JP2005322663A - 半導体基板の研磨方法および研磨治具 - Google Patents
半導体基板の研磨方法および研磨治具 Download PDFInfo
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- JP2005322663A JP2005322663A JP2004137067A JP2004137067A JP2005322663A JP 2005322663 A JP2005322663 A JP 2005322663A JP 2004137067 A JP2004137067 A JP 2004137067A JP 2004137067 A JP2004137067 A JP 2004137067A JP 2005322663 A JP2005322663 A JP 2005322663A
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- polishing
- semiconductor wafer
- jig
- semiconductor substrate
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- 238000005498 polishing Methods 0.000 title claims abstract description 96
- 239000004065 semiconductor Substances 0.000 title claims abstract description 69
- 238000000034 method Methods 0.000 title claims description 19
- 239000000758 substrate Substances 0.000 title abstract description 54
- 239000007788 liquid Substances 0.000 claims description 12
- 150000001875 compounds Chemical class 0.000 claims description 5
- 238000005336 cracking Methods 0.000 claims description 5
- 230000007797 corrosion Effects 0.000 claims description 4
- 238000005260 corrosion Methods 0.000 claims description 4
- 239000000919 ceramic Substances 0.000 claims description 2
- 239000011521 glass Substances 0.000 claims description 2
- 239000010453 quartz Substances 0.000 abstract description 29
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 29
- 230000002093 peripheral effect Effects 0.000 abstract 1
- 239000001993 wax Substances 0.000 description 19
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 11
- 235000012431 wafers Nutrition 0.000 description 11
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 10
- 230000003287 optical effect Effects 0.000 description 7
- 238000007517 polishing process Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 4
- 239000013307 optical fiber Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 229910000679 solder Inorganic materials 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 1
- GPXJNWSHGFTCBW-UHFFFAOYSA-N Indium phosphide Chemical compound [In]#P GPXJNWSHGFTCBW-UHFFFAOYSA-N 0.000 description 1
- 235000013871 bee wax Nutrition 0.000 description 1
- 239000012166 beeswax Substances 0.000 description 1
- 238000003776 cleavage reaction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000007261 regionalization Effects 0.000 description 1
- 230000007017 scission Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/27—Work carriers
- B24B37/30—Work carriers for single side lapping of plane surfaces
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/32—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers using masks
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Abstract
【解決手段】 上記問題を解決するため、半導体基板を固定する面に半導体基板の直径ほぼ同じ径の溝を形成した半導体基板固定用治具を適用する。この治具の適用によって半導体基板の破損やクラックを抑制することができる。
【選択図】 図2
Description
図1は、本発明による研磨治具の一実施例を説明する図である。図2は、本発明による研磨工程の一実施例を説明する図である。図1は、研磨治具として、石英製円板の片面(D面)に深さ100μm(マイクロ・メータ)直径52mmの溝を加工したものである。ここで、研磨対象物を貼り付けるB面と、研磨ホルダと接触し加重を印加するC面とは、その平坦度が研磨対象物の面内厚さばらつきに影響を与えるので、精度良く加工する必要がある。また、溝深さを100μmとしたのは、研磨終了時の研磨対象物の厚さ仕様100±10μmを、この溝深さで出す目的である。従って、D面とB面との平行度は直に研磨対象物の厚さの均一性に影響を与えるので、石英材料の初期精度も必要である。
また、研磨によって薄くなった半導体基板の割れを防止するように、溝の側壁が壁として働くことによっても、破損とクラックとを抑制する。
ここで、ワックスとは蜜蝋に限らず、常温で固体であって、加熱することによって低粘度の液体となるものなら、何でも構わない。
Claims (10)
- 研磨液に対する耐食性を有し、半導体ウェハの直径より5mm以内だけ大きい直径の溝を有する研磨治具の前記溝に、前記半導体ウェハのパターン面をワックスで固定するステップと、
前記研磨液が供給された定盤に圧接させた前記半導体ウェハの非パターン面を、前記定盤に対し移動運動させるステップと、
を含む研磨方法。 - 前記研磨治具の前記溝の直径は、半導体ウェハの直径より2mm以内だけ大きいことを特徴とする請求項1に記載の研磨方法。
- 前記半導体ウェハは、化合物半導体ウェハである請求項1に記載の研磨方法。
- パターン形成された半導体ウェハの裏面を研磨する研磨方法であって、
前記半導体ウェハの直径より大きい直径の溝が設けられた耐食性研磨治具に、前記半導体ウェハをワックスで固定し、前記溝の深さによって前記ウェハの研磨後の厚さを制御することを特徴とする研磨方法。 - 前記溝の深さは、前記半導体ウェハの研磨後の仕様厚さと前記ワックスの厚さの和程度であることを特徴とする請求項4に記載の研磨方法。
- 請求項4に記載された研磨方法であって、
研磨の終了を、前記半導体ウェハと前記研磨治具との段差高さで判断することを特徴とする研磨方法。 - 研磨液に対する耐食性を有し、ウェハ状の研磨対象物を固定する研磨治具であって、
前記研磨治具の片面には、前記研磨対象物の外形と相似の形状の溝が設けられ、前記溝の内側の前記研磨対象物を固定する面の平坦性は、研磨後の研磨対象物の平坦性を保持する性能を有し、前記研磨治具の加重を印加する面の平坦性は、前記研磨後の研磨対象物の平坦性を保持する性能を有することを特徴とする研磨治具。 - 前記研磨治具は、ガラスまたはセラミックからなることを特徴とする請求項7記載の研磨治具。
- 研磨によって薄くなった半導体ウェハの割れを防止するように、前記薄くなった半導体ウェハの周囲に壁部を設けた半導体ウェハを固定する研磨治具。
- 前記半導体ウェハは、化合物半導体ウェハである請求項9に記載の研磨治具。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004137067A JP2005322663A (ja) | 2004-05-06 | 2004-05-06 | 半導体基板の研磨方法および研磨治具 |
KR1020040115867A KR100625131B1 (ko) | 2004-05-06 | 2004-12-30 | 반도체 기판의 연마 방법 |
US11/028,295 US7459397B2 (en) | 2004-05-06 | 2005-01-04 | Polishing method for semiconductor substrate, and polishing jig used therein |
DE102005001259A DE102005001259B4 (de) | 2004-05-06 | 2005-01-11 | Polierverfahren für ein Halbleitersubstrat |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004137067A JP2005322663A (ja) | 2004-05-06 | 2004-05-06 | 半導体基板の研磨方法および研磨治具 |
Publications (1)
Publication Number | Publication Date |
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JP2005322663A true JP2005322663A (ja) | 2005-11-17 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2004137067A Pending JP2005322663A (ja) | 2004-05-06 | 2004-05-06 | 半導体基板の研磨方法および研磨治具 |
Country Status (4)
Country | Link |
---|---|
US (1) | US7459397B2 (ja) |
JP (1) | JP2005322663A (ja) |
KR (1) | KR100625131B1 (ja) |
DE (1) | DE102005001259B4 (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
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KR100814033B1 (ko) * | 2006-08-07 | 2008-04-18 | (주) 비앤피 사이언스 | 왁스 결합 장치 및 이를 이용한 왁스 결합 방법 |
JP5545640B2 (ja) * | 2010-05-11 | 2014-07-09 | 株式会社ディスコ | 研削方法 |
KR101238904B1 (ko) * | 2011-05-11 | 2013-03-12 | (주)디나옵틱스 | 기판 연마장치 |
CN114800222B (zh) * | 2022-05-13 | 2023-09-26 | 中锗科技有限公司 | 一种锗晶片双面抛光的方法 |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
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JPS531464A (en) | 1976-06-28 | 1978-01-09 | Nippon Telegr & Teleph Corp <Ntt> | Bonding for crystal base |
JPS61158145A (ja) | 1984-12-28 | 1986-07-17 | Toshiba Corp | 半導体基板の加工方法 |
JPS61209878A (ja) | 1985-03-12 | 1986-09-18 | Sumitomo Electric Ind Ltd | 研磨プレ−トへの半導体ウエ−ハの接着方法 |
JPH03129823A (ja) | 1989-10-16 | 1991-06-03 | Toshiba Corp | 半導体基板のラッピング方法 |
JPH03256668A (ja) | 1990-03-06 | 1991-11-15 | Hitachi Cable Ltd | 半導体ウェハ研磨用マウント板 |
JPH04305925A (ja) | 1991-04-02 | 1992-10-28 | Furukawa Electric Co Ltd:The | 半導体ウエハの研磨方法 |
JPH05326468A (ja) | 1992-05-21 | 1993-12-10 | Kawasaki Steel Corp | ウェーハの研磨方法 |
JPH06335855A (ja) | 1993-05-25 | 1994-12-06 | Denki Kagaku Kogyo Kk | 平行平面加工治具 |
US5472566A (en) * | 1994-11-14 | 1995-12-05 | Gatan, Inc. | Specimen holder and apparatus for two-sided ion milling system |
JP3453977B2 (ja) | 1995-12-28 | 2003-10-06 | 信越半導体株式会社 | ウェーハの研磨装置 |
JPH10230455A (ja) | 1997-02-17 | 1998-09-02 | Nec Corp | 研磨装置 |
JP3983887B2 (ja) * | 1998-04-09 | 2007-09-26 | 沖電気工業株式会社 | 基板研磨用治具及び半導体ウエハの研磨方法 |
JP2001105307A (ja) | 1999-09-30 | 2001-04-17 | Kyocera Corp | ウェハー研磨装置 |
US6517422B2 (en) * | 2000-03-07 | 2003-02-11 | Toshiba Ceramics Co., Ltd. | Polishing apparatus and method thereof |
JP2001257183A (ja) | 2000-03-10 | 2001-09-21 | Mitsubishi Materials Silicon Corp | 半導体ウェーハの研磨方法 |
JP2003158104A (ja) | 2001-11-22 | 2003-05-30 | Disco Abrasive Syst Ltd | 研磨装置 |
JP3940623B2 (ja) | 2002-03-28 | 2007-07-04 | 京セラ株式会社 | ウェーハ研磨治具とその製造方法及びこれを用いたウェーハ研磨装置 |
JP2004071667A (ja) | 2002-08-02 | 2004-03-04 | Toshiba Ceramics Co Ltd | 研磨装置 |
KR100558196B1 (ko) * | 2003-10-28 | 2006-03-10 | 삼성전자주식회사 | 투과전자현미경 검사용 시편을 고정시키기 위한 마운트 및이를사용하는 시편 제조 방법 |
-
2004
- 2004-05-06 JP JP2004137067A patent/JP2005322663A/ja active Pending
- 2004-12-30 KR KR1020040115867A patent/KR100625131B1/ko active IP Right Grant
-
2005
- 2005-01-04 US US11/028,295 patent/US7459397B2/en active Active
- 2005-01-11 DE DE102005001259A patent/DE102005001259B4/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US20050250334A1 (en) | 2005-11-10 |
KR100625131B1 (ko) | 2006-09-20 |
DE102005001259A1 (de) | 2005-12-01 |
DE102005001259B4 (de) | 2011-02-17 |
US7459397B2 (en) | 2008-12-02 |
KR20050107292A (ko) | 2005-11-11 |
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