JP2004133407A - 犠牲層プロセスを使用する半導体空隙格子製造 - Google Patents

犠牲層プロセスを使用する半導体空隙格子製造 Download PDF

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Publication number
JP2004133407A
JP2004133407A JP2003283547A JP2003283547A JP2004133407A JP 2004133407 A JP2004133407 A JP 2004133407A JP 2003283547 A JP2003283547 A JP 2003283547A JP 2003283547 A JP2003283547 A JP 2003283547A JP 2004133407 A JP2004133407 A JP 2004133407A
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JP
Japan
Prior art keywords
semiconductor layer
growing
semiconductor
layer
dielectric
Prior art date
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Pending
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JP2003283547A
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English (en)
Japanese (ja)
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JP2004133407A5 (enExample
Inventor
P Nesunidaru Michael
マイケル・ピー・ネスニダル
David V Forbes
デービッド・ブイ・フォーブス
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Northrop Grumman Corp
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Northrop Grumman Corp
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Filing date
Publication date
Application filed by Northrop Grumman Corp filed Critical Northrop Grumman Corp
Publication of JP2004133407A publication Critical patent/JP2004133407A/ja
Publication of JP2004133407A5 publication Critical patent/JP2004133407A5/ja
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02518—Deposited layers
    • H01L21/02521—Materials
    • H01L21/02538—Group 13/15 materials
    • H01L21/02543—Phosphides
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1861—Reflection gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/124—Geodesic lenses or integrated gratings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02518—Deposited layers
    • H01L21/02521—Materials
    • H01L21/02538—Group 13/15 materials
    • H01L21/02546—Arsenides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02612—Formation types
    • H01L21/02617—Deposition types
    • H01L21/0262—Reduction or decomposition of gaseous compounds, e.g. CVD
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02612—Formation types
    • H01L21/02617—Deposition types
    • H01L21/02636—Selective deposition, e.g. simultaneous growth of mono- and non-monocrystalline semiconductor materials
    • H01L21/02639—Preparation of substrate for selective deposition
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/12—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region the resonator having a periodic structure, e.g. in distributed feedback [DFB] lasers
    • H01S5/1231—Grating growth or overgrowth details

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)
  • Semiconductor Lasers (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
JP2003283547A 2002-08-01 2003-07-31 犠牲層プロセスを使用する半導体空隙格子製造 Pending JP2004133407A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/210,799 US6649439B1 (en) 2002-08-01 2002-08-01 Semiconductor-air gap grating fabrication using a sacrificial layer process

Publications (2)

Publication Number Publication Date
JP2004133407A true JP2004133407A (ja) 2004-04-30
JP2004133407A5 JP2004133407A5 (enExample) 2006-08-17

Family

ID=29420053

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003283547A Pending JP2004133407A (ja) 2002-08-01 2003-07-31 犠牲層プロセスを使用する半導体空隙格子製造

Country Status (4)

Country Link
US (2) US6649439B1 (enExample)
EP (1) EP1394911B1 (enExample)
JP (1) JP2004133407A (enExample)
DE (1) DE60319314T2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011215486A (ja) * 2010-04-01 2011-10-27 Sumitomo Electric Ind Ltd マッハツェンダー型光変調素子

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6649439B1 (en) * 2002-08-01 2003-11-18 Northrop Grumman Corporation Semiconductor-air gap grating fabrication using a sacrificial layer process
US6944373B2 (en) * 2002-08-01 2005-09-13 Northrop Grumman Corporation High index-step grating fabrication using a regrowth-over-dielectric process
US7116878B2 (en) * 2003-04-24 2006-10-03 Mesophotonics Ltd. Optical waveguide structure
US7773836B2 (en) 2005-12-14 2010-08-10 Luxtera, Inc. Integrated transceiver with lightpipe coupler
US7251386B1 (en) 2004-01-14 2007-07-31 Luxtera, Inc Integrated photonic-electronic circuits and systems
KR100852110B1 (ko) * 2004-06-26 2008-08-13 삼성에스디아이 주식회사 유기 전계 발광 소자 및 그 제조 방법
SG139547A1 (en) * 2004-08-04 2008-02-29 Agency Science Tech & Res Distributed feedback and distributed bragg reflector semiconductor lasers
DE102006036831B9 (de) * 2006-08-07 2016-04-14 Friedrich-Schiller-Universität Jena Verschlossene, binäre Transmissionsgitter
US20090229651A1 (en) * 2008-03-14 2009-09-17 Fay Jr Theodore Denis Solar energy production system
DE102008054217A1 (de) * 2008-10-31 2010-05-06 Osram Opto Semiconductors Gmbh Optoelektronischer Halbleiterchip und Verfahren zur Herstellung eines optoelektronischen Halbleiterchips
WO2011019713A1 (en) * 2009-08-11 2011-02-17 Wedge Technologies Ultra dark field microscope
WO2021168853A1 (zh) * 2020-02-29 2021-09-02 华为技术有限公司 一种dfb激光器
PL439368A1 (pl) 2021-10-30 2023-05-02 Instytut Wysokich Ciśnień Polskiej Akademii Nauk Unipress Sposób wytwarzania obszaru o regularnie zmiennym współczynniku załamania światła w wybranej warstwie warstwowej struktury półprzewodnikowej

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0231488A (ja) * 1988-07-20 1990-02-01 Mitsubishi Electric Corp 半導体レーザ装置及びその製造方法
IT1245541B (it) * 1991-05-13 1994-09-29 Cselt Centro Studi Lab Telecom Laser a semiconduttore a reazione distribuita ed accoppiamento di guadagno ,e procedimento per la sua fabbricazione
US5955749A (en) * 1996-12-02 1999-09-21 Massachusetts Institute Of Technology Light emitting device utilizing a periodic dielectric structure
FR2765347B1 (fr) * 1997-06-26 1999-09-24 Alsthom Cge Alcatel Reflecteur de bragg en semi-conducteur et procede de fabrication
US6358854B1 (en) * 1999-04-21 2002-03-19 Sandia Corporation Method to fabricate layered material compositions
US6468823B1 (en) * 1999-09-30 2002-10-22 California Institute Of Technology Fabrication of optical devices based on two dimensional photonic crystal structures and apparatus made thereby
EP1094345A1 (en) * 1999-10-19 2001-04-25 BRITISH TELECOMMUNICATIONS public limited company Method of making a photonic band gap structure
WO2001069735A1 (en) * 2000-03-13 2001-09-20 Sharp Kabushiki Kaisha Gain-coupled distributed feedback semiconductor laser device and production method therefor
JP2001281473A (ja) * 2000-03-28 2001-10-10 Toshiba Corp フォトニクス結晶及びその製造方法、光モジュール並びに光システム
US6365428B1 (en) * 2000-06-15 2002-04-02 Sandia Corporation Embedded high-contrast distributed grating structures
US6560006B2 (en) * 2001-04-30 2003-05-06 Agilent Technologies, Inc. Two-dimensional photonic crystal slab waveguide
US6944373B2 (en) * 2002-08-01 2005-09-13 Northrop Grumman Corporation High index-step grating fabrication using a regrowth-over-dielectric process
US6649439B1 (en) * 2002-08-01 2003-11-18 Northrop Grumman Corporation Semiconductor-air gap grating fabrication using a sacrificial layer process

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011215486A (ja) * 2010-04-01 2011-10-27 Sumitomo Electric Ind Ltd マッハツェンダー型光変調素子
US9146442B2 (en) 2010-04-01 2015-09-29 Sumitomo Electric Industries, Ltd. Mach-Zehnder interferometer type optical modulator

Also Published As

Publication number Publication date
DE60319314D1 (de) 2008-04-10
EP1394911B1 (en) 2008-02-27
US20040082152A1 (en) 2004-04-29
US6893891B2 (en) 2005-05-17
EP1394911A2 (en) 2004-03-03
EP1394911A3 (en) 2005-06-08
US6649439B1 (en) 2003-11-18
DE60319314T2 (de) 2009-02-26

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