JP2004512671A5 - - Google Patents

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Publication number
JP2004512671A5
JP2004512671A5 JP2001584440A JP2001584440A JP2004512671A5 JP 2004512671 A5 JP2004512671 A5 JP 2004512671A5 JP 2001584440 A JP2001584440 A JP 2001584440A JP 2001584440 A JP2001584440 A JP 2001584440A JP 2004512671 A5 JP2004512671 A5 JP 2004512671A5
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JP
Japan
Prior art keywords
layer
conductive layer
capacitor
conductive
free
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JP2001584440A
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English (en)
Japanese (ja)
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JP4980539B2 (ja
JP2004512671A (ja
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Priority claimed from US09/573,363 external-priority patent/US6396677B1/en
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Publication of JP2004512671A publication Critical patent/JP2004512671A/ja
Publication of JP2004512671A5 publication Critical patent/JP2004512671A5/ja
Application granted granted Critical
Publication of JP4980539B2 publication Critical patent/JP4980539B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2001584440A 2000-05-17 2001-05-10 フォトリソグラフィ・パターン形成による可変コンデンサとその製造方法 Expired - Fee Related JP4980539B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/573,363 2000-05-17
US09/573,363 US6396677B1 (en) 2000-05-17 2000-05-17 Photolithographically-patterned variable capacitor structures and method of making
PCT/US2001/015115 WO2001088933A1 (en) 2000-05-17 2001-05-10 Photolithographically-patterned variable capacitor structures and method of making

Publications (3)

Publication Number Publication Date
JP2004512671A JP2004512671A (ja) 2004-04-22
JP2004512671A5 true JP2004512671A5 (enExample) 2005-01-27
JP4980539B2 JP4980539B2 (ja) 2012-07-18

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Family Applications (1)

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JP2001584440A Expired - Fee Related JP4980539B2 (ja) 2000-05-17 2001-05-10 フォトリソグラフィ・パターン形成による可変コンデンサとその製造方法

Country Status (10)

Country Link
US (3) US6396677B1 (enExample)
EP (1) EP1303863B1 (enExample)
JP (1) JP4980539B2 (enExample)
AT (1) ATE318007T1 (enExample)
AU (1) AU2001261384A1 (enExample)
DE (1) DE60117257T2 (enExample)
ES (1) ES2256239T3 (enExample)
MY (1) MY133936A (enExample)
TW (1) TWI244206B (enExample)
WO (1) WO2001088933A1 (enExample)

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