JP2004146843A - 発光ダイオードの形成方法 - Google Patents
発光ダイオードの形成方法 Download PDFInfo
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- JP2004146843A JP2004146843A JP2003402427A JP2003402427A JP2004146843A JP 2004146843 A JP2004146843 A JP 2004146843A JP 2003402427 A JP2003402427 A JP 2003402427A JP 2003402427 A JP2003402427 A JP 2003402427A JP 2004146843 A JP2004146843 A JP 2004146843A
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- light
- light emitting
- emitting diode
- emitting element
- resin
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- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/12—Passive devices, e.g. 2 terminal devices
- H01L2924/1204—Optical Diode
- H01L2924/12041—LED
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
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- H01L2924/151—Die mounting substrate
- H01L2924/156—Material
- H01L2924/157—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2924/15738—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950 C and less than 1550 C
- H01L2924/15747—Copper [Cu] as principal constituent
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/181—Encapsulation
Abstract
【解決手段】 本発明は、発光素子と、該発光素子からの発光波長の少なくとも一部を吸収し蛍光を発する蛍光物質を含有する透光性樹脂とを有し発光素子からの光と蛍光物質からの蛍光の混色光を発光する発光ダイオードである。特に、蛍光物質を含有する透光性樹脂は、射出成形によって発光素子の少なくとも一部を被覆してなることを特徴とする発光ダイオードである。これにより、発光むら、色むらや発光バラツキが少なく歩留まりの高い発光ダイオードを形成することができる。
【選択図】 図1
Description
本発明に用いられる射出成形機400としては、図4の如き蛍光物質含有の透光性樹脂を加熱溶融させプランジャー402でノズルを通して金型405内に射出し成形させられるために好適に用いられる。したがって、射出成型機は予め蛍光物質が一定量含有された透光性樹脂のペレット401を軟化溶融させ射出するためのプランジャー、プランジャーで押し出される融解樹脂を金型内に導くノズル及び成型品の形を与える金型から主として構成することができる。特に、発光ダイオードが発光素子からの可視光と、この可視光によって励起されると共に発光する蛍光物質との混色発光させる場合、混合分布量がごく微少量でも異なるとその発光色の変動が大きくなる。そのため、蛍光物質が含有された透光性樹脂を予備可塑化装置などを利用して攪拌溶融させることが好ましい。このような攪拌は、透光性樹脂中に含有される蛍光物質の密度が変化しない限り連続的、間欠的になど種々行うことができる。また、攪拌回転数は攪拌部となるスクリュー403の大きさ、蛍光物質の粒径や形状、バインダーの粘度、材質などによって種々選択させることができる。
本発明に用いられる透光性樹脂は蛍光物質を内部に含有させ射出により一定の形状をとることができる樹脂である。具体的には、ノルボネン樹脂、ポリメチルペンテン樹脂、非晶質ナイロン樹脂、ポリアリレートやポリカーボネート樹脂など透光性がありかつ耐熱性に優れた熱可塑性樹脂、ポリアミドや酢酸ビニル等の100℃から260℃程度の比較的低温、1から25Kgf/cm2程度の比較的低圧にていわゆるホットメルト成形と称される射出成形が可能でかつ透光性を有する熱可塑性樹脂及び脂環式エポキシ樹脂、含窒素エポキシ樹脂等の熱硬化性樹脂が好適に挙げられる。これらの樹脂中に蛍光物質を溶融分散させ一定の大きさに形成させることで射出形成の軟化溶融材料となるペレットなどとすることができる。これらの透光性樹脂には所望の波長をカットする着色剤、所望の光を拡散させる拡散材、樹脂の耐光性を高める紫外線吸収剤、酸化防止剤や硬化促進剤など種々の添加剤を含有させることができる。
本発明に用いられる蛍光物質としては、発光素子から発光された電磁波で励起されて蛍光を発する蛍光物質をいう。蛍光物質は一般に発光波長よりも励起波長が短波長の方が効率が良いため、発光素子からの発光波長よりも長波長の蛍光を発する蛍光体を用いることが好ましい。具体的蛍光物質として青色の発光素子との混色により白色を発光させるためには、セリウムで付活されたイットリウム・アルミニウム・ガーネット系蛍光体、ペリレン系誘導体、銅で付活されたセレン化亜鉛など種々のものが挙げられる。特に、イットリウム・アルミニウム・ガーネット系蛍光体は、発光素子に窒化物半導体を用いた場合、耐光性や効率などの観点から特に好ましい。
本発明に用いられる発光素子103とは、蛍光物質を励起可能な発光波長を発光できる発光層を有する半導体発光素子である。このような半導体発光素子としてZnSeやGaNなど種々の半導体を挙げることができるが、蛍光物質を効率良く励起できる短波長が発光可能な窒化物半導体(InXAlYGa1-X-YN、0≦X、0≦Y、X+Y≦1)が好適に挙げられる。半導体の構造としては、MIS接合、PIN接合やpn接合などを有するホモ構造、ヘテロ構造あるいはダブルへテロ構成のものが挙げられる。半導体層の材料やその混晶度によって発光波長を種々選択することができる。また、半導体活性層を量子効果が生ずる薄膜に形成させた単一量子井戸構造や多重量子井戸構造とすることもできる。
マウント・リード104としては、発光素子を配置させるものであり、ダイボンド機器などで積載するのに十分な大きさがあれば良い。また、発光素子を複数設置しマウント・リードを発光素子の共通電極として利用する場合においては、十分な電気伝導性とボンディングワイヤ等との接続性が求められる。また、マウント・リード上のカップ内に発光素子を配置すると共に蛍光体を内部に充填させる場合は、近接して配置させた別の発光ダイオードからの光により疑似点灯することを防止することができる。
インナー・リードとしては、マウント・リード上に配置された発光素子と導電性ワイヤなどを介して電気的に接続を図るものである。インナー・リードは、ボンディングワイヤ等との接続性及び電気伝導性が良いことが求められる。具体的な電気抵抗としては、300μΩ・cm以下が好ましく、より好ましくは3μΩ・cm以下である。これらの条件を満たす材料としては、鉄、銅、鉄入り銅、錫入り銅及び銅、金、銀をメッキしたアルミニウム、鉄、銅等が挙げられる。
ワイヤ107としては、発光素子の電極とのオーミック性、密着性、電気伝導性及び熱伝導性がよいものが求められる。熱伝導度としては0.01cal/cm2/cm/℃以上が好ましく、より好ましくは0.5cal/cm2/cm/℃以上である。また、作業性などを考慮してワイヤの直径は、好ましくは、Φ10μm以上、Φ45μm以下である。このようなワイヤとして具体的には、金、銅、白金、アルミニウム等の金属及びそれらの合金を用いたワイヤが挙げられる。このようなワイヤは、各発光素子の電極と、インナー・リード及びマウント・リードなどとをワイヤボンディング機器によって容易に接続させることができる。
モールド部材208は、発光ダイオードの使用用途に応じて発光素子103、ワイヤ107、蛍光物質102などを外部から保護するために設けることができる。モールド部材は、一般には樹脂を用いて形成させることができる。また、蛍光体を含有させることによって視野角を増やすことができるが、樹脂モールドに拡散剤を含有させることによって発光素子からの指向性を緩和させ視野角をさらに増やすことができる。更にまた、モールド部材を所望の形状にすることによって発光素子からの発光を集束させたり拡散させたりするレンズ効果を持たせることができる。したがって、モールド部材は複数積層した構造でもよい。具体的には、凸レンズ形状、凹レンズ形状さらには、発光観測面から見て楕円形状やそれらを複数組み合わせた物である。モールド部材の具体的材料としては、主としてエポキシ樹脂、ユリア樹脂、シリコーン樹脂などの耐候性に優れた透明樹脂や硝子などが好適に用いられる。また、拡散剤としては、チタン酸バリウム、酸化チタン、酸化アルミニウム、酸化珪素等が好適に用いられる。また、屈折率差を考慮してモールド部材と結着剤とを同じ材質のものを用いて形成させても良い。以下、本発明の具体的実施例について詳述するがこれのみに限定されないことは言うまでもない。
LEDチップは、発光層として発光ピークが450nmのIn0.2Ga0.8N半導体を用いた。LEDチップは、洗浄させたサファイヤ基板上にTMG(トリメチルガリウム)ガス、TMI(トリメチルインジウム)ガス、窒素ガス及びドーパントガスをキャリアガスと共に流し、MOCVD法で窒化物半導体を成膜させることにより形成させた。ドーパントガスとしてSiH4とCp2Mgとを切り替えることによってn型やp型導電性の窒化物半導体を形成させる。発光素子としてはn型導電性を有する窒化ガリウム半導体であるコンタクト層と、p型導電性を有する窒化アルミニウムガリウム半導体であるクラッド層、p型導電性を有する窒化ガリウムであるコンタクト層を形成させた。n型コンタクト層とp型クラッド層との間に厚さ約3nmであり、単一量子井戸構造となるInGaNの活性層を形成してある。(なお、サファイヤ基板上には低温で窒化ガリウムを形成させバッファ層とさせてある。また、p型半導体は、成膜後400℃以上で熱処理させてある。)
エッチングによりサファイア基板上の窒化物半導体に同一面側で、pn各コンタクト層表面を露出させる。各コンタクト層上に、スパッタリング法を用いて正負各台座電極をそれぞれ形成させた。なお、p型窒化物半導体上の全面には金属薄膜を透光性電極として形成させた後に、透光性電極の一部に台座電極を形成させてある。出来上がった半導体ウエハーをスクライブラインを引いた後、外力により分割させ半導体発光素子であるLEDチップを形成させた。
(Y0.8Gd0.2)3Al5O12:Ce蛍光物質をエポキシ樹脂中に混合したものを用いて注型によりカップ内に配置させた後に、硬化形成した以外は実施例1と同様の発光ダイオードを形成させた。形成された発光ダイオードの500個平均と実施例1の発光ダイオードとを比較して色温度の製造バラツキを調べた。比較例の発光ダイオードに較べ実施例の発光ダイオードは、色温度の製造バラツキが明らかに小さくなった。なお、比較例の発光ダイオードは、モールド部材の先端に蛍光物質が固まった状態であった。
図2に示すようにLEDチップ203周辺を上述と同様の蛍光物質202を含有した熱可塑性樹脂201で射出成形封止した後、注型成形にて透光性のエポキシ樹脂をモールド部材208として外側に形成した以外は実施例1と同様にして発光ダイオード200を形成させた。これにより、上述の硬化に加え、射出成形時に封止樹脂表面に型のミスマッチやバリが発生しても、これをさらに注型で覆うことができる。そのため、封止樹脂のレンズ作用のバラツキや発光ダイオード実装時のバリ脱落によるはんだ付け不良等が防止される。また、比較的高価な高透光性かつ高耐熱性の熱可塑性樹脂の使用量を減らすことも可能である。
図3に示すように表面実装型の発光ダイオード300を形成させた。LEDチップ303は、発光層として発光ピークが475nmのIn0.2Ga0.8N半導体を有する窒化物半導体素子を用いた。より具体的にはLEDチップ303は、洗浄させたサファイヤ基板上にTMG(トリメチルガリウム)ガス、TMI(トリメチルインジウム)ガス、窒素ガス及びドーパントガスをキャリアガスと共に流し、MOCVD法で窒化物半導体を成膜させることにより形成させることができる。ドーパントガスとしてSiH4とCp2Mgを切り替えることによってn型窒化物半導体やp型窒化物半導体となる層を形成させる。
エッチングによりサファイア基板上の窒化物半導体に同一面側で、pn各コンタクト層表面を露出させる。各コンタクト層上に、スパッタリング法を用いて正負各台座電極をそれぞれ形成させた。なお、p型窒化物半導体上の全面には金属薄膜を透光性電極として形成させた後に、透光性電極の一部に台座電極を形成させてある。出来上がった半導体ウエハーをスクライブラインを引いた後、外力により分割させ半導体発光素子であるLEDチップを形成させた。
101、201、301・・・蛍光物質を含有する透光性樹脂
102、202、302・・・蛍光物質
103、203、303・・・発光素子
104、204・・・マウント・リード
105、205・・・インナー・リード
106、206、306・・・LEDを接着させるマウント部材
107、207、307・・・ワイヤ
208・・・モールド部材
304、305・・・リード電極
309・・・リード電極間を絶縁する樹脂
400・・・射出成形機
401・・・ペレット
402・・・射出ピストン
403・・・スクリュー
404・・・電熱線
405・・・金型
406・・・発光素子がマウントされたマウントリード
Claims (4)
- 発光素子と、該発光素子からの発光波長の少なくとも一部を吸収し蛍光を発する蛍光物質を含有する透光性樹脂とを有し前記発光素子からの光と蛍光物質からの蛍光の混色光を発光する発光ダイオードであって、
前記蛍光物質を含有する透光性樹脂は射出成形によって発光素子の少なくとも一部を被覆してなることを特徴とする発光ダイオード。 - 発光素子と、該発光素子からの発光波長の少なくとも一部を吸収し蛍光を発する蛍光物質を含有する透光性樹脂とを有する発光ダイオードの形成方法であって、
前記蛍光物質を含有する透光性樹脂を射出成形して発光素子の少なくとも一部を被覆することを特徴とする発光ダイオードの形成方法。 - 発光素子と、該発光素子からの発光波長の少なくとも一部を吸収し蛍光を発する蛍光物質を含有する透光性樹脂とを有し前記発光素子からの光と蛍光物質からの蛍光の混色光を発光する発光ダイオードの形成方法であって、
前記透光性樹脂は蛍光物質を実質的に均一に含有させた固体状とする工程と、
該固体状となった蛍光物質含有の透光性樹脂を軟化させて発光素子の少なくとも一部を被覆する工程と、
再び前記蛍光物質含有の透光性樹脂を固体状とする工程とを有する発光ダイオードの形成方法。 - 前記発光素子の発光層が少なくとも窒化物半導体からなると共に前記蛍光物質がセリウムで付活されたイットリウム・アルミニウム・ガーネット系蛍光体である請求項2又は請求項3に記載の発光ダイオードの形成方法。
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JP2005333069A (ja) * | 2004-05-21 | 2005-12-02 | Stanley Electric Co Ltd | Ledの製造方法 |
JP4529544B2 (ja) * | 2004-05-21 | 2010-08-25 | スタンレー電気株式会社 | Ledの製造方法 |
JP2006013311A (ja) * | 2004-06-29 | 2006-01-12 | Nichia Chem Ind Ltd | 発光装置の製造方法及び発光装置 |
JP4608966B2 (ja) * | 2004-06-29 | 2011-01-12 | 日亜化学工業株式会社 | 発光装置の製造方法 |
JP2007250629A (ja) * | 2006-03-14 | 2007-09-27 | Toshiba Corp | 発光装置及びその製造方法、並びに蛍光パターン形成物 |
JP2012049199A (ja) * | 2010-08-24 | 2012-03-08 | Panasonic Electric Works Co Ltd | 発光ユニット |
JP2015131912A (ja) * | 2014-01-14 | 2015-07-23 | 国立大学法人宇都宮大学 | 透明蛍光発光物体及びその製造方法 |
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