JP2005257404A - Small-diameter member outer surface inspection method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a small-diameter member outer surface inspection method capable of stabilizing the quality of an inspected small-diameter member. <P>SOLUTION: The curvature center C1 of a lens 20 is allowed to agree with the moving center C2 of a circularly moving table 36 based on a control program of PC 6, and the curvature center C1 of the lens 20 is allowed to agree with an observation optical axis by automatic alignment processing, and the focal point of a microscope 3 is focused onto the position of the edge of the lens 20 by automatic focusing processing. Hereby, a rotary stage 23 and a slanting stage 25 are driven and controlled without operation for adjusting the focal point of the microscope 3, and the inspection attitude and the inspection position of the lens 20 are changed properly, and the surface 20a of the lens 20 is moved and arranged evenly stepwise relative to the focal position of an objective lens to take an image, to thereby capture a flaw or a defect formed on the surface of the lens 20 as the number of dots or the like. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a small-diameter member outer surface inspection apparatus that automatically inspects the presence or absence of a scratch on the outer surface of a small-diameter member, such as a small-diameter lens having a small curvature radius, and the size of the scratch.

  Conventionally, an elongated insertion portion of an endoscope is inserted into a body cavity or a duct, and a subject image in the body cavity or the duct is displayed on the screen of a display device so that the image can be observed. Endoscopic devices are widely used. In an endoscope used in such an endoscope apparatus, it is desired to further reduce the diameter of the insertion portion.

  In an electronic endoscope in which an imaging unit including a solid-state imaging device that captures a subject image is incorporated in an insertion portion of the endoscope, downsizing of the imaging unit is required in order to reduce the diameter of the insertion portion. .

  A flat cover glass or a plano-convex field lens is disposed on the front side of the light receiving surface of a CCD, which is a solid-state image sensor constituting these small image pickup units. If there are scratches or defects on the surface of the field lens or the like, the image quality of the endoscopic image is adversely affected depending on the location and size of the scratches. For this reason, all the lens surfaces were visually inspected.

  When inspecting a general lens with a relatively large diameter, an inspection method has been established in which the lens is placed on a cylindrical inspection jig such as an unfinished lens and the inspector visually inspects the lens surface. It was. In the case of this inspection, it was relatively easy to find scratches on the lens surface.

  In contrast, the field lens has a diameter of 3 mm or less. For this reason, it is impossible to install this small-diameter lens on a conventional cylindrical inspection jig. Therefore, it is conceivable to form a new cylindrical inspection jig and install small diameter lenses on the jig one by one, but the work of installing the small diameter lenses in a predetermined state is complicated and corresponds to inspection. It is expected to take a long time.

  For this reason, a plurality of field lenses are arranged on a pallet, for example, 10 vertically and horizontally, and a sensory test is performed by an inspector. At that time, first, screening is performed in the first inspection step. In this screening, field lenses arranged on a pallet are inspected collectively. In this inspection, the lens surface that has been judged as “Is there a flaw?” Is removed from the pallet, and a detailed re-inspection is performed in the second inspection step. On the other hand, if it is determined that “the lens surface is not damaged at all”, it is stored as an acceptable product and then sent to the next process.

  In the second inspection process, the size and position of the lens scratches determined as “Is there a scratch?” Are inspected in detail one by one through a stereomicroscope. At this time, the inspector picks the small-diameter lenses one by one with the tweezers and holds the lens picked with the tweezers so as to change the angle with respect to the illumination light for inspection, and judges the size of the wound or the like. Was judged. And the lens judged to be rejected was discarded as a defective product. The field lens is provided with an AR coating which is a centering, polishing and antireflection coating.

  However, the visual inspection using the stereomicroscope in the second inspection step is a skillful technique, and it takes time to train the inspector, so it is difficult to secure the inspector. Moreover, since it is a visual sensory test, the judgment criteria are different for each inspector. For this reason, there has been a problem that the quality varies. Moreover, even when the same inspector inspects the same lens on different days, it is known that the same inspection result as the previous inspection result cannot be obtained, and it is difficult to maintain stable quality.

  For this reason, it is conceivable to introduce a commercially available general-purpose measuring device into the inspection process, but this measuring device is expensive and cumbersome. In addition, there are problems such as the time and cost required for maintenance and management of the measuring instruments, so it has not been possible to introduce general-purpose measuring instruments.

  This invention is made | formed in view of the said situation, and it aims at providing the small diameter member outer surface inspection method which stabilizes the quality of the inspected small diameter member.

The small diameter member outer surface inspection method of the present invention includes an inspection table including a plurality of electrically driven stages including a stage having a table on which an inspection target member is arranged, and an objective lens facing the inspection target member. A microscope, an illuminating device that generates illumination light for illuminating the inspection target member, a camera device including a solid-state imaging device that images the inspection target member through the objective lens, and an electrically driven stage of the inspection table A control unit that controls the operation of the image processing unit, an image processing unit that constructs an image of the inspection target member based on an electrical signal obtained by photoelectrically converting an optical image of the inspection target member imaged by the camera device, and an output from the image processing unit A calculation processing unit that performs various calculation processes based on the image data and determines the position of the inspection target member and quantitatively determines the size of the scratch on the surface of the inspection target object Using small diameter member outer surface inspection apparatus and a control device, a small-diameter member outer surface inspection method for inspecting the outer surface of the small diameter member is said object member,
An initial setting step for registering the processing data and inspection conditions of the small diameter member, an automatic centering process for arranging the center of the small diameter member arranged on the table on the observation optical axis of the objective lens, and the table. A lens position adjusting step having an automatic focusing process for focusing the objective lens on the small-diameter member, and operating a predetermined table of the inspection table based on an instruction from the control device. A lens surface inspection step of inspecting the surface, and a determination step of determining the quality of the small-diameter member by determining the number of defective dots in the image of the inspection area or the number of defective dots for each inspection region.

And, the automatic centering process is
A step of changing a height position of the inspection target member arranged on the table, a step of storing the height position in a height position information storage array, a step of capturing an image at the height position, and a capturing thereof Calculating the luminance value of the image and storing it in the luminance information storage array; interpolating the height position information stored in the height position information storage array and the luminance information stored in the luminance information storage array; Creating an array; creating an interpolation table indicating a relationship between a height position and a luminance value from the interpolation array; extracting a luminance value maximum point from the interpolation table; and calculating the luminance from the interpolation table. The step of extracting the height position information corresponding to the maximum value point and the inspection target member arranged in the table at the position corresponding to the height position information are arranged. And a step of causing the control.

The automatic focusing process is
A step of outputting a predetermined number of edge detection lines toward the center of the screen, a step of capturing an image of the output edge detection line, and moving the captured edge detection line image from the outer frame side toward the center. Obtaining a brightness value for each pixel, detecting a contrast inflection point that identifies the edge from the result of the obtained brightness value, calculating a coordinate of the inflection point, and at least three or more inflection points. Based on the coordinates, a step of calculating an approximate circle by a predetermined calculation process, a step of calculating a difference between the calculated center coordinates of the approximate circle and the center coordinates of the screen, and a table based on the calculated difference value And controlling the movement.

  According to this inspection method, the inspection of the surface of a small-diameter member having a curved surface with a predetermined curvature radius arranged on the table is performed based on various initial setting information and the control table of the control device, microscope, illumination device, and camera device. It can be done automatically. This is because the inspection posture and inspection position of the small-diameter member are appropriately changed by a control signal output from the control unit of the control device, and the outer surface position of the inspection target member is moved stepwise evenly with respect to the focal position of the objective lens. By capturing the image, the scratches and defects formed on the surface of the small-diameter member are captured by the number of dots and the like, and the pass / fail of the small-diameter member is quantitatively determined.

  The automatic centering process and the automatic focusing process can be automatically performed based on the initial setting information and the control of the inspection table of the control device, the microscope, the illumination device, and the camera device.

  ADVANTAGE OF THE INVENTION According to this invention, the small diameter member outer surface inspection method which stabilizes the quality of the inspected small diameter member can be provided.

Embodiments of the present invention will be described below with reference to the drawings.
1 to 20 relate to an embodiment of the present invention, FIG. 1 is a perspective view illustrating the configuration of a small-diameter member outer surface inspection device, and FIG. 2 is a block diagram illustrating the configuration of a small-diameter member outer surface inspection device. 3 is a diagram for explaining the configuration of the examination table, FIG. 4 is a diagram for explaining the operation of the examination table, FIG. 5 is a flowchart for explaining the process of inspecting the small diameter member using the small diameter member outer surface inspection apparatus, and FIG. FIG. 7 is a diagram illustrating an example of a setting screen. FIG. 7 is a diagram illustrating a change in position and observation of an inspection target member when the inspection target member moved to the inspection position is moved around the rotation center of the bending table. FIG. 8 is a flowchart for explaining a lamp light amount check process, FIG. 9 is a flowchart for explaining an automatic focusing process, FIG. 10 is a diagram showing an example of a captured image, and FIG. Focus FIG. 12 is a diagram for explaining a lens image displayed on the monitor screen, and FIG. 13 is for explaining an automatic centering process. FIG. 14 is a diagram for explaining a state where the output is converged from the outer side of the edge detection line screen at the screen center coordinates. FIG. 15 is a diagram from the detection start point A to the detection end point B in the edge detection line image. FIG. 16 is a diagram illustrating an example of a luminance distribution curve, FIG. 16 is a diagram illustrating a difference between the screen center coordinates and the center coordinates of the lens image in the X direction and the Y direction, and FIG. 17 is a diagram in which the center coordinates of the lens image are arranged at the center coordinates of the screen. FIG. 18 is a flowchart for explaining the process of inspecting the lens surface, FIG. 19 is a diagram for explaining the inspection area image and scratches in the image, and FIG. 20 is for explaining the stage movement during the inspection area inspection. Figure to A.

  4A shows a state in which the inspection target member is arranged on the inspection table, FIG. 4B shows a state in which the inspection target member of the inspection table is moved to the inspection position, and FIG. ) Is a diagram showing a Z1 image, FIG. 10 (b) is a diagram showing a Z3 image, FIG. 10 (c) is a diagram showing a Z5 image, FIG. 10 (d) is a diagram showing a Z6 image, and FIG. It is a figure which shows Z7 image.

  As shown in FIGS. 1 and 2, a small-diameter member outer surface inspection apparatus (hereinafter abbreviated as an inspection apparatus) 1 according to the present embodiment is a member to be inspected, for example, centering and polishing constituting an imaging apparatus for an endoscope. A plurality of stages 21 that can be operated electrically, including a stage 21 that includes a table on which a plano-convex lens (hereinafter abbreviated as a lens), which is called a field lens with an AR coating that is an antireflection coating, is disposed. 25, a microscope 3 having a plurality of objective lenses 41a, 41b, 41c,... For observing the lens 20 arranged on the table of the stage 21 of the inspection table 2, and the stage. An illumination device 4 that supplies illumination light for inspection that illuminates the lens 20 disposed at 21, and an inspection pair of the lens 20 that is disposed at the microscope 21 and disposed at the stage 21. Controls the operation control of a CCD camera (hereinafter abbreviated as a camera) 5 having a built-in CCD 5a, which is a solid-state imaging device, and the stages 21,. A stage control unit 61 based on a program, an image processing unit 62 for generating lens surface image data to be detected based on an electrical signal obtained by photoelectric conversion of the curved surface 20a of the lens 20 imaged by the camera 5, A personal computer (hereinafter abbreviated as “PC”) that also serves as a control device including a control unit 60 such as a calculation unit 63 that determines scratches and defective portions from the surface image data of the lens to be tested and determines pass / fail of the lens based on a control program. ) 6, and a display device that displays a surface image of the lens to be tested generated by image processing by the PC 6, for example, a liquid crystal monitor (hereinafter referred to as a monitor) It is mainly composed of a serial to) 7.

  Reference numeral 8 denotes an electrical box that supplies power to the PC 6 and the monitor 7. Reference numeral 9 denotes a keyboard, for example, for inputting lens data, which is processing data of a plano-convex lens, or inputting various inspection information. Reference numeral 10 denotes a mouse, which operates a button or the like provided on a screen displayed on the screen of the monitor 7 to instruct lens inspection conditions to be described later. Reference numeral 11 denotes a manual operation switch box (hereinafter abbreviated as “switch box”), a suction switch for instructing start or stop of suction, an inspection switch for instructing start or stop of inspection, and the illumination device 4. An illumination switch for switching ON / OFF is provided. Reference numeral 12 denotes a gantry on which the monitor 7, the microscope 3, the inspection table 2, and the like are placed.

The inspection table 2, the microscope 3, the illumination device 4, the camera 5, and the PC 6 will be described with reference to FIGS.
First, the inspection table 2 will be described.

  The plurality of stages 21,..., 25 constituting the inspection table 2 are, for example, the X stage 21 as the first stage and the Y stage as the second stage in order from the objective lens 41 a side provided in the microscope 3. 22, a rotary stage 23 as a third stage, a Z stage 24 as a fourth stage, and an inclined stage 25 as a fifth stage.

  The X stage 21 includes an X stage main body 26 that is a first stage main body, and an X table 27 that is a first table slidably disposed with respect to the X stage main body 26. The X stage body 26 is a fixed member, and the X table 27 is a moving member. The moving direction of the X table 27 is slidably arranged in the left-right direction, which is the X direction shown in FIG. 3, which is the first axis orthogonal to the vertical direction. The X table 27 is formed with suction holes (see reference numeral 27b in FIG. 3) at predetermined positions for fixing and arranging the lens 20, which is an inspection target member, by suction. The X stage main body 26 is provided with an X direction moving mechanism including the X table 27 and an X direction motor 27a for moving the X table 27 forward and backward.

  The Y stage 22 includes a Y stage main body 28 that is a second stage main body, and a Y table 29 that is a second table that is slidably disposed with respect to the Y stage main body 28. The Y stage main body 28 is a fixed member, and the Y table 29 is a moving member. The Y table 29 is slidably arranged in the front-rear direction, which is the Y direction shown in FIG. 3, which is a second axis orthogonal to the first axis.

  The X stage main body 26 is integrally fixed to the Y table 29. When the X stage main body 26 is fixed to the Y table 29, the positional relationship is such that the moving direction of the Y table 29 and the moving direction of the X table 27 sliding with respect to the X stage main body 26 are orthogonal to each other. Set. The Y stage main body 28 is provided with a Y-direction moving mechanism including the Y table 29 and a Y-direction motor 29a for moving the Y table 29 forward and backward.

  The rotary stage 23 includes a rotary stage main body 30 that is a third stage main body, and a rotary table 31 that is a third table that is rotatably arranged with respect to a vertical axis of the rotary stage main body 30. The rotary stage body 30 is a fixed member, and the rotary table 31 is a moving member.

  The Y stage main body 28 is integrally fixed to the rotary table 31. By rotating the rotary table 31 in this fixed state, the Y stage 22 and the X stage 21 are rotated. The rotating stage body 30 is provided with a rotating mechanism including the rotating table 31 and a rotating motor 31a for rotating the rotating table 31.

  The Z stage 24 includes a Z stage main body 32 that is a fourth stage main body, a sliding block 33 that is a sliding support member fixed to the Z stage main body 32 in a vertical state, and the sliding block 33. And a Z table 34, which is a fourth table, slidably arranged in the vertical direction, which is the Z direction in FIG. The Z stage main body 32 and the sliding block 33 are fixed members, and the Z table 34 is a moving member.

  The rotary stage body 30 is integrally fixed to the Z table 34. By moving the Z table 34 up and down in this fixed state, the rotary stage 23, the Y stage 22 and the X stage 21 move up and down, and the distance from the fifth stage changes. The Z stage main body 32 is provided with a Z direction moving mechanism including the Z table 34 and a Z direction motor 34a which is a height adjusting mechanism for moving the Z table 34 up and down.

  The tilt stage 25 includes a bending block 35 which is a fifth stage body, and a bending table 36 which is arranged so as to be swingable in the direction of arrow W in FIG. The bending block 35 is a fixed member, and the bending table 36 is a moving member. The curved block 35 is formed with an arcuate concave curved portion 35a having a predetermined radius (denoted as R in the drawing). On the other hand, the curved table 36 is formed with a curved convex portion 36b that slides with respect to the concave curved portion 35a of the curved block 35.

  The Z stage main body 32 is integrally fixed on the plane of the bending table 36 via a wedge-shaped attachment member 37. In this fixed state, the Z stage 24, the rotary stage 23, the Y stage 22 and the X stage 21 are changed into an inclined state by sliding the bending table 36 along the concave curved portion 35a. The bending block 35 is provided with a moving mechanism including the bending table 36 and a moving motor 36a for slidingly moving the bending table 36 on the concave curved portion 35a.

  Then, in the inspection table 2 configured by combining the stages 21,..., 25, as shown in FIG. 3, the observation optical axis indicated by the two-dot chain line of the objective optical system and the rotary table 31 configuring the rotary stage 23. And the center of the concave curved portion 35a of the bending block 35 constituting the tilting stage 25, in other words, the rotation center C2 when the bending table 36 is swung is the observation optical axis. Located on the top.

Next, the microscope 3 will be described.
The microscope 3 mainly includes the objective lenses 41a, 41b, 41c,..., A lens barrel 42, and a microscope casing 43. The objective lenses 41a, 41b, 41c,... Have different magnifications. The lens barrel 42 is provided with a rotating plate 44 to which a plurality of types of objective lenses 41a, 41b,. The rotating plate 44 is rotated by an objective lens switching mechanism provided with an objective lens switching motor 44 a provided in the microscope casing 43. Accordingly, by rotating the rotating plate 44 by the objective lens switching mechanism, it is possible to switch and arrange an objective lens optimal for observation on the observation optical axis.

  Reference numeral 45 denotes a focus adjustment table. The inspection table 2 is placed on the focus adjustment table 45. The inspection table 2 is moved up and down by a focus adjustment mechanism provided with a focus adjustment motor 45 a provided on the focus adjustment table 45. In other words, by moving the inspection table 2 placed on the focus adjustment table 45 in the vertical direction by the focus adjustment mechanism, for example, the lens 20 is focused on the curved surface 20a of the lens 20 arranged on the X table 27. Can be done.

Next, the lighting device 4 will be described.
The illumination device 4 emits illumination light or the like for observing the lens 20 disposed on the X table 27 of the X stage 21. Specifically, the illumination light illuminated from the illuminating device 4 is such that when the inspection target member is a member that transmits light, such as the lens 20, the illumination light scattered from an oblique direction is made black in the observation range. The dark field illumination is used so as to leak into the observation range that looks black. Under this dark field illumination, for example, if there is a scratch on the surface of the lens 20, the scattered light is reflected by the scratch and the scratched portion looks white. This makes it possible to determine whether the surface of the lens 20 is scratched.

On the other hand, when the inspection target member is a member that reflects light, such as a metal sphere, for example, the illumination light from a halogen light source is uniformly illuminated from the center of the objective lens directly below. Use bright field lighting.
That is, the illumination device 4 can perform inspection by switching between dark field illumination and bright field illumination.

Next, the camera 5 will be described.
The camera 5 photographs the inspection object member through the objective lenses 41a, 41b, 41c,. The camera 5 is attached to a predetermined position of the lens barrel 42 of the microscope 3. Specifically, it is attached so that the center of the CCD 5 a built in the camera 5 and the observation optical axis of the observation optical system of the microscope 3 coincide. Thus, when the observation image captured by the camera 5 is displayed on the display screen of the monitor 7, the center of the observation screen coincides with the center of the observation image.

  And in the inspection apparatus 1 of this embodiment, it is confirmed whether the camera position is attached to the predetermined position twice in the morning and evening, for example, within one day. If the center of the CCD 5a and the observation optical axis of the microscope 3 are misaligned, adjustment is performed by moving the camera 5 side.

Finally, the PC 6 will be described.
A CPU (not shown) of the PC 6 is provided with a control program for automatically inspecting, an operation program for operating each device individually, and the like. The inspection table 2, microscope 3, illumination device 4, and camera 5 described above are controlled based on the control program so that the stages 21,. Control for switching the objective lenses 41a, 41b, 41c... Of the microscope 3, control for switching the illumination light emitted from the illumination device 4 to dark field illumination or bright field illumination, and driving of the CCD 5a provided in the camera 5 The inspection target member is an acceptable product by controlling, processing for generating image data from the electrical signal transmitted from the CCD 5a, and judging the size and position of the scratch on the surface of the inspection target based on this image data. A process for quantitatively determining whether or not is performed.

  In addition to the stage control unit 61, the image processing unit 62, and the arithmetic processing unit 63, the control unit 60 of the PC 6 includes an objective lens control unit 64, a focus adjustment unit 65, an illumination light control unit 66, and the like. Yes.

  The stage control unit 61 controls driving of the X-direction motor 27a of the X-direction moving mechanism that moves the X table 27 forward and backward based on a control program provided in the PC 6, and Y that moves the Y table 29 forward and backward. Driving control of the Y-direction motor 29a of the direction moving mechanism, driving control of the rotating motor 31a of the rotating mechanism that rotates the rotating table 31, and the Z-direction motor 34a of the Z-direction moving mechanism that moves the Z table 34 up and down Drive control and drive control of the moving motor 36a of the moving mechanism that swings the bending table 36 with respect to the rotation center are appropriately performed.

  The image processing unit 62 outputs a drive signal for driving the CCD 5a based on a control program provided in the PC 6, and forms an image on an imaging surface (not shown) of the CCD 5a, photoelectrically converts it, and transmits it. Image processing for generating image data from the electrical signal, processing for outputting the image data obtained by the image processing to the arithmetic processing unit 63 and the monitor 7 are performed.

  The arithmetic processing unit 63 performs drive control for changing the arrangement position of the lens 20 arranged on the X table 27 based on the lens data based on a control program provided in the PC 6, and the image processing unit 62. Various calculation processes are performed based on the image data output from the image data to determine the illumination state, whether or not the inspection target member is arranged at a predetermined inspection position, or the inspection target of the inspection target member Determine whether the surface is in focus, or calculate the size, position, etc. of the surface of the object to be inspected, and quantitatively determine whether the inspected member is acceptable Then, a control signal is output to each unit 61, 64, 65.

  Based on the lens data, the objective lens control unit 64 selects an optimal objective lens for inspection from among a plurality of objective lenses 41a, 41b, 41c... Based on a control program provided in the PC 6. A control signal for operating the rotating plate 44 so as to be arranged on the observation optical axis is output.

  The focus adjustment unit 65 performs control to move the focus adjustment table 45 on which the inspection table 2 is placed in the vertical direction based on a control program provided in the PC 6. Then, based on the calculation result of the calculation processing unit 63, a control signal for moving and placing the control signal so as to focus on the inspection target surface of the inspection target member arranged on the X table 27 of the inspection table 2 is provided. Output. The focus adjustment can also be performed using a manual focus adjustment knob indicated by reference numeral 46 in FIG.

  Based on a control program provided in the PC 6, the illumination light control unit 66 supplies dark field illumination or bright field to a control signal for maintaining the illumination light amount in an optimum state and illumination light for illuminating the inspection target member. A control signal for switching to illumination is output.

The operation of the inspection apparatus 1 configured as described above will be described.
In the inspection apparatus 1 according to the present embodiment, the X table 27, the Y table 29, and the Z table 34 constituting the inspection table 2 are moved based on the control program provided in the PC 6 as shown in FIG. By controlling, the center of curvature C1 of the lens 20 adsorbed and arranged on the X table 27 coincides with the observation optical axis, and the center of curvature C1 of the lens 20 and the movement center C2 of the curved table 36 are In addition, the focus adjustment table 45 in the microscope 3 is moved and controlled so as to focus on, for example, the vertex of the curved surface 20 of the lens 20.

  Based on the control program provided in the PC 6, the X table 27, the Y table 29, the Z table 34, and the focus adjustment table 45 are locked in this in-focus state. 4 (a), the bending table 36 is slid and moved in the direction of the arrow P, for example, with respect to the concave curved portion 35a of the bending block 35, with the center C serving also as the moving center. Then, the inclination angle of the lens 20 arranged on the X table 27 is changed to θ1, and the curved surface halfway portion is arranged instead of the curved surface vertex of the lens 20 at the focal position.

  From this state, when the bending table 36 is further slid in the direction of the arrow P around the center C as shown in FIG. 4B, the lens 20 arranged on the X table 27. Changes from θ1 to the inclination angle θ2. At this time, instead of the middle portion of the curved surface of the lens 20, the vicinity of the edge where the curved surface 20a and the side peripheral surface intersect is arranged at the focal position. Here, by further sliding the bending table 36 by a predetermined amount, although not shown in the figure, the lens 20 further changes to an inclined state, and the edge portion of the lens 20 is at the focal position. Be placed.

  That is, in the state where the center of curvature of the lens 20 is disposed at the center C, the bending table 36 is formed around the center C where the bending table 36 also serves as the moving center, and the concave curved portion 35a of the bending block 35 is formed. By sliding and moving above, the distance from the surface of the concave curved portion 35a of the bending block 35 to the focal point on the curved surface 20a of the lens 20 is always constant (R + r). For this reason, when the bending table 36 is slid and moved, a part of the curved surface 20a of the lens 20 is always disposed at the in-focus position located on the observation optical axis.

  Therefore, the microscope 3 is set so that the center of curvature C1 of the lens 20 coincides with the observation optical axis and the center of curvature C1 of the lens 20 coincides with the movement center C2 of the bending table 36. An operation for adjusting the focal point of the microscope 3 is performed by, for example, sliding only the bending table 36 around the center C in this state, with the focal point being focused on the edge of the lens 20. Without performing this, it is possible to observe the lens 20 from one edge to the other edge. Further, in the state described above, for example, by rotating only the rotary table 31 around the rotation axis C3, the observation over the entire periphery of the edge of the lens 20 can be performed without performing the operation of adjusting the focus of the microscope 3. Yes.

  Therefore, in the state described above, the operation of adjusting the focus of the microscope 3 by moving the bending table 36 and the rotary table 31 as appropriate based on the control program provided in the PC 6 is completely performed. Without performing this, the entire outer surface of the curved surface 20a of the lens 20 can be inspected.

  An inspection procedure for inspecting a lens 20 having a curved surface 20a having a predetermined radius of curvature (for example, r), for example, using the inspection apparatus 1 configured as described above will be described.

  When the inspection apparatus 1 inspects the lens 20, the inspection apparatus 1 is turned on as shown in Step 1 of FIG. Thereby, in the inspection table 2, the stages 21, ..., 25 are returned to the origin. In the microscope 3, the focus adjustment table 45 is returned to the origin. The lighting device 4 is in an initial lighting state. The camera 5 is in a shooting state. A control program is launched in the PC 6 and an initial setting screen or menu screen (not shown) shown in FIG. 6 is displayed on the screen of the monitor 7.

  Note that the X table 27 is arranged horizontally with respect to the origin in the inspection table 2, and the center of the suction hole 27b formed in the X table 27 is arranged on the observation optical axis and on the observation optical axis. It is a position away from the front end surface of one of the objective lenses by a predetermined distance considering workability. The Z table 34 is located at the lowest point. Furthermore, the origin in the microscope 3 is a state where the focus adjustment table 45 is located at the lowest point.

  Next, the process proceeds to step 2 to check the lamp light quantity based on the control program of the PC 6, while the lens data according to the initial setting screen 50 displayed on the screen of the monitor 7 as shown in step 3. Set and register inspection conditions. When the lens 20 is inspected, a process chart is attached together with the lens 20 to be inspected.

  In the process chart, lens data concerning the lens 20 and setting items such as inspection conditions are described, and these description items are registered by an inspector.

Specific registration items include, for example, the type and number of inspection lenses (n), lens data, and inspection conditions. Examples of the lens data include a lens diameter dimension (d), a thickness dimension (t), and a lens surface radius of curvature (r). The inspection conditions include, for example, the number of inspection lines (p ), The number of inspection points (q), the number of height changes (h), which is a focusing condition in the automatic focusing process, the target luminance value (c) related to the illumination light quantity, the switching variable (i), and the lens inspection are automatically performed. Selection of whether or not to perform semi-automatic operation, selection of the size of the inspection area, inspection pitch selection, and inspection area overlap upon inspection of the lens surface.
These setting items are registered on the initial setting screen 50 displayed on the screen of the monitor 7 by using the keyboard 9 and the mouse 10 provided in the inspection apparatus 1. In addition, while selecting the inspection lens and registering the diameter, thickness dimension, etc. of the lens data, other conditions etc. are automatically set, and only necessary portions may be changed according to the process chart. Good. A parallel plate lens is indicated when the radius of curvature is described as infinite in the lens data.

  When the initial setting is completed, the end button 51 on the initial setting screen 50 is operated. Then, a notification signal notifying that the initial setting has been completed is output to the control unit 60, and the process proceeds to step 4.

  In step 4, by operating the inspection switch provided in the switch box 11, the suction hole of the X table 27 is brought into the suction state. Further, for example, an objective optical lens 41a having a predetermined magnification is arranged on the observation optical axis based on the diameter of the lens 20 registered on the initial setting screen 50. As a result, the observation frame displayed on the screen of the monitor 7 is switched to a size corresponding to the diameter of the lens 20.

  Then, by arranging the lens 20 to be inspected so as to block the suction hole 27b, the lens 20 is suctioned and arranged on the X table 27. At this time, at least a part of the lens 20 is reliably displayed on the screen. When a change in pressure when the lens 20 is adsorbed and arranged in the adsorption hole is detected, a detection signal is output to the control unit 60 and the radius of curvature of the lens 20 registered on the initial setting screen 50 is detected. The Z table 34 is moved based on the above. Then, when the position of the center of curvature C1 of the lens 20 becomes the same position as the movement center C2 of the bending block 35, the process proceeds to step 5.

  In step 5, automatic centering processing and automatic focusing processing described later are executed based on the inspection conditions registered in the initial setting in step 3 and the control program provided in the PC 6. By performing these processes, the tables 27, 29, and 34 of the stages 21,..., 23 and the focus adjustment table 45 are moved, and are arranged in the suction holes 27b of the X table 27 as shown in FIG. In this state, the lens 20 which has been displaced from the observation optical axis is moved to the lens surface inspection position as shown in FIG. 3 and is brought into focus on the curved surface 20a of the lens 20. Then, the process proceeds to step 6.

  In this step 6, as shown in FIG. 4 (a) and FIG. 4 (b), based on the inspection condition registered in the initial setting of the step 3 and the control program provided in the PC 6, the bending table is shown. The lens surface image data is collected by moving the 36, the rotary table 31 and the like stepwise, and the lens surface image data is analyzed to perform surface inspection processing. Then, it is determined whether the inspected lens 20 is an acceptable product, and the determination result is displayed on the screen of the monitor 7, for example.

  If this determination result is displayed on the screen of the monitor 7, the inspector operates the inspection switch to release the suction state, removes the inspected lens 20 from the X table 27, and stores the accepted product. However, rejected products are discarded. When the inspection switch is operated to cancel the inspection state, the Z table 34 of the inspection table 2 and the focus adjustment table of the microscope 3 return to the origin.

  Subsequently, the process proceeds to step 7, and if there is a lens to be inspected, the process proceeds to step 4 to continue the inspection of the lens 20. On the other hand, if there are no more lenses to be inspected, the process proceeds to step 8 where the power source of the inspection apparatus 1 is shut off and the inspection is completed.

Here, the lamp light quantity check, the lens position adjustment process, the lens surface inspection process, and the determination process will be described in detail.
First, the lamp light quantity check will be described.
The lamp used in the lighting device 4 is a halogen lamp. This halogen lamp has a difference in light quantity between a warmed state and other states. That is, the halogen lamp is an unstable light source whose light amount changes with the passage of time. For this reason, in the illuminating device 4, the light amount of the halogen lamp is not adjusted based on the lamp voltage value, but is finely adjusted based on the luminance value actually measured once reflected by the mirror. Thus, the measurement is performed with a constant luminance value.

  Therefore, based on the control from the illumination light control unit 66 based on the control program provided in the PC 6, first, as shown in step 11 of FIG. Do. Then, as shown in step 12, an instruction signal for switching the objective lens of the microscope 3 is output to the objective lens control unit 64, and the objective lens for adjusting the light amount is arranged on the observation optical axis. The voltage value is set to an initial value registered in advance, and the process proceeds to step 14.

  In step 14, i values are compared. If the value of i is larger than the registered value, it is determined that there is some problem, and the process proceeds to step 21 for error processing (alarming an alarm). Etc.), the automatic lighting adjustment is terminated.

  On the other hand, if the value of i in step 14 is equal to or less than the value registered in the initial setting, the process proceeds to step 15 to capture an image illuminated with the illumination light amount. Control goes to step 16.

  In step 16, the brightness value of the captured image is once stored as a variable c1, and then the brightness value c1 is plus or minus 10% of the target brightness value (c) registered in the initial setting as shown in step 17. Compare whether or not it is within range. If the luminance value c1 is not within the range of plus or minus 10 percent of the target luminance value, the process proceeds to step 18 to add the condition number i and proceeds to step 19.

  In step 19, the lamp voltage is adjusted to change the luminance value. Thereafter, the processing from step 14 to step 17 is performed again.

  On the other hand, if the luminance value c1 is within the range of plus or minus 10% of the target luminance value (c) registered in the initial setting in step 17, the process proceeds to step 20 to store the voltage value for the luminance value. Then, the lamp light quantity check is finished, and automatic illumination light adjustment is performed based on the voltage value.

Next, the lens position adjustment process will be described.
When the detection signal for notifying that the lens 20 is sucked and arranged is output as described in the step 4, for example, the suction hole 27b formed in the X table 27 as shown in FIG. In most cases, the center of curvature C1 of the lens 20 is shifted from the observation optical axis. At this time, the objective lens 41a is not focused on the curved surface 20a of the lens 20.

  For this reason, in the lens position adjusting step, the lens 20 in the arrangement state shown in FIG. 7 is arranged in the state shown in FIG. Performs automatic centering processing.

  Note that even if the automatic focusing process and the automatic centering process are performed in this order, the reverse order of the automatic centering process → the automatic focusing process is performed, or each process is repeated. , Automatic centering processing → automatic focusing processing → automatic centering processing, and the like, a pattern that is repeatedly performed may be used. In this lens position adjustment step, the lens surface inspection shown in FIG. The purpose is to place the lens 20 in a state.

First, the automatic focusing process will be described.
Based on the control program provided in the PC 6, the variable h is initialized based on the number of height changes (h) registered on the initial setting screen 50 as shown in step 31 of FIG. Thereafter, in correspondence with the number of height changes (h), initialization of the Z position (h), which is an array for storing height position information as shown in step 32, and the step as shown in step 33, The contrast (h), which is an array for storing the luminance information corresponding to the Z position, is initialized.

  Next, as shown in step 34, the thickness information (t) of the lens 20 registered on the initial setting screen 50, the radius of curvature (r), and the optical information of the objective lens 41a arranged on the observation optical axis are obtained. The focus adjustment table 45 is moved upward in accordance with the focus automatic adjustment start position calculated based on this and the feed pitch for this automatic adjustment. As a result, the lens 20 is placed at the focus automatic adjustment start position. Then, as shown in step 35, the height information (Z1) at this time is stored in the Z position (h1).

  Next, as shown in step 36, the Z1 image 52 (see FIG. 10A) in the height information (Z1) is captured, and the luminance value B1 in the specific area of the image 52 is calculated. Then, as shown in step 37, the brightness value B1 is stored in the contrast (h1), and the process proceeds to step 38.

  In step 38, addition of h is instructed, and in step 39, it is compared whether or not the number of additions in step 38 exceeds the number of height changes (h) registered on the initial setting screen 50. . If the number added in step 38 does not exceed the number of height changes (h) registered on the initial setting screen 50, the process proceeds to step 40 and the focus is increased by the predetermined feed pitch. The adjustment table 45 is raised.

  Thereafter, the processing from Step 35 to Step 39 is repeated until the condition of Step 39 is exceeded. Accordingly, for example, height information (Z2),..., Height information (ZN) is stored in the Z position (h2),..., Z position (hN), and the height information (Z2),. , (ZN) corresponding to, for example, the Z3 image 53, the Z5 image 55, the Z6 image 56, the Z7 image 57, etc. shown in FIGS. 10 (b) to 10 (e), and the specification of the captured image 52 or image N The luminance values B2,..., BN in the area are calculated, and the luminance values B2,... BN are stored in the corresponding contrasts (h2),.

  If it is determined in step 39 that the number added in step 38 has exceeded the number of height changes (h) registered on the initial setting screen 50, the process proceeds to step 41.

  In this step 41, an interpolation array relating to the Z position stored in the height position information storage array is created. Further, the process proceeds to step 42, where an interpolation array relating to the luminance values stored in the luminance information storage array is created. Then, as shown in step 43, interpolation is performed. Thereby, for example, the relationship between the Z position and the luminance value as shown in FIG. 11 is obtained.

  Then, while the maximum luminance value point is extracted as shown in step 44, the best focus position corresponding to the maximum luminance value (or the place where the contrast of the black and white edge is most clearly understood in the captured image) as shown in step 45. The height information (Zmax) is extracted. Thereafter, the focus adjustment table 45 is moved so that the lens 20 is disposed at a height position corresponding to the height information (Zmax). This completes the automatic focusing process.

  The lens 20 is subjected to antireflection coating. For this reason, the portion where the light is reflected is the edge portion, and the edge portion is in focus.

  As described above, when the focus adjustment table is moved by a predetermined number of times by a predetermined pitch based on lens data and a control program registered in advance, a plurality of pieces of information regarding the position and a luminance value for each movement position are obtained. Then, the focus position can be determined by processing the relationship between the luminance value and the moving position in software.

Next, the automatic centering process will be described.
At the stage where the focusing process is completed, there may be a case where a lens image 71 in which a part of the edge 71a of the lens 20 is missing is displayed on the screen 70 of the monitor 7 as shown in FIG. At this time, the center coordinate CA of the screen 70 and the center coordinate CB of the lens image 71 are located at different locations. For this reason, in order to be able to observe the lens surface without adjusting the focus position, it is necessary to match the center coordinate CB of the lens image 71 with the center coordinate CA of the screen 70. Note that the center coordinate CA of the screen refers to a pixel located at the center of the screen.

  For this reason, in the automatic alignment process, the variable p corresponding to the number of inspection lines is initialized based on the control program provided in the PC 6 as shown in step 51 of FIG. Thereafter, the process proceeds to step 52, and the edge detection lines are as many as the number of inspection lines (p) corresponding to the automatic alignment conditions (2: precision) registered on the initial setting screen 50 as shown in FIG. 72a, 72b, 72c,..., 72n are output so as to converge at the center coordinates CA of the screen 70 from the outside of the screen according to a predetermined algorithm.

  At this time, in step 53, it is checked whether or not a predetermined number of edge detection lines 72a, 72b, 72c,. Here, if a predetermined number of edge detection lines 72a, 72b, 72c,..., 72n have been output, the process proceeds to step 54 to capture each edge detection line image. On the other hand, if the predetermined number of edge detection lines 72a, 72b, 72c,... Have not been output in step 53, it is determined that there is some problem and the process proceeds to step 60 to perform error processing (such as alarming). ), The automatic centering process is terminated.

  After capturing each edge detection line image in step 54, as shown in step 55, the luminance value in each edge detection line image is picked up from the outer frame side to the center of each pixel. . Then, for example, in the edge detection line 72p, a luminance distribution curve from the detection start point A to the detection end point B can be obtained as shown in FIG.

As shown in step 56, from the distribution of the luminance values shown in the luminance distribution curve shown in FIG. 15, the contrast inflection point when the preset threshold value is exceeded is the edge position (detection position C) corresponding to the outer diameter of the lens 20 And the coordinates of this point are calculated. Then, a plurality of detection points 73,..., 73 indicated by a plurality of black circles (c), etc. in FIG. 14 can be obtained. As shown in FIG. 16, the center coordinate CB1 of the lens image 71A that is an approximate circle at these detection points 73,. Thereafter, as shown in step 58, the differences Dx and Dy in the X and Y directions between the coordinates of the screen center CA and the center coordinates CB1 of the lens image 71A are calculated.

  Then, according to these differences Dx and Dy, the X table 27 is moved in a predetermined direction by an amount corresponding to the difference Dx, and the Y table 29 is moved in a predetermined direction by an amount corresponding to the difference Dy. Take control.

Then, the center coordinates CB1 of the lens image 71A are arranged at the center coordinates CA of the screen 70 as shown in FIG. Then, the process proceeds to step 59, where the current X-axis position and Y-axis position are stored, and the automatic centering process is terminated.
At this time, the center of the lens 20 is arranged on the observation optical axis.

  In this way, by outputting a plurality of edge detection lines that converge at the center coordinates of the screen from the outer frame side of the screen, a detection point that is a contrast inflection point having only one for each edge detection line is obtained, The center coordinate of the lens can be obtained by performing a predetermined calculation process from the coordinate value of each detection point to obtain the approximate circle of the lens.

  Also, by using the edge detection line that converges at the center coordinates of the screen from the outer frame side of the screen, even if a part of the lens protrudes from the observation area, By calculating the approximate circle of the lens by performing a predetermined calculation process from the coordinate value of the detection point, the center position can be determined by the calculation process more reliably and easily than a measurement method such as pattern matching.

  In the above-described automatic centering process, it is not confirmed how many contrast inflection points, that is, detection points are detected with respect to the number of edge detection lines to be output. For this reason, a minimum number is specified for the number of detection points, and when the number of detection points does not reach the minimum number, the process of step 58 is performed to move the X table and the Y table. Then, after the entire circumference of the edge is displayed on the screen 70, the processing from step 52 may be performed again. Thus, high-precision centering can be performed.

Next, the lens surface inspection process and determination will be described.
If the lens 20 is moved to the lens surface inspection position as shown in FIG. 3 in the lens position adjustment step of step 5 and the curved surface 20a of the lens 20 is in focus, the process proceeds to step 6. Then, the lens surface inspection is started.

  First, as shown in step 61 of FIG. 18, the number of movements (m) in the radial direction of the inspection area is initialized. Further, the θ position (m) that is the inspection area position information storage array is initialized as shown in step 62, and the dot count (m) that is the defective dot information storage array is initialized as shown in step 63. Do. Also, the θ position (m) that is the inspection area position information storage array is initialized as shown in step 62, and the dot count (m) that is the defective dot number information storage array is initialized as shown in step 63. .

  The number of movements (m) of the inspection area is determined based on the lens diameter and lens thickness registered on the initial setting screen 50, surface inspection area information, and inspection pitch information. In addition to the number of area movements (m), the number of dots in the vertical and horizontal directions of the inspection area and the circumferential feed pitch (feed angle) are determined.

  Next, as shown in step 64, based on the information registered on the initial setting screen 50, the objective lenses 41a, 41b, 41c,... Arranged on the observation optical axis are exchanged as necessary. If the objective lens is exchanged in step 64, the process proceeds to step 65, and focusing is performed based on the automatic focusing process under the exchanged objective lens, and the process proceeds to step 66. On the other hand, if the objective lens has not been replaced in step 64, the process proceeds directly to step 66 where the illumination light is switched.

  Next, as shown in step 67, the bending table 36 is slid by a predetermined amount. As a result, the edge of the lens 20 is arranged in the observation optical axis. Then, as shown in step 68, this position is registered as the inspection start position. Thereafter, the process proceeds to step 69, the inspection area position is stored in the θ position (m), and the process proceeds to step 70. In step 70, the inspection image at this position is captured. At this time, for example, an inspection area image 80 having a predetermined number of dots in the vertical and horizontal directions as shown in FIG. 19 is captured. Reference numeral 81 denotes a dot that appears white in the inspection area image 80, and this dot is a portion where scattered light is reflected, that is, a scratched portion.

  Thereafter, as shown in step 71, it is determined whether or not there is a dot that appears white in the captured image. If no white dot is found in the inspection area image 80, the process proceeds to step 72, and the inspection area is moved in the circumferential direction by a predetermined pitch. In this embodiment, as shown in FIG. 20, the inspection area 82 is changed by a predetermined angle such as an inspection area 82a indicated by a solid line, an inspection area 82b indicated by a dotted line, an inspection area 82c indicated by an alternate long and short dash line, etc. The rotary table 31 is controlled to rotate in stages so as to move counterclockwise. In the step movement control, adjacent areas are overlapped to prevent detection omission.

  On the other hand, when the white dot 81 shown in the area image 80 of FIG. 19 is found in the step 71, the process shifts to the step 91 to obtain the number of dots (or dot area) that looks white, as shown in the step 92. Compare whether the number of dots exceeds the specified value. If the number of dots exceeds the specified value, it is determined that the inspected lens is a rejected product as shown in step 82, and the inspection of the lens 20 is finished. On the other hand, if it is determined in step 92 that the number of dots does not exceed the prescribed value, the process proceeds to step 93, where the position information and the number of dots of the inspection area are stored in the θ position and the dot count, and the step 72.

  If the movement of the inspection area shown in step 72 is confirmed, the process proceeds to step 73 to confirm whether or not the position of the moved inspection area has returned to the inspection start position. Here, when it is confirmed that the position has not returned to the initial inspection position, the processing from step 69 is performed again. On the other hand, if it is confirmed in step 73 that the inspection area has returned to the observation start position, the process proceeds to step 74 where the inspection over the entire circumference has been completed and m is added.

  Thereafter, in step 75, the value of m is compared with the number of movements. Here, when the value of m is smaller than the number of movements (m), the process proceeds to step 76, and the inspection area 82 is moved inward by a predetermined pitch as shown in FIG. That is, the inspection area of the observation area 82 is moved from m1 to m2 by the control of sliding the bending table 36. Thereafter, the processing from step 68 is performed again. In the present embodiment, the observation area 82 is performed in the order of circumferential step movement → all circumference completion → inspection area change → circumferential direction step movement → all circumference completion → inspection area change.

  If it is determined in step 75 that the value of m is greater than the number of movements (m), the process proceeds to step 77 to extract the number of dots stored in the dot count of the defective dot number information storage array. As shown in step 78, it is determined whether or not the number of dots exceeds a specified value.

  If it is determined in step 78 that the number of dots does not exceed the specified value, it is determined that the inspected lens 20 is an acceptable product as shown in step 79, and the inspection for the lens 20 is completed. .

  On the other hand, if it is determined in step 78 that the number of dots exceeds the specified value, the process proceeds to step 80, and the inspection area position information stored in the θ position of the inspection area position information storage array Then, the number of dots stored in the dot count of the defective dot number information storage array is extracted, and the relationship between the number of dots and the inspection area is extracted.

  Then, as shown in step 81, the number of dots is compared with the standard value for each inspection region. Here, when the number of dots for each inspection area does not exceed the specified value, it is determined that the inspected lens is an acceptable product as shown in step 79, and the inspection of this lens 20 is completed. Let On the other hand, when it is determined in step 81 that the number of dots exceeds the specified value in at least one of the inspection areas, the lens 20 inspected as shown in step 82 is determined to be an unacceptable product, The inspection of this lens 20 is finished.

  When the inspection of the lens 20 is completed, the result is displayed on the screen of the monitor 7, for example. If the determination result is displayed on the screen of the monitor 7, as described above, the inspector operates the inspection switch to release the suction state, and removes the inspected lens 20 from the X table 27. Store acceptable products and discard rejected products.

  Subsequently, when there is a lens to be inspected, in order to continue the lens inspection, a lens 20 to be newly inspected is disposed in the suction hole, and the inspection switch is operated. On the other hand, when there is no lens to be inspected, a predetermined operation is performed, and then the power supply of the inspection apparatus 1 is turned off to complete the inspection.

  In this way, the data such as the number of dots obtained based on the image captured in the inspection area is processed, and the number of defective dots or the number of defective dots for each inspection area is determined to determine whether the lens is good or bad. Can quantitatively determine the failure and stably supply a lens with good quality.

  In the lens surface inspection process, the rotation stage and the tilt stage are driven and controlled, and the inspection area is moved stepwise and overlapping the inspection area with respect to the lens surface, for example, in a spiral shape. The entire lens surface can be reliably inspected without fail.

  Further, the diameter and thickness dimensions of the lens to be inspected have different tolerance ranges, but each time the lens is placed on the X table, Step 4 to Step 6 are performed to re-adjust the focusing and centering. Since the inspection is performed later, differences due to tolerances of lens dimensions can be absorbed by software processing.

  As a result, even when the inspector places the lens in the suction hole, the lens can be placed without paying close attention to the placement position.

  In the present embodiment, a configuration in which only one lens to be inspected is arranged on the X table has been described. For example, a plurality of lenses are regularly arranged on the X table using the pallet. A control program may be formed so that a plurality of lenses can be inspected at a time.

  Further, in the present embodiment, the specified value described in step 92, the specified value described in step 78, and the specified value described in step 81 are different values, and are different depending on each inspection state and inspection region. The size, position, number, and the like of the flaws are set, and the threshold value at the time of determination by calculation processing is changed for each inspection area.

  It should be noted that the present invention is not limited to the embodiments described above, and various modifications can be made without departing from the spirit of the invention.

[Appendix]
According to the embodiment of the present invention as described above in detail, the following configuration can be obtained.

(1) An inspection table including a plurality of electrically driven stages, including a stage having a table on which an inspection target member is disposed, a microscope including an objective lens facing the inspection target member, and the inspection target member An illumination device that generates illumination light that illuminates the camera, a camera device that includes a solid-state imaging device that images the inspection target member through the objective lens, and a control unit that performs operation control of an electrically driven stage of the inspection table, An image processing unit that constructs an image of an inspection target member based on an electrical signal obtained by photoelectrically converting an optical image of the inspection target member imaged by the camera device, and various types based on image data output from the image processing unit Small-diameter portion comprising a control device having an arithmetic processing unit that performs arithmetic processing to determine the position of the inspection target member and quantitatively determine the size of the scratch on the surface of the inspection target Use outer surface inspection apparatus, a small-diameter member outer surface inspection method for inspecting the outer surface of the small diameter member is said object member,
An initial setting step for registering processing data and inspection conditions of the small-diameter member;
An automatic centering process for placing the center of the small-diameter member arranged on the table on the observation optical axis of the objective lens and an automatic focusing process for focusing the objective lens on the small-diameter member arranged on the table A lens position adjusting step having,
Based on an instruction from the control device, a lens surface inspection step of operating a predetermined table of the inspection table to inspect the surface of the small diameter member;
A determination step of determining the number of defective dots in the image of the inspection area or the number of defective dots for each inspection region, and determining the quality of the small-diameter member;
A small-diameter member outer surface inspection method comprising:

(2) The inspection table is
A first moving unit that moves in a vertical direction and moves a member to be inspected arranged on the stage in a vertical direction; at least a first axis direction orthogonal to the vertical direction or orthogonal to the vertical direction; A second moving unit that moves in one direction in a second axis direction orthogonal to the first axis to move the inspection target member arranged on the stage in the front-rear or left-right direction, and an observation optical axis A third moving part that rotates and moves the member to be inspected arranged on the stage and slides on a concave curved surface that has a center position located in a plane including the observation optical axis and has a predetermined radial dimension. And a fourth moving unit that moves and moves to incline so that the inclining state of the inspection target member arranged on the stage changes.

(3) The small-diameter member outer surface inspection device according to appendix 1, wherein the first moving unit, the second moving unit, the third moving unit, and the fourth moving unit are controlled by a control unit of the control device.

(4) The inspection table is
A first table that includes a first stage body that is a fixed member, is a movable member that is slidable with respect to a predetermined direction of the first stage body that constitutes the second moving unit, and on which the inspection target member is disposed, and the first table A first stage having a first table moving mechanism for moving the first table forward and backward with respect to the first stage body;
A second stage main body that is a fixed member is provided, and is slidable in a predetermined direction of the second stage main body constituting the second moving unit, and the first table in a direction orthogonal to the sliding direction. A second stage having a second table, which is a moving member to which the first stage main body is fixed so as to slide, and a second table moving mechanism for moving the second table forward and backward relative to the second stage main body. When,
A moving member that includes a third stage body that is a fixed member, is rotatable with respect to a shaft portion that is provided in the third stage body that constitutes the third moving portion, and is fixed to the second stage body. A third stage having a third table and a third table rotating mechanism for rotating the third table relative to the third stage body;
A moving member that includes a fourth stage body that is a fixed member, is slidable in a vertical direction with respect to the fourth stage body that constitutes the first moving unit, and is fixed to the third stage body. A fourth stage having a fourth table and a fourth table moving mechanism for moving the fourth table up and down relative to a sliding support member disposed in the fourth stage body;
A convex member curved surface which is a fixed member and has a fifth stage body formed with a concave curved surface having a predetermined radius, and which is slidable with respect to the concave curved surface formed in the fifth stage main body constituting the fourth moving unit. A fifth stage having a fifth table as a moving member to which the fourth stage main body is fixed, and a fifth table moving mechanism for sliding the fifth table against the concave curved surface of the fifth stage main body. When,
The small-diameter member outer surface inspection apparatus according to Supplementary Note 1 or Supplementary Note 2, comprising:

(5) The automatic centering process
Changing the height position of the inspection target member arranged on the table;
Storing the height position in the height position information storage array;
Capturing an image at the height position;
Calculating the luminance value of the captured image and storing it in a luminance information storage array;
Creating an interpolation array of height position information stored in the height position information storage array and brightness information stored in the brightness information storage array;
Creating an interpolation table indicating a relationship between a height position and a luminance value from the interpolation array;
Extracting a luminance value maximum point from the interpolation table;
Extracting height position information corresponding to the luminance value maximum point from the interpolation table;
A step of performing control to arrange the inspection target member arranged on the table at a position corresponding to the height position information;
The small-diameter member outer surface inspection method according to Supplementary Note 1, wherein

(6) The automatic focusing process is
Outputting a predetermined number of edge detection lines toward the center of the screen;
Capturing the output edge detection line image;
Acquiring a luminance value from the outer frame side of the captured edge detection line image toward the center one pixel at a time;
A step of detecting a contrast inflection point that identifies the edge from the acquired luminance value result, and calculating coordinates of the inflection point;
Calculating an approximate circle by a predetermined calculation process based on the coordinates of at least three inflection points;
Calculating the difference between the calculated center coordinates of the approximate circle and the center coordinates of the screen;
A step of controlling movement of the table based on the calculated difference value;
The small-diameter member outer surface inspection method according to Supplementary Note 1, wherein

The perspective view explaining the structure of a small diameter member outer surface inspection apparatus Block diagram explaining the configuration of the small diameter member outer surface inspection device Diagram explaining the configuration of the inspection table Diagram explaining the operation of the inspection table The flowchart explaining the process of inspecting a small diameter member using the small diameter member outer surface inspection device Diagram explaining an example of the initial setting screen The figure explaining the relationship between the position change of an inspection object member and an observation state in the state which moved the inspection object member of the state moved to the inspection position centering on the rotation center of a bending table Flow chart explaining lamp light quantity check process Flow chart explaining the process of automatic focusing process Diagram showing an example of a captured image The figure explaining the figure explaining the relationship between the height position and luminance value in an automatic focusing process The figure explaining the lens image currently displayed on the screen of the monitor Diagram explaining automatic centering process The figure explaining the state which is outputting so that it may converge with the screen center coordinates from the outside of the edge detection line screen The figure which shows an example of the luminance distribution curve from the detection start point A to the detection end point B in the edge detection line image The figure which shows the difference of the X direction and Y direction of a screen center coordinate and the center coordinate of a lens image. The figure explaining the state which has arrange | positioned the center coordinate of a lens image to the center coordinate of a screen Flow chart explaining the process of inspecting the lens surface The figure explaining an inspection area image and a crack in an image The figure explaining the stage movement during the inspection of the inspection area

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Small diameter member outer surface inspection apparatus 2 ... Inspection stand 3 ... Microscope 5 ... CCD camera 6 ... Personal computer 21 ... 1st stage 22 ... 2nd stage 23 ... 3rd stage 24 ... 4th stage 25 ... 5th stage 26 ... X stage body 27 ... X table 28 ... Y stage body 29 ... Y table 30 ... Rotation stage body 31 ... Rotation table 32 ... Z stage body 33 ... Sliding block 34 ... Z table 35 ... Bending block 35a ... Concave curved portion 36 ... Bending table 45 ... Focus adjustment table Agent Patent attorney Susumu Ito

Claims (3)

An inspection table including a plurality of electrically driven stages including a stage having a table on which an inspection target member is arranged, a microscope including an objective lens facing the inspection target member, and illuminating the inspection target member An illumination device that generates illumination light, a camera device including a solid-state imaging device that images the inspection target member through the objective lens, a control unit that performs operation control of an electrically driven stage of the inspection table, and the camera device The image processing unit that constructs the image of the inspection target member based on the electrical signal obtained by photoelectrically converting the optical image of the inspection target member imaged in step 1, and various arithmetic processing based on the image data output from the image processing unit A small-diameter member outer surface having a control unit having an arithmetic processing unit that performs determination of the position of the inspection target member and quantitatively determines the size of the scratch on the surface of the inspection target An inspection apparatus is used to determine a small diameter member outer surface inspection method for inspecting the outer surface of the small diameter member is said object member,
An initial setting step for registering processing data and inspection conditions of the small-diameter member;
An automatic centering process for placing the center of the small-diameter member arranged on the table on the observation optical axis of the objective lens and an automatic focusing process for focusing the objective lens on the small-diameter member arranged on the table A lens position adjusting step having,
Based on an instruction from the control device, a lens surface inspection step of operating a predetermined table of the inspection table to inspect the surface of the small diameter member;
A determination step of determining the number of defective dots in the image of the inspection area or the number of defective dots for each inspection region, and determining the quality of the small-diameter member;
A small-diameter member outer surface inspection method comprising: The automatic centering process is
Changing the height position of the inspection target member arranged on the table;
Storing the height position in the height position information storage array;
Capturing an image at the height position;
Calculating the luminance value of the captured image and storing it in a luminance information storage array;
Creating an interpolation array of height position information stored in the height position information storage array and brightness information stored in the brightness information storage array;
Creating an interpolation table indicating a relationship between a height position and a luminance value from the interpolation array;
Extracting a luminance value maximum point from the interpolation table;
Extracting height position information corresponding to the luminance value maximum point from the interpolation table;
A step of performing control to arrange the inspection target member arranged on the table at a position corresponding to the height position information;
The small-diameter member outer surface inspection method according to claim 1, comprising: The automatic focusing process
Outputting a predetermined number of edge detection lines toward the center of the screen;
Capturing the output edge detection line image;
Acquiring a luminance value from the outer frame side of the captured edge detection line image toward the center one pixel at a time;
A step of detecting a contrast inflection point that identifies the edge from the acquired luminance value result, and calculating coordinates of the inflection point;
Calculating an approximate circle by a predetermined calculation process based on the coordinates of at least three inflection points;
Calculating the difference between the calculated center coordinates of the approximate circle and the center coordinates of the screen;
A step of controlling movement of the table based on the calculated difference value;
The small-diameter member outer surface inspection method according to claim 1, comprising:

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