JP2005106550A - 角速度検出装置 - Google Patents
角速度検出装置 Download PDFInfo
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- JP2005106550A JP2005106550A JP2003338507A JP2003338507A JP2005106550A JP 2005106550 A JP2005106550 A JP 2005106550A JP 2003338507 A JP2003338507 A JP 2003338507A JP 2003338507 A JP2003338507 A JP 2003338507A JP 2005106550 A JP2005106550 A JP 2005106550A
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- 238000001514 detection method Methods 0.000 title claims abstract description 77
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- 230000005284 excitation Effects 0.000 description 10
- 238000006243 chemical reaction Methods 0.000 description 8
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- 230000010363 phase shift Effects 0.000 description 7
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- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 3
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
- G01P3/42—Devices characterised by the use of electric or magnetic means
- G01P3/44—Devices characterised by the use of electric or magnetic means for measuring angular speed
- G01P3/48—Devices characterised by the use of electric or magnetic means for measuring angular speed by measuring frequency of generated current or voltage
- G01P3/481—Devices characterised by the use of electric or magnetic means for measuring angular speed by measuring frequency of generated current or voltage of pulse signals
- G01P3/483—Devices characterised by the use of electric or magnetic means for measuring angular speed by measuring frequency of generated current or voltage of pulse signals delivered by variable capacitance detectors
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
Abstract
【解決手段】 4個の質量部3,7,11,12を支持梁13によって連結し、これらの質量部にはそれぞれ個別振動発生部22,23,24,25を設ける。そして、各個別振動発生部22,23,24,25は、互いに隣合う質量部3,12と、質量部7,11とを逆位相で振動させることにより、正規の振動モードを励起する。また、角速度検出部30,31は、中央質量部3,7の内側枠体5,9がX軸方向に振動しつつ、Y軸方向に変位するときの変位量をZ軸周りの角速度Ωとして検出する。これにより、質量部3,7,11,12を正規の振動モードで強制的に振動させることができ、検出精度や信頼性を高めることができる。
【選択図】 図1
Description
2 基板
3,7,11,12 質量部
4,8 外側枠体
5,9 内側枠体
6,10 内側支持梁
13 外側支持梁(支持梁)
13A 節部
14 連結部
15 固定部
16,17,42,43 固定側駆動電極
18,19,20,21 可動側駆動電極
22,23,24,25 個別振動発生部(振動発生部)
26,27 固定側検出電極
28,29 可動側検出電極
30,31 角速度検出部
32,46,47 固定側モニタ電極
33,48,49 可動側モニタ電極
34,50,51 振動モニタ部
44,45 振動発生部
52 制御回路
53 C−V変換回路
54 差動増幅器
55 位相シフト回路
56 自動利得制御回路
57 増幅器
58,59 アンプ
Claims (6)
- 基板と、該基板に一定の方向に並んで配置された複数個の質量部と、前記各質量部を当該質量部が並んだ方向と直交する振動方向に振動可能に連結する支持梁と、該支持梁を前記基板に固定する固定部と、互いに隣合う質量部を逆位相で前記振動方向に振動させる振動発生部と、前記各質量部が振動した状態で一部の質量部が前記振動方向と直交する検出方向に変位するときの変位量を角速度として検出する角速度検出部とを備えてなる角速度検出装置において、
前記振動発生部は互いに隣合う質量部に逆方向の駆動力を付加する構成としたことを特徴とする角速度検出装置。 - 前記振動発生部は前記各質量部にそれぞれ対応する個別振動部として個別に設け、互いに隣合う個別振動部は逆方向の駆動力を発生する構成としてなる請求項1に記載の角速度検出装置。
- 前記振動発生部によって個々の質量部に付加する駆動力の大きさと当該質量部の質量と駆動振幅とを乗算した乗算値との比率を、前記各質量部間で互いにほぼ等しく設定してなる請求項1または2に記載の角速度検出装置。
- 基板と、該基板に一定の方向に並んで配置された複数個の質量部と、前記各質量部を当該質量部が並んだ方向と直交する振動方向に振動可能に連結する支持梁と、該支持梁を前記基板に固定する固定部と、互いに隣合う質量部を逆位相で前記振動方向に振動させる振動発生部と、前記各質量部が振動した状態で一部の質量部が前記振動方向と直交する検出方向に変位するときの変位量を角速度として検出する角速度検出部とを備えてなる角速度検出装置において、
前記振動発生部は前記各質量部のうち少なくとも一部の質量部に設け、前記一部の質量部と隣合う他の質量部には、当該質量部の振動状態をモニタし前記振動発生部を制御するためのモニタ信号を出力する振動モニタ部を設ける構成としたことを特徴とする角速度検出装置。 - 前記振動モニタ部は、前記一部の質量部と他の質量部とが互いに逆位相で振動するときに正規のモニタ信号を出力する構成とし、前記振動発生部と振動モニタ部との間には、前記振動モニタ部から正規のモニタ信号が入力されるときに前記振動発生部によって前記各質量部を共振状態に保持する制御回路を設けてなる請求項4に記載の角速度検出装置。
- 前記各質量部は直線状に並んで配置された4個の質量部である請求項1,2,3,4または5に記載の角速度検出装置。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003338507A JP4433747B2 (ja) | 2003-09-29 | 2003-09-29 | 角速度検出装置 |
US10/924,439 US7093487B2 (en) | 2003-09-29 | 2004-08-24 | Angular-rate detecting apparatus |
AT04020140T ATE545841T1 (de) | 2003-09-29 | 2004-08-25 | Drehgeschwindigkeitsdetektionsgerät |
EP04020140A EP1519149B1 (en) | 2003-09-29 | 2004-08-25 | Angular-rate detecting apparatus |
KR1020040073652A KR100650363B1 (ko) | 2003-09-29 | 2004-09-15 | 각속도 검출장치 |
CNB2004100826037A CN100429480C (zh) | 2003-09-29 | 2004-09-21 | 角速率检测设备 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003338507A JP4433747B2 (ja) | 2003-09-29 | 2003-09-29 | 角速度検出装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005106550A true JP2005106550A (ja) | 2005-04-21 |
JP4433747B2 JP4433747B2 (ja) | 2010-03-17 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003338507A Expired - Lifetime JP4433747B2 (ja) | 2003-09-29 | 2003-09-29 | 角速度検出装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US7093487B2 (ja) |
EP (1) | EP1519149B1 (ja) |
JP (1) | JP4433747B2 (ja) |
KR (1) | KR100650363B1 (ja) |
CN (1) | CN100429480C (ja) |
AT (1) | ATE545841T1 (ja) |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2006126253A1 (ja) * | 2005-05-24 | 2006-11-30 | Japan Aerospace Exploration Agency | ジャイロスコープ |
WO2009150898A1 (ja) * | 2008-06-10 | 2009-12-17 | 株式会社村田製作所 | 外力検知装置および配線破断検出方法 |
JP2010032388A (ja) * | 2008-07-29 | 2010-02-12 | Fujitsu Ltd | 角速度センサおよび電子装置 |
JP2010505102A (ja) * | 2006-09-29 | 2010-02-18 | コンチネンタル オートモーティヴ ゲゼルシャフト ミット ベシュレンクテル ハフツング | 振動センサを用いてヨーレートを測定するための装置 |
JP2012519295A (ja) * | 2009-03-02 | 2012-08-23 | ヴィーティーアイ テクノロジーズ オーワイ | 角速度の振動微小機械センサ |
WO2013094208A1 (ja) * | 2011-12-23 | 2013-06-27 | 株式会社デンソー | 振動型角速度センサ |
KR101348841B1 (ko) * | 2007-07-13 | 2014-01-07 | 현대모비스 주식회사 | 역상 진동 이중 질량 소자 타입 마이크로 자이로스코프 및그 제어 방법 |
WO2015146566A1 (ja) * | 2014-03-25 | 2015-10-01 | 株式会社村田製作所 | 振動子駆動回路 |
WO2018235719A1 (ja) * | 2017-06-22 | 2018-12-27 | 株式会社デンソー | 振動型角速度センサ |
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Cited By (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2006126253A1 (ja) * | 2005-05-24 | 2006-11-30 | Japan Aerospace Exploration Agency | ジャイロスコープ |
JPWO2006126253A1 (ja) * | 2005-05-24 | 2008-12-25 | 独立行政法人 宇宙航空研究開発機構 | ジャイロスコープ |
US8288188B2 (en) | 2005-05-24 | 2012-10-16 | Japan Aerospace Exploration Agency | Gyroscope |
US7832271B2 (en) | 2005-05-24 | 2010-11-16 | Japan Aerospace Exploration Agency | Gyroscope |
JP4761076B2 (ja) * | 2005-05-24 | 2011-08-31 | 独立行政法人 宇宙航空研究開発機構 | ジャイロスコープ |
JP2010505102A (ja) * | 2006-09-29 | 2010-02-18 | コンチネンタル オートモーティヴ ゲゼルシャフト ミット ベシュレンクテル ハフツング | 振動センサを用いてヨーレートを測定するための装置 |
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US7093487B2 (en) | 2006-08-22 |
KR20050031376A (ko) | 2005-04-06 |
CN100429480C (zh) | 2008-10-29 |
CN1603745A (zh) | 2005-04-06 |
EP1519149A1 (en) | 2005-03-30 |
US20050066726A1 (en) | 2005-03-31 |
KR100650363B1 (ko) | 2006-11-29 |
EP1519149B1 (en) | 2012-02-15 |
JP4433747B2 (ja) | 2010-03-17 |
ATE545841T1 (de) | 2012-03-15 |
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