JP2004504495A5 - - Google Patents

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Publication number
JP2004504495A5
JP2004504495A5 JP2002513962A JP2002513962A JP2004504495A5 JP 2004504495 A5 JP2004504495 A5 JP 2004504495A5 JP 2002513962 A JP2002513962 A JP 2002513962A JP 2002513962 A JP2002513962 A JP 2002513962A JP 2004504495 A5 JP2004504495 A5 JP 2004504495A5
Authority
JP
Japan
Prior art keywords
vacuum chamber
valve
pressure
closed
crt
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2002513962A
Other languages
English (en)
Japanese (ja)
Other versions
JP2004504495A (ja
JP4766821B2 (ja
Filing date
Publication date
Priority claimed from EA200000807A external-priority patent/EA003148B1/ru
Application filed filed Critical
Publication of JP2004504495A publication Critical patent/JP2004504495A/ja
Publication of JP2004504495A5 publication Critical patent/JP2004504495A5/ja
Application granted granted Critical
Publication of JP4766821B2 publication Critical patent/JP4766821B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2002513962A 2000-07-05 2001-05-22 基板にコーティングを施すための真空モジュール（及びその変形）とモジュールシステム Expired - Fee Related JP4766821B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EA200000807A EA003148B1 (ru) 2000-07-05 2000-07-05 Вакуумный модуль (его варианты) и система модулей для нанесения покрытий на подложку
EA200000807 2000-07-05
PCT/EA2001/000002 WO2002008484A2 (en) 2000-07-05 2001-05-22 Vacuum module for applying coatings

Publications (3)

Publication Number Publication Date
JP2004504495A JP2004504495A (ja) 2004-02-12
JP2004504495A5 true JP2004504495A5 (enrdf_load_html_response) 2006-11-09
JP4766821B2 JP4766821B2 (ja) 2011-09-07

Family

ID=8161557

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002513962A Expired - Fee Related JP4766821B2 (ja) 2000-07-05 2001-05-22 基板にコーティングを施すための真空モジュール（及びその変形）とモジュールシステム

Country Status (7)

Country Link
JP (1) JP4766821B2 (enrdf_load_html_response)
KR (1) KR100737035B1 (enrdf_load_html_response)
CN (1) CN100348773C (enrdf_load_html_response)
AU (1) AU6896001A (enrdf_load_html_response)
EA (1) EA003148B1 (enrdf_load_html_response)
MY (1) MY137307A (enrdf_load_html_response)
WO (1) WO2002008484A2 (enrdf_load_html_response)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100408902C (zh) 2003-05-13 2008-08-06 应用材料股份有限公司 密封一处理室一开口的方法与装置
EA007701B1 (ru) * 2005-07-18 2006-12-29 Владимир Яковлевич ШИРИПОВ Вакуумный кластер для нанесения покрытий на подложку (варианты)
EA200601327A1 (ru) * 2006-05-15 2007-12-28 Владимир Яковлевич ШИРИПОВ Способ нанесения пленок нитрида кремния в вакууме (варианты)
EA034967B1 (ru) 2018-05-04 2020-04-13 Общество С Ограниченной Ответственностью "Изовак Технологии" Технологическая линия для формирования тонкопленочных покрытий в вакууме (варианты)
CN110592550A (zh) * 2019-10-28 2019-12-20 上海映晓电子科技有限公司 一种磁控溅射和电子束蒸镀双腔镀膜装置及其使用方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2008156B (en) * 1977-11-19 1982-06-23 Hunt C J L Vacuum metallising of hollow articles
US5489369A (en) * 1993-10-25 1996-02-06 Viratec Thin Films, Inc. Method and apparatus for thin film coating an article
KR100318724B1 (ko) * 1996-04-18 2002-04-22 니시무로 타이죠 음극선관의제조방법및그장치

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