JP2005142473A - 半導体装置の製造方法 - Google Patents
半導体装置の製造方法 Download PDFInfo
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 53
- 238000004519 manufacturing process Methods 0.000 title claims description 27
- 238000010438 heat treatment Methods 0.000 claims abstract description 43
- 239000000463 material Substances 0.000 claims abstract description 36
- 239000010949 copper Substances 0.000 claims abstract description 35
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 34
- 229910052802 copper Inorganic materials 0.000 claims abstract description 34
- 238000000034 method Methods 0.000 claims abstract description 34
- 239000011148 porous material Substances 0.000 claims abstract description 31
- 229910052751 metal Inorganic materials 0.000 claims abstract description 27
- 239000002184 metal Substances 0.000 claims abstract description 27
- 230000004888 barrier function Effects 0.000 claims abstract description 25
- 239000000758 substrate Substances 0.000 claims abstract description 23
- 239000000203 mixture Substances 0.000 claims abstract description 21
- 238000004380 ashing Methods 0.000 claims abstract description 19
- 239000002243 precursor Substances 0.000 claims abstract description 17
- 238000001312 dry etching Methods 0.000 claims abstract description 12
- 230000000379 polymerizing effect Effects 0.000 claims abstract description 7
- 238000004140 cleaning Methods 0.000 claims description 22
- 238000005498 polishing Methods 0.000 claims description 18
- 239000004642 Polyimide Substances 0.000 claims description 3
- 229920000292 Polyquinoline Polymers 0.000 claims description 3
- 150000002170 ethers Chemical class 0.000 claims description 3
- 229920001721 polyimide Polymers 0.000 claims description 3
- 239000011229 interlayer Substances 0.000 description 24
- 239000010410 layer Substances 0.000 description 24
- 239000007789 gas Substances 0.000 description 12
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 8
- 230000003071 parasitic effect Effects 0.000 description 8
- -1 polysiloxane Polymers 0.000 description 8
- 229920001296 polysiloxane Polymers 0.000 description 8
- 238000005229 chemical vapour deposition Methods 0.000 description 7
- 238000000354 decomposition reaction Methods 0.000 description 5
- 239000007788 liquid Substances 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 229910052786 argon Inorganic materials 0.000 description 4
- 239000012298 atmosphere Substances 0.000 description 4
- 239000012528 membrane Substances 0.000 description 4
- 239000011342 resin composition Substances 0.000 description 4
- 239000002904 solvent Substances 0.000 description 4
- 229910020177 SiOF Inorganic materials 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 230000001590 oxidative effect Effects 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 230000008016 vaporization Effects 0.000 description 3
- 239000011800 void material Substances 0.000 description 3
- ZVJOQYFQSQJDDX-UHFFFAOYSA-N 1,1,2,3,3,4,4,4-octafluorobut-1-ene Chemical compound FC(F)=C(F)C(F)(F)C(F)(F)F ZVJOQYFQSQJDDX-UHFFFAOYSA-N 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- RWRIWBAIICGTTQ-UHFFFAOYSA-N difluoromethane Chemical compound FCF RWRIWBAIICGTTQ-UHFFFAOYSA-N 0.000 description 2
- 229910001882 dioxygen Inorganic materials 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 150000001491 aromatic compounds Chemical class 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229910000365 copper sulfate Inorganic materials 0.000 description 1
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 239000008151 electrolyte solution Substances 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 1
- 229910052754 neon Inorganic materials 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 229920000620 organic polymer Polymers 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000009832 plasma treatment Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 239000003361 porogen Substances 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 238000002791 soaking Methods 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 1
- TXEYQDLBPFQVAA-UHFFFAOYSA-N tetrafluoromethane Chemical compound FC(F)(F)F TXEYQDLBPFQVAA-UHFFFAOYSA-N 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
- H01L21/02126—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material containing Si, O, and at least one of H, N, C, F, or other non-metal elements, e.g. SiOC, SiOC:H or SiONC
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- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02203—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being porous
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- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02296—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer
- H01L21/02318—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer post-treatment
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
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- H01L21/314—Inorganic layers
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Abstract
【解決手段】 半導体基板1の上に、絶縁膜前駆体および空孔形成材を含む絶縁膜組成物を塗布した後、この絶縁膜組成物に第1の加熱処理を行い、空孔形成材が気化しない状態で絶縁膜前駆体を重合させて非多孔質絶縁膜を形成する。次に、この非多孔質絶縁膜の上にレジストパターンを形成した後、このレジストパターンをマスクとして非多孔質絶縁膜のドライエッチングを行い、非多孔質絶縁膜に溝を形成する。不要となったレジストパターンをアッシングにより除去した後、半導体基板1の表面を洗浄する。次に、非多孔質絶縁膜に第2の加熱処理を行い、非多孔質絶縁膜から空孔形成材を除去することによって多孔質絶縁膜7を形成する。その後、溝にバリアメタル膜8を介して銅層9を埋め込んで銅配線を形成する。
【選択図】 図7
Description
2 絶縁膜組成物
3,12 非多孔質絶縁膜
4,14,24 レジストパターン
5,15,25 溝
6,22 空孔
7,23 多孔質絶縁膜
8,16,26 バリアメタル膜
9,17,27 銅層
10 銅配線
13 CMPストッパ膜
Claims (5)
- 半導体基板の上に、絶縁膜前駆体および空孔形成材を含む絶縁膜組成物を塗布する工程と、
前記絶縁膜組成物に第1の加熱処理を行い、前記空孔形成材が気化しない状態で前記絶縁膜前駆体を重合させて非多孔質絶縁膜を形成する工程と、
前記非多孔質絶縁膜の上にレジストパターンを形成する工程と、
前記レジストパターンをマスクとして前記非多孔質絶縁膜のドライエッチングを行い、前記非多孔質絶縁膜に溝を形成する工程と、
前記レジストパターンをアッシングにより除去する工程と、
前記アッシング後に前記半導体基板の表面を洗浄する工程と、
前記洗浄後に前記非多孔質絶縁膜に第2の加熱処理を行い、前記非多孔質絶縁膜から前記空孔形成材を除去することによって多孔質絶縁膜を形成する工程と、
前記溝の内面にバリアメタル膜を形成する工程と、
前記溝の内部に前記バリアメタル膜を介して銅層を埋め込む工程とを有することを特徴とする半導体装置の製造方法。 - 半導体基板の上に、絶縁膜前駆体および空孔形成材を含む絶縁膜組成物を塗布する工程と、
前記絶縁膜組成物に第1の加熱処理を行い、前記空孔形成材が気化しない状態で前記絶縁膜前駆体を重合させて非多孔質絶縁膜を形成する工程と、
前記非多孔質絶縁膜の上にCMPストッパ膜を形成する工程と、
前記CMPストッパ膜の上にレジストパターンを形成する工程と、
前記レジストパターンをマスクとして前記CMPストッパ膜および前記非多孔質絶縁膜のドライエッチングを行い、前記非多孔質絶縁膜に溝を形成する工程と、
前記レジストパターンをアッシングにより除去する工程と、
前記アッシング後に前記半導体基板の表面を洗浄する工程と、
前記洗浄後に前記非多孔質絶縁膜に第2の加熱処理を行い、前記非多孔質絶縁膜から前記空孔形成材を除去することによって多孔質絶縁膜を形成する工程と、
前記CMPストッパ膜の上および前記溝の内面にバリアメタル膜を形成する工程と、
前記溝を埋め込むようにして前記バリアメタル膜の上に銅層を形成する工程と、
前記銅層および前記バリアメタル膜をCMP法により研磨して銅配線を形成する工程とを有することを特徴とする半導体装置の製造方法。 - 前記第1の加熱処理は350℃以下の温度で行う請求項1または2に記載の半導体装置の製造方法。
- 前記第2の加熱処理は450℃以下の温度で行う請求項1〜3のいずれか1に記載の半導体装置の製造方法。
- 前記多孔質絶縁膜は、MSQ膜、HSQ膜、有機無機ハイブリッド膜、ポリイミド誘導体膜、ポリアリルエーテル誘導体膜、ポリキノリン誘導体膜およびポリパラキシレン誘導体膜よりなる群から選ばれる1の膜が多孔質化された膜である請求項1〜4のいずれか1に記載の半導体装置の製造方法。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
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JP2003379675A JP2005142473A (ja) | 2003-11-10 | 2003-11-10 | 半導体装置の製造方法 |
TW093133181A TWI343602B (en) | 2003-11-10 | 2004-11-01 | Method for manufacturing semiconductor device |
US10/980,279 US6998325B2 (en) | 2003-11-10 | 2004-11-04 | Method for manufacturing semiconductor device |
FR0411925A FR2862159A1 (fr) | 2003-11-10 | 2004-11-09 | Procede pour fabriquer un dispositif a semiconducteur |
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JP2003379675A JP2005142473A (ja) | 2003-11-10 | 2003-11-10 | 半導体装置の製造方法 |
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US (1) | US6998325B2 (ja) |
JP (1) | JP2005142473A (ja) |
FR (1) | FR2862159A1 (ja) |
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US8502388B2 (en) | 2009-02-06 | 2013-08-06 | Panasonic Corporation | Semiconductor device and method for fabricating the same |
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JP4194508B2 (ja) * | 2004-02-26 | 2008-12-10 | 三洋電機株式会社 | 半導体装置の製造方法 |
KR100583520B1 (ko) * | 2004-12-30 | 2006-05-25 | 동부일렉트로닉스 주식회사 | 반도체 소자의 sti 형성 방법 |
US7294923B2 (en) * | 2005-05-04 | 2007-11-13 | Texas Instruments Incorporated | Metallization scheme including a low modulus structure |
KR101185757B1 (ko) * | 2005-06-20 | 2012-09-25 | 고에키자이단호진 고쿠사이카가쿠 신고우자이단 | 층간 절연막 및 배선 구조와 그것들의 제조 방법 |
JP4788415B2 (ja) * | 2006-03-15 | 2011-10-05 | ソニー株式会社 | 半導体装置の製造方法 |
CN104183481B (zh) * | 2014-08-27 | 2019-12-13 | 上海华力微电子有限公司 | 一种提高金属阻挡层沉积质量的方法 |
KR102406977B1 (ko) * | 2015-07-16 | 2022-06-10 | 삼성전자주식회사 | 소자 분리막을 포함하는 반도체 장치의 제조 방법 |
CN105226013B (zh) * | 2015-09-24 | 2018-10-02 | 清华大学 | 多孔状绝缘介质层的三维互连装置及其制备方法 |
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JP3756666B2 (ja) | 1998-05-08 | 2006-03-15 | 松下電器産業株式会社 | 多孔質膜の形成方法及びその形成装置 |
EP1280193B1 (en) * | 2000-05-02 | 2011-06-29 | JGC Catalysts and Chemicals Ltd. | Method of manufacturing integrated circuit, and substrate with integrated circuit formed by the method of manufacturing integrated circuit |
EP1323189A2 (en) * | 2000-09-13 | 2003-07-02 | Shipley Company LLC | Electronic device manufacture |
US6451712B1 (en) * | 2000-12-18 | 2002-09-17 | International Business Machines Corporation | Method for forming a porous dielectric material layer in a semiconductor device and device formed |
US6603204B2 (en) * | 2001-02-28 | 2003-08-05 | International Business Machines Corporation | Low-k interconnect structure comprised of a multilayer of spin-on porous dielectrics |
US20030218253A1 (en) * | 2001-12-13 | 2003-11-27 | Avanzino Steven C. | Process for formation of a wiring network using a porous interlevel dielectric and related structures |
US6818285B2 (en) * | 2002-12-31 | 2004-11-16 | International Business Machines Corporation | Composition and method to achieve reduced thermal expansion in polyarylene networks |
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Cited By (1)
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US8502388B2 (en) | 2009-02-06 | 2013-08-06 | Panasonic Corporation | Semiconductor device and method for fabricating the same |
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US6998325B2 (en) | 2006-02-14 |
US20050101157A1 (en) | 2005-05-12 |
TW200520093A (en) | 2005-06-16 |
TWI343602B (en) | 2011-06-11 |
FR2862159A1 (fr) | 2005-05-13 |
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