JP2005272039A5 - - Google Patents

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Publication number
JP2005272039A5
JP2005272039A5 JP2004084797A JP2004084797A JP2005272039A5 JP 2005272039 A5 JP2005272039 A5 JP 2005272039A5 JP 2004084797 A JP2004084797 A JP 2004084797A JP 2004084797 A JP2004084797 A JP 2004084797A JP 2005272039 A5 JP2005272039 A5 JP 2005272039A5
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JP
Japan
Prior art keywords
substrate
roller
transport
transport mechanism
mechanism according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2004084797A
Other languages
English (en)
Japanese (ja)
Other versions
JP4478488B2 (ja
JP2005272039A (ja
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Publication date
Application filed filed Critical
Priority to JP2004084797A priority Critical patent/JP4478488B2/ja
Priority claimed from JP2004084797A external-priority patent/JP4478488B2/ja
Publication of JP2005272039A publication Critical patent/JP2005272039A/ja
Publication of JP2005272039A5 publication Critical patent/JP2005272039A5/ja
Application granted granted Critical
Publication of JP4478488B2 publication Critical patent/JP4478488B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2004084797A 2004-03-23 2004-03-23 基板の搬送機構 Expired - Lifetime JP4478488B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004084797A JP4478488B2 (ja) 2004-03-23 2004-03-23 基板の搬送機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004084797A JP4478488B2 (ja) 2004-03-23 2004-03-23 基板の搬送機構

Publications (3)

Publication Number Publication Date
JP2005272039A JP2005272039A (ja) 2005-10-06
JP2005272039A5 true JP2005272039A5 (enrdf_load_stackoverflow) 2007-04-19
JP4478488B2 JP4478488B2 (ja) 2010-06-09

Family

ID=35172101

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004084797A Expired - Lifetime JP4478488B2 (ja) 2004-03-23 2004-03-23 基板の搬送機構

Country Status (1)

Country Link
JP (1) JP4478488B2 (enrdf_load_stackoverflow)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4606990B2 (ja) * 2005-10-07 2011-01-05 富士フイルム株式会社 デジタル露光装置
JP4623443B2 (ja) * 2007-04-27 2011-02-02 日本エアーテック株式会社 浮上搬送装置における被搬送物制動装置
JP2009078260A (ja) * 2007-09-05 2009-04-16 Dainippon Screen Mfg Co Ltd 基板搬送装置、塗布装置、基板搬送方法および塗布方法
JP7029983B2 (ja) * 2018-03-09 2022-03-04 東京エレクトロン株式会社 測定器及び測定器のずれ量を求める方法
CN111352305A (zh) * 2018-12-20 2020-06-30 上海微电子装备（集团）股份有限公司 一种基板交接装置及基板交接方法
WO2020174513A1 (ja) * 2019-02-25 2020-09-03 東レエンジニアリング株式会社 塗布装置

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