JP4478488B2 - 基板の搬送機構 - Google Patents

基板の搬送機構 Download PDF

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Publication number
JP4478488B2
JP4478488B2 JP2004084797A JP2004084797A JP4478488B2 JP 4478488 B2 JP4478488 B2 JP 4478488B2 JP 2004084797 A JP2004084797 A JP 2004084797A JP 2004084797 A JP2004084797 A JP 2004084797A JP 4478488 B2 JP4478488 B2 JP 4478488B2
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JP
Japan
Prior art keywords
substrate
rollers
roller
support surface
transport mechanism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2004084797A
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English (en)
Japanese (ja)
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JP2005272039A5 (enrdf_load_stackoverflow
JP2005272039A (ja
Inventor
修一 清水
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Orc Manufacturing Co Ltd
Original Assignee
Orc Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Orc Manufacturing Co Ltd filed Critical Orc Manufacturing Co Ltd
Priority to JP2004084797A priority Critical patent/JP4478488B2/ja
Publication of JP2005272039A publication Critical patent/JP2005272039A/ja
Publication of JP2005272039A5 publication Critical patent/JP2005272039A5/ja
Application granted granted Critical
Publication of JP4478488B2 publication Critical patent/JP4478488B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP2004084797A 2004-03-23 2004-03-23 基板の搬送機構 Expired - Lifetime JP4478488B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004084797A JP4478488B2 (ja) 2004-03-23 2004-03-23 基板の搬送機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004084797A JP4478488B2 (ja) 2004-03-23 2004-03-23 基板の搬送機構

Publications (3)

Publication Number Publication Date
JP2005272039A JP2005272039A (ja) 2005-10-06
JP2005272039A5 JP2005272039A5 (enrdf_load_stackoverflow) 2007-04-19
JP4478488B2 true JP4478488B2 (ja) 2010-06-09

Family

ID=35172101

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004084797A Expired - Lifetime JP4478488B2 (ja) 2004-03-23 2004-03-23 基板の搬送機構

Country Status (1)

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JP (1) JP4478488B2 (enrdf_load_stackoverflow)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4606990B2 (ja) * 2005-10-07 2011-01-05 富士フイルム株式会社 デジタル露光装置
JP4623443B2 (ja) * 2007-04-27 2011-02-02 日本エアーテック株式会社 浮上搬送装置における被搬送物制動装置
JP2009078260A (ja) * 2007-09-05 2009-04-16 Dainippon Screen Mfg Co Ltd 基板搬送装置、塗布装置、基板搬送方法および塗布方法
JP7029983B2 (ja) * 2018-03-09 2022-03-04 東京エレクトロン株式会社 測定器及び測定器のずれ量を求める方法
CN111352305A (zh) * 2018-12-20 2020-06-30 上海微电子装备（集团）股份有限公司 一种基板交接装置及基板交接方法
WO2020174513A1 (ja) * 2019-02-25 2020-09-03 東レエンジニアリング株式会社 塗布装置

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Publication number Publication date
JP2005272039A (ja) 2005-10-06

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