JP2005060754A - 銅、銅合金の表面処理剤 - Google Patents
銅、銅合金の表面処理剤 Download PDFInfo
- Publication number
- JP2005060754A JP2005060754A JP2003290346A JP2003290346A JP2005060754A JP 2005060754 A JP2005060754 A JP 2005060754A JP 2003290346 A JP2003290346 A JP 2003290346A JP 2003290346 A JP2003290346 A JP 2003290346A JP 2005060754 A JP2005060754 A JP 2005060754A
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- JP
- Japan
- Prior art keywords
- group
- copper
- surface treatment
- treatment agent
- compound
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 title claims abstract description 35
- 229910052802 copper Inorganic materials 0.000 title claims abstract description 33
- 239000010949 copper Substances 0.000 title claims abstract description 33
- 239000012756 surface treatment agent Substances 0.000 title claims abstract description 23
- 229910000881 Cu alloy Inorganic materials 0.000 title claims abstract description 16
- -1 tetrazole compound Chemical class 0.000 claims abstract description 16
- 239000000126 substance Substances 0.000 claims abstract description 10
- 150000002366 halogen compounds Chemical class 0.000 claims abstract description 9
- 125000003277 amino group Chemical group 0.000 claims abstract description 6
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 claims abstract description 6
- 125000005843 halogen group Chemical group 0.000 claims abstract description 6
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims abstract description 6
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims abstract description 6
- 125000003396 thiol group Chemical group [H]S* 0.000 claims abstract description 6
- 125000003342 alkenyl group Chemical group 0.000 claims abstract description 3
- 125000000217 alkyl group Chemical group 0.000 claims abstract description 3
- 125000000304 alkynyl group Chemical group 0.000 claims abstract description 3
- 125000003710 aryl alkyl group Chemical group 0.000 claims abstract description 3
- 125000003118 aryl group Chemical group 0.000 claims abstract description 3
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims description 12
- 150000002736 metal compounds Chemical class 0.000 claims description 11
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 8
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 8
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 8
- 150000001875 compounds Chemical class 0.000 claims description 6
- 229910052763 palladium Inorganic materials 0.000 claims description 6
- 229910052709 silver Inorganic materials 0.000 claims description 6
- 239000004332 silver Substances 0.000 claims description 6
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 5
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 5
- 229910052737 gold Inorganic materials 0.000 claims description 5
- 239000010931 gold Substances 0.000 claims description 5
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 claims description 4
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims description 4
- 229910017052 cobalt Inorganic materials 0.000 claims description 4
- 239000010941 cobalt Substances 0.000 claims description 4
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims description 4
- 150000002497 iodine compounds Chemical class 0.000 claims description 4
- 229910052742 iron Inorganic materials 0.000 claims description 4
- 229910052759 nickel Inorganic materials 0.000 claims description 4
- 229910052697 platinum Inorganic materials 0.000 claims description 4
- 229910052703 rhodium Inorganic materials 0.000 claims description 4
- 239000010948 rhodium Substances 0.000 claims description 4
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 claims description 4
- 229910052707 ruthenium Inorganic materials 0.000 claims description 4
- 229910052718 tin Inorganic materials 0.000 claims description 4
- 229910052725 zinc Inorganic materials 0.000 claims description 4
- 239000011701 zinc Substances 0.000 claims description 4
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 3
- GDTBXPJZTBHREO-UHFFFAOYSA-N bromine Substances BrBr GDTBXPJZTBHREO-UHFFFAOYSA-N 0.000 claims description 3
- 229910052794 bromium Inorganic materials 0.000 claims description 3
- WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 claims description 3
- 239000011135 tin Substances 0.000 claims description 3
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 claims description 2
- 125000004432 carbon atom Chemical group C* 0.000 claims description 2
- 229910000679 solder Inorganic materials 0.000 abstract description 16
- 239000011347 resin Substances 0.000 abstract description 14
- 229920005989 resin Polymers 0.000 abstract description 14
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract 1
- WURBFLDFSFBTLW-UHFFFAOYSA-N benzil Chemical group C=1C=CC=CC=1C(=O)C(=O)C1=CC=CC=C1 WURBFLDFSFBTLW-UHFFFAOYSA-N 0.000 abstract 1
- 229910052799 carbon Inorganic materials 0.000 abstract 1
- 239000003795 chemical substances by application Substances 0.000 description 14
- 239000010408 film Substances 0.000 description 9
- 238000002845 discoloration Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 6
- 239000000243 solution Substances 0.000 description 6
- 239000002253 acid Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 238000004381 surface treatment Methods 0.000 description 3
- FLFWJIBUZQARMD-UHFFFAOYSA-N 2-mercapto-1,3-benzoxazole Chemical class C1=CC=C2OC(S)=NC2=C1 FLFWJIBUZQARMD-UHFFFAOYSA-N 0.000 description 2
- BWQPGBPTSZZQQV-UHFFFAOYSA-N 5-naphthalen-1-yl-2h-tetrazole Chemical compound C=1C=CC2=CC=CC=C2C=1C=1N=NNN=1 BWQPGBPTSZZQQV-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical compound [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 description 2
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 2
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 2
- KAESVJOAVNADME-UHFFFAOYSA-N Pyrrole Chemical compound C=1C=CNC=1 KAESVJOAVNADME-UHFFFAOYSA-N 0.000 description 2
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- 239000011889 copper foil Substances 0.000 description 2
- 239000013039 cover film Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- AMWRITDGCCNYAT-UHFFFAOYSA-L hydroxy(oxo)manganese;manganese Chemical compound [Mn].O[Mn]=O.O[Mn]=O AMWRITDGCCNYAT-UHFFFAOYSA-L 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- SONJTKJMTWTJCT-UHFFFAOYSA-K rhodium(iii) chloride Chemical compound [Cl-].[Cl-].[Cl-].[Rh+3] SONJTKJMTWTJCT-UHFFFAOYSA-K 0.000 description 2
- YBCAZPLXEGKKFM-UHFFFAOYSA-K ruthenium(iii) chloride Chemical compound [Cl-].[Cl-].[Cl-].[Ru+3] YBCAZPLXEGKKFM-UHFFFAOYSA-K 0.000 description 2
- NDVLTYZPCACLMA-UHFFFAOYSA-N silver oxide Chemical compound [O-2].[Ag+].[Ag+] NDVLTYZPCACLMA-UHFFFAOYSA-N 0.000 description 2
- SQGYOTSLMSWVJD-UHFFFAOYSA-N silver(1+) nitrate Chemical compound [Ag+].[O-]N(=O)=O SQGYOTSLMSWVJD-UHFFFAOYSA-N 0.000 description 2
- JIAARYAFYJHUJI-UHFFFAOYSA-L zinc dichloride Chemical compound [Cl-].[Cl-].[Zn+2] JIAARYAFYJHUJI-UHFFFAOYSA-L 0.000 description 2
- 0 *c1nnn[n]1* Chemical compound *c1nnn[n]1* 0.000 description 1
- YXIWHUQXZSMYRE-UHFFFAOYSA-N 1,3-benzothiazole-2-thiol Chemical class C1=CC=C2SC(S)=NC2=C1 YXIWHUQXZSMYRE-UHFFFAOYSA-N 0.000 description 1
- HWHNFJYQDMSYAF-UHFFFAOYSA-N 1,5-dimethyltetrazole Chemical compound CC1=NN=NN1C HWHNFJYQDMSYAF-UHFFFAOYSA-N 0.000 description 1
- FCERNNLMTCOKHX-UHFFFAOYSA-N 1,5-diphenyltetrazole Chemical compound C1=CC=CC=C1C1=NN=NN1C1=CC=CC=C1 FCERNNLMTCOKHX-UHFFFAOYSA-N 0.000 description 1
- GGZHVNZHFYCSEV-UHFFFAOYSA-N 1-Phenyl-5-mercaptotetrazole Chemical compound SC1=NN=NN1C1=CC=CC=C1 GGZHVNZHFYCSEV-UHFFFAOYSA-N 0.000 description 1
- ARIIHZKOHBHOGP-UHFFFAOYSA-N 1-butyl-2h-tetrazole-5-thione Chemical compound CCCCN1N=NN=C1S ARIIHZKOHBHOGP-UHFFFAOYSA-N 0.000 description 1
- VSTPPIHOPZBGOE-UHFFFAOYSA-N 1-butyl-5-phenyltetrazole Chemical compound CCCCN1N=NN=C1C1=CC=CC=C1 VSTPPIHOPZBGOE-UHFFFAOYSA-N 0.000 description 1
- DAFSTKDZKAGKGV-UHFFFAOYSA-N 1-butyltetrazol-5-amine Chemical compound CCCCN1N=NN=C1N DAFSTKDZKAGKGV-UHFFFAOYSA-N 0.000 description 1
- KSUSTLKKFLDJNC-UHFFFAOYSA-N 1-butyltetrazole Chemical compound CCCCN1C=NN=N1 KSUSTLKKFLDJNC-UHFFFAOYSA-N 0.000 description 1
- UZOALRWXDKRYDU-UHFFFAOYSA-N 1-dodecyl-2h-tetrazole-5-thione Chemical compound CCCCCCCCCCCCN1NN=NC1=S UZOALRWXDKRYDU-UHFFFAOYSA-N 0.000 description 1
- NHUAPYFDBAUNLO-UHFFFAOYSA-N 1-dodecyl-5-methyltetrazole Chemical compound C(CCCCCCCCCCC)N1N=NN=C1C NHUAPYFDBAUNLO-UHFFFAOYSA-N 0.000 description 1
- IKUTXXBUWALTGR-UHFFFAOYSA-N 1-dodecyl-5-phenyltetrazole Chemical compound C(CCCCCCCCCCC)N1N=NN=C1C1=CC=CC=C1 IKUTXXBUWALTGR-UHFFFAOYSA-N 0.000 description 1
- PLCKCTIXVOHDAX-UHFFFAOYSA-N 1-dodecyltetrazol-5-amine Chemical compound CCCCCCCCCCCCN1N=NN=C1N PLCKCTIXVOHDAX-UHFFFAOYSA-N 0.000 description 1
- IBJYQXMLZXKDDB-UHFFFAOYSA-N 1-dodecyltetrazole Chemical compound CCCCCCCCCCCCN1C=NN=N1 IBJYQXMLZXKDDB-UHFFFAOYSA-N 0.000 description 1
- JLQLTELAOKOFBV-UHFFFAOYSA-N 1-ethyl-2h-tetrazole-5-thione Chemical compound CCN1N=NN=C1S JLQLTELAOKOFBV-UHFFFAOYSA-N 0.000 description 1
- HPZIIBYLAYWBSN-UHFFFAOYSA-N 1-ethyl-5-methyltetrazole Chemical compound CCN1N=NN=C1C HPZIIBYLAYWBSN-UHFFFAOYSA-N 0.000 description 1
- XBDIFKZMUYFXBN-UHFFFAOYSA-N 1-ethyl-5-phenyltetrazole Chemical compound CCN1N=NN=C1C1=CC=CC=C1 XBDIFKZMUYFXBN-UHFFFAOYSA-N 0.000 description 1
- WGPNLKPTYJCEKI-UHFFFAOYSA-N 1-ethyltetrazol-5-amine Chemical compound CCN1N=NN=C1N WGPNLKPTYJCEKI-UHFFFAOYSA-N 0.000 description 1
- PZDFYVBXRWSAON-UHFFFAOYSA-N 1-ethyltetrazole Chemical compound CCN1C=NN=N1 PZDFYVBXRWSAON-UHFFFAOYSA-N 0.000 description 1
- IKDSKNZIRJDHFL-UHFFFAOYSA-N 1-hexyl-2h-tetrazole-5-thione Chemical compound CCCCCCN1N=NN=C1S IKDSKNZIRJDHFL-UHFFFAOYSA-N 0.000 description 1
- LCVGZGGBZDEVBB-UHFFFAOYSA-N 1-hexyl-5-methyltetrazole Chemical compound CCCCCCN1N=NN=C1C LCVGZGGBZDEVBB-UHFFFAOYSA-N 0.000 description 1
- HEZFPTKCTBYTCK-UHFFFAOYSA-N 1-hexyltetrazol-5-amine Chemical compound CCCCCCN1N=NN=C1N HEZFPTKCTBYTCK-UHFFFAOYSA-N 0.000 description 1
- QGPCVBGTPDZKDZ-UHFFFAOYSA-N 1-hexyltetrazole Chemical compound CCCCCCN1C=NN=N1 QGPCVBGTPDZKDZ-UHFFFAOYSA-N 0.000 description 1
- XOHZHMUQBFJTNH-UHFFFAOYSA-N 1-methyl-2h-tetrazole-5-thione Chemical compound CN1N=NN=C1S XOHZHMUQBFJTNH-UHFFFAOYSA-N 0.000 description 1
- UIEGWLAONRMBOG-UHFFFAOYSA-N 1-methyl-5-phenyltetrazole Chemical compound CN1N=NN=C1C1=CC=CC=C1 UIEGWLAONRMBOG-UHFFFAOYSA-N 0.000 description 1
- GTKOKCQMHAGFSM-UHFFFAOYSA-N 1-methyltetrazol-5-amine Chemical compound CN1N=NN=C1N GTKOKCQMHAGFSM-UHFFFAOYSA-N 0.000 description 1
- OMAFFHIGWTVZOH-UHFFFAOYSA-N 1-methyltetrazole Chemical compound CN1C=NN=N1 OMAFFHIGWTVZOH-UHFFFAOYSA-N 0.000 description 1
- QUFRGNOIJAGRFY-UHFFFAOYSA-N 1-naphthalen-1-yl-2h-tetrazole-5-thione Chemical compound S=C1N=NNN1C1=CC=CC2=CC=CC=C12 QUFRGNOIJAGRFY-UHFFFAOYSA-N 0.000 description 1
- PDLHVAUTQBJDCR-UHFFFAOYSA-N 1-naphthalen-1-yl-5-phenyltetrazole Chemical compound C1=CC=CC=C1C1=NN=NN1C1=CC=CC2=CC=CC=C12 PDLHVAUTQBJDCR-UHFFFAOYSA-N 0.000 description 1
- CAMZCCDMGNIZTA-UHFFFAOYSA-N 1-naphthalen-1-yltetrazol-5-amine Chemical compound NC1=NN=NN1C1=CC=CC2=CC=CC=C12 CAMZCCDMGNIZTA-UHFFFAOYSA-N 0.000 description 1
- VSWDBRHHLLNOFC-UHFFFAOYSA-N 1-pentyl-2h-tetrazole-5-thione Chemical compound CCCCCN1NN=NC1=S VSWDBRHHLLNOFC-UHFFFAOYSA-N 0.000 description 1
- ZASACYUOFWMFOK-UHFFFAOYSA-N 1-pentyltetrazol-5-amine Chemical compound CCCCCN1N=NN=C1N ZASACYUOFWMFOK-UHFFFAOYSA-N 0.000 description 1
- NMEFJGAOVRFDEQ-UHFFFAOYSA-N 1-pentyltetrazole Chemical compound CCCCCN1C=NN=N1 NMEFJGAOVRFDEQ-UHFFFAOYSA-N 0.000 description 1
- ULIDRMKBVYYVIQ-UHFFFAOYSA-N 1-phenyltetrazol-5-amine Chemical compound NC1=NN=NN1C1=CC=CC=C1 ULIDRMKBVYYVIQ-UHFFFAOYSA-N 0.000 description 1
- IYPXPGSELZFFMI-UHFFFAOYSA-N 1-phenyltetrazole Chemical compound C1=NN=NN1C1=CC=CC=C1 IYPXPGSELZFFMI-UHFFFAOYSA-N 0.000 description 1
- BVVDPRQMYYDZHL-UHFFFAOYSA-N 1-propyl-2h-tetrazole-5-thione Chemical compound CCCN1N=NN=C1S BVVDPRQMYYDZHL-UHFFFAOYSA-N 0.000 description 1
- RUCUYFVAKOESSN-UHFFFAOYSA-N 1-propyltetrazol-5-amine Chemical compound CCCN1N=NN=C1N RUCUYFVAKOESSN-UHFFFAOYSA-N 0.000 description 1
- AHYVTIGFFGLKHA-UHFFFAOYSA-N 1-propyltetrazole Chemical compound CCCN1C=NN=N1 AHYVTIGFFGLKHA-UHFFFAOYSA-N 0.000 description 1
- JAAIPIWKKXCNOC-UHFFFAOYSA-N 1h-tetrazol-1-ium-5-thiolate Chemical compound SC1=NN=NN1 JAAIPIWKKXCNOC-UHFFFAOYSA-N 0.000 description 1
- JKFYKCYQEWQPTM-UHFFFAOYSA-N 2-azaniumyl-2-(4-fluorophenyl)acetate Chemical compound OC(=O)C(N)C1=CC=C(F)C=C1 JKFYKCYQEWQPTM-UHFFFAOYSA-N 0.000 description 1
- ULRPISSMEBPJLN-UHFFFAOYSA-N 2h-tetrazol-5-amine Chemical compound NC1=NN=NN1 ULRPISSMEBPJLN-UHFFFAOYSA-N 0.000 description 1
- CPHGOBGXZQKCKI-UHFFFAOYSA-N 4,5-diphenyl-1h-imidazole Chemical compound N1C=NC(C=2C=CC=CC=2)=C1C1=CC=CC=C1 CPHGOBGXZQKCKI-UHFFFAOYSA-N 0.000 description 1
- PLHJRIBZRHLPLB-UHFFFAOYSA-N 5-butyl-2h-tetrazole Chemical compound CCCCC=1N=NNN=1 PLHJRIBZRHLPLB-UHFFFAOYSA-N 0.000 description 1
- KYRMPMCAOPMOIR-UHFFFAOYSA-N 5-ethyl-2h-tetrazole Chemical compound CCC=1N=NNN=1 KYRMPMCAOPMOIR-UHFFFAOYSA-N 0.000 description 1
- FJRPBODWQHUFGR-UHFFFAOYSA-N 5-hexyl-2h-tetrazole Chemical compound CCCCCCC1=NN=NN1 FJRPBODWQHUFGR-UHFFFAOYSA-N 0.000 description 1
- PTTMMONNYVLHRZ-UHFFFAOYSA-N 5-methyl-1-naphthalen-1-yltetrazole Chemical compound CC1=NN=NN1C1=CC=CC2=CC=CC=C12 PTTMMONNYVLHRZ-UHFFFAOYSA-N 0.000 description 1
- CWPDBQHIZFPDHI-UHFFFAOYSA-N 5-methyl-1-pentyltetrazole Chemical compound CCCCCN1N=NN=C1C CWPDBQHIZFPDHI-UHFFFAOYSA-N 0.000 description 1
- QYSASSWEUXOZEQ-UHFFFAOYSA-N 5-methyl-1-phenyltetrazole Chemical compound CC1=NN=NN1C1=CC=CC=C1 QYSASSWEUXOZEQ-UHFFFAOYSA-N 0.000 description 1
- LEMGJFREQSYDOQ-UHFFFAOYSA-N 5-methyl-1-propyltetrazole Chemical compound CCCN1N=NN=C1C LEMGJFREQSYDOQ-UHFFFAOYSA-N 0.000 description 1
- LRUDIIUSNGCQKF-UHFFFAOYSA-N 5-methyl-1H-benzotriazole Chemical compound C1=C(C)C=CC2=NNN=C21 LRUDIIUSNGCQKF-UHFFFAOYSA-N 0.000 description 1
- XZGLNCKSNVGDNX-UHFFFAOYSA-N 5-methyl-2h-tetrazole Chemical compound CC=1N=NNN=1 XZGLNCKSNVGDNX-UHFFFAOYSA-N 0.000 description 1
- OKIYPFZZDQLNMP-UHFFFAOYSA-N 5-pentyl-2h-tetrazole Chemical compound CCCCCC=1N=NNN=1 OKIYPFZZDQLNMP-UHFFFAOYSA-N 0.000 description 1
- PNXASXDSPGXYMR-UHFFFAOYSA-N 5-phenyl-1-propyltetrazole Chemical compound CCCN1N=NN=C1C1=CC=CC=C1 PNXASXDSPGXYMR-UHFFFAOYSA-N 0.000 description 1
- MARUHZGHZWCEQU-UHFFFAOYSA-N 5-phenyl-2h-tetrazole Chemical compound C1=CC=CC=C1C1=NNN=N1 MARUHZGHZWCEQU-UHFFFAOYSA-N 0.000 description 1
- JAHCQVVOKAFXQU-UHFFFAOYSA-N 5-propyl-2h-tetrazole Chemical compound CCCC=1N=NNN=1 JAHCQVVOKAFXQU-UHFFFAOYSA-N 0.000 description 1
- JPIBPRUFSDLADV-UHFFFAOYSA-N C(CCCCC)N1N=NN=C1C1=CC=CC=C1.C(CCCC)N1N=NN=C1C1=CC=CC=C1 Chemical compound C(CCCCC)N1N=NN=C1C1=CC=CC=C1.C(CCCC)N1N=NN=C1C1=CC=CC=C1 JPIBPRUFSDLADV-UHFFFAOYSA-N 0.000 description 1
- DRJKHHXLHXHVLA-UHFFFAOYSA-N C1(=CC=CC=C1)C1=NN=NN1.C(CCCCCCCCCCC)C1=NN=NN1 Chemical compound C1(=CC=CC=C1)C1=NN=NN1.C(CCCCCCCCCCC)C1=NN=NN1 DRJKHHXLHXHVLA-UHFFFAOYSA-N 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- 229910021503 Cobalt(II) hydroxide Inorganic materials 0.000 description 1
- JJLJMEJHUUYSSY-UHFFFAOYSA-L Copper hydroxide Chemical compound [OH-].[OH-].[Cu+2] JJLJMEJHUUYSSY-UHFFFAOYSA-L 0.000 description 1
- 239000005750 Copper hydroxide Substances 0.000 description 1
- QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical compound [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 description 1
- 239000005751 Copper oxide Substances 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- 229910021380 Manganese Chloride Inorganic materials 0.000 description 1
- GLFNIEUTAYBVOC-UHFFFAOYSA-L Manganese chloride Chemical compound Cl[Mn]Cl GLFNIEUTAYBVOC-UHFFFAOYSA-L 0.000 description 1
- 229910021586 Nickel(II) chloride Inorganic materials 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 229910021603 Ruthenium iodide Inorganic materials 0.000 description 1
- JBEXFVRUULLZOE-UHFFFAOYSA-E S(=O)([O-])[O-].[Au+3].[Au](I)(I)I.S(=O)([O-])[O-].S(=O)([O-])[O-].[Au+3] Chemical compound S(=O)([O-])[O-].[Au+3].[Au](I)(I)I.S(=O)([O-])[O-].S(=O)([O-])[O-].[Au+3] JBEXFVRUULLZOE-UHFFFAOYSA-E 0.000 description 1
- 229910021612 Silver iodide Inorganic materials 0.000 description 1
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- 239000005083 Zinc sulfide Substances 0.000 description 1
- RAOSIAYCXKBGFE-UHFFFAOYSA-K [Cu+3].[O-]P([O-])([O-])=O Chemical compound [Cu+3].[O-]P([O-])([O-])=O RAOSIAYCXKBGFE-UHFFFAOYSA-K 0.000 description 1
- MQRWBMAEBQOWAF-UHFFFAOYSA-N acetic acid;nickel Chemical compound [Ni].CC(O)=O.CC(O)=O MQRWBMAEBQOWAF-UHFFFAOYSA-N 0.000 description 1
- ZOIORXHNWRGPMV-UHFFFAOYSA-N acetic acid;zinc Chemical compound [Zn].CC(O)=O.CC(O)=O ZOIORXHNWRGPMV-UHFFFAOYSA-N 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 239000004480 active ingredient Substances 0.000 description 1
- 150000001339 alkali metal compounds Chemical class 0.000 description 1
- 125000003785 benzimidazolyl group Chemical class N1=C(NC2=C1C=CC=C2)* 0.000 description 1
- ODWXUNBKCRECNW-UHFFFAOYSA-M bromocopper(1+) Chemical compound Br[Cu+] ODWXUNBKCRECNW-UHFFFAOYSA-M 0.000 description 1
- KXZJHVJKXJLBKO-UHFFFAOYSA-N chembl1408157 Chemical compound N=1C2=CC=CC=C2C(C(=O)O)=CC=1C1=CC=C(O)C=C1 KXZJHVJKXJLBKO-UHFFFAOYSA-N 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 229940011182 cobalt acetate Drugs 0.000 description 1
- GVPFVAHMJGGAJG-UHFFFAOYSA-L cobalt dichloride Chemical compound [Cl-].[Cl-].[Co+2] GVPFVAHMJGGAJG-UHFFFAOYSA-L 0.000 description 1
- 229910000428 cobalt oxide Inorganic materials 0.000 description 1
- AVWLPUQJODERGA-UHFFFAOYSA-L cobalt(2+);diiodide Chemical compound [Co+2].[I-].[I-] AVWLPUQJODERGA-UHFFFAOYSA-L 0.000 description 1
- QAHREYKOYSIQPH-UHFFFAOYSA-L cobalt(II) acetate Chemical compound [Co+2].CC([O-])=O.CC([O-])=O QAHREYKOYSIQPH-UHFFFAOYSA-L 0.000 description 1
- BZRRQSJJPUGBAA-UHFFFAOYSA-L cobalt(ii) bromide Chemical compound Br[Co]Br BZRRQSJJPUGBAA-UHFFFAOYSA-L 0.000 description 1
- PFQLIVQUKOIJJD-UHFFFAOYSA-L cobalt(ii) formate Chemical compound [Co+2].[O-]C=O.[O-]C=O PFQLIVQUKOIJJD-UHFFFAOYSA-L 0.000 description 1
- ASKVAEGIVYSGNY-UHFFFAOYSA-L cobalt(ii) hydroxide Chemical compound [OH-].[OH-].[Co+2] ASKVAEGIVYSGNY-UHFFFAOYSA-L 0.000 description 1
- IVMYJDGYRUAWML-UHFFFAOYSA-N cobalt(ii) oxide Chemical compound [Co]=O IVMYJDGYRUAWML-UHFFFAOYSA-N 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 229940116318 copper carbonate Drugs 0.000 description 1
- 229910001956 copper hydroxide Inorganic materials 0.000 description 1
- 229910000431 copper oxide Inorganic materials 0.000 description 1
- 229910000365 copper sulfate Inorganic materials 0.000 description 1
- ORTQZVOHEJQUHG-UHFFFAOYSA-L copper(II) chloride Chemical compound Cl[Cu]Cl ORTQZVOHEJQUHG-UHFFFAOYSA-L 0.000 description 1
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 description 1
- OPQARKPSCNTWTJ-UHFFFAOYSA-L copper(ii) acetate Chemical compound [Cu+2].CC([O-])=O.CC([O-])=O OPQARKPSCNTWTJ-UHFFFAOYSA-L 0.000 description 1
- GEZOTWYUIKXWOA-UHFFFAOYSA-L copper;carbonate Chemical compound [Cu+2].[O-]C([O-])=O GEZOTWYUIKXWOA-UHFFFAOYSA-L 0.000 description 1
- HFDWIMBEIXDNQS-UHFFFAOYSA-L copper;diformate Chemical compound [Cu+2].[O-]C=O.[O-]C=O HFDWIMBEIXDNQS-UHFFFAOYSA-L 0.000 description 1
- GBRBMTNGQBKBQE-UHFFFAOYSA-L copper;diiodide Chemical compound I[Cu]I GBRBMTNGQBKBQE-UHFFFAOYSA-L 0.000 description 1
- QYCVHILLJSYYBD-UHFFFAOYSA-L copper;oxalate Chemical compound [Cu+2].[O-]C(=O)C([O-])=O QYCVHILLJSYYBD-UHFFFAOYSA-L 0.000 description 1
- ADPOBOOHCUVXGO-UHFFFAOYSA-H dioxido-oxo-sulfanylidene-$l^{6}-sulfane;gold(3+) Chemical compound [Au+3].[Au+3].[O-]S([O-])(=O)=S.[O-]S([O-])(=O)=S.[O-]S([O-])(=O)=S ADPOBOOHCUVXGO-UHFFFAOYSA-H 0.000 description 1
- 239000012776 electronic material Substances 0.000 description 1
- 230000005496 eutectics Effects 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- FDWREHZXQUYJFJ-UHFFFAOYSA-M gold monochloride Chemical compound [Cl-].[Au+] FDWREHZXQUYJFJ-UHFFFAOYSA-M 0.000 description 1
- IZLAVFWQHMDDGK-UHFFFAOYSA-N gold(1+);cyanide Chemical compound [Au+].N#[C-] IZLAVFWQHMDDGK-UHFFFAOYSA-N 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 125000000623 heterocyclic group Chemical group 0.000 description 1
- WJRBRSLFGCUECM-UHFFFAOYSA-N hydantoin Chemical compound O=C1CNC(=O)N1 WJRBRSLFGCUECM-UHFFFAOYSA-N 0.000 description 1
- 229940091173 hydantoin Drugs 0.000 description 1
- XMBWDFGMSWQBCA-UHFFFAOYSA-N hydrogen iodide Chemical compound I XMBWDFGMSWQBCA-UHFFFAOYSA-N 0.000 description 1
- 150000002460 imidazoles Chemical class 0.000 description 1
- 239000003112 inhibitor Substances 0.000 description 1
- 229910052500 inorganic mineral Inorganic materials 0.000 description 1
- FBAFATDZDUQKNH-UHFFFAOYSA-M iron chloride Chemical compound [Cl-].[Fe] FBAFATDZDUQKNH-UHFFFAOYSA-M 0.000 description 1
- 235000014413 iron hydroxide Nutrition 0.000 description 1
- PQQAOTNUALRVTE-UHFFFAOYSA-L iron(2+);diformate Chemical compound [Fe+2].[O-]C=O.[O-]C=O PQQAOTNUALRVTE-UHFFFAOYSA-L 0.000 description 1
- PVFSDGKDKFSOTB-UHFFFAOYSA-K iron(3+);triacetate Chemical compound [Fe+3].CC([O-])=O.CC([O-])=O.CC([O-])=O PVFSDGKDKFSOTB-UHFFFAOYSA-K 0.000 description 1
- GYCHYNMREWYSKH-UHFFFAOYSA-L iron(ii) bromide Chemical compound [Fe+2].[Br-].[Br-] GYCHYNMREWYSKH-UHFFFAOYSA-L 0.000 description 1
- NCNCGGDMXMBVIA-UHFFFAOYSA-L iron(ii) hydroxide Chemical compound [OH-].[OH-].[Fe+2] NCNCGGDMXMBVIA-UHFFFAOYSA-L 0.000 description 1
- BQZGVMWPHXIKEQ-UHFFFAOYSA-L iron(ii) iodide Chemical compound [Fe+2].[I-].[I-] BQZGVMWPHXIKEQ-UHFFFAOYSA-L 0.000 description 1
- LQBJWKCYZGMFEV-UHFFFAOYSA-N lead tin Chemical compound [Sn].[Pb] LQBJWKCYZGMFEV-UHFFFAOYSA-N 0.000 description 1
- 229940071125 manganese acetate Drugs 0.000 description 1
- 239000011565 manganese chloride Substances 0.000 description 1
- 235000002867 manganese chloride Nutrition 0.000 description 1
- 229940099607 manganese chloride Drugs 0.000 description 1
- IPJKJLXEVHOKSE-UHFFFAOYSA-L manganese dihydroxide Chemical compound [OH-].[OH-].[Mn+2] IPJKJLXEVHOKSE-UHFFFAOYSA-L 0.000 description 1
- 229940099596 manganese sulfate Drugs 0.000 description 1
- 239000011702 manganese sulphate Substances 0.000 description 1
- 235000007079 manganese sulphate Nutrition 0.000 description 1
- UOGMEBQRZBEZQT-UHFFFAOYSA-L manganese(2+);diacetate Chemical compound [Mn+2].CC([O-])=O.CC([O-])=O UOGMEBQRZBEZQT-UHFFFAOYSA-L 0.000 description 1
- BHVPEUGTPDJECS-UHFFFAOYSA-L manganese(2+);diformate Chemical compound [Mn+2].[O-]C=O.[O-]C=O BHVPEUGTPDJECS-UHFFFAOYSA-L 0.000 description 1
- SQQMAOCOWKFBNP-UHFFFAOYSA-L manganese(II) sulfate Chemical compound [Mn+2].[O-]S([O-])(=O)=O SQQMAOCOWKFBNP-UHFFFAOYSA-L 0.000 description 1
- 239000011707 mineral Substances 0.000 description 1
- 235000010755 mineral Nutrition 0.000 description 1
- 229940078494 nickel acetate Drugs 0.000 description 1
- QMMRZOWCJAIUJA-UHFFFAOYSA-L nickel dichloride Chemical compound Cl[Ni]Cl QMMRZOWCJAIUJA-UHFFFAOYSA-L 0.000 description 1
- 229910000480 nickel oxide Inorganic materials 0.000 description 1
- UQPSGBZICXWIAG-UHFFFAOYSA-L nickel(2+);dibromide;trihydrate Chemical compound O.O.O.Br[Ni]Br UQPSGBZICXWIAG-UHFFFAOYSA-L 0.000 description 1
- HZPNKQREYVVATQ-UHFFFAOYSA-L nickel(2+);diformate Chemical compound [Ni+2].[O-]C=O.[O-]C=O HZPNKQREYVVATQ-UHFFFAOYSA-L 0.000 description 1
- BFDHFSHZJLFAMC-UHFFFAOYSA-L nickel(ii) hydroxide Chemical compound [OH-].[OH-].[Ni+2] BFDHFSHZJLFAMC-UHFFFAOYSA-L 0.000 description 1
- BFSQJYRFLQUZKX-UHFFFAOYSA-L nickel(ii) iodide Chemical compound I[Ni]I BFSQJYRFLQUZKX-UHFFFAOYSA-L 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- GNRSAWUEBMWBQH-UHFFFAOYSA-N oxonickel Chemical compound [Ni]=O GNRSAWUEBMWBQH-UHFFFAOYSA-N 0.000 description 1
- SJLOMQIUPFZJAN-UHFFFAOYSA-N oxorhodium Chemical compound [Rh]=O SJLOMQIUPFZJAN-UHFFFAOYSA-N 0.000 description 1
- 229910003445 palladium oxide Inorganic materials 0.000 description 1
- NXJCBFBQEVOTOW-UHFFFAOYSA-L palladium(2+);dihydroxide Chemical compound O[Pd]O NXJCBFBQEVOTOW-UHFFFAOYSA-L 0.000 description 1
- PIBWKRNGBLPSSY-UHFFFAOYSA-L palladium(II) chloride Chemical compound Cl[Pd]Cl PIBWKRNGBLPSSY-UHFFFAOYSA-L 0.000 description 1
- JQPTYAILLJKUCY-UHFFFAOYSA-N palladium(ii) oxide Chemical compound [O-2].[Pd+2] JQPTYAILLJKUCY-UHFFFAOYSA-N 0.000 description 1
- CLSUSRZJUQMOHH-UHFFFAOYSA-L platinum dichloride Chemical compound Cl[Pt]Cl CLSUSRZJUQMOHH-UHFFFAOYSA-L 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- HKSGQTYSSZOJOA-UHFFFAOYSA-N potassium argentocyanide Chemical compound [K+].[Ag+].N#[C-].N#[C-] HKSGQTYSSZOJOA-UHFFFAOYSA-N 0.000 description 1
- GKKCIDNWFBPDBW-UHFFFAOYSA-M potassium cyanate Chemical compound [K]OC#N GKKCIDNWFBPDBW-UHFFFAOYSA-M 0.000 description 1
- HBCQSNAFLVXVAY-UHFFFAOYSA-N pyrimidine-2-thiol Chemical compound SC1=NC=CC=N1 HBCQSNAFLVXVAY-UHFFFAOYSA-N 0.000 description 1
- 229910003450 rhodium oxide Inorganic materials 0.000 description 1
- KTEDZFORYFITAF-UHFFFAOYSA-K rhodium(3+);trihydroxide Chemical compound [OH-].[OH-].[OH-].[Rh+3] KTEDZFORYFITAF-UHFFFAOYSA-K 0.000 description 1
- KXAHUXSHRWNTOD-UHFFFAOYSA-K rhodium(3+);triiodide Chemical compound [Rh+3].[I-].[I-].[I-] KXAHUXSHRWNTOD-UHFFFAOYSA-K 0.000 description 1
- YWFDDXXMOPZFFM-UHFFFAOYSA-H rhodium(3+);trisulfate Chemical compound [Rh+3].[Rh+3].[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O YWFDDXXMOPZFFM-UHFFFAOYSA-H 0.000 description 1
- 238000007788 roughening Methods 0.000 description 1
- 229910001925 ruthenium oxide Inorganic materials 0.000 description 1
- DKNJHLHLMWHWOI-UHFFFAOYSA-L ruthenium(2+);sulfate Chemical compound [Ru+2].[O-]S([O-])(=O)=O DKNJHLHLMWHWOI-UHFFFAOYSA-L 0.000 description 1
- VDRDGQXTSLSKKY-UHFFFAOYSA-K ruthenium(3+);trihydroxide Chemical compound [OH-].[OH-].[OH-].[Ru+3] VDRDGQXTSLSKKY-UHFFFAOYSA-K 0.000 description 1
- LJZVDOUZSMHXJH-UHFFFAOYSA-K ruthenium(3+);triiodide Chemical compound [Ru+3].[I-].[I-].[I-] LJZVDOUZSMHXJH-UHFFFAOYSA-K 0.000 description 1
- WOCIAKWEIIZHES-UHFFFAOYSA-N ruthenium(iv) oxide Chemical compound O=[Ru]=O WOCIAKWEIIZHES-UHFFFAOYSA-N 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- ADZWSOLPGZMUMY-UHFFFAOYSA-M silver bromide Chemical compound [Ag]Br ADZWSOLPGZMUMY-UHFFFAOYSA-M 0.000 description 1
- LFAGQMCIGQNPJG-UHFFFAOYSA-N silver cyanide Chemical compound [Ag+].N#[C-] LFAGQMCIGQNPJG-UHFFFAOYSA-N 0.000 description 1
- 229940045105 silver iodide Drugs 0.000 description 1
- 229910001961 silver nitrate Inorganic materials 0.000 description 1
- 229910001923 silver oxide Inorganic materials 0.000 description 1
- RXWQRLQUJZRVHB-UHFFFAOYSA-M silver;5-oxo-3,4-dihydropyrrol-2-olate Chemical compound [Ag+].[O-]C1=NC(=O)CC1 RXWQRLQUJZRVHB-UHFFFAOYSA-M 0.000 description 1
- UKHWJBVVWVYFEY-UHFFFAOYSA-M silver;hydroxide Chemical compound [OH-].[Ag+] UKHWJBVVWVYFEY-UHFFFAOYSA-M 0.000 description 1
- VMDSWYDTKFSTQH-UHFFFAOYSA-N sodium;gold(1+);dicyanide Chemical compound [Na+].[Au+].N#[C-].N#[C-] VMDSWYDTKFSTQH-UHFFFAOYSA-N 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- 238000010301 surface-oxidation reaction Methods 0.000 description 1
- 150000003536 tetrazoles Chemical class 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- YZJQPSAZKVXWEZ-UHFFFAOYSA-J tin(4+) tetraformate Chemical compound [Sn+4].[O-]C=O.[O-]C=O.[O-]C=O.[O-]C=O YZJQPSAZKVXWEZ-UHFFFAOYSA-J 0.000 description 1
- LTSUHJWLSNQKIP-UHFFFAOYSA-J tin(iv) bromide Chemical compound Br[Sn](Br)(Br)Br LTSUHJWLSNQKIP-UHFFFAOYSA-J 0.000 description 1
- HPGGPRDJHPYFRM-UHFFFAOYSA-J tin(iv) chloride Chemical compound Cl[Sn](Cl)(Cl)Cl HPGGPRDJHPYFRM-UHFFFAOYSA-J 0.000 description 1
- QPBYLOWPSRZOFX-UHFFFAOYSA-J tin(iv) iodide Chemical compound I[Sn](I)(I)I QPBYLOWPSRZOFX-UHFFFAOYSA-J 0.000 description 1
- YJGJRYWNNHUESM-UHFFFAOYSA-J triacetyloxystannyl acetate Chemical compound [Sn+4].CC([O-])=O.CC([O-])=O.CC([O-])=O.CC([O-])=O YJGJRYWNNHUESM-UHFFFAOYSA-J 0.000 description 1
- 150000003852 triazoles Chemical class 0.000 description 1
- LHHPEAQVCCPLBC-UHFFFAOYSA-N tributyltin;hydrate Chemical compound O.CCCC[Sn](CCCC)CCCC LHHPEAQVCCPLBC-UHFFFAOYSA-N 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
- 239000004246 zinc acetate Substances 0.000 description 1
- 239000011592 zinc chloride Substances 0.000 description 1
- 235000005074 zinc chloride Nutrition 0.000 description 1
- SRWMQSFFRFWREA-UHFFFAOYSA-M zinc formate Chemical compound [Zn+2].[O-]C=O SRWMQSFFRFWREA-UHFFFAOYSA-M 0.000 description 1
- UGZADUVQMDAIAO-UHFFFAOYSA-L zinc hydroxide Chemical compound [OH-].[OH-].[Zn+2] UGZADUVQMDAIAO-UHFFFAOYSA-L 0.000 description 1
- 229910021511 zinc hydroxide Inorganic materials 0.000 description 1
- 229940007718 zinc hydroxide Drugs 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
- LRXTYHSAJDENHV-UHFFFAOYSA-H zinc phosphate Chemical compound [Zn+2].[Zn+2].[Zn+2].[O-]P([O-])([O-])=O.[O-]P([O-])([O-])=O LRXTYHSAJDENHV-UHFFFAOYSA-H 0.000 description 1
- 229910000165 zinc phosphate Inorganic materials 0.000 description 1
- 229910052984 zinc sulfide Inorganic materials 0.000 description 1
- DRDVZXDWVBGGMH-UHFFFAOYSA-N zinc;sulfide Chemical compound [S-2].[Zn+2] DRDVZXDWVBGGMH-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Chemical Treatment Of Metals (AREA)
Abstract
【解決手段】 下記の一般式で表されるテトラゾール化合物、及びハロゲン化合物(単体を含む)を含有することを特徴とする銅、及び銅合金の表面処理剤。
【化1】
(一般式中 R1、R2は炭素数16以下のアルキル基、アルケニル基、アルキニル基、アリール基、アラルキル基、ベンジル基、または、これらにハロゲン原子、水酸基、カルボキシル基、アミノ基、メルカプト基が付加した基、または、アミノ基、メルカプト基、水酸基、カルボキシル基、またはハロゲン原子、水素原子を示す。但し、同時に水素原子ではない。)
【選択図】 なし
Description
これらの化合物を電子材料用にアレンジしたものに、本出願人の出願にかかる特許文献1(特開平4−160173号公報、5−メチル−1H−ベンゾトリアゾール、5,6−ジメチル−1H−ベンゾトリアゾール、2−メルカプトピリミジンを含有する酸性の銅変色防止液)がある。
上記化合物は、耐湿性に優れ、被処理物保管時の銅の変色防止に有効であるが、熱に弱いため、加熱すると銅が酸化され、酸化膜が剥離するという問題があった。この問題を解決した本出願にかかる特許文献2(特許第3373356号公報、分子内に窒素又は硫黄あるいはこれら両方を含んでいる銅インヒビターとして働く複素環状物溶液に銅より貴な金属、又はその塩を添加した銅変色防止液)である。
しかし、この表面処理剤は、加熱時の銅の酸化を抑制するのではなく、生成した酸化被膜が剥離しないようにしたものである。加熱時の銅の酸化を抑制し、はんだ濡れ性を向上させるものとして、2位変性ベンズイミダゾールを主成分とした水溶性表面処理剤が提案されている。それらは、例えば、特許文献3(特許第2686168号公報)、特許文献4(特許第2575242号公報)に開示されている。また、表面処理剤の主成分としてイミダゾール誘導体を用いるものとしては、特許文献5(特開平4−206681号公報)、特許文献6(特開平7−243053号公報)がある。
一方、テトラゾール化合物を含有する表面処理剤も提案されている。例えば、特許文献7(特許第3141145号公報)には、テトラゾール系化合物が、特許文献8(特開2000−282033)にはテトラゾール系化合物とチアジアゾール系化合物をからなる表面処理剤が、また、特許文献9(特開2003−3283)には、過酸化水素、鉱酸、テトラゾール化合物、銀イオン、およびハロゲンイオンを含む表面処理剤による銅表面の粗面化による樹脂との密着性を向上することが提案されている。
本発明は、こうした状況の下に、耐熱性、樹脂との密着性、はんだ濡れ性のいずれにも優れた表面処理剤を提供することを目的とするものである。
(1) 下記の一般式で表されるテトラゾール化合物、及びハロゲン化合物(単体を含む)を含有することを特徴とする銅、及び銅合金の表面処理剤。
(3) 更に、金属化合物(単体を含む)を含むことを特徴とする前記(1)または(2)記載の銅、及び銅合金の表面処理剤。
(4) 金属化合物が亜鉛、マンガン、錫、鉄、ニッケル、コバルト、銅、金、銀、白金、パラジウム、ロジウム、ルテニウム、またはその化合物であることを特徴とする前記(1)〜(3)いずれか1項に記載の銅、及び銅合金の表面処理剤。
に関する。
1−メチルテトラゾール、1−エチルテトラゾール、1−プロピルテトラゾール、1−ブチルテトラゾール、1−ペンチルテトラゾール、1−ヘキシルテトラゾール、1−ドデシルテトラゾール、1−フェニルテトラゾール、1−ナフチルテトラゾール、5−メチル−1H−テトラゾール、5−エチル−1H−テトラゾール、5−プロピル−1H−テトラゾール、5−ブチル−1H−テトラゾール、5−ペンチル−1H−テトラゾール、5−ヘキシル−1H−テトラゾール、5−ドデシル−1H−テトラゾール、5−フェニル−1H−テトラゾール、5−ナフチル−1H−テトラゾール、1−メチル−5−メチルテトラゾール、1−エチル−5−メチルテトラゾール、1−プロピル−5−メチルテトラゾール、1−ブチル−5−メチルテトラゾール、1−ペンチル−5−メチルテトラゾール、1−ヘキシル−5−メチルテトラゾール、1−ドデシル−5−メチルテトラゾール、1−フェニル−5−メチルテトラゾール、1−ナフチル−5−メチルテトラゾール、5−フェニル−1H−テトラゾール、1−メチル−5−フェニルテトラゾール、1−エチル−5−フェニルテトラゾール、1−プロピル−5−フェニルテトラゾール、1−ブチル−5−フェニルテトラゾール、1−ペンチル−5−フェニルテトラゾール、1−ヘキシル−5−フェニルテトラゾール、1−ドデシル−5−フェニルテトラゾール、1−フェニル−5−フェニルテトラゾール、1−ナフチル−5−フェニルテトラゾール、5−アミノ−1H−テトラゾール、1−メチル−5−アミノテトラゾール、1−エチル−5−アミノテトラゾール、1−プロピル−5−アミノテトラゾール、1−ブチル−5−アミノテトラゾール、1−ペンチル−5−アミノテトラゾール、1−ヘキシル−5−アミノテトラゾール、1−ドデシル−5−アミノテトラゾール、1−フェニル−5−アミノテトラゾール、1−ナフチル−5−アミノテトラゾール、5−メルカプト−1H−テトラゾール、1−メチル−5−メルカプトテトラゾール、1−エチル−5−メルカプトテトラゾール、1−プロピル−5−メルカプトテトラゾール、1−ブチル−5−メルカプトテトラゾール、1−ペンチル−5−メルカプトテトラゾール、1−ヘキシル−5−メルカプトテトラゾール、1−ドデシル−5−メルカプトテトラゾール、1−フェニル−5−メルカプトテトラゾール、1−ナフチル−5−メルカプトテトラゾール等。
これらのハロゲン化合物は、2種類以上の混合物として使用してもよく、本発明の表面処理剤中に、1mg/L〜100g/L、好ましくは10mg/L〜20g/L含有される。1mg/L未満では耐熱性、樹脂との密着性、はんだ濡れ性向上効果が低く、100g/Lを超えても持ち出しなどによる液のロスが増えるだけでメリットがない。
この金属化合物としては、好ましくは亜鉛、マンガン、錫、鉄、ニッケル、コバルト、銅、金、銀、白金、パラジウム、ロジウム、ルテニウム、またはその化合物をあげることができる。これらの金属化合物は、2種類以上の混合物として使用してもよく、本発明の表面処理剤中に1mg/L〜100g/L、好ましくは10mg/L〜20g/L含有される。
1mg/L未満では耐熱性、樹脂密着性、はんだ濡れ性向上効果が低く、100g/Lを越えても、持ち出し等による液のロスが増えるだけで、メリットがない。
例えば、亜鉛、水酸化亜鉛、酸化亜鉛、蟻酸亜鉛、酢酸亜鉛、塩化亜鉛、硫化亜鉛、リン酸亜鉛、水酸化マンガン、酸化マンガン、塩化マンガン、硫酸マンガン、蟻酸マンガン、酢酸マンガン、錫、水酸化錫、酸化錫、蟻酸錫、酢酸錫、塩化錫、臭化錫、ヨウ化錫、鉄、水酸化鉄、酸化鉄、蟻酸鉄、酢酸鉄、塩化鉄、臭化鉄、ヨウ化鉄、ニッケル、水酸化ニッケル、酸化ニッケル、塩化ニッケル、蟻酸ニッケル、酢酸ニッケル、臭化ニッケル、ヨウ化ニッケル、コバルト、水酸化コバルト、酸化コバルト、塩化コバルト、蟻酸コバルト、酢酸コバルト、臭化コバルト、ヨウ化コバルト、銅、水酸化銅、酸化銅、塩化銅、硫酸銅、リン酸銅、炭酸銅、蟻酸銅、酢酸銅、シュウ酸銅、臭化銅、ヨウ化銅、金、塩化金、塩化金酸、臭化金、ヨウ化金、亜硫酸金、チオ硫酸金、シアン化金、シンア化金カリウム、シアン化金ナトリウム、銀、水酸化銀、酸化銀、硝酸銀、ヨウ化銀、臭化銀、コハク酸イミド銀、ヒダントイン銀、シアン化銀、シアン化銀カリウム、シアン化銀ナトリウム、白金、塩化白金、塩化白金酸、パラジウム、水酸化パラジウム、酸化パラジウム、塩化パラジウム、塩化パラジウム酸、ヨウ化パラジウム、硫酸パラジウム、ロジウム、水酸化ロジウム、酸化ロジウム、塩化ロジウム、塩化ロジウム酸、ヨウ化ロジウム、硫酸ロジウム、ルテニウム、水酸化ルテニウム、酸化ルテニウム、塩化ルテニウム、塩化ルテニウム酸、ヨウ化ルテニウム、硫酸ルテニウム等である。
また、本発明の表面処理剤を使用して、銅または銅合金を表面処理する温度は、5〜90℃、好ましくは10〜70℃である。5℃以下では成膜性が低く、良好な特性が出ない。90℃を越えても作業性が悪くなるだけで、メリットがない。
下記表に示す表面処理剤の水溶液に、100mm×100mm、厚さ70μmの圧延銅生箔を浸漬して表面処理しその後適当なサイズに切断したものを試験片として以下の試験を行った。はんだ濡れ性試験については、プリント配線板を表面処理剤溶液に浸責して表面処理した後試験を行った。
表面処理の結果は、以下の基準で評価した。
耐湿性:40℃、湿度90%の環境下に、96時間放置後の銅箔表面の変色の有無を
目視で観察し、変色のないものを○、変色したものを×とした。
耐熱性:オーブン中で170℃、1時間加熱後の銅箔の変色の有無を目視で観察し、
変色のないものを○、変色したものを×とした。
樹脂密着性1:エポキシモールディング樹脂との密着性(剪断強度)が
10kgf/cm2 以上のものを○、未満のものを×とした。
樹脂密着性2:ポリイミドカバーフィルムとの密着性(90度ピール強度)が
0.5kg/cm2 以上のものを○、未満のものを×とした。
はんだ濡れ性:40℃、湿度90%の環境下に96時間放置後、175℃、6時間加熱
したプリント配線板(銅回路幅0.8mm)をポストフラックス(Rタ
イプ)処理し、銅回路部に0.6mmφの錫鉛共晶はんだボールを搭載
し、リフローさせた後、はんだ濡れ長さが2mm以上のものを○、2m
m未満のものを×とした。
また、銅表面を粗化処理する処理剤として提案されている特開2003−3283に開示のもの(比較例4)は、耐湿性、耐熱性、はんだ濡れ性に劣ることが示されている。
Claims (4)
- ハロゲン化合物がヨウ素化合物(単体を含む)、及びまたは臭素化合物(単体を含む)であることを特徴とする請求項1記載の銅、及び銅合金の表面処理剤。
- 更に、金属化合物(単体を含む)を含むことを特徴とする請求項1または2記載の銅、及び銅合金の表面処理剤。
- 金属化合物が亜鉛、マンガン、錫、鉄、ニッケル、コバルト、銅、金、銀、白金、パラジウム、ロジウム、ルテニウム、またはその化合物であることを特徴とする請求項1〜3いずれか1項に記載の銅、及び銅合金の表面処理剤。
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JP2008045156A (ja) * | 2006-08-11 | 2008-02-28 | Nippon Hyomen Kagaku Kk | 銅又は銅合金表面の表面処理剤及び処理方法 |
US7393395B2 (en) | 2004-02-05 | 2008-07-01 | Nippon Mining & Metals Co., Ltd. | Surface-treating agent for metal |
KR100907204B1 (ko) | 2004-08-31 | 2009-07-10 | 센주긴조쿠고교 가부시키가이샤 | 땜납 접합용 플럭스 |
JP2013057090A (ja) * | 2011-09-07 | 2013-03-28 | Jcu Corp | 金属または合金用の表面処理液およびそれを用いた表面処理方法 |
JP2013189683A (ja) * | 2012-03-14 | 2013-09-26 | Shikoku Chem Corp | 銅または銅合金の表面処理剤およびその利用 |
WO2015037085A1 (ja) * | 2013-09-11 | 2015-03-19 | 四国化成工業株式会社 | 銅または銅合金の表面処理剤およびその利用 |
WO2018207443A1 (ja) | 2017-05-11 | 2018-11-15 | メック株式会社 | 被膜形成用組成物、表面処理金属部材の製造方法、および金属‐樹脂複合体の製造方法 |
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JP5862916B1 (ja) | 2014-06-24 | 2016-02-16 | 奥野製薬工業株式会社 | 銅系金属又は銀系金属の黒化処理用組成物 |
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KR20190138897A (ko) | 2017-05-11 | 2019-12-16 | 멕크 가부시키가이샤 | 피막 형성용 조성물, 표면 처리 금속 부재의 제조 방법 및 금속-수지 복합체의 제조 방법 |
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