JP2005243903A - 半導体装置の製造方法 - Google Patents
半導体装置の製造方法 Download PDFInfo
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 47
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 21
- 238000010438 heat treatment Methods 0.000 claims abstract description 65
- 239000000463 material Substances 0.000 claims abstract description 35
- 239000011148 porous material Substances 0.000 claims abstract description 27
- 239000000758 substrate Substances 0.000 claims abstract description 22
- 238000004380 ashing Methods 0.000 claims abstract description 19
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- 239000000203 mixture Substances 0.000 claims abstract description 16
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- 239000011261 inert gas Substances 0.000 claims abstract description 5
- 238000000034 method Methods 0.000 claims description 42
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 29
- 229910052802 copper Inorganic materials 0.000 claims description 29
- 239000010949 copper Substances 0.000 claims description 29
- 230000008569 process Effects 0.000 claims description 21
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- 238000004140 cleaning Methods 0.000 claims description 17
- 230000004888 barrier function Effects 0.000 claims description 15
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- 239000002243 precursor Substances 0.000 claims description 9
- 150000002170 ethers Chemical class 0.000 claims description 4
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- 229920001721 polyimide Polymers 0.000 claims description 3
- 238000009413 insulation Methods 0.000 abstract 7
- 239000011229 interlayer Substances 0.000 description 20
- 239000010410 layer Substances 0.000 description 18
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 11
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 8
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- 230000015572 biosynthetic process Effects 0.000 description 4
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- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
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- 238000001704 evaporation Methods 0.000 description 2
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 2
- BCCOBQSFUDVTJQ-UHFFFAOYSA-N octafluorocyclobutane Chemical compound FC1(F)C(F)(F)C(F)(F)C1(F)F BCCOBQSFUDVTJQ-UHFFFAOYSA-N 0.000 description 2
- 235000019407 octafluorocyclobutane Nutrition 0.000 description 2
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- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 1
- VZPPHXVFMVZRTE-UHFFFAOYSA-N [Kr]F Chemical compound [Kr]F VZPPHXVFMVZRTE-UHFFFAOYSA-N 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- ISQINHMJILFLAQ-UHFFFAOYSA-N argon hydrofluoride Chemical compound F.[Ar] ISQINHMJILFLAQ-UHFFFAOYSA-N 0.000 description 1
- 150000001491 aromatic compounds Chemical class 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 229910000365 copper sulfate Inorganic materials 0.000 description 1
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 239000008151 electrolyte solution Substances 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 229910052754 neon Inorganic materials 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000009832 plasma treatment Methods 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 239000003361 porogen Substances 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 238000002791 soaking Methods 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 1
- TXEYQDLBPFQVAA-UHFFFAOYSA-N tetrafluoromethane Chemical compound FC(F)(F)F TXEYQDLBPFQVAA-UHFFFAOYSA-N 0.000 description 1
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- H01L21/02041—Cleaning
- H01L21/02057—Cleaning during device manufacture
- H01L21/0206—Cleaning during device manufacture during, before or after processing of insulating layers
- H01L21/02063—Cleaning during device manufacture during, before or after processing of insulating layers the processing being the formation of vias or contact holes
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Abstract
【解決手段】 半導体基板の上に形成した絶縁膜組成物に不活性ガス雰囲気下、350℃以下の温度で第1の加熱処理を行い非多孔質絶縁膜を形成する。次に、レジストパターンをマスクとしたドライエッチングにより非多孔質絶縁膜に溝を形成し、アッシングによりレジストパターンを除去した後、半導体基板の表面を洗浄する。その後、非多孔質絶縁膜に第2の加熱処理を行うことによって多孔質絶縁膜にする。第2の加熱処理は酸化性ガス雰囲気下で行うので、従来より低温で空孔形成材を除去して低誘電率の絶縁膜を形成することができる。
【選択図】 図7
Description
2 絶縁膜組成物
3 非多孔質絶縁膜
4 CMPストッパ膜
5 レジストパターン
6 溝
7 空孔
8 多孔質絶縁膜
9 バリアメタル膜
10 銅層
11 銅配線
Claims (4)
- 半導体基板の上方に、絶縁膜前駆体および空孔形成材を含む絶縁膜組成物を塗布する工程と、
前記絶縁膜組成物に対して不活性ガス雰囲気下、350℃以下の温度で第1の加熱処理を行い、前記絶縁膜前駆体を重合させて非多孔質絶縁膜を形成する工程と、
前記非多孔質絶縁膜の上にCMPストッパ膜を形成する工程と、
前記CMPストッパ膜の上にレジストパターンを形成する工程と、
前記レジストパターンをマスクとして前記CMPストッパ膜および前記非多孔質絶縁膜にドライエッチングを行い、前記非多孔質絶縁膜に溝を形成する工程と、
前記レジストパターンをアッシングにより除去する工程と、
前記アッシング後に前記半導体基板の表面を洗浄する工程と、
前記洗浄後に前記非多孔質絶縁膜に対して酸化性ガス雰囲気下で第2の加熱処理を行い、前記非多孔質絶縁膜から前記空孔形成材を除去することによって多孔質絶縁膜を形成する工程と、
前記CMPストッパ膜の上および前記溝の内面にバリアメタル膜を形成する工程と、
前記溝を埋め込むようにして前記バリアメタル膜の上に銅層を形成する工程と、
前記銅層および前記バリアメタル膜をCMP法により研磨して銅配線を形成する工程とを有することを特徴とする半導体装置の製造方法。 - 前記第2の加熱処理の温度は、前記第1の加熱処理の温度と同じまたはこれより低い温度である請求項1に記載の半導体装置の製造方法。
- 前記アッシングを水素を含む還元性雰囲気下で行う請求項1または2に記載の半導体装置の製造方法。
- 前記多孔質絶縁膜は、MSQ膜、HSQ膜、有機無機ハイブリッド膜、ポリイミド誘導体膜、ポリアリルエーテル誘導体膜、ポリキノリン誘導体膜およびポリパラキシレン誘導体膜よりなる群から選ばれる1の膜が多孔質化された膜である請求項1〜3のいずれか1に記載の半導体装置の製造方法。
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JP2004051432A JP4194508B2 (ja) | 2004-02-26 | 2004-02-26 | 半導体装置の製造方法 |
TW093138353A TW200529392A (en) | 2004-02-26 | 2004-12-10 | Method for manufacturing semiconductor device |
US11/010,344 US7064060B2 (en) | 2004-02-26 | 2004-12-14 | Method for manufacturing semiconductor device |
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JP2010215819A (ja) * | 2009-03-17 | 2010-09-30 | Sumitomo Bakelite Co Ltd | 膜形成用組成物、絶縁膜および半導体装置 |
JP2012174845A (ja) * | 2011-02-21 | 2012-09-10 | Tokyo Electron Ltd | 成膜方法及び半導体装置の製造方法 |
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2004
- 2004-02-26 JP JP2004051432A patent/JP4194508B2/ja not_active Expired - Lifetime
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US7602061B2 (en) | 2006-09-04 | 2009-10-13 | Sony Corporation | Semiconductor device and method for manufacturing semiconductor device |
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JP2012174845A (ja) * | 2011-02-21 | 2012-09-10 | Tokyo Electron Ltd | 成膜方法及び半導体装置の製造方法 |
JP2018170473A (ja) * | 2017-03-30 | 2018-11-01 | 東京エレクトロン株式会社 | 半導体装置の製造方法 |
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