JP2005200214A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2005200214A5 JP2005200214A5 JP2004344301A JP2004344301A JP2005200214A5 JP 2005200214 A5 JP2005200214 A5 JP 2005200214A5 JP 2004344301 A JP2004344301 A JP 2004344301A JP 2004344301 A JP2004344301 A JP 2004344301A JP 2005200214 A5 JP2005200214 A5 JP 2005200214A5
- Authority
- JP
- Japan
- Prior art keywords
- substrate support
- substrate
- gripping means
- roller
- operating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE10355679A DE10355679B4 (de) | 2003-11-28 | 2003-11-28 | Substratträger, Vorrichtung und Verfahren zum Handhaben des Substratträgers und Verwendung in Beschichtungsprozessen |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2005200214A JP2005200214A (ja) | 2005-07-28 |
| JP2005200214A5 true JP2005200214A5 (https=) | 2007-07-19 |
Family
ID=34442326
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004344301A Pending JP2005200214A (ja) | 2003-11-28 | 2004-11-29 | 基板支持体アダプタシステム |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US20050142290A1 (https=) |
| EP (1) | EP1538236B1 (https=) |
| JP (1) | JP2005200214A (https=) |
| AT (1) | ATE396288T1 (https=) |
| DE (2) | DE10355679B4 (https=) |
| ES (1) | ES2305651T3 (https=) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102005045718B4 (de) * | 2005-09-24 | 2009-06-25 | Applied Materials Gmbh & Co. Kg | Träger für ein Substrat |
| DE102006046968A1 (de) * | 2006-10-04 | 2008-04-10 | Singulus Technologies Ag | Oberflächenbehandlungssystem und darin verwendbare Lackiervorrichtung |
| DE102016214445A1 (de) | 2016-08-04 | 2018-02-08 | Meyer Burger (Germany) Ag | Anpassungsvorrichtung für Substratträger |
| CN111430279B (zh) * | 2020-04-30 | 2023-09-01 | 瑞安市荣海机电有限公司 | 一种准分子激光退火设备用基板支撑装置 |
| DE102021002293B4 (de) | 2021-04-30 | 2025-04-30 | Singulus Technologies Aktiengesellschaft | Substratträger mit Zentrierfunktion, Wechselstation mit einem Substratträger und Verfahren zum Behandeln eines Substrats |
| CN121451122B (zh) * | 2026-01-05 | 2026-04-07 | 中国人民解放军国防科技大学 | 一种矫正陶瓷片翘曲的镀膜工装及电极制备方法 |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE7707767U1 (de) * | 1977-03-14 | 1977-09-08 | Balzers Hochvakuum Gmbh, 6200 Wiesbaden | Halterung fuer substratplaettchen |
| DE2723284A1 (de) * | 1977-05-24 | 1978-12-07 | Leybold Heraeus Gmbh & Co Kg | Transporteinrichtung fuer die bewegung von gegenstaenden in abgeschlossenen raeumen |
| JPH01103983A (ja) * | 1988-09-19 | 1989-04-21 | Hitachi Ltd | 分子線エピタキシ装置用サセプタ |
| JP2747715B2 (ja) * | 1989-01-24 | 1998-05-06 | 株式会社日平トヤマ | 把握装置 |
| DE3919611A1 (de) * | 1989-06-15 | 1990-12-20 | Wacker Chemitronic | Haltevorrichtung zur aufnahme von scheibenfoermigen gegenstaenden, insbesondere halbleiterscheiben, und verfahren zu deren behandlung |
| DE69021952T2 (de) * | 1989-06-29 | 1996-05-15 | Applied Materials Inc | Vorrichtung zur Handhabung von Halbleiterplättchen. |
| DE4446179C2 (de) * | 1994-12-23 | 2003-08-21 | Leybold Optics Gmbh | Halterung für scheibenförmige Substrate |
| DE19605598C1 (de) * | 1996-02-15 | 1996-10-31 | Singulus Technologies Gmbh | Vorrichtung zum Greifen und Halten von Substraten |
| JPH11176916A (ja) * | 1997-12-11 | 1999-07-02 | Toshiba Mach Co Ltd | ウェーハ支持体 |
| JP2002307343A (ja) * | 2001-04-12 | 2002-10-23 | Matsushita Electric Ind Co Ltd | 薄板材の移載方法および装置 |
| JP2003124167A (ja) * | 2001-10-10 | 2003-04-25 | Sumitomo Heavy Ind Ltd | ウエハ支持部材及びこれを用いる両頭研削装置 |
-
2003
- 2003-11-28 DE DE10355679A patent/DE10355679B4/de not_active Expired - Fee Related
-
2004
- 2004-11-24 ES ES04027863T patent/ES2305651T3/es not_active Expired - Lifetime
- 2004-11-24 EP EP04027863A patent/EP1538236B1/de not_active Expired - Lifetime
- 2004-11-24 AT AT04027863T patent/ATE396288T1/de not_active IP Right Cessation
- 2004-11-24 DE DE502004007214T patent/DE502004007214D1/de not_active Expired - Lifetime
- 2004-11-26 US US10/998,206 patent/US20050142290A1/en not_active Abandoned
- 2004-11-29 JP JP2004344301A patent/JP2005200214A/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN201793727U (zh) | 行星轮鼠笼式工件架 | |
| JP2002280443A (ja) | ディスクキャリヤ | |
| KR102655730B1 (ko) | 복수 공정 단계용 공구 유지 장치 | |
| WO2004030051A3 (en) | System for substrate processing with meniscus, vacuum, ipa vapor, drying manifold | |
| TWI594314B (zh) | 用於晶圓狀物件之液體處理的方法 | |
| JP2005507162A5 (https=) | ||
| WO2008121275A3 (en) | Method and apparatus for membrane deposition | |
| US9038262B2 (en) | Device for holding disk-shaped articles and method thereof | |
| JP2008502134A5 (https=) | ||
| TW201546930A (zh) | 具有多站處理及前處理及／或後處理站之緊密的基板處理工具 | |
| JP2005200214A5 (https=) | ||
| WO2019096515A1 (en) | Vacuum treatment apparatus and method of vacuum treating substrates | |
| TWI733875B (zh) | 雙層式的膠帶框架的清洗組件 | |
| JP2011014229A5 (https=) | ||
| CN206089796U (zh) | 用于pvd加工的挂具 | |
| JP2005518920A5 (https=) | ||
| JPWO2007148536A1 (ja) | 成膜装置及び成膜方法 | |
| CN101960581B (zh) | 在腔室中搬运工件的系统 | |
| JP2007332462A5 (https=) | ||
| US20130239894A1 (en) | Chemical vapor deposition apparatus | |
| JPH0151163B2 (https=) | ||
| JP2005200214A (ja) | 基板支持体アダプタシステム | |
| JP2013243203A (ja) | 支持装置 | |
| CN107250007B (zh) | 运输机构、用于处理物品的机构和运输方法 | |
| US20210381100A1 (en) | Vacuum treatment apparatus and method of vacuum treating substrates |