JP2005057147A5 - - Google Patents
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- Publication number
- JP2005057147A5 JP2005057147A5 JP2003288375A JP2003288375A JP2005057147A5 JP 2005057147 A5 JP2005057147 A5 JP 2005057147A5 JP 2003288375 A JP2003288375 A JP 2003288375A JP 2003288375 A JP2003288375 A JP 2003288375A JP 2005057147 A5 JP2005057147 A5 JP 2005057147A5
- Authority
- JP
- Japan
- Prior art keywords
- silicon
- film
- germanium film
- silicon germanium
- silicon substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910000577 Silicon-germanium Inorganic materials 0.000 claims 14
- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 claims 14
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 13
- 229910052710 silicon Inorganic materials 0.000 claims 13
- 239000010703 silicon Substances 0.000 claims 13
- 239000000758 substrate Substances 0.000 claims 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 7
- 229910052814 silicon oxide Inorganic materials 0.000 claims 7
- 239000004065 semiconductor Substances 0.000 claims 5
- 238000005530 etching Methods 0.000 claims 4
- 238000002955 isolation Methods 0.000 claims 4
- 238000004519 manufacturing process Methods 0.000 claims 4
- 229910052732 germanium Inorganic materials 0.000 claims 3
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims 3
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003288375A JP2005057147A (ja) | 2003-08-07 | 2003-08-07 | 半導体装置の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003288375A JP2005057147A (ja) | 2003-08-07 | 2003-08-07 | 半導体装置の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2005057147A JP2005057147A (ja) | 2005-03-03 |
| JP2005057147A5 true JP2005057147A5 (enExample) | 2006-09-21 |
Family
ID=34367042
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003288375A Pending JP2005057147A (ja) | 2003-08-07 | 2003-08-07 | 半導体装置の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2005057147A (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5096681B2 (ja) * | 2006-02-21 | 2012-12-12 | ルネサスエレクトロニクス株式会社 | 半導体装置の製造方法 |
| KR100775963B1 (ko) | 2006-07-12 | 2007-11-15 | 삼성전자주식회사 | 반도체 장치 및 그 제조 방법 |
| KR101223417B1 (ko) | 2007-12-18 | 2013-01-17 | 삼성전자주식회사 | 반도체 소자 및 이의 제조방법 |
-
2003
- 2003-08-07 JP JP2003288375A patent/JP2005057147A/ja active Pending
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