head through the third mounting member provided at both ends of the second direction, The third mounting member, The multi-coater receives an upward acting force from the third slot hole to the third elastic member, and is supported by a third micrometer above the third slot hole to adjust the height. According to claim 1, The coater head is, And a dispenser for dispensing the coating liquid and moving in a second direction crossing the first direction. According to claim 1, The doctor blade, It is formed long in the second direction, mounted on the blade holder provided on both sides of the first direction, The blade holder, The multi-coater is mounted on the first slot hole of the coater head through the first mounting member provided at both ends of the second direction, the height adjustment and support. delete delete According to claim 1, The third slot hole, A thirty-first slot hole and a thirty-second slot hole formed at both ends of the coater head in the second direction; The third mounting member, And a thirty-first mounting member and a thirty-second mounting member mounted in the thirty-first slot hole and the thirty-second slot hole, respectively. One of the 31st mounting member and the 32nd mounting member is A multi coater separated from the coater head. A substrate loading step of loading the substrate to be coated on the vacuum hot plate using the multi-coater of any one of claims 1 to 3 and 6; A coating liquid dispensing step of dispensing a coating liquid on the substrate loaded on the vacuum hot plate; An equipment selection step of selecting one or more equipment among one or more doctor blades, one or more squeeze and coating rolls provided in the coater head; And Coating method comprising the step of forming a coating film with the selected equipment. The method of claim 7, wherein In the equipment selection step, when the combination of the doctor blade, the squeeze and the coating roll is variously selected, The film forming step, Coating method to form a multi layer. A pattern making loading step of loading a patterned plate making on the vacuum hot plate using the multi-coater of any one of claims 1 to 3 and 6; Inking the ink dispensed on the patterned platen loaded on the vacuum hot plate into a pattern of the patterned substrate; And And a film patterning step of mounting the first film on the coating roll and roll printing to pattern the first film. The method of claim 9, The film patterning step, Removing the coating roll, and mounting a printing device including a printing roll on which a blanket roll and a second film are mounted, thereby patterning the second film by roll printing.

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