JP2004336002A - 抽出格子ブラッグ反射器に結合された抽出格子分布帰還波長可変半導体レーザ - Google Patents
抽出格子ブラッグ反射器に結合された抽出格子分布帰還波長可変半導体レーザ Download PDFInfo
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- JP2004336002A JP2004336002A JP2003435891A JP2003435891A JP2004336002A JP 2004336002 A JP2004336002 A JP 2004336002A JP 2003435891 A JP2003435891 A JP 2003435891A JP 2003435891 A JP2003435891 A JP 2003435891A JP 2004336002 A JP2004336002 A JP 2004336002A
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- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
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- H—ELECTRICITY
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- H01S5/00—Semiconductor lasers
- H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
- H01S5/062—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium by varying the potential of the electrodes
- H01S5/0625—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium by varying the potential of the electrodes in multi-section lasers
- H01S5/06255—Controlling the frequency of the radiation
- H01S5/06256—Controlling the frequency of the radiation with DBR-structure
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- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
- H01S5/062—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium by varying the potential of the electrodes
- H01S5/0625—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium by varying the potential of the electrodes in multi-section lasers
- H01S5/06255—Controlling the frequency of the radiation
- H01S5/06258—Controlling the frequency of the radiation with DFB-structure
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- H—ELECTRICITY
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- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/12—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region the resonator having a periodic structure, e.g. in distributed feedback [DFB] lasers
- H01S5/125—Distributed Bragg reflector [DBR] lasers
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- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
- H01S5/22—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure
- H01S5/227—Buried mesa structure ; Striped active layer
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- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/028—Coatings ; Treatment of the laser facets, e.g. etching, passivation layers or reflecting layers
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- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/12—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region the resonator having a periodic structure, e.g. in distributed feedback [DFB] lasers
- H01S5/1206—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region the resonator having a periodic structure, e.g. in distributed feedback [DFB] lasers having a non constant or multiplicity of periods
- H01S5/1209—Sampled grating
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- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
- H01S5/22—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure
- H01S5/2205—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure comprising special burying or current confinement layers
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Abstract
【解決手段】 光波を生成し、第1周期の抽出格子が形成された利得領域及び位相制御領域を備えるSG−DFB構造部と、該SG−DFB構造部と共に集積されて形成され、第2周期の抽出格子が形成されたSG−DBR領域を備えるSG−DBR構造部と、前記SG−DFB構造部及び前記SG−DBR構造部の各端面に形成された無反射薄膜とを含んでなるが、前記位相制御領域及び/又は前記SG−DBR領域の屈折率の変化に応じて、発振する波長が可変するように構成される。
【選択図】 図6
Description
32 p型InPクラッド層
33 無反射薄膜
34 InGaAsP導波路層
35 活性層
36 位相制御領域電極
37 利得領域電極
38 電極
39 抽出格子
51 n型電流遮断層
52 p型電流遮断層
53 n型電極
Claims (8)
- 光波を生成し、第1周期の抽出格子が形成された利得領域及び位相制御領域を備えるSG−DFB構造部と、
前記SG−DFB構造部と共に集積されて形成され、第2周期の抽出格子が形成されたSG−DBR領域を備えるSG−DBR構造部と、
前記SG−DFB構造部及び前記SG−DBR構造部の各端面に形成された無反射薄膜とを含んでなるが、
前記位相制御領域及び/又は前記SG−DBR領域の屈折率の変化に応じて、発振する波長が可変するように構成されたことを特徴とする波長可変半導体レーザ。 - 前記第1周期の抽出格子と前記第2周期の抽出格子とは互いに同一のピッチを有することを特徴とする請求項1に記載の波長可変半導体レーザ。
- 前記位相制御領域及び前記SG−DBR領域は電流の印加によって屈折率が変化するように構成されたことを特徴とする請求項1に記載の波長可変半導体レーザ。
- 前記発振する波長は連続的又は不連続的に可変することを特徴とする請求項1に記載の波長可変半導体レーザ。
- 前記波長可変半導体レーザは一つの半導体基板に光変調器と共に集積されて具現されたことを特徴とする請求項1に記載の波長可変半導体レーザ。
- 下部クラッド層の基板と、
前記基板上に、それぞれ異なる導波路層で形成された利得領域、位相制御領域及びSG−DBR領域と、
全体構造上に形成された上部クラッド層と、
前記基板下部及び前記利得領域、前記位相制御領域及び前記SG−DBR領域に独立的に電圧を印加するための電極と、
各端面に形成された無反射薄膜とを含んでなるが、
前記利得領域及び前記位相制御領域はSG−DFB構造部を構成して第1周期の抽出格子を備え、前記SG−DBR領域はSG−DBR構造部を構成して第2周期の抽出格子を備え、
前記位相制御領域及び/又は前記SG−DBR領域に前記電極を介して印加される電流によって発生する屈折率の変化に応じて発振する波長が連続的又は不連続的に可変するように構成されたことを特徴とする波長可変半導体レーザ。 - 前記第1周期の抽出格子のピッチと前記第2周期の抽出格子のピーチとが互いに同一であり、第1周期と第2周期とがそれぞれ異なるように構成されたことを特徴とする請求項6に記載の波長可変半導体レーザ。
- 前記基板はn型InP基板であり、前記導波路層等はInGaAsP系列からなり、前記上部クラッド層はp型InPであることを特徴とする請求項6に記載の波長可変半導体レーザ。
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KR1020030028186A KR100541913B1 (ko) | 2003-05-02 | 2003-05-02 | 추출 격자 브래그 반사기와 결합된 추출 격자 분포궤환파장가변 반도체 레이저 |
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JP2004336002A true JP2004336002A (ja) | 2004-11-25 |
JP3962014B2 JP3962014B2 (ja) | 2007-08-22 |
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JP2003435891A Expired - Fee Related JP3962014B2 (ja) | 2003-05-02 | 2003-12-26 | 抽出格子ブラッグ反射器に結合された抽出格子分布帰還波長可変半導体レーザ |
Country Status (4)
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US (1) | US7130325B2 (ja) |
EP (1) | EP1489707B1 (ja) |
JP (1) | JP3962014B2 (ja) |
KR (1) | KR100541913B1 (ja) |
Cited By (10)
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JP2007048988A (ja) * | 2005-08-11 | 2007-02-22 | Eudyna Devices Inc | 半導体レーザ、レーザモジュール、光学部品、レーザ装置、半導体レーザの製造方法および半導体レーザの制御方法 |
JP2007201425A (ja) * | 2005-12-27 | 2007-08-09 | Eudyna Devices Inc | レーザ装置、レーザモジュール、半導体レーザおよびその製造方法 |
JP2007243897A (ja) * | 2006-03-10 | 2007-09-20 | Korea Electronics Telecommun | ミリメートル波の生成装置及びその生成方法 |
JP2010021308A (ja) * | 2008-07-10 | 2010-01-28 | Mitsubishi Electric Corp | 波長可変半導体レーザ |
JP2011003886A (ja) * | 2009-05-21 | 2011-01-06 | Sumitomo Electric Ind Ltd | 半導体レーザ素子及びその作製方法 |
US8311071B2 (en) | 2009-04-27 | 2012-11-13 | Sumitomo Electric Industries, Ltd. | Wavelength tunable laser |
JP2013258398A (ja) * | 2012-05-18 | 2013-12-26 | Sumitomo Electric Ind Ltd | 半導体レーザ |
JP2014007435A (ja) * | 2013-10-18 | 2014-01-16 | Sumitomo Electric Ind Ltd | 波長可変レーザ、波長可変レーザ装置、及び波長可変レーザ制御方法 |
US8774243B2 (en) | 2010-08-31 | 2014-07-08 | Electronics And Telecommunications Research Institute | Dual mode semiconductor laser and terahertz wave apparatus using the same |
JP2017139341A (ja) * | 2016-02-04 | 2017-08-10 | 古河電気工業株式会社 | 光素子、集積型光素子および光素子モジュール |
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JP2007273650A (ja) * | 2006-03-30 | 2007-10-18 | Eudyna Devices Inc | 光半導体装置 |
KR100949541B1 (ko) * | 2006-12-07 | 2010-03-25 | 한국전자통신연구원 | 광변조기 집적 분포궤환형 레이저 다이오드 및 그 제조방법 |
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2003
- 2003-05-02 KR KR1020030028186A patent/KR100541913B1/ko not_active IP Right Cessation
- 2003-12-26 JP JP2003435891A patent/JP3962014B2/ja not_active Expired - Fee Related
- 2003-12-29 US US10/749,043 patent/US7130325B2/en not_active Expired - Fee Related
- 2003-12-30 EP EP03030025A patent/EP1489707B1/en not_active Expired - Fee Related
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JP4629022B2 (ja) * | 2005-12-27 | 2011-02-09 | 住友電工デバイス・イノベーション株式会社 | レーザ装置、レーザモジュール、および、半導体レーザ |
JP2007243897A (ja) * | 2006-03-10 | 2007-09-20 | Korea Electronics Telecommun | ミリメートル波の生成装置及びその生成方法 |
JP2010021308A (ja) * | 2008-07-10 | 2010-01-28 | Mitsubishi Electric Corp | 波長可変半導体レーザ |
US8311071B2 (en) | 2009-04-27 | 2012-11-13 | Sumitomo Electric Industries, Ltd. | Wavelength tunable laser |
JP2011003886A (ja) * | 2009-05-21 | 2011-01-06 | Sumitomo Electric Ind Ltd | 半導体レーザ素子及びその作製方法 |
US8774243B2 (en) | 2010-08-31 | 2014-07-08 | Electronics And Telecommunications Research Institute | Dual mode semiconductor laser and terahertz wave apparatus using the same |
JP2013258398A (ja) * | 2012-05-18 | 2013-12-26 | Sumitomo Electric Ind Ltd | 半導体レーザ |
JP2014007435A (ja) * | 2013-10-18 | 2014-01-16 | Sumitomo Electric Ind Ltd | 波長可変レーザ、波長可変レーザ装置、及び波長可変レーザ制御方法 |
JP2017139341A (ja) * | 2016-02-04 | 2017-08-10 | 古河電気工業株式会社 | 光素子、集積型光素子および光素子モジュール |
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KR100541913B1 (ko) | 2006-01-10 |
JP3962014B2 (ja) | 2007-08-22 |
US7130325B2 (en) | 2006-10-31 |
EP1489707A2 (en) | 2004-12-22 |
US20040218639A1 (en) | 2004-11-04 |
EP1489707B1 (en) | 2009-02-25 |
EP1489707A3 (en) | 2005-04-27 |
KR20040094190A (ko) | 2004-11-09 |
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