JP2005208465A5 - - Google Patents
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- Publication number
- JP2005208465A5 JP2005208465A5 JP2004016730A JP2004016730A JP2005208465A5 JP 2005208465 A5 JP2005208465 A5 JP 2005208465A5 JP 2004016730 A JP2004016730 A JP 2004016730A JP 2004016730 A JP2004016730 A JP 2004016730A JP 2005208465 A5 JP2005208465 A5 JP 2005208465A5
- Authority
- JP
- Japan
- Prior art keywords
- carbon atoms
- organic group
- group
- integer
- divalent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 239000002245 particle Substances 0.000 claims description 4
- 150000001875 compounds Chemical class 0.000 claims description 2
- 125000000962 organic group Chemical group 0.000 claims 11
- 125000004432 carbon atom Chemical group C* 0.000 claims 10
- 239000011342 resin composition Substances 0.000 claims 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims 2
- 229910052739 hydrogen Inorganic materials 0.000 claims 2
- 239000001257 hydrogen Substances 0.000 claims 2
- -1 quinonediazide compound Chemical class 0.000 claims 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 1
- 229910052782 aluminium Inorganic materials 0.000 claims 1
- 229910052799 carbon Inorganic materials 0.000 claims 1
- 125000003983 fluorenyl group Chemical group C1(=CC=CC=2C3=CC=CC=C3CC12)* 0.000 claims 1
- 229920006015 heat resistant resin Polymers 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims 1
- 239000010954 inorganic particle Substances 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N phenol group Chemical group C1(=CC=CC=C1)O ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 claims 1
- 229920000642 polymer Polymers 0.000 claims 1
- 150000003377 silicon compounds Chemical class 0.000 claims 1
- 125000000472 sulfonyl group Chemical group *S(*)(=O)=O 0.000 claims 1
- 125000000101 thioether group Chemical group 0.000 claims 1
- RMVRSNDYEFQCLF-UHFFFAOYSA-N thiophenol Chemical group SC1=CC=CC=C1 RMVRSNDYEFQCLF-UHFFFAOYSA-N 0.000 claims 1
- 150000003606 tin compounds Chemical class 0.000 claims 1
- 150000003609 titanium compounds Chemical class 0.000 claims 1
- 150000003755 zirconium compounds Chemical class 0.000 claims 1
- 239000011246 composite particle Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- JVQAJHYYWVAKPP-UHFFFAOYSA-N [O-2].[Ti+4].[Sn+2]=O.[O-2].[O-2] Chemical compound [O-2].[Ti+4].[Sn+2]=O.[O-2].[O-2] JVQAJHYYWVAKPP-UHFFFAOYSA-N 0.000 description 1
- JHGFRCLDPHKRBS-UHFFFAOYSA-N [Sn+2]=O.[O-2].[Zr+4].[O-2].[O-2] Chemical compound [Sn+2]=O.[O-2].[Zr+4].[O-2].[O-2] JHGFRCLDPHKRBS-UHFFFAOYSA-N 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004016730A JP4403811B2 (ja) | 2004-01-26 | 2004-01-26 | ポジ型感光性樹脂組成物 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004016730A JP4403811B2 (ja) | 2004-01-26 | 2004-01-26 | ポジ型感光性樹脂組成物 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2005208465A JP2005208465A (ja) | 2005-08-04 |
| JP2005208465A5 true JP2005208465A5 (https=) | 2009-04-02 |
| JP4403811B2 JP4403811B2 (ja) | 2010-01-27 |
Family
ID=34901792
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004016730A Expired - Fee Related JP4403811B2 (ja) | 2004-01-26 | 2004-01-26 | ポジ型感光性樹脂組成物 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4403811B2 (https=) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004310076A (ja) * | 2003-03-26 | 2004-11-04 | Sumitomo Bakelite Co Ltd | ポジ型感光性樹脂組成物並びに半導体装置及び表示素子 |
| EP1886187A4 (en) * | 2005-06-03 | 2010-10-06 | Fujifilm Electronic Materials | NOVEL LIGHT-SENSITIVE RESIN COMPOSITIONS |
| JP2007122024A (ja) * | 2005-09-28 | 2007-05-17 | Toray Ind Inc | 感光性組成物 |
| JP4946105B2 (ja) * | 2006-03-15 | 2012-06-06 | 東レ株式会社 | 樹脂組成物、それを用いたレリーフパターンの形成方法 |
| JP5162787B2 (ja) * | 2007-03-30 | 2013-03-13 | Ｊｓｒ株式会社 | 樹脂組成物、硬化膜及び光学用部材 |
| JP4986071B2 (ja) | 2007-03-30 | 2012-07-25 | 国立大学法人東京工業大学 | 樹脂組成物、硬化物及び光学用部材 |
| JP5252338B2 (ja) * | 2007-11-22 | 2013-07-31 | Ｊｓｒ株式会社 | ジアミン化合物、それを使用して製造されるポリアミック酸及びイミド化重合体 |
| KR100913058B1 (ko) * | 2008-08-25 | 2009-08-20 | 금호석유화학 주식회사 | 포지티브형 감광성 수지 조성물, 패턴 형성 방법 및 반도체소자 |
| KR101200140B1 (ko) * | 2009-08-31 | 2012-11-12 | 금호석유화학 주식회사 | 포지티브형 감광성 조성물 |
| JPWO2013094477A1 (ja) * | 2011-12-19 | 2015-04-27 | パナソニックＩｐマネジメント株式会社 | 透明導電膜、透明導電膜付き基材及びその製造方法 |
| JPWO2016148176A1 (ja) * | 2015-03-19 | 2017-12-28 | 東レ株式会社 | ポジ型感光性樹脂組成物、硬化膜、ｔｆｔ基板、層間絶縁膜、表示装置、およびその製造方法 |
-
2004
- 2004-01-26 JP JP2004016730A patent/JP4403811B2/ja not_active Expired - Fee Related
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