JP2003526010A5 - - Google Patents

Download PDF

Info

Publication number
JP2003526010A5
JP2003526010A5 JP2001565421A JP2001565421A JP2003526010A5 JP 2003526010 A5 JP2003526010 A5 JP 2003526010A5 JP 2001565421 A JP2001565421 A JP 2001565421A JP 2001565421 A JP2001565421 A JP 2001565421A JP 2003526010 A5 JP2003526010 A5 JP 2003526010A5
Authority
JP
Japan
Prior art keywords
atomic
thin film
substrate
glass
diamond
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2001565421A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003526010A (ja
JP4938951B2 (ja
Filing date
Publication date
Priority claimed from US09/519,449 external-priority patent/US6696157B1/en
Application filed filed Critical
Publication of JP2003526010A publication Critical patent/JP2003526010A/ja
Publication of JP2003526010A5 publication Critical patent/JP2003526010A5/ja
Application granted granted Critical
Publication of JP4938951B2 publication Critical patent/JP4938951B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2001565421A 2000-03-05 2000-10-10 ダイヤモンド状ガラス薄膜 Expired - Fee Related JP4938951B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/519,449 US6696157B1 (en) 2000-03-05 2000-03-05 Diamond-like glass thin films
US09/519,449 2000-03-05
PCT/US2000/027885 WO2001066820A1 (en) 2000-03-05 2000-10-10 Diamond-like glass thin films

Publications (3)

Publication Number Publication Date
JP2003526010A JP2003526010A (ja) 2003-09-02
JP2003526010A5 true JP2003526010A5 (enExample) 2007-12-06
JP4938951B2 JP4938951B2 (ja) 2012-05-23

Family

ID=24068356

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001565421A Expired - Fee Related JP4938951B2 (ja) 2000-03-05 2000-10-10 ダイヤモンド状ガラス薄膜

Country Status (7)

Country Link
US (1) US6696157B1 (enExample)
EP (1) EP1266045B1 (enExample)
JP (1) JP4938951B2 (enExample)
AT (1) ATE249531T1 (enExample)
AU (1) AU2000280036A1 (enExample)
DE (1) DE60005225T2 (enExample)
WO (1) WO2001066820A1 (enExample)

Families Citing this family (146)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5858477A (en) * 1996-12-10 1999-01-12 Akashic Memories Corporation Method for producing recording media having protective overcoats of highly tetrahedral amorphous carbon
US6881538B1 (en) 2000-03-05 2005-04-19 3M Innovative Properties Company Array comprising diamond-like glass film
US7106939B2 (en) * 2001-09-19 2006-09-12 3M Innovative Properties Company Optical and optoelectronic articles
US6878419B2 (en) 2001-12-14 2005-04-12 3M Innovative Properties Co. Plasma treatment of porous materials
DE10218955B4 (de) * 2002-04-27 2004-09-09 Infineon Technologies Ag Verfahren zur Herstellung einer strukturierten Schicht auf einem Halbleitersubstrat
US7150789B2 (en) * 2002-07-29 2006-12-19 Micron Technology, Inc. Atomic layer deposition methods
US6753271B2 (en) * 2002-08-15 2004-06-22 Micron Technology, Inc. Atomic layer deposition methods
US6890596B2 (en) * 2002-08-15 2005-05-10 Micron Technology, Inc. Deposition methods
US6673701B1 (en) * 2002-08-27 2004-01-06 Micron Technology, Inc. Atomic layer deposition methods
US8349241B2 (en) 2002-10-04 2013-01-08 Molecular Imprints, Inc. Method to arrange features on a substrate to replicate features having minimal dimensional variability
US6878403B2 (en) * 2002-10-04 2005-04-12 Guardian Industries Corp. Method of ion beam treatment of DLC in order to reduce contact angle
US6929762B2 (en) * 2002-11-13 2005-08-16 Molecular Imprints, Inc. Method of reducing pattern distortions during imprint lithography processes
US7105809B2 (en) 2002-11-18 2006-09-12 3M Innovative Properties Company Microstructured polymeric substrate
US6871558B2 (en) * 2002-12-12 2005-03-29 Molecular Imprints, Inc. Method for determining characteristics of substrate employing fluid geometries
US7866342B2 (en) * 2002-12-18 2011-01-11 Vapor Technologies, Inc. Valve component for faucet
US8220489B2 (en) 2002-12-18 2012-07-17 Vapor Technologies Inc. Faucet with wear-resistant valve component
US8555921B2 (en) 2002-12-18 2013-10-15 Vapor Technologies Inc. Faucet component with coating
US7866343B2 (en) 2002-12-18 2011-01-11 Masco Corporation Of Indiana Faucet
US20040168613A1 (en) * 2003-02-27 2004-09-02 Molecular Imprints, Inc. Composition and method to form a release layer
US7122079B2 (en) * 2004-02-27 2006-10-17 Molecular Imprints, Inc. Composition for an etching mask comprising a silicon-containing material
US6750261B1 (en) 2003-04-08 2004-06-15 3M Innovative Properties Company High internal phase emulsion foams containing polyelectrolytes
US7462494B2 (en) * 2003-06-09 2008-12-09 3M Innovative Properties Company Method for laser desorption mass spectrometry using porous polymeric substrates with particle fillers
US7157036B2 (en) * 2003-06-17 2007-01-02 Molecular Imprints, Inc Method to reduce adhesion between a conformable region and a pattern of a mold
US20050160934A1 (en) * 2004-01-23 2005-07-28 Molecular Imprints, Inc. Materials and methods for imprint lithography
US7307118B2 (en) 2004-11-24 2007-12-11 Molecular Imprints, Inc. Composition to reduce adhesion between a conformable region and a mold
US7136150B2 (en) * 2003-09-25 2006-11-14 Molecular Imprints, Inc. Imprint lithography template having opaque alignment marks
US7361767B2 (en) 2003-11-14 2008-04-22 3M Innovative Properties Company N-sulfonyldicarboximide containing tethering compounds
US7943388B2 (en) 2003-11-14 2011-05-17 3M Innovative Properties Company Acoustic sensors and methods
US7169933B2 (en) 2003-11-14 2007-01-30 3M Innovative Properties Company N-sulfonylaminocarbonyl containing compounds
US7423155B2 (en) 2003-11-14 2008-09-09 3M Innovative Properties Company N-sulfonyldicarboximide containing tethering compounds
JP5173193B2 (ja) 2003-11-14 2013-03-27 スリーエム イノベイティブ プロパティズ カンパニー Ｎ−スルホニルアミノカルボニル含有化合物
CN100507548C (zh) 2003-12-30 2009-07-01 3M创新有限公司 检测目标生物分析物的系统及方法
KR20060113747A (ko) * 2003-12-30 2006-11-02 쓰리엠 이노베이티브 프로퍼티즈 컴파니 기질 및 그에 결합된 화합물
US7658994B2 (en) 2003-12-30 2010-02-09 3M Innovative Properties Company Substrates and compounds bonded thereto
US8076386B2 (en) * 2004-02-23 2011-12-13 Molecular Imprints, Inc. Materials for imprint lithography
US7906180B2 (en) 2004-02-27 2011-03-15 Molecular Imprints, Inc. Composition for an etching mask comprising a silicon-containing material
US20060062922A1 (en) * 2004-09-23 2006-03-23 Molecular Imprints, Inc. Polymerization technique to attenuate oxygen inhibition of solidification of liquids and composition therefor
US20060063015A1 (en) * 2004-09-23 2006-03-23 3M Innovative Properties Company Protected polymeric film
US7342356B2 (en) * 2004-09-23 2008-03-11 3M Innovative Properties Company Organic electroluminescent device having protective structure with boron oxide layer and inorganic barrier layer
US8057842B2 (en) * 2004-11-18 2011-11-15 3M Innovative Properties Company Method of contact coating a microneedle array
JP5015787B2 (ja) * 2004-11-18 2012-08-29 スリーエム イノベイティブ プロパティズ カンパニー マイクロニードルアレイの接触コーティング法
US20060131700A1 (en) * 2004-12-22 2006-06-22 David Moses M Flexible electronic circuit articles and methods of making thereof
US20070020451A1 (en) * 2005-07-20 2007-01-25 3M Innovative Properties Company Moisture barrier coatings
US8557351B2 (en) 2005-07-22 2013-10-15 Molecular Imprints, Inc. Method for adhering materials together
US7759407B2 (en) * 2005-07-22 2010-07-20 Molecular Imprints, Inc. Composition for adhering materials together
US7544754B2 (en) 2005-09-30 2009-06-09 3M Innovative Properties Company Crosslinked polymers with amine binding groups
US7544755B2 (en) * 2005-09-30 2009-06-09 3M Innovative Properties Company Crosslinked polymers with amine binding groups
US7544756B2 (en) * 2005-09-30 2009-06-09 3M Innovative Properties Company Crosslinked polymers with amine binding groups
US9440003B2 (en) * 2005-11-04 2016-09-13 Boston Scientific Scimed, Inc. Medical devices having particle-containing regions with diamond-like coatings
US20070139451A1 (en) * 2005-12-20 2007-06-21 Somasiri Nanayakkara L Microfluidic device having hydrophilic microchannels
US9526814B2 (en) * 2006-02-16 2016-12-27 Boston Scientific Scimed, Inc. Medical balloons and methods of making the same
US20070231541A1 (en) * 2006-03-31 2007-10-04 3M Innovative Properties Company Microstructured tool and method of making same using laser ablation
US20070235902A1 (en) * 2006-03-31 2007-10-11 3M Innovative Properties Company Microstructured tool and method of making same using laser ablation
US20080006819A1 (en) * 2006-06-19 2008-01-10 3M Innovative Properties Company Moisture barrier coatings for organic light emitting diode devices
ATE458839T1 (de) * 2006-10-20 2010-03-15 3M Innovative Properties Co Verfahren für leicht zu reinigende substrate und artikel daraus
EP2088123A1 (en) * 2006-11-10 2009-08-12 Sumitomo Electric Industries, Ltd. Si-O CONTAINING HYDROGENATED CARBON FILM, OPTICAL DEVICE INCLUDING THE SAME, AND METHOD FOR MANUFACTURING THE Si-O CONTAINING HYDROGENATED FILM AND THE OPTICAL DEVICE
US8906703B2 (en) * 2006-12-21 2014-12-09 3M Innovative Properties Company Surface-bound fluorinated esters for amine capture
US8357540B2 (en) * 2006-12-21 2013-01-22 3M Innovative Properties Company Polymeric substrates with fluoroalkoxycarbonyl groups for amine capture
US7414547B2 (en) * 2006-12-22 2008-08-19 3M Innovative Properties Company Method and system for calibrating a rotary encoder and making a high resolution rotary encoder
US8241713B2 (en) * 2007-02-21 2012-08-14 3M Innovative Properties Company Moisture barrier coatings for organic light emitting diode devices
EP2140264A1 (en) 2007-04-19 2010-01-06 3M Innovative Properties Company Methods of use of solid support material for binding biomolecules
JP2010525187A (ja) * 2007-04-23 2010-07-22 スリーエム イノベイティブ プロパティズ カンパニー １つ以上の高分子電解質層をその上に有する繊維性物品及び、これを作製する方法
US20090114618A1 (en) * 2007-06-21 2009-05-07 3M Innovative Properties Company Method of making hierarchical articles
US20090041986A1 (en) * 2007-06-21 2009-02-12 3M Innovative Properties Company Method of making hierarchical articles
US20080315459A1 (en) * 2007-06-21 2008-12-25 3M Innovative Properties Company Articles and methods for replication of microstructures and nanofeatures
EP2185721B1 (en) * 2007-08-03 2014-04-02 Sanofi Caspase imaging probes
EP2197645B1 (en) * 2007-09-06 2014-10-22 3M Innovative Properties Company Methods of forming molds and methods of forming articles using said molds
JP5951928B2 (ja) 2007-09-06 2016-07-13 スリーエム イノベイティブ プロパティズ カンパニー 光出力の領域制御を提供する光抽出構造体を有する光ガイド
WO2009032815A1 (en) * 2007-09-06 2009-03-12 3M Innovative Properties Company Tool for making microstructured articles
US8451457B2 (en) * 2007-10-11 2013-05-28 3M Innovative Properties Company Chromatic confocal sensor
GB0721739D0 (en) * 2007-11-06 2007-12-19 3M Innovative Properties Co medicinal inhalation devices and components thereof
JP5571560B2 (ja) * 2007-11-06 2014-08-13 スリーエム イノベイティブ プロパティズ カンパニー 医薬品吸入装置及びそれらの構成要素
GB0721737D0 (en) * 2007-11-06 2007-12-19 3M Innovative Properties Co Medicinal inhalation devices and components thereof
US8115920B2 (en) * 2007-11-14 2012-02-14 3M Innovative Properties Company Method of making microarrays
JP5524856B2 (ja) * 2007-12-12 2014-06-18 スリーエム イノベイティブ プロパティズ カンパニー エッジ明瞭性が向上した構造の製造方法
US8071277B2 (en) * 2007-12-21 2011-12-06 3M Innovative Properties Company Method and system for fabricating three-dimensional structures with sub-micron and micron features
EP2257854B1 (en) 2008-02-26 2018-10-31 3M Innovative Properties Company Multi-photon exposure system
US7767604B2 (en) * 2008-04-29 2010-08-03 Corning Incorporated Ga—P—S glass compositions
CN102301277B (zh) 2008-12-05 2013-07-17 3M创新有限公司 使用非线性热聚合的三维制品
WO2010080378A1 (en) 2008-12-19 2010-07-15 3M Innovative Properties Company Method and system for fabricating nanostructure mass replication tool
CN102803555A (zh) * 2009-05-06 2012-11-28 3M创新有限公司 药物吸入装置
EP2427902B1 (en) * 2009-05-06 2017-01-18 3M Innovative Properties Company Apparatus and method for plasma treatment of containers
JP5720009B2 (ja) 2009-05-18 2015-05-20 アダミス ファーマシューティカルズ コーポレーション ドライパウダー吸入器
CN102577657A (zh) 2009-08-03 2012-07-11 3M创新有限公司 抗反射的透明emi屏蔽的光学滤光器
TWI515276B (zh) 2010-05-25 2016-01-01 ３Ｍ新設資產公司 抗微生物塗料
WO2011150103A2 (en) 2010-05-25 2011-12-01 3M Innovative Properties Company Antimicrobial–coated medical articles
US20110294916A1 (en) * 2010-05-26 2011-12-01 3M Innovative Properties Company Hydrophilic marking film having plasma chemical vapor deposition treated protective layer
US8664323B2 (en) 2010-06-25 2014-03-04 3M Innovative Properties Company Fluorinated composition, method of coating the composition, and article thereby
WO2012027091A1 (en) 2010-08-11 2012-03-01 3M Innovative Properties Company Dental articles including a ceramic and microparticle coating and method of making the same
EP2603159A1 (en) 2010-08-11 2013-06-19 3M Innovative Properties Company Aesthetic and abrasion resistant coated dental articles and methods of making the same
US20130137064A1 (en) 2010-08-11 2013-05-30 3M Innovative Properties Company Coated dental crowns and method of making the same
US20130130203A1 (en) 2010-08-11 2013-05-23 3M Innovative Properties Company Polymer coated dental articles and method of making the same
EP2638117B1 (en) 2010-11-10 2015-09-23 3M Innovative Properties Company Surface treatment process, composition for use therein, and treated article
US20130229378A1 (en) 2010-11-10 2013-09-05 Suresh S. Iyer Optical device surface treatment process and smudge-resistant article produced thereby
EP2658674B1 (en) 2010-12-30 2017-03-01 3M Innovative Properties Company Apparatus for laser converting using a support member having a gold facing layer; method of laser converting a sheet material using such apparatus
US11092977B1 (en) 2017-10-30 2021-08-17 Zane Coleman Fluid transfer component comprising a film with fluid channels
KR102038341B1 (ko) * 2011-12-29 2019-10-30 쓰리엠 이노베이티브 프로퍼티즈 컴파니 클리닝가능한 물품, 이의 제조 방법 및 사용 방법
KR20130098606A (ko) * 2012-02-28 2013-09-05 씨제이제일제당 (주) 향상된 산소차단성을 갖는 식품용기 및 그의 제조방법
WO2014097886A1 (ja) * 2012-12-18 2014-06-26 学校法人早稲田大学 光学デバイスおよび分析装置
US8748848B1 (en) * 2013-07-02 2014-06-10 Macau University Of Science And Technology Method of generating raman laser for inducing fluorescence of fluoranthene and a system thereof
CA2939489A1 (en) * 2014-02-11 2015-08-20 The Mackinac Technology Company Fluorinated and hydrogenated diamond-like carbon materials for anti-reflective coatings
BR112017005778A2 (pt) 2014-09-22 2017-12-12 3M Innovative Properties Co componentes de motor de combustão interna com propriedades anti-incrustantes e métodos de produção dos mesmos
JP6218716B2 (ja) * 2014-09-30 2017-10-25 富士フイルム株式会社 多孔フィルム及びその製造方法
US10788621B2 (en) 2015-07-07 2020-09-29 Ofs Fitel, Llc UV-transparent optical fiber coating for high temperature application, and fibers made therefrom
CN108156813B (zh) * 2015-09-30 2020-12-08 3M创新有限公司 多层阻隔涂层
EP3374181A1 (en) 2015-11-11 2018-09-19 3M Innovative Properties Company Multilayer construction including barrier layer and sealing layer
WO2017091428A2 (en) * 2015-11-24 2017-06-01 3M Innovative Properties Company Moisture barrier film articles and methods of making
KR20190023095A (ko) 2016-06-29 2019-03-07 쓰리엠 이노베이티브 프로퍼티즈 캄파니 중합성 이온 액체 조성물
FR3059001B1 (fr) * 2016-11-24 2021-07-23 Saint Gobain Procede d'obtention de plaques de verre marquees
WO2018150298A1 (en) * 2017-02-15 2018-08-23 3M Innovative Properties Company Coating comprising hydrophobic silane and articles
JP6681520B1 (ja) 2017-02-15 2020-04-15 スリーエム イノベイティブ プロパティズ カンパニー 乾式消去物品
EP3642271B1 (en) 2017-06-23 2024-05-15 3M Innovative Properties Company Films with a primer layer containing composite particles that include an organic polymer portion and a siliceous portion
US11384212B2 (en) 2017-06-23 2022-07-12 3M Innovative Properties Company Films with a primer layer containing silica nanoparticles modified by an organic silane
US12043785B2 (en) * 2017-07-11 2024-07-23 3M Innovative Properties Company Abrasive articles including conformable coatings and polishing system therefrom
EP3768878B1 (en) 2018-03-23 2022-05-04 3M Innovative Properties Company Fluorinated membrane articles
US20210147648A1 (en) 2018-08-14 2021-05-20 3M Innovative Properties Company Flexible hardcoat disposed between organic base member and siliceous layer and cleanable articles
CN112638981A (zh) 2018-08-14 2021-04-09 3M创新有限公司 挤出的聚氨酯表面膜
CN113166485A (zh) 2018-10-18 2021-07-23 3M创新有限公司 硅烷醇组合物及使用方法
EP3877454A4 (en) 2018-11-09 2022-11-16 3M Innovative Properties Company NANOSTRUCTURED OPTICAL FILMS AND INTERMEDIATE PRODUCTS
EP3990612A1 (en) 2019-06-25 2022-05-04 3M Innovative Properties Company Device for growing microorganisms
EP3990892A1 (en) 2019-06-28 2022-05-04 3M Innovative Properties Company Articles having conformal layers and methods of making same
WO2021090130A1 (en) 2019-11-08 2021-05-14 3M Innovative Properties Company Optical film
US20230347355A1 (en) 2019-12-20 2023-11-02 3M Innovative Properties Company Multilayer Adhesive Fluid Collection Articles Including Capillary Channels
WO2021255593A2 (en) 2020-06-19 2021-12-23 3M Innovative Properties Company Device for growing microorganisms
CN115956405A (zh) 2020-08-28 2023-04-11 3M创新有限公司 包括纳米结构化表面和封闭空隙的制品、其制备方法和光学元件
EP4264340A4 (en) 2020-12-18 2024-10-16 3M Innovative Properties Company Structured film and optical article including structured film
US20240043989A1 (en) 2020-12-31 2024-02-08 3M Innovative Properties Company Metallic Nanohole Arrays on Nanowells with Controlled Depth and Methods of Making the Same
EP4271996B1 (en) 2020-12-31 2025-12-24 3M Innovative Properties Company Nanopatterned films with patterned surface chemistry
EP4307981A1 (en) 2021-03-16 2024-01-24 3M Innovative Properties Company A nonwoven decontamination wipe comprising a small diameter fiber
CN117136296A (zh) 2021-04-07 2023-11-28 3M创新有限公司 用于发光成像的荧光增强膜
KR102594928B1 (ko) * 2021-06-30 2023-10-30 주식회사 케이디엘씨 다이아몬드상 탄소 박막 및 그 제조 방법
US20240342711A1 (en) 2021-09-30 2024-10-17 3M Innovative Properties Company Small volume fluidic devices
CN118318206A (zh) 2021-11-16 2024-07-09 3M创新有限公司 甲基丙烯酸酯共聚物及其制备和使用方法
CN118541337A (zh) 2021-12-17 2024-08-23 3M创新有限公司 具有附接至无机氧化物表面的光引发转移终止剂的制品和由其制备的聚合物
WO2023119008A1 (en) 2021-12-23 2023-06-29 3M Innovative Properties Company Articles including a multilayer optical film and fluoropolymer layers, transfer articles, and methods of making same
WO2023248159A1 (en) 2022-06-23 2023-12-28 3M Innovative Properties Company Methods and devices for removing particles from fluids
CN115125488B (zh) * 2022-07-08 2023-11-03 成都市精鹰光电技术有限责任公司 基于混频脉冲反应磁控溅射制备的热敏薄膜
EP4577775A1 (en) 2022-08-26 2025-07-02 3M Innovative Properties Company Multilayer optical gratings
CN120129804A (zh) 2022-08-26 2025-06-10 3M创新有限公司 光学波导及其制作方法
EP4619153A1 (en) 2022-11-15 2025-09-24 Solventum Intellectual Properties Company Microstructured substrate including connected wells
CN120202065A (zh) 2022-11-15 2025-06-24 舒万诺知识产权公司 用于从流体中去除颗粒的方法和套件
CN120322706A (zh) 2022-12-09 2025-07-15 3M创新有限公司 具有无规纳米结构化蚀刻止挡件的光控膜
CN121127366A (zh) 2023-05-15 2025-12-12 3M创新有限公司 可转移的基于膜的结构化基底
US12202764B2 (en) * 2023-06-02 2025-01-21 Corning Incorporated Coating of glass-based assembly
WO2025012838A1 (en) 2023-07-12 2025-01-16 3M Innovative Properties Company Light control film and method of making same
WO2025022240A2 (en) 2023-07-21 2025-01-30 3M Innovative Properties Company Filmless, chemically differentiated, nanostructured substrate on a rigid substrate

Family Cites Families (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2105371B (en) 1981-08-18 1985-10-02 Secr Defence Carbon deposited on fibre by glow discharge method
JPS5983107A (ja) 1982-11-04 1984-05-14 Sumitomo Electric Ind Ltd 光フアイバ−
DE3316693A1 (de) 1983-05-06 1984-11-08 Leybold-Heraeus GmbH, 5000 Köln Verfahren zum herstellen von amorphen kohlenstoffschichten auf substraten und durch das verfahren beschichtete substrate
US4777090A (en) 1986-11-03 1988-10-11 Ovonic Synthetic Materials Company Coated article and method of manufacturing the article
US4960643A (en) 1987-03-31 1990-10-02 Lemelson Jerome H Composite synthetic materials
US5041303A (en) 1988-03-07 1991-08-20 Polyplasma Incorporated Process for modifying large polymeric surfaces
US5266409A (en) 1989-04-28 1993-11-30 Digital Equipment Corporation Hydrogenated carbon compositions
JP2739129B2 (ja) 1990-02-21 1998-04-08 日本碍子株式会社 複合部材の製造方法
US5190807A (en) 1990-10-18 1993-03-02 Diamonex, Incorporated Abrasion wear resistant polymeric substrate product
US5352493A (en) 1991-05-03 1994-10-04 Veniamin Dorfman Method for forming diamond-like nanocomposite or doped-diamond-like nanocomposite films
US5718976A (en) 1991-05-03 1998-02-17 Advanced Refractory Technologies, Inc. Erosion resistant diamond-like nanocomposite coatings for optical components
US5728465A (en) 1991-05-03 1998-03-17 Advanced Refractory Technologies, Inc. Diamond-like nanocomposite corrosion resistant coatings
DE4122834A1 (de) 1991-07-10 1993-01-14 Siemens Ag Verfahren zur beschichtung von lwl-fasern
US5455072A (en) 1992-11-18 1995-10-03 Bension; Rouvain M. Initiation and bonding of diamond and other thin films
JPH07161034A (ja) * 1993-04-13 1995-06-23 Matsushita Electric Ind Co Ltd 磁気記録媒体
USH1461H (en) 1993-05-10 1995-07-04 The United States Of America As Represented By The Secretary Of The Army Abrasion resistant diamond like coating for optical fiber and method of forming the coating
US5794801A (en) 1993-08-16 1998-08-18 Lemelson; Jerome Material compositions
US5677051A (en) * 1993-11-30 1997-10-14 Tdk Corporation Magnetic recording medium having a specified plasma polymerized hydrogen containing carbon film and lubricant
US5618619A (en) 1994-03-03 1997-04-08 Monsanto Company Highly abrasion-resistant, flexible coatings for soft substrates
DE69609244T2 (de) 1995-03-31 2001-03-08 Ceramoptec Gmbh Verfahren zur Herstellung diamantartiger Beschichtungen
US5530581A (en) 1995-05-31 1996-06-25 Eic Laboratories, Inc. Protective overlayer material and electro-optical coating using same
US5620495A (en) 1995-08-16 1997-04-15 Lucent Technologies Inc. Formation of gratings in polymer-coated optical fibers
US6468642B1 (en) 1995-10-03 2002-10-22 N.V. Bekaert S.A. Fluorine-doped diamond-like coatings
US5638251A (en) * 1995-10-03 1997-06-10 Advanced Refractory Technologies, Inc. Capacitive thin films using diamond-like nanocomposite materials
DE69710324T2 (de) 1996-04-22 2002-08-29 N.V. Bekaert S.A., Zwevegem Diamantaehnliche nanokomposit-zusammensetzungen
US6080470A (en) 1996-06-17 2000-06-27 Dorfman; Benjamin F. Hard graphite-like material bonded by diamond-like framework
US5773486A (en) 1996-09-26 1998-06-30 Lucent Technologies Inc. Method for the manufacture of optical gratings
US5745615A (en) 1996-10-11 1998-04-28 Lucent Technologies Inc. Method of making an optical fiber grating, and article made by the method
US5948166A (en) 1996-11-05 1999-09-07 3M Innovative Properties Company Process and apparatus for depositing a carbon-rich coating on a moving substrate
EP0856592A1 (en) 1997-02-04 1998-08-05 N.V. Bekaert S.A. A coating comprising layers of diamond like carbon and diamond like nanocomposite compositions
US5912999A (en) 1997-10-02 1999-06-15 Minnesota Mining And Manufacturing Company Method for fabrication of in-line optical waveguide index grating of any length
US6203898B1 (en) 1997-08-29 2001-03-20 3M Innovatave Properties Company Article comprising a substrate having a silicone coating
US5999671A (en) 1997-10-27 1999-12-07 Lucent Technologies Inc. Tunable long-period optical grating device and optical systems employing same
US6015597A (en) * 1997-11-26 2000-01-18 3M Innovative Properties Company Method for coating diamond-like networks onto particles
WO1999046128A1 (en) 1998-03-10 1999-09-16 Diamonex, Incorporated Highly wear-resistant thermal print heads with silicon-doped diamond-like carbon protective coatings
WO2000047402A1 (en) 1998-12-02 2000-08-17 Advanced Refractory Technologies, Inc. Fluorine-doped diamond-like coatings
US6083313A (en) * 1999-07-27 2000-07-04 Advanced Refractory Technologies, Inc. Hardcoats for flat panel display substrates

Similar Documents

Publication Publication Date Title
JP2003526010A5 (enExample)
TWI233161B (en) Method of forming nanotip arrays
CA2121423C (en) Process for barrier coating of plastic objects
US5308661A (en) Pretreatment process for forming a smooth surface diamond film on a carbon-coated substrate
TW539752B (en) Method of forming indium tin oxide thin film using magnetron negative ion sputter source
EP1266045B1 (en) Diamond-like glass thin films
ATE402118T1 (de) Verfahren und vorrichtung zum ecr plasma aufbringen von einwandigen kohlenstoffnanoröhren sowie erhaltene nanoröhren
CA2207235A1 (en) Large-scale, low pressure plasma-ion deposition of diamondlike carbon films
WO2005024094A3 (en) In-situ-etch-assisted hdp deposition using sif4 and hydrogen
MY122888A (en) Carbon doped oxide deposition
Theirich et al. Atmospheric pressure plasma ALD of titanium oxide
Yu et al. Optical and electrical properties of nitrogen incorporated amorphous carbon films
JP3931229B2 (ja) 酸化炭素薄膜および酸化窒化炭素薄膜とこれら酸化炭素系薄膜の製造方法
WO1998059355A3 (fr) Cathode froide et procedes de fabrication
KR101101178B1 (ko) 귀금속의 플라즈마 이온주입 장치 및 방법과 이를 이용한 귀금속 나노복합체 형성 방법
Gupta et al. Field emission characteristics of diamond-like carbon films synthesized by electrodeposition technique
EP1039519A3 (en) Method and apparatus for forming a porous SiO2 interlayer insulating film
JPS644591B2 (enExample)
Milne et al. Investigating carbon materials for use as the electron emission source in a parallel electron-beam lithography system
Al-Masoodi et al. Deposition of Silver Nanoparticles on Indium Tin Oxide Substrates by Plasma-Assisted Hot-Filament Evaporation
JP2734556B2 (ja) アモルファスカーボン膜の製造方法
Buck et al. VUV-light-induced deposited silica films
Shi et al. Raman scattering studies on the C60 films deposited by ionized cluster beam deposition (ICBD) technique
JPS61124561A (ja) 化合物薄膜の製造方法
Matsutani et al. Comparison of surface morphologies of SiO2 films prepared by ion-beam induced chemical vapor deposition and ion-beam assisted deposition