JP2005257404A - 小径部材外表面検査方法 - Google Patents

小径部材外表面検査方法 Download PDF

Info

Publication number
JP2005257404A
JP2005257404A JP2004067904A JP2004067904A JP2005257404A JP 2005257404 A JP2005257404 A JP 2005257404A JP 2004067904 A JP2004067904 A JP 2004067904A JP 2004067904 A JP2004067904 A JP 2004067904A JP 2005257404 A JP2005257404 A JP 2005257404A
Authority
JP
Japan
Prior art keywords
inspection
lens
image
small
stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2004067904A
Other languages
English (en)
Japanese (ja)
Other versions
JP2005257404A5 (enrdf_load_stackoverflow
Inventor
Toru Isaka
徹 井坂
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Corp filed Critical Olympus Corp
Priority to JP2004067904A priority Critical patent/JP2005257404A/ja
Publication of JP2005257404A publication Critical patent/JP2005257404A/ja
Publication of JP2005257404A5 publication Critical patent/JP2005257404A5/ja
Pending legal-status Critical Current

Links

Images

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP2004067904A 2004-03-10 2004-03-10 小径部材外表面検査方法 Pending JP2005257404A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004067904A JP2005257404A (ja) 2004-03-10 2004-03-10 小径部材外表面検査方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004067904A JP2005257404A (ja) 2004-03-10 2004-03-10 小径部材外表面検査方法

Publications (2)

Publication Number Publication Date
JP2005257404A true JP2005257404A (ja) 2005-09-22
JP2005257404A5 JP2005257404A5 (enrdf_load_stackoverflow) 2006-02-09

Family

ID=35083275

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004067904A Pending JP2005257404A (ja) 2004-03-10 2004-03-10 小径部材外表面検査方法

Country Status (1)

Country Link
JP (1) JP2005257404A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009257812A (ja) * 2008-04-14 2009-11-05 Mitsutoyo Corp 形状測定方法及び形状測定装置
JP2010085341A (ja) * 2008-10-02 2010-04-15 Ntn Corp 球面形状測定装置および球面形状測定方法
CN114274482A (zh) * 2021-12-24 2022-04-05 博众精工科技股份有限公司 一种检测机构及无线充电垫片后处理系统
CN115031679A (zh) * 2022-08-09 2022-09-09 四川至臻光电有限公司 一种用于光学元件检测的调心方法、装置及系统

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009257812A (ja) * 2008-04-14 2009-11-05 Mitsutoyo Corp 形状測定方法及び形状測定装置
JP2010085341A (ja) * 2008-10-02 2010-04-15 Ntn Corp 球面形状測定装置および球面形状測定方法
CN114274482A (zh) * 2021-12-24 2022-04-05 博众精工科技股份有限公司 一种检测机构及无线充电垫片后处理系统
CN115031679A (zh) * 2022-08-09 2022-09-09 四川至臻光电有限公司 一种用于光学元件检测的调心方法、装置及系统

Similar Documents

Publication Publication Date Title
JP4020144B2 (ja) 表面状態の検査方法
TWI443763B (zh) 外觀檢查裝置
JP5014003B2 (ja) 検査装置および方法
JPWO2007141857A1 (ja) 外観検査装置
JP2008235892A (ja) ウエハの縁部領域の欠陥の評価のための装置及び方法
TW201100779A (en) System and method for inspecting a wafer (3)
JP2007248241A (ja) 表面状態の検査方法および表面状態検査装置
WO2022030325A1 (ja) 検査装置、検査方法およびピストンの製造方法
KR101015807B1 (ko) 표면 검사 장치 및 표면 검사 방법
JP2011145171A (ja) 形状検出装置
JP2000131037A (ja) 物体形状検査装置
JP5272784B2 (ja) 光学的検査方法および光学的検査装置
JP2005257404A (ja) 小径部材外表面検査方法
JP4655644B2 (ja) 周期性パターンのムラ検査装置
JP5042503B2 (ja) 欠陥検出方法
JP4119828B2 (ja) 光学部材検査装置による球面部の検査方法
JP2018169216A (ja) 付着物の検査装置
JP2004179581A (ja) 半導体ウエハ検査装置
WO2021033396A1 (ja) ウエーハ外観検査装置および方法
JP5316924B2 (ja) 観察装置および観察方法
JP5120233B2 (ja) 撮像モジュールの検査装置及び撮像モジュールの検査方法及び電子機器モジュールの製造方法
JP2016070683A (ja) 画像処理装置、画像測定装置、画像処理方法、画像処理プログラムおよび構造物の製造方法
JPH11337320A (ja) 眼内レンズ用自動投影機検査装置およびそれを用いた眼内レンズ検査方法
JP2007033372A (ja) 外観検査装置
JP2021032672A (ja) ウエーハ外観検査装置および方法

Legal Events

Date Code Title Description
A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20051214

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20051214

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20080529

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20080603

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20081104