JP2005159275A - セル駆動型圧電アクチュエータ、及びセル駆動型圧電アクチュエータの製造方法 - Google Patents
セル駆動型圧電アクチュエータ、及びセル駆動型圧電アクチュエータの製造方法 Download PDFInfo
- Publication number
- JP2005159275A JP2005159275A JP2004154940A JP2004154940A JP2005159275A JP 2005159275 A JP2005159275 A JP 2005159275A JP 2004154940 A JP2004154940 A JP 2004154940A JP 2004154940 A JP2004154940 A JP 2004154940A JP 2005159275 A JP2005159275 A JP 2005159275A
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- Prior art keywords
- cell
- piezoelectric actuator
- piezoelectric
- side walls
- wall
- Prior art date
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- Granted
Links
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Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14209—Structure of print heads with piezoelectric elements of finger type, chamber walls consisting integrally of piezoelectric material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1607—Production of print heads with piezoelectric elements
- B41J2/1609—Production of print heads with piezoelectric elements of finger type, chamber walls consisting integrally of piezoelectric material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B17/00—Pumps characterised by combination with, or adaptation to, specific driving engines or motors
- F04B17/003—Pumps characterised by combination with, or adaptation to, specific driving engines or motors driven by piezoelectric means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/05—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
- H10N30/053—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes by integrally sintering piezoelectric or electrostrictive bodies and electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
- H10N30/501—Piezoelectric or electrostrictive devices having a stacked or multilayer structure having a non-rectangular cross-section in a plane parallel to the stacking direction, e.g. polygonal or trapezoidal in side view
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N39/00—Integrated devices, or assemblies of multiple devices, comprising at least one piezoelectric, electrostrictive or magnetostrictive element covered by groups H10N30/00 – H10N35/00
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
【解決手段】壁部22と、その壁部22によって形成されたセル3と、を有する複数のセル駆動体20を備え、その複数のセル駆動体20の各々が、壁部22において、圧電体14と、少なくとも一対の電極18,19と、からなる圧電作動部4を具備し、その圧電作動部4の変位によってセル3の容積が変化するセル駆動型圧電アクチュエータ1をインクジェットヘッドとして適用する。セル駆動型圧電アクチュエータ1は、少なくとも一対の支持体21を備え、複数のセル駆動体20が互いに完全に独立して少なくとも一対の支持体21を架け渡して連設されるとともに、セル駆動体20と支持体21とが焼成一体化されている。
【選択図】図1
Description
Claims (10)
- 壁部と前記壁部によって形成されたセルとを有する複数のセル駆動体を備え、前記複数のセル駆動体の各々が、前記壁部において、圧電体と少なくとも一対の電極とからなる圧電作動部を具備し、前記圧電作動部の変位によって前記セルの容積が変化するアクチュエータであって、
少なくとも一対の支持体を備え、前記複数のセル駆動体が互いに完全に独立して前記少なくとも一対の支持体を架け渡して連設されるとともに、前記セル駆動体と前記支持体とが焼成一体化されているセル駆動型圧電アクチュエータ。 - 前記複数のセル駆動体の各々が、2つの側壁と、前記2つの側壁を接続する天井壁及び底壁と、で前記壁部を構成して、スリット状の前記セルを形成し、
少なくとも前記2つの側壁の各々に備わる前記圧電作動部が、側壁の高さ方向に交互に積層をされた、層状の前記圧電体と、前記少なくとも一対の電極と、を有し、圧電縦効果により前記変位を発生する請求項1に記載のセル駆動型圧電アクチュエータ。 - 前記少なくとも一対の電極の端部が、少なくとも前記セルの内側において、前記圧電体内に埋設されている請求項2に記載のセル駆動型圧電アクチュエータ。
- 前記少なくとも一対の電極の端部が、前記セルの外側において、前記圧電体から露出している請求項3に記載のセル駆動型圧電アクチュエータ。
- 前記複数のセル駆動体の各々が、2つの側壁と、前記2つの側壁を接続する天井壁及び底壁と、で前記壁部を構成して、スリット状の前記セルを形成し、
少なくとも前記2つの側壁の各々に備わる前記圧電作動部が、板状の前記圧電体と、前記圧電体の側面に形成された前記少なくとも一対の電極と、を有し、圧電横効果により前記変位を発生する請求項1に記載のセル駆動型圧電アクチュエータ。 - 前記板状の圧電体が複数備わる請求項5に記載のセル駆動型圧電アクチュエータ。
- 前記複数のセル駆動体の各々が、2つの側壁と、前記2つの側壁を接続する天井壁及び底壁と、で前記壁部を構成して、スリット状の前記セルを形成し、
前記2つの側壁と天井壁と底壁のうち何れか3つ又は全てに、前記圧電作動部が備わる請求項1〜6の何れか一項に記載のセル駆動型圧電アクチュエータ。 - 壁部によって形成された複数のセルを有し、前記壁部は、2つの側壁と、前記2つの側壁を接続する天井壁及び底壁と、で構成され、少なくとも前記2つの側壁に圧電作動部が備わり、前記圧電作動部は、板状の圧電体と、前記圧電体の側面に形成された少なくとも一対の電極と、を有し、圧電横効果により変位を発生するアクチュエータを製造する方法であって、
圧電材料を主成分とする3以上のセラミックグリーンシートを用意する第1の工程と、
前記3以上のセラミックグリーンシートの各々に、少なくとも2つのビアホール乃至スルーホールを形成して、加工済セラミックグリーンシートAを得る第2の工程と、
前記加工済セラミックグリーンシートAの各々に、複数のキャビティと、前記複数のキャビティを形成する面の各々に露出され且つ前記ビアホール乃至スルーホールに接続される導体膜と、を形成して、複数の加工済セラミックグリーンシートBを得る第3の工程と、前記複数の加工済セラミックグリーンシートBを積層し圧着して、前記複数の加工済セラミックグリーンシートBの各々に形成された複数のキャビティがそれぞれ連通してなる複数の貫通孔が備わるセラミックグリーン積層体を形成する第4の工程と、
前記セラミックグリーン積層体を焼成して一体化し、焼成積層体を得る第5の工程と、を有するセル駆動型圧電アクチュエータの製造方法。 - 請求項2に記載のセル駆動型圧電アクチュエータを製造する方法であって、
少なくとも前記2つの側壁を、圧電材料を主成分とするセラミック材料で構成し、前記天井壁又は底壁に、1又は2以上の細孔を設けて、前記セルを形成した後に、
前記細孔を通じて前記セルの中へ流体からなる絶縁体材料を導入し、前記壁部のセル形成面に前記絶縁体材料を密着させて、前記セル形成面に、保護膜を形成する工程を有するセル駆動型圧電アクチュエータの製造方法。 - 請求項5に記載のセル駆動型圧電アクチュエータを製造する方法であって、
少なくとも前記2つの側壁を、圧電材料を主成分とするセラミック材料で構成し、前記天井壁又は底壁に、1又は2以上の細孔を設けて、前記セルを形成した後に、
前記細孔を通じて前記セルの中へ流体からなる導体材料又は絶縁体材料を導入し、前記壁部のセル形成面に前記導体材料又は絶縁体材料を密着させて、前記セル形成面に、電極、又は、前記電極を絶縁する保護膜を形成する工程を有するセル駆動型圧電アクチュエータの製造方法。
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US10/855,932 US7274133B2 (en) | 2003-05-30 | 2004-05-27 | Cell driving type piezoelectric actuator, and method of manufacturing cell driving type piezoelectric actuator |
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Cited By (5)
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JP2007035805A (ja) * | 2005-07-25 | 2007-02-08 | Ngk Insulators Ltd | 圧電/電歪デバイス |
JP2007076062A (ja) * | 2005-09-12 | 2007-03-29 | Konica Minolta Ij Technologies Inc | インクジェットヘッドの製造方法 |
JP2010506553A (ja) * | 2006-10-02 | 2010-02-25 | ロベルト・ボッシュ・ゲゼルシャフト・ミト・ベシュレンクテル・ハフツング | 印刷形成法により製造したエネルギハーベスティング装置 |
JP2013129106A (ja) * | 2011-12-21 | 2013-07-04 | Canon Inc | 液体吐出ヘッド |
CN107009741A (zh) * | 2015-09-30 | 2017-08-04 | 精工电子打印科技有限公司 | 液体喷射头以及液体喷射装置 |
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US8456772B2 (en) * | 2009-06-05 | 2013-06-04 | Nikon Corporation | Piezoelectric actuator, lens barrel, and camera |
JP5773127B2 (ja) * | 2011-01-24 | 2015-09-02 | セイコーエプソン株式会社 | 液体噴射ヘッド、液体噴射装置、圧電素子、超音波デバイス及びirセンサー |
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JP2007035805A (ja) * | 2005-07-25 | 2007-02-08 | Ngk Insulators Ltd | 圧電/電歪デバイス |
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